JP4584839B2 - 感光性樹脂組成物及びその硬化物 - Google Patents
感光性樹脂組成物及びその硬化物 Download PDFInfo
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- JP4584839B2 JP4584839B2 JP2005517277A JP2005517277A JP4584839B2 JP 4584839 B2 JP4584839 B2 JP 4584839B2 JP 2005517277 A JP2005517277 A JP 2005517277A JP 2005517277 A JP2005517277 A JP 2005517277A JP 4584839 B2 JP4584839 B2 JP 4584839B2
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- JP
- Japan
- Prior art keywords
- compound
- glycidyl
- group
- resin composition
- acrylate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011342 resin composition Substances 0.000 title claims description 45
- 150000001875 compounds Chemical class 0.000 claims description 56
- 239000000047 product Substances 0.000 claims description 34
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 28
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 claims description 26
- 229920005989 resin Polymers 0.000 claims description 21
- 239000011347 resin Substances 0.000 claims description 21
- 150000008065 acid anhydrides Chemical class 0.000 claims description 17
- 150000007519 polyprotic acids Polymers 0.000 claims description 16
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 13
- 239000007795 chemical reaction product Substances 0.000 claims description 13
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 12
- 239000003431 cross linking reagent Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 8
- 125000005843 halogen group Chemical group 0.000 claims description 7
- 239000003999 initiator Substances 0.000 claims description 7
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 5
- SXIFAEWFOJETOA-UHFFFAOYSA-N 4-hydroxy-butyl Chemical group [CH2]CCCO SXIFAEWFOJETOA-UHFFFAOYSA-N 0.000 claims description 4
- 125000000217 alkyl group Chemical group 0.000 claims description 4
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 claims description 3
- QOXOZONBQWIKDA-UHFFFAOYSA-N 3-hydroxypropyl Chemical group [CH2]CCO QOXOZONBQWIKDA-UHFFFAOYSA-N 0.000 claims description 3
- 229930016911 cinnamic acid Natural products 0.000 claims description 3
- 235000013985 cinnamic acid Nutrition 0.000 claims description 3
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 claims description 3
- SZQVEOLVJHOCMY-UHFFFAOYSA-N 2-(2,5-dioxopyrrol-1-yl)hexanoic acid Chemical compound CCCCC(C(O)=O)N1C(=O)C=CC1=O SZQVEOLVJHOCMY-UHFFFAOYSA-N 0.000 claims description 2
- WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 claims description 2
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 claims description 2
- 239000010408 film Substances 0.000 description 58
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- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical group C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 30
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- 239000007864 aqueous solution Substances 0.000 description 18
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- 238000000034 method Methods 0.000 description 15
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 12
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- 235000011118 potassium hydroxide Nutrition 0.000 description 10
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- 238000003786 synthesis reaction Methods 0.000 description 9
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 8
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 8
- 239000003208 petroleum Substances 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
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- 230000005856 abnormality Effects 0.000 description 7
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- 230000003287 optical effect Effects 0.000 description 7
- 239000003960 organic solvent Substances 0.000 description 7
- VHYFNPMBLIVWCW-UHFFFAOYSA-N 4-Dimethylaminopyridine Chemical compound CN(C)C1=CC=NC=C1 VHYFNPMBLIVWCW-UHFFFAOYSA-N 0.000 description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
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- 239000003054 catalyst Substances 0.000 description 6
- 238000011161 development Methods 0.000 description 6
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 6
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 229940106691 bisphenol a Drugs 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
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- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 4
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 4
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 4
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 4
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 4
- 239000003513 alkali Substances 0.000 description 4
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 4
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 4
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 238000004898 kneading Methods 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- UOHMMEJUHBCKEE-UHFFFAOYSA-N prehnitene Chemical compound CC1=CC=C(C)C(C)=C1C UOHMMEJUHBCKEE-UHFFFAOYSA-N 0.000 description 4
- 229940014800 succinic anhydride Drugs 0.000 description 4
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 3
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 3
- CMLFRMDBDNHMRA-UHFFFAOYSA-N 2h-1,2-benzoxazine Chemical compound C1=CC=C2C=CNOC2=C1 CMLFRMDBDNHMRA-UHFFFAOYSA-N 0.000 description 3
- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 3
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- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical class CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
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- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical class C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 3
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- 235000011181 potassium carbonates Nutrition 0.000 description 1
- NNFCIKHAZHQZJG-UHFFFAOYSA-N potassium cyanide Chemical compound [K+].N#[C-] NNFCIKHAZHQZJG-UHFFFAOYSA-N 0.000 description 1
- TYJJADVDDVDEDZ-UHFFFAOYSA-M potassium hydrogencarbonate Chemical compound [K+].OC([O-])=O TYJJADVDDVDEDZ-UHFFFAOYSA-M 0.000 description 1
- 229940086066 potassium hydrogencarbonate Drugs 0.000 description 1
- 229910000160 potassium phosphate Inorganic materials 0.000 description 1
- 235000011009 potassium phosphates Nutrition 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910000030 sodium bicarbonate Inorganic materials 0.000 description 1
- 235000017557 sodium bicarbonate Nutrition 0.000 description 1
- 235000011121 sodium hydroxide Nutrition 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- 235000011008 sodium phosphates Nutrition 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 1
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- KHPCPRHQVVSZAH-UHFFFAOYSA-N trans-cinnamyl beta-D-glucopyranoside Natural products OC1C(O)C(O)C(CO)OC1OCC=CC1=CC=CC=C1 KHPCPRHQVVSZAH-UHFFFAOYSA-N 0.000 description 1
- ILWRPSCZWQJDMK-UHFFFAOYSA-N triethylazanium;chloride Chemical compound Cl.CCN(CC)CC ILWRPSCZWQJDMK-UHFFFAOYSA-N 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- IFNXAMCERSVZCV-UHFFFAOYSA-L zinc;2-ethylhexanoate Chemical compound [Zn+2].CCCCC(CC)C([O-])=O.CCCCC(CC)C([O-])=O IFNXAMCERSVZCV-UHFFFAOYSA-L 0.000 description 1
- CHJMFFKHPHCQIJ-UHFFFAOYSA-L zinc;octanoate Chemical compound [Zn+2].CCCCCCCC([O-])=O.CCCCCCCC([O-])=O CHJMFFKHPHCQIJ-UHFFFAOYSA-L 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Materials For Photolithography (AREA)
- Macromonomer-Based Addition Polymer (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Phenolic Resins Or Amino Resins (AREA)
Description
(1)下記式(1)
(3)式(1)の化合物(a)のR1からR10の全てが水素原子である(1)または(2)に記載の感光性樹脂組成物、
(4)分子中にエチレン性不飽和基とグリシジル基を有する化合物(b)が、グリシジル(メタ)アクリレート、3−ヒドロキシプロピル(メタ)アクリレートのグリシジルエーテル化物、4−ヒドロキシブチル(メタ)アクリレートのグリシジルエーテル化物、ペンタエリスリトールトリアクリレートのグリシジルエーテル化物、マレイミドカプロン酸のグリシジルエステル化物及び桂皮酸のグリシジルエステル化物からなる群から選ばれる1種又は2種以上である(1)乃至(3)の何れか1項に記載の感光性樹脂組成物、
(5)(1)乃至(4)の何れか1項に記載の感光性樹脂組成物の硬化物、
(6)(5)に記載の硬化物の層を有する基材、
(7)(6)に記載の基材を有する物品、
を提供することにある。
前記式(1)で表される化合物(a)として、例えば市販品のMEH−7851SS(n=1.5)、MEH−7851M(n=2.1)、MEH−7851−3H(n=3.2)(何れも明和化成(株)製)があげられる。
攪拌装置、還流管をつけた1Lフラスコ中に、反応溶媒としてジエチレングリコールモノエチルエーテルアセテートを150g、化合物(a)としてMEH−7851SS(商品名:明和化成(株)製、式(1)において、R1〜R10=水素原子、n=1.5、水酸基当量:200g/当量)を200g(1当量)、化合物(b)として4−ヒドロキシブチルアクリレートグリシジルエーテル(日本化成(株)製、エポキシ当量:200g/当量)を150g(0.75当量)、反応触媒として4−ジメチルアミノピリジンを1g、及び熱重合禁止剤として2,6−ジ第三ブチル−p−クレゾールを1g仕込み、120℃の温度で反応液のエポキシ基が消失するまで24時間反応させ、ビフェニル骨格を有するアクリレート樹脂を70重量%含む樹脂溶液を得た。この樹脂溶液を(A’−1)とした。この樹脂溶液(A’−1)の酸価は、0.2mg・KOH/g(固形分換算値:0.3mg・KOH/g)であった。
攪拌装置、還流管をつけた1Lフラスコ中に、反応溶媒としてジエチレングリコールモノエチルエーテルアセテートを150g、化合物(a)としてMEH−7851−3H(商品名:明和化成(株)製、式(1)において、R1〜R10=水素原子、n=3.2、水酸基当量:200g/当量)を200g(1当量)、化合物(b)として4−ヒドロキシブチルアクリレートグリシジルエーテル(日本化成(株)製、エポキシ当量:200g/当量)を150g(0.75当量)、反応触媒として4−ジメチルアミノピリジンを1g、及び熱重合禁止剤として2,6−ジ第三ブチル−p−クレゾールを1g仕込み、120℃の温度で反応液のエポキシ基が消失するまで24時間反応させ、ビフェニル骨格を有するアクリレート樹脂を70重量%含む樹脂溶液を得た。この樹脂溶液を(A’−2)とした。この樹脂溶液(A’−2)の酸価は、0.8mg・KOH/g(固形分換算値:1.1mg・KOH/g)であった。
合成例2で得られた樹脂溶液(A’−2)に、多塩基酸無水物(c)としてテトラヒドロ無水フタル酸を114g(0.75当量)、溶剤としてジエチレングリコールモノエチルエーテルアセテートを49g仕込み、100℃の温度で6時間反応させ、ビフェニル骨格を有するカルボキシル基含有アクリレート樹脂(A)を70重量%含む樹脂溶液(A−3)を得た。この樹脂溶液(A−3)の酸価は、63.4mg・KOH/g(固形分換算値:90.6mg・KOH/g)であった。
合成例2で得られた樹脂溶液(A’−2)に、多塩基酸無水物(c)として無水コハク酸を75g(0.75当量)、溶剤としてジエチレングリコールモノエチルエーテルアセテートを32g仕込み、100℃の温度で6時間反応させ、ビフェニル骨格を有するカルボキシル基含有アクリレート樹脂(A)を70重量%含む樹脂溶液(A−4)を得た。この樹脂溶液(A−4)の酸価は、69.3mg・KOH/g(固形分換算値:99mg・KOH/g)であった。
前記合成例1、合成例3、及び合成例4で得られた樹脂溶液(A’−1)、(A−3)、及び(A−4)、並びにその他の各種成分を表1に示す配合割合で混合、必要に応じて3本ロールミルで混練し、本発明の感光性樹脂組成物を得た。これをバーコート法により、15〜25μmの厚さになるように銅回路プリント基板に塗布し、塗膜を80℃の熱風乾燥器で60分乾燥させた。得られた塗膜について、後述のとおり、タック性を確認した。次いで、パターンの描画されたマスクフィルムを密着させ、紫外線露光装置(USHIO製:500Wマルチライト)を用いて、紫外線を照射した。次に、アルカリ現像液である、2重量%炭酸ナトリウム水溶液(温度30℃)を用いて120秒間スプレー(スプレー圧:0.2MPa)現像を行った。リンス後、150℃の熱風乾燥器で60分間熱処理を行い本発明の硬化物を得た。得られた硬化物について、光感度、表面光沢、密着性、鉛筆硬度、耐溶剤性、耐酸性、耐熱性、耐金メッキ性、HAST性、柔軟性の試験を行なった。それらの結果を表2に示す。なお、各試験方法及び評価方法は次のとおりである。
○・・・・脱脂綿は張り付かない。
×・・・・脱脂綿の糸くずが、膜に張り付く。
○・・・・照射量150mJ/cm2以下でも硬化した場合
△・・・・照射量150〜500mJ/cm2で硬化した場合
×・・・・照射量500mJ/cm2以上でないと硬化しない場合
○・・・・曇りが全く見られない
△・・・・若干の曇りが見られる
×・・・・曇りが見られ、光沢無し
○・・・・剥れのないもの
×・・・・剥離するもの
○・・・・曇りが全く見られない
×・・・・若干の曇りが見られる
○・・・・膜外観に異常がなく、フクレや剥離のないもの
×・・・・膜にフクレや剥離があるもの
○・・・・膜外観に異常がなく、フクレや剥離のないもの
×・・・・膜にフクレや剥離のあるもの
○:全く異常が無いもの。
×:若干剥がれが観られたもの。
○:全く異常が無いもの。
×:若干剥がれが観られたもの。
○:全く異常がないもの
×:細かいクラックが入っているもの
*1 ε−カプロラクトン変性ジペンタエリスリトールヘキサアクリレート(日本化薬(株)製)
*2 2−メチル−1−[4−(メチルチオ)フェニル]−2−モルホリノ−プロパン−1−オン(チバスペシャリティーケミカルズ製)
*3 2,4−ジエチルチオキサントン(日本化薬(株)製)
*4 ビスフェノール−A型エポキシ樹脂(ジャパンエポキシレジン(株)製)
*5 ビフェニル型エポキシ樹脂(日本化薬(株)製)
*6 硫酸バリウム(堺化学製)
*7 レベリング剤(ビックケミー製)
*8 消泡剤(信越化学製)
*9 ジエチレングリコールモノエチルエーテルアセテート
*10 ジプロピレングリコールモノメチルエーテル
*11 プロピレングリコールモノメチルエーテル
参考例1で用いた本発明の感光性樹脂組成物を、ポリエチレンテレフタレートフィルムに塗布(乾燥膜厚50μm)し、80℃の乾燥機で30分乾燥させた。この膜に500mJ/cm2の紫外線を照射し、得られた硬化膜をフィルム基板より剥離した。得られた硬化膜を150℃の温度で60分間加熱硬化処理を行い、カッターにて幅5mmに切断した。短冊状の硬化膜に火をつけ、燃えやすさを観察したところ、直ちに炎が消え難燃性を示すことが観察された。
Claims (6)
- 下記式(1)
- 式(1)の化合物(a)のR1からR10の全てが水素原子である請求項1に記載の感光性樹脂組成物。
- 分子中にエチレン性不飽和基とグリシジル基を有する化合物(b)が、グリシジル(メタ)アクリレート、3−ヒドロキシプロピル(メタ)アクリレートのグリシジルエーテル化物、4−ヒドロキシブチル(メタ)アクリレートのグリシジルエーテル化物、ペンタエリスリトールトリアクリレートのグリシジルエーテル化物、マレイミドカプロン酸のグリシジルエステル化物及び桂皮酸のグリシジルエステル化物からなる群から選ばれる1種又は2種以上である請求項1または2に記載の感光性樹脂組成物。
- 請求項1乃至請求項3の何れか1項に記載の感光性樹脂組成物の硬化物。
- 請求項4に記載の硬化物の層を有する基材。
- 請求項5に記載の基材を有する物品。
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PCT/JP2005/000761 WO2005071489A1 (ja) | 2004-01-26 | 2005-01-21 | 感光性樹脂組成物及びその硬化物 |
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JP5382761B2 (ja) * | 2005-03-15 | 2014-01-08 | 日本化薬株式会社 | エポキシ樹脂、エポキシ樹脂組成物、これを用いたプリプレグ及び積層板 |
JP5179194B2 (ja) | 2005-11-30 | 2013-04-10 | 日本化薬株式会社 | フェノール樹脂、その製造法、エポキシ樹脂及びその用途 |
KR100881860B1 (ko) * | 2007-01-17 | 2009-02-06 | 제일모직주식회사 | 컬러필터용 감광성 수지 조성물 및 이를 이용한 이미지센서컬러필터 |
JP5103912B2 (ja) * | 2007-01-30 | 2012-12-19 | Dic株式会社 | 硬化性樹脂組成物、及びその硬化物 |
JP5415128B2 (ja) * | 2008-04-18 | 2014-02-12 | 住友化学株式会社 | 着色感光性樹脂組成物ならびにそれを用いて形成されたパターン及びカラーフィルタ |
CN101727003B (zh) | 2008-10-24 | 2012-07-18 | 第一毛织株式会社 | 用于彩色滤光片的光敏树脂组合物以及使用其制备的彩色滤光片 |
JP5403545B2 (ja) * | 2009-09-14 | 2014-01-29 | 太陽ホールディングス株式会社 | ソルダーレジスト組成物、そのドライフィルム及び硬化物並びにそれらを用いたプリント配線板 |
KR20140083620A (ko) | 2012-12-26 | 2014-07-04 | 제일모직주식회사 | 차광층용 감광성 수지 조성물 및 이를 이용한 차광층 |
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JP6277542B2 (ja) * | 2013-02-28 | 2018-02-14 | パナソニックIpマネジメント株式会社 | プリプレグ、金属張積層板 |
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JPS63258975A (ja) * | 1986-12-26 | 1988-10-26 | Toshiba Corp | ソルダーレジストインキ組成物 |
US5858618A (en) * | 1996-12-02 | 1999-01-12 | Nan Ya Plastics Corporation | Photopolymerizable resinous composition |
-
2005
- 2005-01-21 JP JP2005517277A patent/JP4584839B2/ja not_active Expired - Fee Related
- 2005-01-21 CA CA002552905A patent/CA2552905A1/en not_active Abandoned
- 2005-01-21 CN CNA2005800030909A patent/CN1910519A/zh active Pending
- 2005-01-21 US US10/585,699 patent/US20080286688A1/en not_active Abandoned
- 2005-01-21 WO PCT/JP2005/000761 patent/WO2005071489A1/ja not_active Application Discontinuation
- 2005-01-21 EP EP05703982A patent/EP1710626A1/en not_active Withdrawn
- 2005-01-25 TW TW094102205A patent/TW200540568A/zh not_active IP Right Cessation
-
2006
- 2006-08-11 KR KR1020067016273A patent/KR101117653B1/ko not_active IP Right Cessation
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH09211860A (ja) * | 1996-02-06 | 1997-08-15 | Nippon Kayaku Co Ltd | 樹脂組成物、レジストインキ樹脂組成物及びこれらの硬化物 |
JPH11140144A (ja) * | 1997-11-04 | 1999-05-25 | Nippon Kayaku Co Ltd | 樹脂組成物及びその硬化物 |
JP2002128865A (ja) * | 2000-10-31 | 2002-05-09 | Showa Highpolymer Co Ltd | 感光性樹脂組成物 |
JP2002308957A (ja) * | 2001-04-17 | 2002-10-23 | Showa Highpolymer Co Ltd | 変性ノボラック樹脂および感光性樹脂組成物 |
JP2003012772A (ja) * | 2001-06-26 | 2003-01-15 | Hitachi Chem Co Ltd | 封止用エポキシ樹脂成形材料及び電子部品装置 |
JP2003082067A (ja) * | 2001-09-13 | 2003-03-19 | Nippon Kayaku Co Ltd | 樹脂組成物、ソルダーレジスト樹脂組成物及びこれらの硬化物 |
JP2003082025A (ja) * | 2001-09-13 | 2003-03-19 | Nippon Kayaku Co Ltd | 樹脂組成物、ソルダーレジスト樹脂組成物及びこれらの硬化物 |
Also Published As
Publication number | Publication date |
---|---|
KR20070001130A (ko) | 2007-01-03 |
TWI359331B (ja) | 2012-03-01 |
JPWO2005071489A1 (ja) | 2007-12-27 |
KR101117653B1 (ko) | 2012-03-09 |
TW200540568A (en) | 2005-12-16 |
US20080286688A1 (en) | 2008-11-20 |
EP1710626A1 (en) | 2006-10-11 |
WO2005071489A1 (ja) | 2005-08-04 |
CN1910519A (zh) | 2007-02-07 |
CA2552905A1 (en) | 2005-08-04 |
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