JP4340047B2 - エキシマー充填物を有する放電容器、該放電容器を有する放電ランプ及び放電容器の製造方法 - Google Patents

エキシマー充填物を有する放電容器、該放電容器を有する放電ランプ及び放電容器の製造方法 Download PDF

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Publication number
JP4340047B2
JP4340047B2 JP2002221343A JP2002221343A JP4340047B2 JP 4340047 B2 JP4340047 B2 JP 4340047B2 JP 2002221343 A JP2002221343 A JP 2002221343A JP 2002221343 A JP2002221343 A JP 2002221343A JP 4340047 B2 JP4340047 B2 JP 4340047B2
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Japan
Prior art keywords
discharge vessel
discharge
layer
excimer
filling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002221343A
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English (en)
Japanese (ja)
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JP2003059457A5 (enExample
JP2003059457A (ja
Inventor
アーノルト エーリヒ
ヴィレ クリスティーナ
ヒルレ レナーテ
ヴィツケ ハンス−ディーター
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osram GmbH
Original Assignee
Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH filed Critical Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH
Publication of JP2003059457A publication Critical patent/JP2003059457A/ja
Publication of JP2003059457A5 publication Critical patent/JP2003059457A5/ja
Application granted granted Critical
Publication of JP4340047B2 publication Critical patent/JP4340047B2/ja
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/12Selection of substances for gas fillings; Specified operating pressure or temperature
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/82Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
    • H01J61/827Metal halide arc lamps
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23Oxides
    • C03C17/25Oxides by deposition from the liquid phase
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/12Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/125Selection of substances for gas fillings; Specified operating pressure or temperature having an halogenide as principal component
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00Gas-discharge or vapour-discharge lamps
    • H01J61/02Details
    • H01J61/30Vessels; Containers
    • H01J61/35Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/21Oxides
    • C03C2217/214Al2O3
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/21Oxides
    • C03C2217/228Other specific oxides
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/11Deposition methods from solutions or suspensions
    • C03C2218/111Deposition methods from solutions or suspensions by dipping, immersion

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
JP2002221343A 2001-07-30 2002-07-30 エキシマー充填物を有する放電容器、該放電容器を有する放電ランプ及び放電容器の製造方法 Expired - Fee Related JP4340047B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10137015A DE10137015A1 (de) 2001-07-30 2001-07-30 Entladungsgefäß mit Excimerfüllung und zugehörige Entladungslampe
DE10137015.6 2001-07-30

Publications (3)

Publication Number Publication Date
JP2003059457A JP2003059457A (ja) 2003-02-28
JP2003059457A5 JP2003059457A5 (enExample) 2005-10-27
JP4340047B2 true JP4340047B2 (ja) 2009-10-07

Family

ID=7693545

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002221343A Expired - Fee Related JP4340047B2 (ja) 2001-07-30 2002-07-30 エキシマー充填物を有する放電容器、該放電容器を有する放電ランプ及び放電容器の製造方法

Country Status (7)

Country Link
US (1) US6734629B2 (enExample)
EP (1) EP1282153A3 (enExample)
JP (1) JP4340047B2 (enExample)
KR (1) KR100942846B1 (enExample)
CA (1) CA2396018A1 (enExample)
DE (1) DE10137015A1 (enExample)
TW (1) TWI275120B (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7268355B2 (en) 2002-12-27 2007-09-11 Franek Olstowski Excimer UV fluorescence detection
DE10350114B4 (de) * 2003-10-28 2006-01-12 Tuilaser Ag Optisches Element sowie Excimerlaser mit optischem Element
WO2006017644A2 (en) * 2004-08-03 2006-02-16 Franek Olstowski Improved closed-loop light intensity control and related fluorescence application method
KR100706184B1 (ko) * 2005-12-26 2007-04-12 주식회사 디엠에스 형광램프 및 이의 제조방법
DE102006028749A1 (de) * 2006-06-20 2007-12-27 Universität Bielefeld Verfahren zur Herstellung einer transparenten Aluminiumoxid-Schutzschicht auf einem Glassubstrat
JP2008146906A (ja) * 2006-12-07 2008-06-26 Toshiba Corp 紫外線発生装置
JP4424394B2 (ja) * 2007-08-31 2010-03-03 ウシオ電機株式会社 エキシマランプ
DE102007046343A1 (de) 2007-09-27 2009-04-02 Osram Gesellschaft mit beschränkter Haftung Verfahren zum Verbinden eines Entladungsgefäßes einer Entladungslampe mit einem Rohrstück, insbesondere einem Pumprohr
JP4462448B2 (ja) 2007-12-29 2010-05-12 ウシオ電機株式会社 エキシマランプ
DE102008009029A1 (de) * 2008-02-14 2009-08-20 Osram Gesellschaft mit beschränkter Haftung Verfahren zum Herstellen eines Entladungsgefäßes für eine Entladungslampe
JP5223443B2 (ja) * 2008-04-28 2013-06-26 ウシオ電機株式会社 ArFエキシマランプ
JP2010198977A (ja) * 2009-02-26 2010-09-09 Seiko Epson Corp 放電ランプ及びその製造方法、光源装置、プロジェクタ
DE102009014425B4 (de) * 2009-03-26 2011-02-03 Heraeus Noblelight Gmbh Deuteriumlampe
JP5741603B2 (ja) * 2013-01-30 2015-07-01 ウシオ電機株式会社 エキシマランプ
CA2944903A1 (en) 2014-04-24 2015-10-29 Dana-Farber Cancer Institute, Inc. Tumor suppressor and oncogene biomarkers predictive of anti-immune checkpoint inhibitor response
CA3067260A1 (en) * 2017-06-20 2018-12-27 General Fusion Inc. Vacuum compatible electrical insulator
RU208591U1 (ru) * 2020-12-02 2021-12-24 Игорь Георгиевич Рудой Газоразрядная лампа ультрафиолетового диапазона спектра

Family Cites Families (21)

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US3821585A (en) * 1973-04-30 1974-06-28 Westinghouse Electric Corp Tungsten halogen incandescent lamp with group iva metal getter and method of manufacture
US4256988A (en) * 1977-01-17 1981-03-17 Thorn Lighting Limited Incandescent halogen lamp with protective envelope coating
US4363998A (en) * 1981-05-19 1982-12-14 Westinghouse Electric Corp. Fluorescent lamp processing which improves performance of zinc silicate phosphor used therein
NL8202778A (nl) * 1982-07-09 1984-02-01 Philips Nv Lagedrukkwikdampontladingslamp.
CH672380A5 (en) 1987-01-27 1989-11-15 Bbc Brown Boveri & Cie Reduce darkening of mercury vapour UV tube - using hafnium, lanthanum, thorium or aluminium oxide coating
JPH01211854A (ja) * 1988-02-19 1989-08-25 Mitsubishi Electric Corp ラピッドスタート型蛍光ランプ
US5270615A (en) 1991-11-22 1993-12-14 General Electric Company Multi-layer oxide coating for high intensity metal halide discharge lamps
US5218269A (en) * 1991-11-29 1993-06-08 Gte Products Corporation Negative glow discharge lamp having wire anode
US5258689A (en) * 1991-12-11 1993-11-02 General Electric Company Fluorescent lamps having reduced interference colors
JP3189481B2 (ja) * 1993-03-19 2001-07-16 ウシオ電機株式会社 誘電体バリヤ放電ランプ
BE1007440A3 (nl) 1993-08-20 1995-06-13 Philips Electronics Nv Lagedrukkwikdampontladingslamp.
US5473226A (en) * 1993-11-16 1995-12-05 Osram Sylvania Inc. Incandescent lamp having hardglass envelope with internal barrier layer
JP3087565B2 (ja) * 1994-03-30 2000-09-11 ウシオ電機株式会社 誘電体バリア放電ランプ
WO2004076711A1 (ja) * 1995-10-03 2004-09-10 Seigo Yamamoto 耐ハロゲン系ガス腐食性及び耐ハロゲン系プラズマ腐食性に優れたコーティング膜、該コーティング膜を施した積層構造体並びにそれらの製造方法
US5898265A (en) 1996-05-31 1999-04-27 Philips Electronics North America Corporation TCLP compliant fluorescent lamp
JPH10139480A (ja) * 1996-10-31 1998-05-26 Toshiba Ceramics Co Ltd アルミナ被覆石英ガラス及びその製造方法並びに半導体製造装置用部品
ATE261188T1 (de) * 1997-03-21 2004-03-15 Vollkommer Frank Dr Flachleuchtstofflampe für die hintergrundbeleuchtung und flüssigkristallanzeige-vorrichtung mit dieser flachleuchtstofflampe
IT1306214B1 (it) 1998-09-09 2001-05-30 Gel Design And Engineering Srl Processo per la preparazione di film vetrosi spessi di ossido disilicio secondo la tecnica sol-gel e film spessi cosi' ottenuti.
US6130512A (en) * 1999-08-25 2000-10-10 College Of William & Mary Rf capacitively-coupled electrodeless light source
DE19953533A1 (de) 1999-11-05 2001-05-10 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Entladungslampe mit Elektrodenhalterung
DE60017232T2 (de) * 1999-11-10 2005-12-08 Denglas Technologies, Llc Schichten auf Basis von Nioboxid für optische Dünnfilmbeschichtungen und Verfahren zu deren Herstellung

Also Published As

Publication number Publication date
EP1282153A2 (de) 2003-02-05
KR20030011659A (ko) 2003-02-11
DE10137015A1 (de) 2003-02-20
TWI275120B (en) 2007-03-01
US6734629B2 (en) 2004-05-11
EP1282153A3 (de) 2006-04-19
KR100942846B1 (ko) 2010-02-17
US20030020407A1 (en) 2003-01-30
CA2396018A1 (en) 2003-01-30
JP2003059457A (ja) 2003-02-28

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