DE10137015A1 - Entladungsgefäß mit Excimerfüllung und zugehörige Entladungslampe - Google Patents

Entladungsgefäß mit Excimerfüllung und zugehörige Entladungslampe

Info

Publication number
DE10137015A1
DE10137015A1 DE10137015A DE10137015A DE10137015A1 DE 10137015 A1 DE10137015 A1 DE 10137015A1 DE 10137015 A DE10137015 A DE 10137015A DE 10137015 A DE10137015 A DE 10137015A DE 10137015 A1 DE10137015 A1 DE 10137015A1
Authority
DE
Germany
Prior art keywords
discharge vessel
layer
discharge
filling
excimer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE10137015A
Other languages
German (de)
English (en)
Inventor
Erich Arnold
Christina Doppleb
Renate Hirrle
Hans-Dieter Witzke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osram GmbH
Excelitas Noblelight GmbH
Original Assignee
Heraeus Noblelight GmbH
Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Noblelight GmbH, Patent Treuhand Gesellschaft fuer Elektrische Gluehlampen mbH filed Critical Heraeus Noblelight GmbH
Priority to DE10137015A priority Critical patent/DE10137015A1/de
Priority to EP02015380A priority patent/EP1282153A3/de
Priority to TW091115822A priority patent/TWI275120B/zh
Priority to KR1020020044615A priority patent/KR100942846B1/ko
Priority to CA002396018A priority patent/CA2396018A1/en
Priority to JP2002221343A priority patent/JP4340047B2/ja
Priority to US10/207,129 priority patent/US6734629B2/en
Publication of DE10137015A1 publication Critical patent/DE10137015A1/de
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
    • H01J61/827—Metal halide arc lamps
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/25—Oxides by deposition from the liquid phase
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/125—Selection of substances for gas fillings; Specified operating pressure or temperature having an halogenide as principal component
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/214—Al2O3
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/228—Other specific oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C03C2218/111—Deposition methods from solutions or suspensions by dipping, immersion

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
DE10137015A 2001-07-30 2001-07-30 Entladungsgefäß mit Excimerfüllung und zugehörige Entladungslampe Ceased DE10137015A1 (de)

Priority Applications (7)

Application Number Priority Date Filing Date Title
DE10137015A DE10137015A1 (de) 2001-07-30 2001-07-30 Entladungsgefäß mit Excimerfüllung und zugehörige Entladungslampe
EP02015380A EP1282153A3 (de) 2001-07-30 2002-07-10 Entladungsgefäss mit Excimerfüllung, zugehörige Entladungslampe und Verfahren zur Herstellung des Entladungsgefässes
TW091115822A TWI275120B (en) 2001-07-30 2002-07-16 Discharge vessel with excimer fill, and associated discharge lamp
KR1020020044615A KR100942846B1 (ko) 2001-07-30 2002-07-29 엑시머 충진물을 갖춘 방전 용기, 연관된 방전 램프 및 방전용기 제조 방법
CA002396018A CA2396018A1 (en) 2001-07-30 2002-07-29 Discharge vessel with excimer fill, and associated discharge lamp
JP2002221343A JP4340047B2 (ja) 2001-07-30 2002-07-30 エキシマー充填物を有する放電容器、該放電容器を有する放電ランプ及び放電容器の製造方法
US10/207,129 US6734629B2 (en) 2001-07-30 2002-07-30 Discharge vessel with excimer fill, and associated discharge lamp

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10137015A DE10137015A1 (de) 2001-07-30 2001-07-30 Entladungsgefäß mit Excimerfüllung und zugehörige Entladungslampe

Publications (1)

Publication Number Publication Date
DE10137015A1 true DE10137015A1 (de) 2003-02-20

Family

ID=7693545

Family Applications (1)

Application Number Title Priority Date Filing Date
DE10137015A Ceased DE10137015A1 (de) 2001-07-30 2001-07-30 Entladungsgefäß mit Excimerfüllung und zugehörige Entladungslampe

Country Status (7)

Country Link
US (1) US6734629B2 (enExample)
EP (1) EP1282153A3 (enExample)
JP (1) JP4340047B2 (enExample)
KR (1) KR100942846B1 (enExample)
CA (1) CA2396018A1 (enExample)
DE (1) DE10137015A1 (enExample)
TW (1) TWI275120B (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10350114B4 (de) * 2003-10-28 2006-01-12 Tuilaser Ag Optisches Element sowie Excimerlaser mit optischem Element
DE102006028749A1 (de) * 2006-06-20 2007-12-27 Universität Bielefeld Verfahren zur Herstellung einer transparenten Aluminiumoxid-Schutzschicht auf einem Glassubstrat
WO2010108581A1 (de) 2009-03-26 2010-09-30 Heraeus Noblelight Gmbh Deuteriumlampe

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7268355B2 (en) 2002-12-27 2007-09-11 Franek Olstowski Excimer UV fluorescence detection
WO2006017644A2 (en) * 2004-08-03 2006-02-16 Franek Olstowski Improved closed-loop light intensity control and related fluorescence application method
KR100706184B1 (ko) * 2005-12-26 2007-04-12 주식회사 디엠에스 형광램프 및 이의 제조방법
JP2008146906A (ja) * 2006-12-07 2008-06-26 Toshiba Corp 紫外線発生装置
JP4424394B2 (ja) * 2007-08-31 2010-03-03 ウシオ電機株式会社 エキシマランプ
DE102007046343A1 (de) 2007-09-27 2009-04-02 Osram Gesellschaft mit beschränkter Haftung Verfahren zum Verbinden eines Entladungsgefäßes einer Entladungslampe mit einem Rohrstück, insbesondere einem Pumprohr
JP4462448B2 (ja) 2007-12-29 2010-05-12 ウシオ電機株式会社 エキシマランプ
DE102008009029A1 (de) * 2008-02-14 2009-08-20 Osram Gesellschaft mit beschränkter Haftung Verfahren zum Herstellen eines Entladungsgefäßes für eine Entladungslampe
JP5223443B2 (ja) * 2008-04-28 2013-06-26 ウシオ電機株式会社 ＡｒＦエキシマランプ
JP2010198977A (ja) * 2009-02-26 2010-09-09 Seiko Epson Corp 放電ランプ及びその製造方法、光源装置、プロジェクタ
JP5741603B2 (ja) * 2013-01-30 2015-07-01 ウシオ電機株式会社 エキシマランプ
CA2944903A1 (en) 2014-04-24 2015-10-29 Dana-Farber Cancer Institute, Inc. Tumor suppressor and oncogene biomarkers predictive of anti-immune checkpoint inhibitor response
CA3067260A1 (en) * 2017-06-20 2018-12-27 General Fusion Inc. Vacuum compatible electrical insulator
RU208591U1 (ru) * 2020-12-02 2021-12-24 Игорь Георгиевич Рудой Газоразрядная лампа ультрафиолетового диапазона спектра

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US3821585A (en) * 1973-04-30 1974-06-28 Westinghouse Electric Corp Tungsten halogen incandescent lamp with group iva metal getter and method of manufacture
US4256988A (en) * 1977-01-17 1981-03-17 Thorn Lighting Limited Incandescent halogen lamp with protective envelope coating
US4363998A (en) * 1981-05-19 1982-12-14 Westinghouse Electric Corp. Fluorescent lamp processing which improves performance of zinc silicate phosphor used therein
NL8202778A (nl) * 1982-07-09 1984-02-01 Philips Nv Lagedrukkwikdampontladingslamp.
CH672380A5 (en) 1987-01-27 1989-11-15 Bbc Brown Boveri & Cie Reduce darkening of mercury vapour UV tube - using hafnium, lanthanum, thorium or aluminium oxide coating
JPH01211854A (ja) * 1988-02-19 1989-08-25 Mitsubishi Electric Corp ラピッドスタート型蛍光ランプ
US5270615A (en) 1991-11-22 1993-12-14 General Electric Company Multi-layer oxide coating for high intensity metal halide discharge lamps
US5218269A (en) * 1991-11-29 1993-06-08 Gte Products Corporation Negative glow discharge lamp having wire anode
US5258689A (en) * 1991-12-11 1993-11-02 General Electric Company Fluorescent lamps having reduced interference colors
JP3189481B2 (ja) * 1993-03-19 2001-07-16 ウシオ電機株式会社 誘電体バリヤ放電ランプ
BE1007440A3 (nl) 1993-08-20 1995-06-13 Philips Electronics Nv Lagedrukkwikdampontladingslamp.
US5473226A (en) * 1993-11-16 1995-12-05 Osram Sylvania Inc. Incandescent lamp having hardglass envelope with internal barrier layer
JP3087565B2 (ja) * 1994-03-30 2000-09-11 ウシオ電機株式会社 誘電体バリア放電ランプ
WO2004076711A1 (ja) * 1995-10-03 2004-09-10 Seigo Yamamoto 耐ハロゲン系ガス腐食性及び耐ハロゲン系プラズマ腐食性に優れたコーティング膜、該コーティング膜を施した積層構造体並びにそれらの製造方法
US5898265A (en) 1996-05-31 1999-04-27 Philips Electronics North America Corporation TCLP compliant fluorescent lamp
JPH10139480A (ja) * 1996-10-31 1998-05-26 Toshiba Ceramics Co Ltd アルミナ被覆石英ガラス及びその製造方法並びに半導体製造装置用部品
ATE261188T1 (de) * 1997-03-21 2004-03-15 Vollkommer Frank Dr Flachleuchtstofflampe für die hintergrundbeleuchtung und flüssigkristallanzeige-vorrichtung mit dieser flachleuchtstofflampe
IT1306214B1 (it) 1998-09-09 2001-05-30 Gel Design And Engineering Srl Processo per la preparazione di film vetrosi spessi di ossido disilicio secondo la tecnica sol-gel e film spessi cosi' ottenuti.
US6130512A (en) * 1999-08-25 2000-10-10 College Of William & Mary Rf capacitively-coupled electrodeless light source
DE19953533A1 (de) 1999-11-05 2001-05-10 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Entladungslampe mit Elektrodenhalterung
DE60017232T2 (de) * 1999-11-10 2005-12-08 Denglas Technologies, Llc Schichten auf Basis von Nioboxid für optische Dünnfilmbeschichtungen und Verfahren zu deren Herstellung

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10350114B4 (de) * 2003-10-28 2006-01-12 Tuilaser Ag Optisches Element sowie Excimerlaser mit optischem Element
DE102006028749A1 (de) * 2006-06-20 2007-12-27 Universität Bielefeld Verfahren zur Herstellung einer transparenten Aluminiumoxid-Schutzschicht auf einem Glassubstrat
WO2010108581A1 (de) 2009-03-26 2010-09-30 Heraeus Noblelight Gmbh Deuteriumlampe
DE102009014425A1 (de) 2009-03-26 2010-10-21 Heraeus Noblelight Gmbh Deuteriumlampe
DE102009014425B4 (de) * 2009-03-26 2011-02-03 Heraeus Noblelight Gmbh Deuteriumlampe

Also Published As

Publication number Publication date
EP1282153A2 (de) 2003-02-05
KR20030011659A (ko) 2003-02-11
TWI275120B (en) 2007-03-01
US6734629B2 (en) 2004-05-11
EP1282153A3 (de) 2006-04-19
JP4340047B2 (ja) 2009-10-07
KR100942846B1 (ko) 2010-02-17
US20030020407A1 (en) 2003-01-30
CA2396018A1 (en) 2003-01-30
JP2003059457A (ja) 2003-02-28

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Legal Events

Date Code Title Description
8110 Request for examination paragraph 44
8127 New person/name/address of the applicant

Owner name: OSRAM GESELLSCHAFT MIT BESCHRAENKTER HAFTUNG, , DE

Owner name: HERAEUS NOBLELIGHT GMBH, 63450 HANAU, DE

R081 Change of applicant/patentee

Owner name: HERAEUS NOBLELIGHT GMBH, DE

Free format text: FORMER OWNERS: HERAEUS NOBLELIGHT GMBH, 63450 HANAU, DE; OSRAM GESELLSCHAFT MIT BESCHRAENKTER HAFTUNG, 81543 MUENCHEN, DE

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