KR100942846B1 - 엑시머 충진물을 갖춘 방전 용기, 연관된 방전 램프 및 방전용기 제조 방법 - Google Patents

엑시머 충진물을 갖춘 방전 용기, 연관된 방전 램프 및 방전용기 제조 방법 Download PDF

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KR100942846B1
KR100942846B1 KR1020020044615A KR20020044615A KR100942846B1 KR 100942846 B1 KR100942846 B1 KR 100942846B1 KR 1020020044615 A KR1020020044615 A KR 1020020044615A KR 20020044615 A KR20020044615 A KR 20020044615A KR 100942846 B1 KR100942846 B1 KR 100942846B1
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South Korea
Prior art keywords
discharge vessel
discharge
layer
excimer
lamp
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English (en)
Korean (ko)
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KR20030011659A (ko
Inventor
에리히 아놀트
크리스티나 빌레
레나테 히를레
한스-디터 비츠케
Original Assignee
파텐트-트로이한트-게젤샤프트 퓌어 엘렉트리쉐 글뤼람펜 엠베하
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/82—Lamps with high-pressure unconstricted discharge having a cold pressure > 400 Torr
    • H01J61/827—Metal halide arc lamps
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/25—Oxides by deposition from the liquid phase
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/125—Selection of substances for gas fillings; Specified operating pressure or temperature having an halogenide as principal component
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/214—Al2O3
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/228—Other specific oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C03C2218/111—Deposition methods from solutions or suspensions by dipping, immersion

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
KR1020020044615A 2001-07-30 2002-07-29 엑시머 충진물을 갖춘 방전 용기, 연관된 방전 램프 및 방전용기 제조 방법 Expired - Fee Related KR100942846B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10137015A DE10137015A1 (de) 2001-07-30 2001-07-30 Entladungsgefäß mit Excimerfüllung und zugehörige Entladungslampe
DE10137015.6 2001-07-30

Publications (2)

Publication Number Publication Date
KR20030011659A KR20030011659A (ko) 2003-02-11
KR100942846B1 true KR100942846B1 (ko) 2010-02-17

Family

ID=7693545

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020020044615A Expired - Fee Related KR100942846B1 (ko) 2001-07-30 2002-07-29 엑시머 충진물을 갖춘 방전 용기, 연관된 방전 램프 및 방전용기 제조 방법

Country Status (7)

Country Link
US (1) US6734629B2 (enExample)
EP (1) EP1282153A3 (enExample)
JP (1) JP4340047B2 (enExample)
KR (1) KR100942846B1 (enExample)
CA (1) CA2396018A1 (enExample)
DE (1) DE10137015A1 (enExample)
TW (1) TWI275120B (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7268355B2 (en) 2002-12-27 2007-09-11 Franek Olstowski Excimer UV fluorescence detection
DE10350114B4 (de) * 2003-10-28 2006-01-12 Tuilaser Ag Optisches Element sowie Excimerlaser mit optischem Element
WO2006017644A2 (en) * 2004-08-03 2006-02-16 Franek Olstowski Improved closed-loop light intensity control and related fluorescence application method
KR100706184B1 (ko) * 2005-12-26 2007-04-12 주식회사 디엠에스 형광램프 및 이의 제조방법
DE102006028749A1 (de) * 2006-06-20 2007-12-27 Universität Bielefeld Verfahren zur Herstellung einer transparenten Aluminiumoxid-Schutzschicht auf einem Glassubstrat
JP2008146906A (ja) * 2006-12-07 2008-06-26 Toshiba Corp 紫外線発生装置
JP4424394B2 (ja) * 2007-08-31 2010-03-03 ウシオ電機株式会社 エキシマランプ
DE102007046343A1 (de) 2007-09-27 2009-04-02 Osram Gesellschaft mit beschränkter Haftung Verfahren zum Verbinden eines Entladungsgefäßes einer Entladungslampe mit einem Rohrstück, insbesondere einem Pumprohr
JP4462448B2 (ja) 2007-12-29 2010-05-12 ウシオ電機株式会社 エキシマランプ
DE102008009029A1 (de) * 2008-02-14 2009-08-20 Osram Gesellschaft mit beschränkter Haftung Verfahren zum Herstellen eines Entladungsgefäßes für eine Entladungslampe
JP5223443B2 (ja) * 2008-04-28 2013-06-26 ウシオ電機株式会社 ＡｒＦエキシマランプ
JP2010198977A (ja) * 2009-02-26 2010-09-09 Seiko Epson Corp 放電ランプ及びその製造方法、光源装置、プロジェクタ
DE102009014425B4 (de) * 2009-03-26 2011-02-03 Heraeus Noblelight Gmbh Deuteriumlampe
JP5741603B2 (ja) * 2013-01-30 2015-07-01 ウシオ電機株式会社 エキシマランプ
CA2944903A1 (en) 2014-04-24 2015-10-29 Dana-Farber Cancer Institute, Inc. Tumor suppressor and oncogene biomarkers predictive of anti-immune checkpoint inhibitor response
CA3067260A1 (en) * 2017-06-20 2018-12-27 General Fusion Inc. Vacuum compatible electrical insulator
RU208591U1 (ru) * 2020-12-02 2021-12-24 Игорь Георгиевич Рудой Газоразрядная лампа ультрафиолетового диапазона спектра

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4256988A (en) * 1977-01-17 1981-03-17 Thorn Lighting Limited Incandescent halogen lamp with protective envelope coating
JPH01211854A (ja) * 1988-02-19 1989-08-25 Mitsubishi Electric Corp ラピッドスタート型蛍光ランプ
JPH06275242A (ja) * 1993-03-19 1994-09-30 Ushio Inc 誘電体バリヤ放電ランプ
JPH07272693A (ja) * 1994-03-30 1995-10-20 Ushio Inc 誘電体バリア放電ランプ
US6027792A (en) * 1995-10-03 2000-02-22 Kabushiki Kaisha Kobe Seiko Sho Coating film excellent in resistance to halogen-containing gas corrosion and halogen-containing plasma corrosion, laminated structure coated with the same, and method for producing the same
KR20000015788A (ko) * 1997-03-21 2000-03-15 타실로 다우너 ; 랄프 프레준 ; 요아힘 베르너 백그라운드 조명을 위한 평면형 형광 램프와 이러한 평면형형광 램프를 포함하는 액정 디스플레이 장치
WO2000014013A1 (en) 1998-09-09 2000-03-16 Novara Technology S.R.L. Process for preparing silica or silica-based thick vitreous films according to the sol-gel technique and thick films thereby obtained

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3821585A (en) * 1973-04-30 1974-06-28 Westinghouse Electric Corp Tungsten halogen incandescent lamp with group iva metal getter and method of manufacture
US4363998A (en) * 1981-05-19 1982-12-14 Westinghouse Electric Corp. Fluorescent lamp processing which improves performance of zinc silicate phosphor used therein
NL8202778A (nl) * 1982-07-09 1984-02-01 Philips Nv Lagedrukkwikdampontladingslamp.
CH672380A5 (en) 1987-01-27 1989-11-15 Bbc Brown Boveri & Cie Reduce darkening of mercury vapour UV tube - using hafnium, lanthanum, thorium or aluminium oxide coating
US5270615A (en) 1991-11-22 1993-12-14 General Electric Company Multi-layer oxide coating for high intensity metal halide discharge lamps
US5218269A (en) * 1991-11-29 1993-06-08 Gte Products Corporation Negative glow discharge lamp having wire anode
US5258689A (en) * 1991-12-11 1993-11-02 General Electric Company Fluorescent lamps having reduced interference colors
BE1007440A3 (nl) 1993-08-20 1995-06-13 Philips Electronics Nv Lagedrukkwikdampontladingslamp.
US5473226A (en) * 1993-11-16 1995-12-05 Osram Sylvania Inc. Incandescent lamp having hardglass envelope with internal barrier layer
US5898265A (en) 1996-05-31 1999-04-27 Philips Electronics North America Corporation TCLP compliant fluorescent lamp
JPH10139480A (ja) * 1996-10-31 1998-05-26 Toshiba Ceramics Co Ltd アルミナ被覆石英ガラス及びその製造方法並びに半導体製造装置用部品
US6130512A (en) * 1999-08-25 2000-10-10 College Of William & Mary Rf capacitively-coupled electrodeless light source
DE19953533A1 (de) 1999-11-05 2001-05-10 Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh Entladungslampe mit Elektrodenhalterung
DE60017232T2 (de) * 1999-11-10 2005-12-08 Denglas Technologies, Llc Schichten auf Basis von Nioboxid für optische Dünnfilmbeschichtungen und Verfahren zu deren Herstellung

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4256988A (en) * 1977-01-17 1981-03-17 Thorn Lighting Limited Incandescent halogen lamp with protective envelope coating
JPH01211854A (ja) * 1988-02-19 1989-08-25 Mitsubishi Electric Corp ラピッドスタート型蛍光ランプ
JPH06275242A (ja) * 1993-03-19 1994-09-30 Ushio Inc 誘電体バリヤ放電ランプ
JPH07272693A (ja) * 1994-03-30 1995-10-20 Ushio Inc 誘電体バリア放電ランプ
US6027792A (en) * 1995-10-03 2000-02-22 Kabushiki Kaisha Kobe Seiko Sho Coating film excellent in resistance to halogen-containing gas corrosion and halogen-containing plasma corrosion, laminated structure coated with the same, and method for producing the same
KR20000015788A (ko) * 1997-03-21 2000-03-15 타실로 다우너 ; 랄프 프레준 ; 요아힘 베르너 백그라운드 조명을 위한 평면형 형광 램프와 이러한 평면형형광 램프를 포함하는 액정 디스플레이 장치
WO2000014013A1 (en) 1998-09-09 2000-03-16 Novara Technology S.R.L. Process for preparing silica or silica-based thick vitreous films according to the sol-gel technique and thick films thereby obtained

Also Published As

Publication number Publication date
EP1282153A2 (de) 2003-02-05
KR20030011659A (ko) 2003-02-11
DE10137015A1 (de) 2003-02-20
TWI275120B (en) 2007-03-01
US6734629B2 (en) 2004-05-11
EP1282153A3 (de) 2006-04-19
JP4340047B2 (ja) 2009-10-07
US20030020407A1 (en) 2003-01-30
CA2396018A1 (en) 2003-01-30
JP2003059457A (ja) 2003-02-28

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