JP4339232B2 - アクテイブマトリクス型表示装置用フォトマスク及びその製造方法 - Google Patents

アクテイブマトリクス型表示装置用フォトマスク及びその製造方法 Download PDF

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Publication number
JP4339232B2
JP4339232B2 JP2004342782A JP2004342782A JP4339232B2 JP 4339232 B2 JP4339232 B2 JP 4339232B2 JP 2004342782 A JP2004342782 A JP 2004342782A JP 2004342782 A JP2004342782 A JP 2004342782A JP 4339232 B2 JP4339232 B2 JP 4339232B2
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JP
Japan
Prior art keywords
film
resist
photomask
pattern
electrode
Prior art date
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Expired - Fee Related
Application number
JP2004342782A
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English (en)
Japanese (ja)
Other versions
JP2006154122A (ja
Inventor
美朝 高橋
容一 村山
弘 毛利
敦 飛田
正視 國吉
清人 伴
秀作 城戸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Tianma Japan Ltd
Original Assignee
Dai Nippon Printing Co Ltd
NEC LCD Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd, NEC LCD Technologies Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP2004342782A priority Critical patent/JP4339232B2/ja
Priority to TW094141434A priority patent/TW200632539A/zh
Priority to KR1020050113214A priority patent/KR100744705B1/ko
Publication of JP2006154122A publication Critical patent/JP2006154122A/ja
Application granted granted Critical
Publication of JP4339232B2 publication Critical patent/JP4339232B2/ja
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Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G03F1/32—Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion; Preparation thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Thin Film Transistor (AREA)
  • Liquid Crystal (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2004342782A 2004-11-26 2004-11-26 アクテイブマトリクス型表示装置用フォトマスク及びその製造方法 Expired - Fee Related JP4339232B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004342782A JP4339232B2 (ja) 2004-11-26 2004-11-26 アクテイブマトリクス型表示装置用フォトマスク及びその製造方法
TW094141434A TW200632539A (en) 2004-11-26 2005-11-25 Photomask for display device of active matrix type and manufacturing method thereof
KR1020050113214A KR100744705B1 (ko) 2004-11-26 2005-11-25 액티브 매트릭스형 표시장치용 포토마스크 및 그 제조방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004342782A JP4339232B2 (ja) 2004-11-26 2004-11-26 アクテイブマトリクス型表示装置用フォトマスク及びその製造方法

Publications (2)

Publication Number Publication Date
JP2006154122A JP2006154122A (ja) 2006-06-15
JP4339232B2 true JP4339232B2 (ja) 2009-10-07

Family

ID=36632536

Family Applications (1)

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JP2004342782A Expired - Fee Related JP4339232B2 (ja) 2004-11-26 2004-11-26 アクテイブマトリクス型表示装置用フォトマスク及びその製造方法

Country Status (3)

Country Link
JP (1) JP4339232B2 (https=)
KR (1) KR100744705B1 (https=)
TW (1) TW200632539A (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007273827A (ja) * 2006-03-31 2007-10-18 Tokyo Electron Ltd リフロー方法、パターン形成方法および液晶表示装置用ｔｆｔ素子の製造方法
JP5105407B2 (ja) * 2007-03-30 2012-12-26 Ｈｏｙａ株式会社 フォトマスクブランク、フォトマスク及びフォトマスクの製造方法
JP2008311250A (ja) * 2007-06-12 2008-12-25 Tokyo Electron Ltd リフローシステムおよびリフロー方法
JP5429590B2 (ja) * 2007-07-10 2014-02-26 Ｎｌｔテクノロジー株式会社 ハーフトーンマスク
KR101242625B1 (ko) 2007-11-01 2013-03-19 알박 세이마쿠 가부시키가이샤 하프톤 마스크, 하프톤 마스크 블랭크 및 하프톤 마스크의 제조 방법
WO2009130746A1 (ja) * 2008-04-22 2009-10-29 シャープ株式会社 薄膜トランジスタ基板の製造方法
WO2011086905A1 (ja) * 2010-01-13 2011-07-21 シャープ株式会社 アクティブマトリクス基板及びその製造方法
KR20140101817A (ko) * 2011-12-02 2014-08-20 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 그 제작 방법
KR102756671B1 (ko) 2019-02-21 2025-01-17 삼성디스플레이 주식회사 감광성 수지 조성물, 이를 이용한 표시 장치 및 표시 장치의 제조 방법

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0651492A (ja) * 1992-07-31 1994-02-25 Nec Corp 位相シフトマスク及びその製造方法
JPH0749410A (ja) * 1993-08-06 1995-02-21 Dainippon Printing Co Ltd 階調マスク及びその製造方法
JPH07134396A (ja) * 1993-11-08 1995-05-23 Fujitsu Ltd 露光用マスク及びその製造方法
JPH08123010A (ja) * 1994-10-28 1996-05-17 Toppan Printing Co Ltd 位相シフトマスクおよびそれに用いるマスクブランク
JPH11327121A (ja) * 1998-05-20 1999-11-26 Toppan Printing Co Ltd ハーフトーン型位相シフトマスクの製造方法およびハーフトーン型位相シフトマスクのブランク
JP3253590B2 (ja) * 1998-08-31 2002-02-04 シャープ株式会社 ハーフトーンマスクの製造方法
JP2000181048A (ja) * 1998-12-16 2000-06-30 Sharp Corp フォトマスクおよびその製造方法、並びにそれを用いた露光方法
JP4686006B2 (ja) * 2000-04-27 2011-05-18 大日本印刷株式会社 ハーフトーン位相シフトフォトマスクとハーフトーン位相シフトフォトマスク用ブランクス、及びハーフトーン位相シフトフォトマスクの製造方法
JP3616584B2 (ja) * 2000-06-12 2005-02-02 鹿児島日本電気株式会社 パターン形成方法及びそれを用いた表示装置の製造方法
JP2002189281A (ja) * 2000-12-19 2002-07-05 Hoya Corp グレートーンマスク及びその製造方法
JP2004085759A (ja) * 2002-08-26 2004-03-18 Toppan Printing Co Ltd ハーフトーン型位相シフトマスク用ブランクス及びハーフトーン型位相シフトマスク
JP2004140239A (ja) * 2002-10-18 2004-05-13 Dainippon Screen Mfg Co Ltd 薄膜除去装置および薄膜除去方法
JP4651929B2 (ja) * 2002-11-15 2011-03-16 Ｎｅｃ液晶テクノロジー株式会社 液晶表示装置の製造方法
JP2006078727A (ja) * 2004-09-09 2006-03-23 Toppan Printing Co Ltd ハーフトーン型位相シフトマスクの製造方法

Also Published As

Publication number Publication date
TW200632539A (en) 2006-09-16
KR100744705B1 (ko) 2007-08-02
KR20060059194A (ko) 2006-06-01
TWI311686B (https=) 2009-07-01
JP2006154122A (ja) 2006-06-15

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