JP4338614B2 - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
- Publication number
- JP4338614B2 JP4338614B2 JP2004284938A JP2004284938A JP4338614B2 JP 4338614 B2 JP4338614 B2 JP 4338614B2 JP 2004284938 A JP2004284938 A JP 2004284938A JP 2004284938 A JP2004284938 A JP 2004284938A JP 4338614 B2 JP4338614 B2 JP 4338614B2
- Authority
- JP
- Japan
- Prior art keywords
- via hole
- layer wiring
- insulating film
- hole plug
- lower layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5226—Via connections in a multilevel interconnection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Description
図4は、ビアホールの分布に疎密がある場合、すなわちビアホールが蜜に形成された領域Hとビアホールが存在しない領域Lを併有する場合のCMPの問題を示す図である。
2 絶縁層
3 下層配線
4 層間絶縁膜
5 フォトレジスト
8 導電膜
6a 接続用ビアホール
7a ダミービアホール
8a 接続用ビアホールプラグ
8b ダミービアホールプラグ
10 上層配線
H ビアホールプラグが形成される領域
L ビアホールプラグの存在しない領域
Claims (6)
- 半導体基板上のチップ内に、下層配線および上層配線が層間絶縁膜を介して形成され、前記下層配線と上層配線はビアホールプラグを介して、電気的に接続される構成を有する半導体装置において、
前記層間絶縁膜中であって、かつ前記ビアホールプラグの存在しない領域に、下層配線の深さに到達しないダミービアホールが複数個設けられ、
前記複数個のダミービアホールのそれぞれには、金属が埋め込まれており、
前記複数個のダミービアホールは、前記ビアホールプラグが形成されている領域から遠ざかるにつれて、徐々にダミービアホール密度を減少させて配置されていることを特徴とする半導体装置。 - 前記ダミービアホールの開口部面積の総和は、前記ビアホールプラグを埋め込むビアホールの開口部面積の総和の25%以上75%以下である請求項1に記載の半導体装置
- 前記ダミービアホールは、前記ビアホールプラグの存在しない領域に1%以上15%以下の密度で設けられている請求項1または2に記載の半導体装置。
- 下層配線および上層配線が層間絶縁膜を介在させて設けられ、かつ前記下層配線と前記上層配線はビアホールプラグを介して電気的に接続されている半導体装置の製造方法であって、
下層配線を覆うように半導体基板の上に層間絶縁膜を形成する工程と、
前記層間絶縁膜中に、前記下層配線の表面を露出させるビアホールを形成し、同時に、前記ビアホールの存在しない前記層間絶縁膜の領域に、下層配線の深さに到達しない、複数個のダミービアホールを、前記ビアホールが形成される領域から離れるにつれて、徐々にその密度を減少させて形成する工程と、
前記ビアホールと前記ダミービアホールを埋め込むように金属層を前記半導体基板の上に形成する工程と、
前記半導体基板上を研磨して、前記ビアホールプラグとダミービアホールプラグを形成する工程と、
前記ビアホールプラグに接触するように前記上層配線を形成する工程とを備えた半導体装置の製造方法。 - 前記ダミービアホールの開口部面積の総和は、前記ビアホールの開口部面積の総和の25%以上75%以下にする請求項4に記載の半導体装置の製造方法。
- 前記ダミービアホールを、前記ビアホールプラグの存在しない領域に1%以上15%以下の密度で形成することを特徴とする請求項4または5に記載の半導体装置の製造方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004284938A JP4338614B2 (ja) | 2004-09-29 | 2004-09-29 | 半導体装置およびその製造方法 |
TW094131341A TWI278062B (en) | 2004-09-29 | 2005-09-12 | Semiconductor device and manufacturing method thereof |
US11/235,548 US7470981B2 (en) | 2004-09-29 | 2005-09-27 | Semiconductor device with varying dummy via-hole plug density |
KR1020050091212A KR100724319B1 (ko) | 2004-09-29 | 2005-09-29 | 반도체 장치 및 그 제조 방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004284938A JP4338614B2 (ja) | 2004-09-29 | 2004-09-29 | 半導体装置およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006100571A JP2006100571A (ja) | 2006-04-13 |
JP4338614B2 true JP4338614B2 (ja) | 2009-10-07 |
Family
ID=36098081
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004284938A Expired - Fee Related JP4338614B2 (ja) | 2004-09-29 | 2004-09-29 | 半導体装置およびその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7470981B2 (ja) |
JP (1) | JP4338614B2 (ja) |
KR (1) | KR100724319B1 (ja) |
TW (1) | TWI278062B (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006108541A (ja) * | 2004-10-08 | 2006-04-20 | Ricoh Co Ltd | 半導体集積回路装置 |
US7282451B2 (en) * | 2005-08-31 | 2007-10-16 | Samsung Electronics Co., Ltd. | Methods of forming integrated circuit devices having metal interconnect layers therein |
KR100887010B1 (ko) * | 2007-05-25 | 2009-03-04 | 주식회사 동부하이텍 | 금속 포토 공정 시 포토 정렬키 형성 방법 |
KR100934808B1 (ko) | 2008-03-03 | 2009-12-31 | 주식회사 하이닉스반도체 | 반도체 소자의 캐패시터 형성 방법 |
US7949981B2 (en) * | 2008-07-31 | 2011-05-24 | International Business Machines Corporation | Via density change to improve wafer surface planarity |
JP5489528B2 (ja) | 2009-05-12 | 2014-05-14 | キヤノン株式会社 | 光電変換装置の製造方法 |
JP5638218B2 (ja) * | 2009-10-15 | 2014-12-10 | 三菱電機株式会社 | 半導体装置およびその製造方法 |
JP5515816B2 (ja) * | 2010-02-09 | 2014-06-11 | 富士通株式会社 | 研磨予測評価装置、研磨予測評価方法、研磨予測評価プログラム、過研磨条件算出装置、過研磨条件算出方法及び過研磨条件算出プログラム |
US8796855B2 (en) | 2012-01-13 | 2014-08-05 | Freescale Semiconductor, Inc. | Semiconductor devices with nonconductive vias |
US8883638B2 (en) * | 2012-01-18 | 2014-11-11 | United Microelectronics Corp. | Method for manufacturing damascene structure involving dummy via holes |
FR3003962B1 (fr) * | 2013-03-29 | 2016-07-22 | St Microelectronics Rousset | Procede d'elaboration d'un masque de photolitographie destine a la formation de contacts, masque et circuit integre correspondants |
JP6506536B2 (ja) | 2014-11-11 | 2019-04-24 | キヤノン株式会社 | 半導体装置及びその製造方法、ならびにカメラ |
US10541205B1 (en) * | 2017-02-14 | 2020-01-21 | Intel Corporation | Manufacture of interconnects for integration of multiple integrated circuits |
JP2021136320A (ja) * | 2020-02-26 | 2021-09-13 | キオクシア株式会社 | 半導体装置およびその製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3348327B2 (ja) | 1995-02-13 | 2002-11-20 | ソニー株式会社 | 多層配線形成方法および構造 |
KR100253411B1 (ko) | 1998-03-26 | 2000-04-15 | 김영환 | 반도체 소자의 다층 배선 구조 형성 방법 |
KR20000019031A (ko) | 1998-09-08 | 2000-04-06 | 윤종용 | 반도체 소자의 더미패턴 구조 |
JP2000236076A (ja) * | 1999-02-15 | 2000-08-29 | Nec Corp | 半導体装置及びその製造方法 |
JP3505465B2 (ja) * | 2000-03-28 | 2004-03-08 | 株式会社東芝 | 半導体装置及びその製造方法 |
US6342734B1 (en) * | 2000-04-27 | 2002-01-29 | Lsi Logic Corporation | Interconnect-integrated metal-insulator-metal capacitor and method of fabricating same |
JP4947849B2 (ja) * | 2001-05-30 | 2012-06-06 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
-
2004
- 2004-09-29 JP JP2004284938A patent/JP4338614B2/ja not_active Expired - Fee Related
-
2005
- 2005-09-12 TW TW094131341A patent/TWI278062B/zh not_active IP Right Cessation
- 2005-09-27 US US11/235,548 patent/US7470981B2/en not_active Expired - Fee Related
- 2005-09-29 KR KR1020050091212A patent/KR100724319B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2006100571A (ja) | 2006-04-13 |
KR100724319B1 (ko) | 2007-06-04 |
TW200623324A (en) | 2006-07-01 |
US7470981B2 (en) | 2008-12-30 |
TWI278062B (en) | 2007-04-01 |
KR20060051839A (ko) | 2006-05-19 |
US20060065981A1 (en) | 2006-03-30 |
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