JP4171499B2 - 電子装置用基板およびその製造方法、並びに電子装置およびその製造方法 - Google Patents
電子装置用基板およびその製造方法、並びに電子装置およびその製造方法 Download PDFInfo
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- JP4171499B2 JP4171499B2 JP2006107842A JP2006107842A JP4171499B2 JP 4171499 B2 JP4171499 B2 JP 4171499B2 JP 2006107842 A JP2006107842 A JP 2006107842A JP 2006107842 A JP2006107842 A JP 2006107842A JP 4171499 B2 JP4171499 B2 JP 4171499B2
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/022—Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
- H05K3/025—Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates by transfer of thin metal foil formed on a temporary carrier, e.g. peel-apart copper
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
- H05K3/064—Photoresists
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/244—Finish plating of conductors, especially of copper conductors, e.g. for pads or lands
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
- H05K3/386—Improvement of the adhesion between the insulating substrate and the metal by the use of an organic polymeric bonding layer, e.g. adhesive
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/421—Blind plated via connections
Description
(電子装置用基板の構成)
図1は、本発明の第1の実施の形態に係る電子装置用基板の断面図である。
電子装置用基板(二層配線基板)10は、薄板状のコア基板(補強基板)11と、コア基板11上に設けられた外部接続配線層100と、さらに外部接続配線層100上に設けられた電子部品搭載層110とを備える。
外部接続配線層100と電子部品搭載層110のみでは、基板としての強度が不足するため、補強基板を貼り付けて基板強度を補強している。
外部接続配線層100は、電気絶縁物であるフォトソルダーレジスト(以下、PSRという。)101に設けられた開口102に導体めっき(電子部品搭載層110側の第1のめっき膜103とコア基板11側の第2のめっき膜104)が施された構成を有する。
電子部品搭載層110は、PSR101上に設けられ、開口111が形成された金属層121と、金属層121上(開口111の壁面を含む)に施された第3のめっき膜112と、第3のめっき膜112上に施された第4のめっき膜113とを備え、電子部品搭載層110の最下部の金属層121は第1のめっき膜103と少なくとも一部が電気的に接続されている。
次に、第1の実施の形態に係る電子装置用基板の製造方法について説明する。図2および図3は、図1の電子装置用基板の製造フローを示す説明図である。
本実施の形態によれば、以下の効果を奏する。
(1)本実施の形態に係る電子装置用基板は、薄板状の電気絶縁物を穿孔し、開口させた中に導電物を形成し、導体パターンとビアホール導体を兼用させて単層板としているため、この単層板の上にパッケージ内部の配線パターンを、金属層を加工することで形成出来るので、コア基板レスパッケージと同様の非常に薄い基板厚を持ちながら二層配線が可能となる。これにより、コア基板レスパッケージにおいても二層配線基板の作成が可能となる。また、当該二層配線基板を使用した電子装置の提供が可能となる。
(電子装置の構成)
図4は、本発明の第2の実施の形態に係る電子装置の断面図である。
電子装置200は、第1の実施の形態に係る電子装置用基板10と、当該電子装置用基板10の電子部品搭載層110にバンプ202を介して電気的接続された電子部品201とを備える。ただし、電子装置用基板10のコア基板11は除去され、第2のめっき膜104上に半田(半田ボール)205が搭載されている。
次に、図5を参照して第2の実施の形態に係る電子装置の製造方法について説明する。図5は、図4の電子装置の製造フローを示す説明図である。
本実施の形態によれば、以下の効果を奏する。
コア基板の除去により薄い電子装置を得ることができるほか、第1の実施の形態に係る基板に電子部品を実装する前にキャリア層123とテープ材130を物理的に引き剥がし、除去してしまうため、このキャリア層123付きテープ材130には電子装置を実装する工程で印加される熱が印加されずに済み、酸化や歪の問題が生じない。このため、剥離したキャリア層123付きテープ材130を再利用して、本実施の形態ではポリイミドのテープ材130であるのでフレキシブル配線板として再利用が可能となる。これにより、半導体装置作成時に出る廃棄物を削減でき、地球環境保護への貢献が可能となる。
(電子装置用基板の製造方法)
次に、第1の実施の形態に係る電子装置用基板10と同じ構成の基板について、別の製造方法を第3の実施の形態として説明する。本実施の形態に係る製造方法においては、第1の実施の形態において説明した製造方法で用いたポリイミド支持基板(ポリイミドテープ132)を使わないで電子装置用基板を製造するものである。
なお、本実施の形態に係る電子装置用基板10による電子装置の構成、製造方法は、第2の実施の形態で示したものと同様である。
まず、第1の実施の形態と同様に、金属層121とキャリア層123の間に剥離層122を有する3層構成のキャリア付き銅箔120を準備する(図6(a))。
本実施の形態によれば、本発明の第1の実施の形態の効果のほかに以下の効果を奏する。
本実施の形態では、第1の実施の形態で使用したポリイミドテープを使用しない製造方法としているため、基板製造における低価格化が可能になる。
本発明は、上記各実施の形態に限定されず、本発明の技術思想を逸脱あるいは変更しない範囲内で種々な変形が可能である。
11:コア基板
100:外部接続配線層
101:PSR
102:開口
103:第1のめっき膜
104:第2のめっき膜
105:空気膜
107:フォトマスク
108:紫外線
110:電子部品搭載層
111:開口
112:第3のめっき膜
113:第4のめっき膜
115:マスク
120:キャリア付き銅箔
121:金属層
122:剥離層
123:キャリア層
130:テープ材
131:接着剤
132:ポリイミドテープ
201:電子部品
202:バンプ
203:接着剤
204:封止樹脂
205:半田
210a,210b:ロール
Claims (21)
- 薄板状の補強基板と、前記補強基板上に設けられた電気絶縁物および前記電気絶縁物に形成された開口内に設けられた第1の導体パターンとビアホール導体を備えた外部接続配線層とを積層した電子装置用基板において、
前記第1の導体パターンと前記ビアホール導体とは一体で形成されており、前記電気絶縁物の前記補強基板とは反対の面上に前記ビアホール導体と少なくとも一部が電気的に接続された第2の導体パターンが形成され、
前記第1の導体パターンと前記補強基板の間には、空気層が存在すること特徴とする電子装置用基板。 - 前記補強基板は、アクリル、エポキシ、ポリイミド、又は接着剤を表面に塗工した金属物のいずれか、或いはこれらを組み合わせたものであることを特徴とする請求項1記載の電子装置用基板。
- 前記第1の導体パターンと前記ビアホール導体の一体物は、金、銀、銅、ニッケル、パラジウム、錫、ロジウム、コバルトの単体、又はそれらの合金の単層若しくは積層したものであることを特徴とする請求項1の記載の電子装置用基板。
- 前記第1の導体パターンと前記ビアホール導体の一体物は、その構成中に、少なくとも銅またはその合金めっきを5μm以上、あるいはニッケルまたはその合金めっきを3μm以上有していることを特徴とする請求項1の記載の電子装置用基板。
- 前記第1の導体パターンと前記ビアホール導体の一体物の高さ(厚さ)は、前記電気絶縁物の高さ(厚さ)よりも低い(薄い)ことを特徴とした請求項1の記載の電子装置用基板。
- 前記電気絶縁物は、ソルダーレジスト、フォトソルダーレジストであることを特徴とする請求項1記載の電子装置用基板。
- 金属層とキャリア層とを有する複合基板の前記金属層上に電気絶縁物を形成する工程と、前記電気絶縁物に開口を形成する工程と、前記開口に第1の導体パターンとビアホール導体の一体物を形成する工程と、前記電気絶縁物の前記複合基板とは反対の面に薄板上の補強基板を接着させる工程と、前記複合基板を前記金属層のみを残して物理的に引き剥がす工程と、残された前記金属層に第2の導体パターンを形成する工程とを含むことを特徴とする電子装置用基板の製造方法。
- 前記複合基板は、前記金属層と前記キャリア層との間に剥離層を備えることを特徴とする請求項7記載の電子装置用基板の製造方法。
- 前記金属層と前記剥離層を介した前記キャリア層との接着力が、前記金属層と前記電気絶縁物との接着力よりも小さいことを特徴とする請求項8記載の電子装置用基板の製造方法。
- 前記剥離層は、有機系剥離層又は無機系剥離層であることを特徴とする請求項8記載の電子装置用基板の製造方法。
- 前記金属層は、銅およびその合金箔、ステンレス箔、アルミニウムおよびその合金箔、ニッケルおよびその合金箔、或いは、錫およびその合金箔であることを特徴とする請求項7記載の電子装置用基板の製造方法。
- 前記複合基板は、前記キャリア層側に支持基板が貼着されていることを特徴とする請求項7記載の電子装置用基板の製造方法。
- 前記支持基板は、絶縁フィルムであることを特徴とする請求項12記載の電子装置用基板の製造方法。
- 前記支持基板は、接着剤付きの電気絶縁フィルムであり、前記接着剤を用いて前記複合基板に一体化させることを特徴とする請求項12記載の電子装置用基板の製造方法。
- 請求項1乃至請求項6のいずれか1項に記載の電子装置用基板を使用した電子装置であって、
前記補強基板が除去された前記電子装置用基板と、
前記第2の導体パターンと電気的に接続される電極を有する電子部品と、
前記電子部品を覆う絶縁性被覆材料とを備えたことを特徴とする電子装置。 - 前記第1の導体パターンには半田が接続されていることを特徴とする請求項15記載の電子装置。
- 前記電子部品は、前記第2の導体パターンと金属細線を介して電気的に接続されていることを特徴とする請求項15記載の電子装置。
- 前記電子部品は、前記第2の導体パターンとバンプを介して電気的に接続されていることを特徴とする請求項15記載の電子装置。
- 前記第2の導体パターンは、バンプ接続が可能なめっき膜が施されていることを特徴とする請求項18記載の電子装置。
- 請求項1乃至請求項6のいずれか1項に記載の電子装置用基板を使用した電子装置の製造方法であって、
前記電子装置用基板に電子部品を搭載する工程と、前記電子部品の所定の電極と前記第2の導体パターンとを電気的に接続する工程と、少なくとも前記電子部品と前記第2の導体パターンとの電気的接続部を絶縁性被覆材料で被覆する工程と、前記電子装置用基板から前記補強基板を除去する工程とを有することを特徴とする電子装置の製造方法。 - 前記補強基板を除去する工程は、物理的な引き剥がしによって行われることを特徴とする請求項20記載の電子装置の製造方法。
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JP2006107842A JP4171499B2 (ja) | 2006-04-10 | 2006-04-10 | 電子装置用基板およびその製造方法、並びに電子装置およびその製造方法 |
US11/530,344 US7705245B2 (en) | 2006-04-10 | 2006-09-08 | Electronic device substrate and its fabrication method, and electronic device and its fabrication method |
KR1020060094462A KR100834657B1 (ko) | 2006-04-10 | 2006-09-28 | 전자 장치용 기판 및 그 제조 방법, 및 전자 장치 및 그제조 방법 |
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KR102086792B1 (ko) * | 2013-09-02 | 2020-03-09 | 삼성전자주식회사 | 착탈 가능한 장치를 포함하는 전자 장치 |
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US10515884B2 (en) | 2015-02-17 | 2019-12-24 | Advanced Semiconductor Engineering, Inc. | Substrate having a conductive structure within photo-sensitive resin |
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KR20070101094A (ko) | 2007-10-16 |
US20070235218A1 (en) | 2007-10-11 |
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