JP4152437B2 - 薄膜アクチュエーテッドミラーアレイ及びその製造方法 - Google Patents
薄膜アクチュエーテッドミラーアレイ及びその製造方法 Download PDFInfo
- Publication number
- JP4152437B2 JP4152437B2 JP52750197A JP52750197A JP4152437B2 JP 4152437 B2 JP4152437 B2 JP 4152437B2 JP 52750197 A JP52750197 A JP 52750197A JP 52750197 A JP52750197 A JP 52750197A JP 4152437 B2 JP4152437 B2 JP 4152437B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- array
- layer
- electrode
- actuated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 title claims description 221
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 239000010410 layer Substances 0.000 claims description 108
- 239000000463 material Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 14
- 238000004544 sputter deposition Methods 0.000 claims description 14
- 239000011159 matrix material Substances 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 9
- 239000011241 protective layer Substances 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 239000011810 insulating material Substances 0.000 claims description 6
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 238000003491 array Methods 0.000 claims description 3
- 230000006872 improvement Effects 0.000 claims description 2
- 238000000059 patterning Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 description 12
- 239000002184 metal Substances 0.000 description 12
- 238000005229 chemical vapour deposition Methods 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 239000005360 phosphosilicate glass Substances 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000003980 solgel method Methods 0.000 description 3
- 239000010949 copper Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0102—Constructional details, not otherwise provided for in this subclass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/02—Function characteristic reflective
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Elements Other Than Lenses (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Projection Apparatus (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Liquid Crystal (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1996/2315 | 1996-01-31 | ||
| KR1019960002315A KR100229790B1 (ko) | 1996-01-31 | 1996-01-31 | 유전층을 갖는 박막형광로 조절장치 |
| PCT/KR1996/000048 WO1997028653A1 (fr) | 1996-01-31 | 1996-04-08 | Matrice de miroirs actionnes par film mince, pourvue de couches dielectriques |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11503538A JPH11503538A (ja) | 1999-03-26 |
| JP4152437B2 true JP4152437B2 (ja) | 2008-09-17 |
Family
ID=36955865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP52750197A Expired - Fee Related JP4152437B2 (ja) | 1996-01-31 | 1996-04-08 | 薄膜アクチュエーテッドミラーアレイ及びその製造方法 |
Country Status (14)
| Country | Link |
|---|---|
| JP (1) | JP4152437B2 (fr) |
| KR (1) | KR100229790B1 (fr) |
| CN (1) | CN1104815C (fr) |
| AR (1) | AR001149A1 (fr) |
| AU (1) | AU724477B2 (fr) |
| BR (1) | BR9607803A (fr) |
| CA (1) | CA2216557A1 (fr) |
| CZ (1) | CZ304197A3 (fr) |
| HU (1) | HUP9801148A3 (fr) |
| PE (1) | PE47197A1 (fr) |
| PL (1) | PL179839B1 (fr) |
| TW (1) | TW348324B (fr) |
| UY (1) | UY24186A1 (fr) |
| WO (1) | WO1997028653A1 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4582380B2 (ja) * | 2001-05-11 | 2010-11-17 | ソニー株式会社 | 光変調素子とそれを用いた光学装置、および光変調素子の製造方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5260798A (en) * | 1989-11-01 | 1993-11-09 | Aura Systems, Inc. | Pixel intensity modulator |
| US5247222A (en) * | 1991-11-04 | 1993-09-21 | Engle Craig D | Constrained shear mode modulator |
| JP3283881B2 (ja) * | 1993-10-29 | 2002-05-20 | テーウー エレクトロニクス カンパニー リミテッド | Ｍ×ｎ個の薄膜アクチュエーテッドミラーアレイ及びその製造方法 |
| CZ290728B6 (cs) * | 1993-11-09 | 2002-10-16 | Daewoo Electronics Co., Ltd. | Pole tenkofilmových řízených zrcadel a způsob jeho přípravy |
| US5355008A (en) * | 1993-11-19 | 1994-10-11 | Micrel, Inc. | Diamond shaped gate mesh for cellular MOS transistor array |
-
1996
- 1996-01-04 TW TW085100044A patent/TW348324B/zh active
- 1996-01-31 KR KR1019960002315A patent/KR100229790B1/ko not_active IP Right Cessation
- 1996-03-04 AR AR33563296A patent/AR001149A1/es unknown
- 1996-03-20 PE PE1996000192A patent/PE47197A1/es not_active Application Discontinuation
- 1996-03-22 UY UY24186A patent/UY24186A1/es not_active IP Right Cessation
- 1996-04-08 PL PL96322490A patent/PL179839B1/pl unknown
- 1996-04-08 AU AU52899/96A patent/AU724477B2/en not_active Ceased
- 1996-04-08 CN CN96192838A patent/CN1104815C/zh not_active Expired - Fee Related
- 1996-04-08 HU HU9801148A patent/HUP9801148A3/hu unknown
- 1996-04-08 WO PCT/KR1996/000048 patent/WO1997028653A1/fr not_active Application Discontinuation
- 1996-04-08 CZ CZ973041A patent/CZ304197A3/cs unknown
- 1996-04-08 CA CA002216557A patent/CA2216557A1/fr not_active Abandoned
- 1996-04-08 JP JP52750197A patent/JP4152437B2/ja not_active Expired - Fee Related
- 1996-04-08 BR BR9607803A patent/BR9607803A/pt not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| TW348324B (en) | 1998-12-21 |
| UY24186A1 (es) | 1996-06-21 |
| KR970060514A (ko) | 1997-08-12 |
| PL179839B1 (pl) | 2000-11-30 |
| WO1997028653A1 (fr) | 1997-08-07 |
| CZ304197A3 (cs) | 1998-04-15 |
| PE47197A1 (es) | 1998-02-06 |
| AU5289996A (en) | 1997-08-22 |
| BR9607803A (pt) | 1998-07-07 |
| CN1104815C (zh) | 2003-04-02 |
| AU724477B2 (en) | 2000-09-21 |
| JPH11503538A (ja) | 1999-03-26 |
| PL322490A1 (en) | 1998-02-02 |
| MX9707476A (es) | 1997-11-29 |
| CA2216557A1 (fr) | 1997-08-07 |
| KR100229790B1 (ko) | 1999-11-15 |
| HUP9801148A3 (en) | 2002-07-29 |
| CN1179871A (zh) | 1998-04-22 |
| AR001149A1 (es) | 1997-09-24 |
| HUP9801148A2 (hu) | 1998-08-28 |
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