TW348324B - Thin film actuated mirror array having dielectric layers - Google Patents
Thin film actuated mirror array having dielectric layersInfo
- Publication number
- TW348324B TW348324B TW085100044A TW85100044A TW348324B TW 348324 B TW348324 B TW 348324B TW 085100044 A TW085100044 A TW 085100044A TW 85100044 A TW85100044 A TW 85100044A TW 348324 B TW348324 B TW 348324B
- Authority
- TW
- Taiwan
- Prior art keywords
- thin film
- array
- electrode
- actuating structures
- conduits
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title abstract 13
- 239000004020 conductor Substances 0.000 abstract 2
- 239000011159 matrix material Substances 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0102—Constructional details, not otherwise provided for in this subclass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/02—Function characteristic reflective
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Elements Other Than Lenses (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Projection Apparatus (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Liquid Crystal (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960002315A KR100229790B1 (ko) | 1996-01-31 | 1996-01-31 | 유전층을 갖는 박막형광로 조절장치 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW348324B true TW348324B (en) | 1998-12-21 |
Family
ID=36955865
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW085100044A TW348324B (en) | 1996-01-31 | 1996-01-04 | Thin film actuated mirror array having dielectric layers |
Country Status (14)
Country | Link |
---|---|
JP (1) | JP4152437B2 (fr) |
KR (1) | KR100229790B1 (fr) |
CN (1) | CN1104815C (fr) |
AR (1) | AR001149A1 (fr) |
AU (1) | AU724477B2 (fr) |
BR (1) | BR9607803A (fr) |
CA (1) | CA2216557A1 (fr) |
CZ (1) | CZ304197A3 (fr) |
HU (1) | HUP9801148A3 (fr) |
PE (1) | PE47197A1 (fr) |
PL (1) | PL179839B1 (fr) |
TW (1) | TW348324B (fr) |
UY (1) | UY24186A1 (fr) |
WO (1) | WO1997028653A1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4582380B2 (ja) * | 2001-05-11 | 2010-11-17 | ソニー株式会社 | 光変調素子とそれを用いた光学装置、および光変調素子の製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5260798A (en) * | 1989-11-01 | 1993-11-09 | Aura Systems, Inc. | Pixel intensity modulator |
US5247222A (en) * | 1991-11-04 | 1993-09-21 | Engle Craig D | Constrained shear mode modulator |
JP3283881B2 (ja) * | 1993-10-29 | 2002-05-20 | テーウー エレクトロニクス カンパニー リミテッド | M×n個の薄膜アクチュエーテッドミラーアレイ及びその製造方法 |
CZ290728B6 (cs) * | 1993-11-09 | 2002-10-16 | Daewoo Electronics Co., Ltd. | Pole tenkofilmových řízených zrcadel a způsob jeho přípravy |
US5355008A (en) * | 1993-11-19 | 1994-10-11 | Micrel, Inc. | Diamond shaped gate mesh for cellular MOS transistor array |
-
1996
- 1996-01-04 TW TW085100044A patent/TW348324B/zh active
- 1996-01-31 KR KR1019960002315A patent/KR100229790B1/ko not_active IP Right Cessation
- 1996-03-04 AR AR33563296A patent/AR001149A1/es unknown
- 1996-03-20 PE PE1996000192A patent/PE47197A1/es not_active Application Discontinuation
- 1996-03-22 UY UY24186A patent/UY24186A1/es not_active IP Right Cessation
- 1996-04-08 PL PL96322490A patent/PL179839B1/pl unknown
- 1996-04-08 AU AU52899/96A patent/AU724477B2/en not_active Ceased
- 1996-04-08 CN CN96192838A patent/CN1104815C/zh not_active Expired - Fee Related
- 1996-04-08 HU HU9801148A patent/HUP9801148A3/hu unknown
- 1996-04-08 WO PCT/KR1996/000048 patent/WO1997028653A1/fr not_active Application Discontinuation
- 1996-04-08 CZ CZ973041A patent/CZ304197A3/cs unknown
- 1996-04-08 CA CA002216557A patent/CA2216557A1/fr not_active Abandoned
- 1996-04-08 JP JP52750197A patent/JP4152437B2/ja not_active Expired - Fee Related
- 1996-04-08 BR BR9607803A patent/BR9607803A/pt not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
UY24186A1 (es) | 1996-06-21 |
KR970060514A (ko) | 1997-08-12 |
PL179839B1 (pl) | 2000-11-30 |
WO1997028653A1 (fr) | 1997-08-07 |
CZ304197A3 (cs) | 1998-04-15 |
PE47197A1 (es) | 1998-02-06 |
AU5289996A (en) | 1997-08-22 |
BR9607803A (pt) | 1998-07-07 |
CN1104815C (zh) | 2003-04-02 |
AU724477B2 (en) | 2000-09-21 |
JPH11503538A (ja) | 1999-03-26 |
PL322490A1 (en) | 1998-02-02 |
MX9707476A (es) | 1997-11-29 |
CA2216557A1 (fr) | 1997-08-07 |
KR100229790B1 (ko) | 1999-11-15 |
HUP9801148A3 (en) | 2002-07-29 |
CN1179871A (zh) | 1998-04-22 |
JP4152437B2 (ja) | 2008-09-17 |
AR001149A1 (es) | 1997-09-24 |
HUP9801148A2 (hu) | 1998-08-28 |
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