AU724477B2 - Thin film actuated mirror array having dielectric layers - Google Patents
Thin film actuated mirror array having dielectric layers Download PDFInfo
- Publication number
- AU724477B2 AU724477B2 AU52899/96A AU5289996A AU724477B2 AU 724477 B2 AU724477 B2 AU 724477B2 AU 52899/96 A AU52899/96 A AU 52899/96A AU 5289996 A AU5289996 A AU 5289996A AU 724477 B2 AU724477 B2 AU 724477B2
- Authority
- AU
- Australia
- Prior art keywords
- thin film
- layer
- array
- actuated mirrors
- electrodisplacive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 239000010409 thin film Substances 0.000 title claims description 190
- 238000000034 method Methods 0.000 claims description 31
- 238000004519 manufacturing process Methods 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 14
- 238000004544 sputter deposition Methods 0.000 claims description 14
- 239000011159 matrix material Substances 0.000 claims description 11
- 238000000151 deposition Methods 0.000 claims description 10
- 239000004020 conductor Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 239000011810 insulating material Substances 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 4
- 238000000059 patterning Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 description 15
- 239000002184 metal Substances 0.000 description 15
- 230000003287 optical effect Effects 0.000 description 14
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- OYLRFHLPEAGKJU-UHFFFAOYSA-N phosphane silicic acid Chemical compound P.[Si](O)(O)(O)O OYLRFHLPEAGKJU-UHFFFAOYSA-N 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000005368 silicate glass Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- ZBSCCQXBYNSKPV-UHFFFAOYSA-N oxolead;oxomagnesium;2,4,5-trioxa-1$l^{5},3$l^{5}-diniobabicyclo[1.1.1]pentane 1,3-dioxide Chemical compound [Mg]=O.[Pb]=O.[Pb]=O.[Pb]=O.O1[Nb]2(=O)O[Nb]1(=O)O2 ZBSCCQXBYNSKPV-UHFFFAOYSA-N 0.000 description 1
- 230000000063 preceeding effect Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0102—Constructional details, not otherwise provided for in this subclass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/02—Function characteristic reflective
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Elements Other Than Lenses (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Video Image Reproduction Devices For Color Tv Systems (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Liquid Crystal (AREA)
- Projection Apparatus (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960002315A KR100229790B1 (ko) | 1996-01-31 | 1996-01-31 | 유전층을 갖는 박막형광로 조절장치 |
| KR96/2315 | 1996-01-31 | ||
| PCT/KR1996/000048 WO1997028653A1 (fr) | 1996-01-31 | 1996-04-08 | Matrice de miroirs actionnes par film mince, pourvue de couches dielectriques |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| AU5289996A AU5289996A (en) | 1997-08-22 |
| AU724477B2 true AU724477B2 (en) | 2000-09-21 |
Family
ID=36955865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU52899/96A Ceased AU724477B2 (en) | 1996-01-31 | 1996-04-08 | Thin film actuated mirror array having dielectric layers |
Country Status (14)
| Country | Link |
|---|---|
| JP (1) | JP4152437B2 (fr) |
| KR (1) | KR100229790B1 (fr) |
| CN (1) | CN1104815C (fr) |
| AR (1) | AR001149A1 (fr) |
| AU (1) | AU724477B2 (fr) |
| BR (1) | BR9607803A (fr) |
| CA (1) | CA2216557A1 (fr) |
| CZ (1) | CZ304197A3 (fr) |
| HU (1) | HUP9801148A3 (fr) |
| PE (1) | PE47197A1 (fr) |
| PL (1) | PL179839B1 (fr) |
| TW (1) | TW348324B (fr) |
| UY (1) | UY24186A1 (fr) |
| WO (1) | WO1997028653A1 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4582380B2 (ja) * | 2001-05-11 | 2010-11-17 | ソニー株式会社 | 光変調素子とそれを用いた光学装置、および光変調素子の製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995012287A1 (fr) * | 1993-10-29 | 1995-05-04 | Daewoo Electronics Co., Ltd. | Reseau de miroirs actionnes par couches minces et son procede de fabrication |
| WO1995013693A1 (fr) * | 1993-11-19 | 1995-05-26 | Micrel, Inc. | Grille a ouvertures en forme de diamant pour groupement cellulaire de transistors mos |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5260798A (en) * | 1989-11-01 | 1993-11-09 | Aura Systems, Inc. | Pixel intensity modulator |
| US5247222A (en) * | 1991-11-04 | 1993-09-21 | Engle Craig D | Constrained shear mode modulator |
| CA2176111A1 (fr) * | 1993-11-09 | 1995-05-18 | Jeong Beom Ji | Reseau de miroirs actionnes par couches minces utilisable dans un systeme de projection optique, et son procede de fabrication |
-
1996
- 1996-01-04 TW TW085100044A patent/TW348324B/zh active
- 1996-01-31 KR KR1019960002315A patent/KR100229790B1/ko not_active IP Right Cessation
- 1996-03-04 AR AR33563296A patent/AR001149A1/es unknown
- 1996-03-20 PE PE1996000192A patent/PE47197A1/es not_active Application Discontinuation
- 1996-03-22 UY UY24186A patent/UY24186A1/es not_active IP Right Cessation
- 1996-04-08 CZ CZ973041A patent/CZ304197A3/cs unknown
- 1996-04-08 CN CN96192838A patent/CN1104815C/zh not_active Expired - Fee Related
- 1996-04-08 CA CA002216557A patent/CA2216557A1/fr not_active Abandoned
- 1996-04-08 PL PL96322490A patent/PL179839B1/pl unknown
- 1996-04-08 WO PCT/KR1996/000048 patent/WO1997028653A1/fr not_active Application Discontinuation
- 1996-04-08 AU AU52899/96A patent/AU724477B2/en not_active Ceased
- 1996-04-08 HU HU9801148A patent/HUP9801148A3/hu unknown
- 1996-04-08 JP JP52750197A patent/JP4152437B2/ja not_active Expired - Fee Related
- 1996-04-08 BR BR9607803A patent/BR9607803A/pt not_active Application Discontinuation
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995012287A1 (fr) * | 1993-10-29 | 1995-05-04 | Daewoo Electronics Co., Ltd. | Reseau de miroirs actionnes par couches minces et son procede de fabrication |
| WO1995013693A1 (fr) * | 1993-11-19 | 1995-05-26 | Micrel, Inc. | Grille a ouvertures en forme de diamant pour groupement cellulaire de transistors mos |
Also Published As
| Publication number | Publication date |
|---|---|
| AR001149A1 (es) | 1997-09-24 |
| KR970060514A (ko) | 1997-08-12 |
| CZ304197A3 (cs) | 1998-04-15 |
| MX9707476A (es) | 1997-11-29 |
| JPH11503538A (ja) | 1999-03-26 |
| PE47197A1 (es) | 1998-02-06 |
| CN1179871A (zh) | 1998-04-22 |
| CN1104815C (zh) | 2003-04-02 |
| AU5289996A (en) | 1997-08-22 |
| KR100229790B1 (ko) | 1999-11-15 |
| JP4152437B2 (ja) | 2008-09-17 |
| PL322490A1 (en) | 1998-02-02 |
| TW348324B (en) | 1998-12-21 |
| BR9607803A (pt) | 1998-07-07 |
| CA2216557A1 (fr) | 1997-08-07 |
| HUP9801148A3 (en) | 2002-07-29 |
| HUP9801148A2 (hu) | 1998-08-28 |
| WO1997028653A1 (fr) | 1997-08-07 |
| PL179839B1 (pl) | 2000-11-30 |
| UY24186A1 (es) | 1996-06-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FGA | Letters patent sealed or granted (standard patent) | ||
| MK14 | Patent ceased section 143(a) (annual fees not paid) or expired |