PL322490A1 - System of thin-film acftuated mirrors having dielectric layers - Google Patents

System of thin-film acftuated mirrors having dielectric layers

Info

Publication number
PL322490A1
PL322490A1 PL96322490A PL32249096A PL322490A1 PL 322490 A1 PL322490 A1 PL 322490A1 PL 96322490 A PL96322490 A PL 96322490A PL 32249096 A PL32249096 A PL 32249096A PL 322490 A1 PL322490 A1 PL 322490A1
Authority
PL
Poland
Prior art keywords
acftuated
mirrors
thin
film
dielectric layers
Prior art date
Application number
PL96322490A
Other versions
PL179839B1 (en
Inventor
Geun Yong Lim
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of PL322490A1 publication Critical patent/PL322490A1/en
Publication of PL179839B1 publication Critical patent/PL179839B1/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0102—Constructional details, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/02—Function characteristic reflective

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Liquid Crystal (AREA)
  • Projection Apparatus (AREA)
PL96322490A 1996-01-31 1996-04-08 System of thin-film acftuated mirrors having dielectric layers PL179839B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019960002315A KR100229790B1 (en) 1996-01-31 1996-01-31 Actuated mirror array
PCT/KR1996/000048 WO1997028653A1 (en) 1996-01-31 1996-04-08 Thin film actuated mirror array having dielectric layers

Publications (2)

Publication Number Publication Date
PL322490A1 true PL322490A1 (en) 1998-02-02
PL179839B1 PL179839B1 (en) 2000-11-30

Family

ID=36955865

Family Applications (1)

Application Number Title Priority Date Filing Date
PL96322490A PL179839B1 (en) 1996-01-31 1996-04-08 System of thin-film acftuated mirrors having dielectric layers

Country Status (14)

Country Link
JP (1) JP4152437B2 (en)
KR (1) KR100229790B1 (en)
CN (1) CN1104815C (en)
AR (1) AR001149A1 (en)
AU (1) AU724477B2 (en)
BR (1) BR9607803A (en)
CA (1) CA2216557A1 (en)
CZ (1) CZ304197A3 (en)
HU (1) HUP9801148A3 (en)
PE (1) PE47197A1 (en)
PL (1) PL179839B1 (en)
TW (1) TW348324B (en)
UY (1) UY24186A1 (en)
WO (1) WO1997028653A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4582380B2 (en) * 2001-05-11 2010-11-17 ソニー株式会社 LIGHT MODULATION ELEMENT, OPTICAL DEVICE USING THE SAME, AND LIGHT MODULATION ELEMENT MANUFACTURING METHOD

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5260798A (en) * 1989-11-01 1993-11-09 Aura Systems, Inc. Pixel intensity modulator
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
HU220516B1 (en) * 1993-10-29 2002-03-28 Daewoo Electronics Co. Ltd. Thin film actuated mirror array and method for its manufacture
AU693125B2 (en) * 1993-11-09 1998-06-25 Daewoo Electronics Co., Ltd. Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
US5355008A (en) * 1993-11-19 1994-10-11 Micrel, Inc. Diamond shaped gate mesh for cellular MOS transistor array

Also Published As

Publication number Publication date
KR970060514A (en) 1997-08-12
CZ304197A3 (en) 1998-04-15
AR001149A1 (en) 1997-09-24
HUP9801148A3 (en) 2002-07-29
CA2216557A1 (en) 1997-08-07
HUP9801148A2 (en) 1998-08-28
TW348324B (en) 1998-12-21
PL179839B1 (en) 2000-11-30
BR9607803A (en) 1998-07-07
UY24186A1 (en) 1996-06-21
CN1104815C (en) 2003-04-02
CN1179871A (en) 1998-04-22
AU5289996A (en) 1997-08-22
KR100229790B1 (en) 1999-11-15
JPH11503538A (en) 1999-03-26
PE47197A1 (en) 1998-02-06
WO1997028653A1 (en) 1997-08-07
JP4152437B2 (en) 2008-09-17
AU724477B2 (en) 2000-09-21
MX9707476A (en) 1997-11-29

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