UY24186A1 - SET OF THIN FILM DRIVEN MIRRORS HAVING DIELECTRIC LAYERS - Google Patents

SET OF THIN FILM DRIVEN MIRRORS HAVING DIELECTRIC LAYERS

Info

Publication number
UY24186A1
UY24186A1 UY24186A UY24186A UY24186A1 UY 24186 A1 UY24186 A1 UY 24186A1 UY 24186 A UY24186 A UY 24186A UY 24186 A UY24186 A UY 24186A UY 24186 A1 UY24186 A1 UY 24186A1
Authority
UY
Uruguay
Prior art keywords
thin film
mirrors
dielectric layers
driven mirrors
film driven
Prior art date
Application number
UY24186A
Other languages
Spanish (es)
Inventor
Yong-Geun Lim
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of UY24186A1 publication Critical patent/UY24186A1/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0102—Constructional details, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/02—Function characteristic reflective

Abstract

Un conjunto de M x N espejos accionados de película delgada que incluye una matriz activa y un conjunto de estructuras actuadotas. Cada una de las estructuras actuadoras incluye un miembro elástico, un segundo electrodo de película delgada, un miembro electromovible de película delgada y un primer electrodo de película delgada, y un numero M x N de pilas multicapas de miembros dieléctricos de película delgada. Además de la provisión de una protección contra los ataques físicos y químicos sobre el primer electrodo de película delgada, el cual asimismo actúa como un espejo para reflejar un haz de luz, la pila multicapa de miembros dieléctricos de película delgada ubicado sobre la parte superior de cada una de las estructuras actuadoras provee la reflectancia máxima en cada uno de los espejos accionados de película delgada para asegurar por lo tanto una eficiencia óptica optima del conjunto.A set of M x N thin film driven mirrors that includes an active matrix and a set of actuator structures. Each of the actuator structures includes an elastic member, a second thin film electrode, an electromobable thin film member and a first thin film electrode, and an M x N number of multilayer cells of thin film dielectric members. In addition to providing protection against physical and chemical attack on the first thin film electrode, which also acts as a mirror to reflect a beam of light, the multilayer stack of thin film dielectric members located on top of each of the actuating structures provides the maximum reflectance in each of the actuated thin film mirrors to therefore ensure optimum optical efficiency of the assembly.

UY24186A 1996-01-31 1996-03-22 SET OF THIN FILM DRIVEN MIRRORS HAVING DIELECTRIC LAYERS UY24186A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960002315A KR100229790B1 (en) 1996-01-31 1996-01-31 Actuated mirror array

Publications (1)

Publication Number Publication Date
UY24186A1 true UY24186A1 (en) 1996-06-21

Family

ID=36955865

Family Applications (1)

Application Number Title Priority Date Filing Date
UY24186A UY24186A1 (en) 1996-01-31 1996-03-22 SET OF THIN FILM DRIVEN MIRRORS HAVING DIELECTRIC LAYERS

Country Status (14)

Country Link
JP (1) JP4152437B2 (en)
KR (1) KR100229790B1 (en)
CN (1) CN1104815C (en)
AR (1) AR001149A1 (en)
AU (1) AU724477B2 (en)
BR (1) BR9607803A (en)
CA (1) CA2216557A1 (en)
CZ (1) CZ304197A3 (en)
HU (1) HUP9801148A3 (en)
PE (1) PE47197A1 (en)
PL (1) PL179839B1 (en)
TW (1) TW348324B (en)
UY (1) UY24186A1 (en)
WO (1) WO1997028653A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4582380B2 (en) * 2001-05-11 2010-11-17 ソニー株式会社 LIGHT MODULATION ELEMENT, OPTICAL DEVICE USING THE SAME, AND LIGHT MODULATION ELEMENT MANUFACTURING METHOD

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5260798A (en) * 1989-11-01 1993-11-09 Aura Systems, Inc. Pixel intensity modulator
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
PL176406B1 (en) * 1993-10-29 1999-05-31 Daewoo Electronics Co Ltd System of movable thin-layer mirrors and method of making such system
WO1995013683A1 (en) * 1993-11-09 1995-05-18 Daewoo Electronics Co., Ltd. Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
US5355008A (en) * 1993-11-19 1994-10-11 Micrel, Inc. Diamond shaped gate mesh for cellular MOS transistor array

Also Published As

Publication number Publication date
CA2216557A1 (en) 1997-08-07
MX9707476A (en) 1997-11-29
PL322490A1 (en) 1998-02-02
BR9607803A (en) 1998-07-07
AR001149A1 (en) 1997-09-24
CN1104815C (en) 2003-04-02
KR970060514A (en) 1997-08-12
AU5289996A (en) 1997-08-22
PE47197A1 (en) 1998-02-06
JPH11503538A (en) 1999-03-26
HUP9801148A3 (en) 2002-07-29
PL179839B1 (en) 2000-11-30
JP4152437B2 (en) 2008-09-17
CZ304197A3 (en) 1998-04-15
AU724477B2 (en) 2000-09-21
TW348324B (en) 1998-12-21
KR100229790B1 (en) 1999-11-15
CN1179871A (en) 1998-04-22
HUP9801148A2 (en) 1998-08-28
WO1997028653A1 (en) 1997-08-07

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Legal Events

Date Code Title Description
VENC Patent expired

Effective date: 20160322