HUP9801148A3 - Thin film actuated mirror array having dielectric layers - Google Patents

Thin film actuated mirror array having dielectric layers

Info

Publication number
HUP9801148A3
HUP9801148A3 HU9801148A HUP9801148A HUP9801148A3 HU P9801148 A3 HUP9801148 A3 HU P9801148A3 HU 9801148 A HU9801148 A HU 9801148A HU P9801148 A HUP9801148 A HU P9801148A HU P9801148 A3 HUP9801148 A3 HU P9801148A3
Authority
HU
Hungary
Prior art keywords
thin film
dielectric layers
mirror array
actuated mirror
film actuated
Prior art date
Application number
HU9801148A
Other languages
Hungarian (hu)
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of HUP9801148A2 publication Critical patent/HUP9801148A2/en
Publication of HUP9801148A3 publication Critical patent/HUP9801148A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0102—Constructional details, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/02—Function characteristic reflective
HU9801148A 1996-01-31 1996-04-08 Thin film actuated mirror array having dielectric layers HUP9801148A3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960002315A KR100229790B1 (en) 1996-01-31 1996-01-31 Actuated mirror array

Publications (2)

Publication Number Publication Date
HUP9801148A2 HUP9801148A2 (en) 1998-08-28
HUP9801148A3 true HUP9801148A3 (en) 2002-07-29

Family

ID=36955865

Family Applications (1)

Application Number Title Priority Date Filing Date
HU9801148A HUP9801148A3 (en) 1996-01-31 1996-04-08 Thin film actuated mirror array having dielectric layers

Country Status (14)

Country Link
JP (1) JP4152437B2 (en)
KR (1) KR100229790B1 (en)
CN (1) CN1104815C (en)
AR (1) AR001149A1 (en)
AU (1) AU724477B2 (en)
BR (1) BR9607803A (en)
CA (1) CA2216557A1 (en)
CZ (1) CZ304197A3 (en)
HU (1) HUP9801148A3 (en)
PE (1) PE47197A1 (en)
PL (1) PL179839B1 (en)
TW (1) TW348324B (en)
UY (1) UY24186A1 (en)
WO (1) WO1997028653A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4582380B2 (en) * 2001-05-11 2010-11-17 ソニー株式会社 LIGHT MODULATION ELEMENT, OPTICAL DEVICE USING THE SAME, AND LIGHT MODULATION ELEMENT MANUFACTURING METHOD

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5260798A (en) * 1989-11-01 1993-11-09 Aura Systems, Inc. Pixel intensity modulator
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
PL176406B1 (en) * 1993-10-29 1999-05-31 Daewoo Electronics Co Ltd System of movable thin-layer mirrors and method of making such system
WO1995013683A1 (en) * 1993-11-09 1995-05-18 Daewoo Electronics Co., Ltd. Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
US5355008A (en) * 1993-11-19 1994-10-11 Micrel, Inc. Diamond shaped gate mesh for cellular MOS transistor array

Also Published As

Publication number Publication date
UY24186A1 (en) 1996-06-21
CA2216557A1 (en) 1997-08-07
MX9707476A (en) 1997-11-29
PL322490A1 (en) 1998-02-02
BR9607803A (en) 1998-07-07
AR001149A1 (en) 1997-09-24
CN1104815C (en) 2003-04-02
KR970060514A (en) 1997-08-12
AU5289996A (en) 1997-08-22
PE47197A1 (en) 1998-02-06
JPH11503538A (en) 1999-03-26
PL179839B1 (en) 2000-11-30
JP4152437B2 (en) 2008-09-17
CZ304197A3 (en) 1998-04-15
AU724477B2 (en) 2000-09-21
TW348324B (en) 1998-12-21
KR100229790B1 (en) 1999-11-15
CN1179871A (en) 1998-04-22
HUP9801148A2 (en) 1998-08-28
WO1997028653A1 (en) 1997-08-07

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