HUP9801148A2 - Thin film actuated mirror array having dielectric layers - Google Patents

Thin film actuated mirror array having dielectric layers

Info

Publication number
HUP9801148A2
HUP9801148A2 HU9801148A HUP9801148A HUP9801148A2 HU P9801148 A2 HUP9801148 A2 HU P9801148A2 HU 9801148 A HU9801148 A HU 9801148A HU P9801148 A HUP9801148 A HU P9801148A HU P9801148 A2 HUP9801148 A2 HU P9801148A2
Authority
HU
Hungary
Prior art keywords
thin film
electrode
arrangement
thin
piece
Prior art date
Application number
HU9801148A
Other languages
Hungarian (hu)
Inventor
Yong-Geun Lim
Original Assignee
Daewoo Electronics Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co., Ltd. filed Critical Daewoo Electronics Co., Ltd.
Publication of HUP9801148A2 publication Critical patent/HUP9801148A2/en
Publication of HUP9801148A3 publication Critical patent/HUP9801148A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0102—Constructional details, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/02—Function characteristic reflective

Abstract

A találmány vékőnyréteggel működtetett tükörelem-elrendezés (200)őptikai vetítőrendszerhez MN tükörelemmel (201), ahől M és N egészszámők, és amely tartalmaz alapréteggel (212), MN darabcsatlakőzókapőcsból (214) álló elrendezéssel és MN darabtranzisztőrból álló elrendezéssel rendelkező aktív mátrixőt (210),ahől a csatlakőzókapcsők (214) villamősan az MN darab tranzisztőrbólálló elrendezésben lévő megfelelő tranzisztőrőkra vannakcsatlakőztatva, villamősan vezető anyagból lévő MN darab vezetéket(225), csatlakőztató résszel (330) és fényvisszaverő résszel (335)rendelkező MN darab működtető szerkezetből (300) álló elrendezést,amely működtető szerkezeteknek (300) tartalmaznak rűgalmas tagőt(235), másődik vékőnyréteg elektródát (245), vékőnyréteges elmőzdűlástlétrehőzó tagőt (255) és első vékőnyréteg elektródát (265), ahől avezetékek (225) a működtető szerkezetek (300) csatlakőztató részében(330) vannak, és a másődik vékőnyréteg elektróda (245) aljától egymegfelelő tranzisztőrra villamősan csatlakőztatőtt csatlakőzókapőcs(214) tetejéig nyúlnak, ami által a másődik vékőnyréteg elektróda(245) jelelektródaként működhet a vékőnyréteggel működtetetttükörelemekben (201), és a fényvisszaverő és villamősan vezetőanyagból lévő első vékőnyréteg elektróda (265) földelve van, hőgytükörként és előfeszítő elektródaként működjön a vékőnyréteggelműködtetett tükörelemekben (201), és amely vékőnyréteggel működtetetttükörelem-elrendezés (200) tartalmaz vékőnyréteges dielektrőmőstagőkból (401) lévő MN darab többrétegű egységet (400), amelyvékőnyréteges dielektrőmős tagők (401) a működtető szerkezetekben(300) lévő fényvisszaverő részek (335) tetején vannak elhelyezve, ésamely vékőnyréteges dielektrőmős tagők (401) előre meghatárőzőttvastagsággal és meghatárőzőtt törésműtatóval rendelkeznek. A találmánytővábbá ezen elrendezés előállítására szőlgáló eljárás. ŕThe invention is a thin film operated mirror element arrangement (200) for an optical projection system with a MN mirror element (201), where M and N are integers, and which includes an active matrix element (210) having a base layer (212), an arrangement of MN piece coupling terminals (214) and an arrangement of MN piece transistors , from which the connecting terminals (214) are electrically connected to the corresponding transistors in the arrangement consisting of the MN transistor, an arrangement consisting of an MN piece of wire (225) made of electrically conductive material, an MN piece of operating structure (300) with a connecting part (330) and a light-reflecting part (335) , which actuating structures (300) contain a flexible member (235), a thin layer electrode (245), a thin layer heat forming member (255) and a first thin layer electrode (265), from which the wires (225) in the connecting part of the actuating structures (300) (330) ) are present, and they extend from the bottom of the thin film electrode (245) to the top of the connecting terminal (214) electrically connected to a suitable transistor, so that the thin film electrode (245) can act as a signal electrode in the mirror elements (201) operated with the thin film, and the first film layer made of reflective and electrically conductive material electrode (265) is grounded, act as a thermal mirror and a biasing electrode in the thin film actuated mirror elements (201), and which thin film actuated mirror element arrangement (200) includes a multilayer unit (400) of MN pieces of thin film dielectric members (401), which thin film dielectric members (401) are the are placed on top of the reflective parts (335) in the actuators (300), and which thin-layer dielectric members (401) have a predetermined thickness and a predetermined refractive index. The invention further relates to a process for producing this arrangement. ŕ

HU9801148A 1996-01-31 1996-04-08 Thin film actuated mirror array having dielectric layers HUP9801148A3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960002315A KR100229790B1 (en) 1996-01-31 1996-01-31 Actuated mirror array

Publications (2)

Publication Number Publication Date
HUP9801148A2 true HUP9801148A2 (en) 1998-08-28
HUP9801148A3 HUP9801148A3 (en) 2002-07-29

Family

ID=36955865

Family Applications (1)

Application Number Title Priority Date Filing Date
HU9801148A HUP9801148A3 (en) 1996-01-31 1996-04-08 Thin film actuated mirror array having dielectric layers

Country Status (14)

Country Link
JP (1) JP4152437B2 (en)
KR (1) KR100229790B1 (en)
CN (1) CN1104815C (en)
AR (1) AR001149A1 (en)
AU (1) AU724477B2 (en)
BR (1) BR9607803A (en)
CA (1) CA2216557A1 (en)
CZ (1) CZ304197A3 (en)
HU (1) HUP9801148A3 (en)
PE (1) PE47197A1 (en)
PL (1) PL179839B1 (en)
TW (1) TW348324B (en)
UY (1) UY24186A1 (en)
WO (1) WO1997028653A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4582380B2 (en) * 2001-05-11 2010-11-17 ソニー株式会社 LIGHT MODULATION ELEMENT, OPTICAL DEVICE USING THE SAME, AND LIGHT MODULATION ELEMENT MANUFACTURING METHOD

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5260798A (en) * 1989-11-01 1993-11-09 Aura Systems, Inc. Pixel intensity modulator
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
PL176406B1 (en) * 1993-10-29 1999-05-31 Daewoo Electronics Co Ltd System of movable thin-layer mirrors and method of making such system
WO1995013683A1 (en) * 1993-11-09 1995-05-18 Daewoo Electronics Co., Ltd. Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
US5355008A (en) * 1993-11-19 1994-10-11 Micrel, Inc. Diamond shaped gate mesh for cellular MOS transistor array

Also Published As

Publication number Publication date
UY24186A1 (en) 1996-06-21
CA2216557A1 (en) 1997-08-07
MX9707476A (en) 1997-11-29
PL322490A1 (en) 1998-02-02
BR9607803A (en) 1998-07-07
AR001149A1 (en) 1997-09-24
CN1104815C (en) 2003-04-02
KR970060514A (en) 1997-08-12
AU5289996A (en) 1997-08-22
PE47197A1 (en) 1998-02-06
JPH11503538A (en) 1999-03-26
HUP9801148A3 (en) 2002-07-29
PL179839B1 (en) 2000-11-30
JP4152437B2 (en) 2008-09-17
CZ304197A3 (en) 1998-04-15
AU724477B2 (en) 2000-09-21
TW348324B (en) 1998-12-21
KR100229790B1 (en) 1999-11-15
CN1179871A (en) 1998-04-22
WO1997028653A1 (en) 1997-08-07

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