CA2216557A1 - Matrice de miroirs actionnes par film mince, pourvue de couches dielectriques - Google Patents

Matrice de miroirs actionnes par film mince, pourvue de couches dielectriques Download PDF

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Publication number
CA2216557A1
CA2216557A1 CA002216557A CA2216557A CA2216557A1 CA 2216557 A1 CA2216557 A1 CA 2216557A1 CA 002216557 A CA002216557 A CA 002216557A CA 2216557 A CA2216557 A CA 2216557A CA 2216557 A1 CA2216557 A1 CA 2216557A1
Authority
CA
Canada
Prior art keywords
thin film
array
layer
actuated mirrors
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002216557A
Other languages
English (en)
Inventor
Yong-Geun Lim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WiniaDaewoo Co Ltd
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2216557A1 publication Critical patent/CA2216557A1/fr
Abandoned legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0102—Constructional details, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/02—Function characteristic reflective

Abstract

Cette invention concerne un groupement (200) de M x N miroirs (201) commandés par couches minces qui comprend une matrice active (201), un réseau de structures de commande (235) comprenant un élément élastique (235), une seconde électrode en couche mince (245), un élément en couche mince électro-displacif (255) et une première électrode en couche mince (265), ainsi qu'un empilage (400) de M x N éléments diélectriques (401) en couche mince. En plus d'assurer une protection de la première électrode en couche mince (265), qui sert aussi de miroir réfléchissant un faisceau de lumière, contre les agressions chimiques ou physiques, l'empilage (400) d'éléments diélectriques en couche mince (401) sur chacune des structures de commande (300) assure une réflectance maximum dans chacun des miroirs commandés par couches minces (201) pour une efficacité optique optimale du groupement.
CA002216557A 1996-01-31 1996-04-08 Matrice de miroirs actionnes par film mince, pourvue de couches dielectriques Abandoned CA2216557A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1996/2315 1996-01-31
KR1019960002315A KR100229790B1 (ko) 1996-01-31 1996-01-31 유전층을 갖는 박막형광로 조절장치

Publications (1)

Publication Number Publication Date
CA2216557A1 true CA2216557A1 (fr) 1997-08-07

Family

ID=36955865

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002216557A Abandoned CA2216557A1 (fr) 1996-01-31 1996-04-08 Matrice de miroirs actionnes par film mince, pourvue de couches dielectriques

Country Status (14)

Country Link
JP (1) JP4152437B2 (fr)
KR (1) KR100229790B1 (fr)
CN (1) CN1104815C (fr)
AR (1) AR001149A1 (fr)
AU (1) AU724477B2 (fr)
BR (1) BR9607803A (fr)
CA (1) CA2216557A1 (fr)
CZ (1) CZ304197A3 (fr)
HU (1) HUP9801148A3 (fr)
PE (1) PE47197A1 (fr)
PL (1) PL179839B1 (fr)
TW (1) TW348324B (fr)
UY (1) UY24186A1 (fr)
WO (1) WO1997028653A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4582380B2 (ja) * 2001-05-11 2010-11-17 ソニー株式会社 光変調素子とそれを用いた光学装置、および光変調素子の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5260798A (en) * 1989-11-01 1993-11-09 Aura Systems, Inc. Pixel intensity modulator
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
CZ288846B6 (cs) * 1993-10-29 2001-09-12 Daewoo Electronics Co., Ltd. Soustava ovládaných zrcadel tenkého filmu a způsob její výroby
PL176490B1 (pl) * 1993-11-09 1999-06-30 Daewoo Electronics Co Ltd Układ zwierciadeł cienkowarstwowych ruchomych i sposób wytwarzania układu zwierciadeł cienkowarstwowych ruchomych
US5355008A (en) * 1993-11-19 1994-10-11 Micrel, Inc. Diamond shaped gate mesh for cellular MOS transistor array

Also Published As

Publication number Publication date
HUP9801148A3 (en) 2002-07-29
JPH11503538A (ja) 1999-03-26
PE47197A1 (es) 1998-02-06
WO1997028653A1 (fr) 1997-08-07
PL322490A1 (en) 1998-02-02
MX9707476A (es) 1997-11-29
CZ304197A3 (cs) 1998-04-15
AR001149A1 (es) 1997-09-24
CN1104815C (zh) 2003-04-02
TW348324B (en) 1998-12-21
JP4152437B2 (ja) 2008-09-17
AU5289996A (en) 1997-08-22
AU724477B2 (en) 2000-09-21
CN1179871A (zh) 1998-04-22
PL179839B1 (pl) 2000-11-30
HUP9801148A2 (hu) 1998-08-28
UY24186A1 (es) 1996-06-21
KR100229790B1 (ko) 1999-11-15
BR9607803A (pt) 1998-07-07
KR970060514A (ko) 1997-08-12

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Legal Events

Date Code Title Description
FZDE Discontinued