BR9607803A - Conjunto de espelhos atuados por um filme fino tendo camada dielétricas - Google Patents

Conjunto de espelhos atuados por um filme fino tendo camada dielétricas

Info

Publication number
BR9607803A
BR9607803A BR9607803A BR9607803A BR9607803A BR 9607803 A BR9607803 A BR 9607803A BR 9607803 A BR9607803 A BR 9607803A BR 9607803 A BR9607803 A BR 9607803A BR 9607803 A BR9607803 A BR 9607803A
Authority
BR
Brazil
Prior art keywords
thin film
dielectric layers
mirrors
actuated
mirrors actuated
Prior art date
Application number
BR9607803A
Other languages
English (en)
Inventor
Yong Geun Lim
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of BR9607803A publication Critical patent/BR9607803A/pt

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0102Constructional details, not otherwise provided for in this subclass
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00Function characteristic
    • G02F2203/02Function characteristic reflective

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Video Image Reproduction Devices For Color Tv Systems (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Liquid Crystal (AREA)
  • Projection Apparatus (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
BR9607803A 1996-01-31 1996-04-08 Conjunto de espelhos atuados por um filme fino tendo camada dielétricas BR9607803A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019960002315A KR100229790B1 (ko) 1996-01-31 1996-01-31 유전층을 갖는 박막형광로 조절장치
PCT/KR1996/000048 WO1997028653A1 (en) 1996-01-31 1996-04-08 Thin film actuated mirror array having dielectric layers

Publications (1)

Publication Number Publication Date
BR9607803A true BR9607803A (pt) 1998-07-07

Family

ID=36955865

Family Applications (1)

Application Number Title Priority Date Filing Date
BR9607803A BR9607803A (pt) 1996-01-31 1996-04-08 Conjunto de espelhos atuados por um filme fino tendo camada dielétricas

Country Status (14)

Country Link
JP (1) JP4152437B2 (pt)
KR (1) KR100229790B1 (pt)
CN (1) CN1104815C (pt)
AR (1) AR001149A1 (pt)
AU (1) AU724477B2 (pt)
BR (1) BR9607803A (pt)
CA (1) CA2216557A1 (pt)
CZ (1) CZ304197A3 (pt)
HU (1) HUP9801148A3 (pt)
PE (1) PE47197A1 (pt)
PL (1) PL179839B1 (pt)
TW (1) TW348324B (pt)
UY (1) UY24186A1 (pt)
WO (1) WO1997028653A1 (pt)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4582380B2 (ja) * 2001-05-11 2010-11-17 ソニー株式会社 光変調素子とそれを用いた光学装置、および光変調素子の製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5260798A (en) * 1989-11-01 1993-11-09 Aura Systems, Inc. Pixel intensity modulator
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
CA2175198A1 (en) * 1993-10-29 1995-05-04 Jeong Beom Ji Thin film actuated mirror array and methods for its manufacture
CA2176111A1 (en) * 1993-11-09 1995-05-18 Jeong Beom Ji Thin film actuated mirror array for use in an optical projection system and method for the manufacture thereof
US5355008A (en) * 1993-11-19 1994-10-11 Micrel, Inc. Diamond shaped gate mesh for cellular MOS transistor array

Also Published As

Publication number Publication date
KR100229790B1 (ko) 1999-11-15
WO1997028653A1 (en) 1997-08-07
JP4152437B2 (ja) 2008-09-17
CN1104815C (zh) 2003-04-02
UY24186A1 (es) 1996-06-21
CZ304197A3 (cs) 1998-04-15
PL179839B1 (pl) 2000-11-30
TW348324B (en) 1998-12-21
KR970060514A (ko) 1997-08-12
HUP9801148A3 (en) 2002-07-29
AU724477B2 (en) 2000-09-21
JPH11503538A (ja) 1999-03-26
PE47197A1 (es) 1998-02-06
PL322490A1 (en) 1998-02-02
CN1179871A (zh) 1998-04-22
AR001149A1 (es) 1997-09-24
AU5289996A (en) 1997-08-22
CA2216557A1 (en) 1997-08-07
HUP9801148A2 (hu) 1998-08-28
MX9707476A (es) 1997-11-29

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Legal Events

Date Code Title Description
FA10 Dismissal: dismissal - article 33 of industrial property law