MX9707476A - Formacion de espejos accionada por pelicula delgada que tiene capas dielectricas. - Google Patents

Formacion de espejos accionada por pelicula delgada que tiene capas dielectricas.

Info

Publication number
MX9707476A
MX9707476A MX9707476A MX9707476A MX9707476A MX 9707476 A MX9707476 A MX 9707476A MX 9707476 A MX9707476 A MX 9707476A MX 9707476 A MX9707476 A MX 9707476A MX 9707476 A MX9707476 A MX 9707476A
Authority
MX
Mexico
Prior art keywords
thin film
array
dielectric layers
film actuated
mirror array
Prior art date
Application number
MX9707476A
Other languages
English (en)
Other versions
MXPA97007476A (es
Inventor
Yong-Geun Lim
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Publication of MX9707476A publication Critical patent/MX9707476A/es
Publication of MXPA97007476A publication Critical patent/MXPA97007476A/es

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0102—Constructional details, not otherwise provided for in this subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/02—Function characteristic reflective

Abstract

Una formacion (200) de espejos accionados por película delgada M x N (201) incluye una matriz activa (210), una formacion de estructuras de accionamiento (300), cada una de las estructuras de accionamiento (300) incluye un miembro elástico (235), un segundo electrodo de película delgada (245), un miembro electrododesplazable de película delgada (255) y un primer electrodo de película delgada (265) y el numero M x N de pilas de capas multiples (400) de miembros dieléctricos de película delgada (401). Además de proporcionar una proteccion contra los ataques químico o físico en el primer electrodo de película delgada (265) y actuan también como un espejo para reflejar un haz de luz, la pila de capas multiples (400) de miembros dieléctricos de película delgada (401) colocado en la parte superior de cada una de las estructuras de accionamiento (300) proporciona la reflectancia máxima en cada uno de los espejos accionado por película delgada (201), para de esta manera asegurar una eficiencia optima de la formacion.
MXPA/A/1997/007476A 1996-01-31 1997-09-30 Formacion de espejos accionada por peliculadelgada que tiene capas dielectricas MXPA97007476A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019960002315 1996-01-31
KR1019960002315A KR100229790B1 (ko) 1996-01-31 1996-01-31 유전층을 갖는 박막형광로 조절장치

Publications (2)

Publication Number Publication Date
MX9707476A true MX9707476A (es) 1997-11-29
MXPA97007476A MXPA97007476A (es) 1998-07-03

Family

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Also Published As

Publication number Publication date
HUP9801148A3 (en) 2002-07-29
JPH11503538A (ja) 1999-03-26
PE47197A1 (es) 1998-02-06
WO1997028653A1 (en) 1997-08-07
PL322490A1 (en) 1998-02-02
CZ304197A3 (cs) 1998-04-15
AR001149A1 (es) 1997-09-24
CN1104815C (zh) 2003-04-02
TW348324B (en) 1998-12-21
JP4152437B2 (ja) 2008-09-17
AU5289996A (en) 1997-08-22
CA2216557A1 (en) 1997-08-07
AU724477B2 (en) 2000-09-21
CN1179871A (zh) 1998-04-22
PL179839B1 (pl) 2000-11-30
HUP9801148A2 (hu) 1998-08-28
UY24186A1 (es) 1996-06-21
KR100229790B1 (ko) 1999-11-15
BR9607803A (pt) 1998-07-07
KR970060514A (ko) 1997-08-12

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Legal Events

Date Code Title Description
FG Grant or registration
MM Annulment or lapse due to non-payment of fees