MY114982A - Thin film actuated mirror array having dielectric layers - Google Patents

Thin film actuated mirror array having dielectric layers

Info

Publication number
MY114982A
MY114982A MYPI96000011A MYPI9600011A MY114982A MY 114982 A MY114982 A MY 114982A MY PI96000011 A MYPI96000011 A MY PI96000011A MY PI9600011 A MYPI9600011 A MY PI9600011A MY 114982 A MY114982 A MY 114982A
Authority
MY
Malaysia
Prior art keywords
thin film
array
dielectric layers
film actuated
mirror array
Prior art date
Application number
MYPI96000011A
Inventor
Yong-Geun Lim
Original Assignee
Daewoo Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daewoo Electronics Co Ltd filed Critical Daewoo Electronics Co Ltd
Priority to MYPI96000011A priority Critical patent/MY114982A/en
Publication of MY114982A publication Critical patent/MY114982A/en

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  • Optical Elements Other Than Lenses (AREA)

Abstract

AN ARRAY (200) OF M X N THIN FILM ACTUATED MIRRORS (201) INCLUDES AN ACTIVE MATRIX (210), AN ARRAY OF ACTUATING STRUCTURES (300), EACH OF THE ACTUATING STRUCTURES (300) INCLUDING AN ELASTIC MEMBER (235) , A SECOND THIN FILM ELECTRODE (245) , A THIN FILM ELECTRODISPLACIVE MEMBER (255) AND A FIRST THIN FILM ELECTRODE (265), AND M X N NUMBER OF MULTILAYER STACKS (400) OF THIN FILM DIELECTRIC MEMBERS (401) . IN ADDITION TO PROVIDING A PROTECTION AGAINST CHEMICAL OR PHYSICAL ATTACKS ON THE FIRST THIN FILM ELECTRODE (265) WHICH ALSO ACTS AS A MIRROR FOR REFLECTING A LIGHT BEAM, THE MULTILAYER STACK (400) OF THIN FILM DIELECTRIC MEMBERS (401) PLACED ON TOP OF EACH OF THE ACTUATING STRUCTURES (300) PROVIDES THE MAXIMUM REFLECTANCE IN EACH OF THE THIN FILM ACTUATED MIRRORS (201) TO THEREBY ENSURE AN OPTIMUM OPTICAL EFFICIENCY OF THE ARRAY (200).
MYPI96000011A 1996-01-03 1996-01-03 Thin film actuated mirror array having dielectric layers MY114982A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MYPI96000011A MY114982A (en) 1996-01-03 1996-01-03 Thin film actuated mirror array having dielectric layers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI96000011A MY114982A (en) 1996-01-03 1996-01-03 Thin film actuated mirror array having dielectric layers

Publications (1)

Publication Number Publication Date
MY114982A true MY114982A (en) 2003-03-31

Family

ID=47221687

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI96000011A MY114982A (en) 1996-01-03 1996-01-03 Thin film actuated mirror array having dielectric layers

Country Status (1)

Country Link
MY (1) MY114982A (en)

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