CA2429363A1 - Method of and apparatus for adjusting optical component, and optical unit - Google Patents

Method of and apparatus for adjusting optical component, and optical unit Download PDF

Info

Publication number
CA2429363A1
CA2429363A1 CA002429363A CA2429363A CA2429363A1 CA 2429363 A1 CA2429363 A1 CA 2429363A1 CA 002429363 A CA002429363 A CA 002429363A CA 2429363 A CA2429363 A CA 2429363A CA 2429363 A1 CA2429363 A1 CA 2429363A1
Authority
CA
Canada
Prior art keywords
optical axis
unit
adjusting
optical
optical component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002429363A
Other languages
French (fr)
Other versions
CA2429363C (en
Inventor
Keiji Otsuka
Hirofumi Morita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honda Motor Co Ltd
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000361804A external-priority patent/JP3507431B2/en
Priority claimed from JP2000361792A external-priority patent/JP2002162551A/en
Priority claimed from JP2000361808A external-priority patent/JP3773413B2/en
Priority claimed from JP2000361813A external-priority patent/JP3773414B2/en
Priority claimed from JP2000361819A external-priority patent/JP3499209B2/en
Application filed by Individual filed Critical Individual
Publication of CA2429363A1 publication Critical patent/CA2429363A1/en
Application granted granted Critical
Publication of CA2429363C publication Critical patent/CA2429363C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042—Automatically aligning the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/042—Automatically aligning the laser beam
    • B23K26/043—Automatically aligning the laser beam along the beam path, i.e. alignment of laser beam axis relative to laser beam apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0673—Dividing the beam into multiple beams, e.g. multifocusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction
    • B23K26/0892—Controlling the laser beam travel length
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Lasers (AREA)

Abstract

An apparatus for adjusting an optical component has a reference beam unit (10) for emitting a reference laser beam L whose optical axis has established, and an optical axis unit (70) detecting the optical axis and focal point of a reflected beam La from a parabolic mirror (222) to which the reference laser beam L is applied. The optical axis unit (70) comprises first and second pinhole plates (74, 76) spaced a given distance from each other and having respective small holes (80, 90) defined therein.
CA002429363A 2000-11-28 2001-11-22 Method of and apparatus for adjusting optical component, and optical unit Expired - Fee Related CA2429363C (en)

Applications Claiming Priority (11)

Application Number Priority Date Filing Date Title
JP2000-361808 2000-11-28
JP2000-361792 2000-11-28
JP2000361804A JP3507431B2 (en) 2000-11-28 2000-11-28 Non-planar mirror adjustment method and apparatus
JP2000-361819 2000-11-28
JP2000361792A JP2002162551A (en) 2000-11-28 2000-11-28 Optical unit
JP2000-361804 2000-11-28
JP2000361808A JP3773413B2 (en) 2000-11-28 2000-11-28 Method for adjusting reference light generator
JP2000361813A JP3773414B2 (en) 2000-11-28 2000-11-28 Optical component optical axis detection method
JP2000-361813 2000-11-28
JP2000361819A JP3499209B2 (en) 2000-11-28 2000-11-28 Optical component focus detection method and apparatus
PCT/JP2001/010201 WO2002044785A2 (en) 2000-11-28 2001-11-22 Method of and apparatus for adjusting optical component, and optical unit

Publications (2)

Publication Number Publication Date
CA2429363A1 true CA2429363A1 (en) 2002-06-06
CA2429363C CA2429363C (en) 2007-08-14

Family

ID=27531724

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002429363A Expired - Fee Related CA2429363C (en) 2000-11-28 2001-11-22 Method of and apparatus for adjusting optical component, and optical unit

Country Status (5)

Country Link
US (1) US7119895B2 (en)
EP (1) EP1337886B1 (en)
CA (1) CA2429363C (en)
DE (1) DE60137446D1 (en)
WO (1) WO2002044785A2 (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITBO20050146A1 (en) * 2005-03-14 2006-09-15 Marposs Spa EQUIPMENT AND METHOD FOR THE CONTROL OF MECHANICAL PARTS
CN100427998C (en) * 2006-12-27 2008-10-22 中国科学院上海光学精密机械研究所 Double-optical flat plate swinging mechanism
US7986586B2 (en) * 2008-04-08 2011-07-26 Pgs Geophysical As Method for deghosting marine seismic streamer data with irregular receiver positions
US8219353B2 (en) * 2009-01-30 2012-07-10 Axiam, Inc. Absolute diameter measurement arm
US9157723B2 (en) 2009-01-30 2015-10-13 Axiam, Inc. Absolute diameter measurement arm
CN102789144B (en) * 2011-05-18 2014-09-17 上海微电子装备有限公司 Adjustment mechanism of lithography aligning system reference plate, and adjustment method thereof
CN107064074B (en) * 2012-08-10 2019-12-03 能美防灾株式会社 Photoelectric separation type detector
CN103094815B (en) * 2013-01-17 2015-04-15 中国科学院上海光学精密机械研究所 Auxiliary device for light path standard and angular adjustment and use method thereof
GB2528976B (en) * 2014-08-08 2016-12-28 Servomex Group Ltd Alignment device and transmitter/receiver system with two angular degrees of freedom
DE102015105978B3 (en) 2015-04-20 2016-09-15 Carl Mahr Holding Gmbh Holding device for an optical measuring device
CN105958306B (en) * 2016-07-02 2019-01-04 烟台大学 A kind of line laser High-precision angle automatic regulating apparatus
CN106405857B (en) * 2016-12-14 2019-04-12 大族激光科技产业集团股份有限公司 Laser path adjusts device and method
CN107015375A (en) * 2017-04-27 2017-08-04 中国科学院长春光学精密机械与物理研究所 A kind of laser polarization coupling light path debugging device and method
CN109581336B (en) * 2019-01-02 2024-10-01 宁波傲视智绘光电科技有限公司 Laser radar emission collimation adjusting device and method
CN113866928B (en) * 2020-06-12 2024-03-15 深圳市大族数控科技股份有限公司 Adjusting frame for optical device and adjusting method thereof
CN111811487B (en) * 2020-07-06 2023-06-09 浙江大学 Single-axis double-beam emitting device and three-axis double-beam parallel light adjusting system and method
CN114378425B (en) * 2020-10-15 2024-08-02 深圳市大族数控科技股份有限公司 Laser processing equipment and vibrating mirror installation method
CN112394535A (en) * 2020-11-25 2021-02-23 天津津航技术物理研究所 Multi-dimensional optical axis adjusting mechanism of refrigeration type zoom infrared camera
CN114089541B (en) * 2021-11-25 2023-09-19 无锡奥普特自动化技术有限公司 Material taking module for full-automatic FAC (Fabry-Perot) Babbing lens group collimation system
CN116105706A (en) * 2023-01-04 2023-05-12 北京东方锐镭科技有限公司 Light perpendicularity testing method and testing tool

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4655548A (en) * 1984-10-22 1987-04-07 Grumman Aerospace Corporation Multi-degree of freedom mount
JPS6386609U (en) 1986-11-25 1988-06-06
JPH0438281Y2 (en) 1987-02-10 1992-09-08
JPS63229412A (en) 1987-03-19 1988-09-26 Fujitsu Ltd Correcting device for optical path position
JPH01117610U (en) 1988-02-03 1989-08-09
JPH0810291B2 (en) 1988-03-09 1996-01-31 株式会社日立製作所 Solar lighting system
JPH0289662A (en) 1988-09-27 1990-03-29 Canon Inc Optical device
JP2541115Y2 (en) 1988-12-28 1997-07-09 株式会社島津製作所 Infinity projection display inspection equipment
JPH0373914A (en) 1989-08-16 1991-03-28 Toshiba Corp Optical axis adjusting device
JPH0398013A (en) 1989-09-11 1991-04-23 Beruno Giken:Kk Parallel beam device in optical equipment
JPH03264836A (en) 1990-03-15 1991-11-26 Omron Corp Optical-axis aligning apparatus
JP2540604Y2 (en) 1990-04-27 1997-07-09 グラフテック株式会社 Optical element mounting device
JP2817407B2 (en) 1991-02-04 1998-10-30 日本電気株式会社 Optical module optical axis adjustment device
JP3116481B2 (en) 1991-12-05 2000-12-11 三菱電機株式会社 Optical device module assembly equipment
KR930017127A (en) 1992-01-16 1993-08-30 제임스 조셉 드룽 Method and apparatus for precisely fitting laser beam to reflective surface
US5353167A (en) 1992-07-22 1994-10-04 The United States Of America As Represented By The United States Department Of Energy Mirror mount
DE4322609B4 (en) 1993-07-07 2004-08-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and device for testing focusing optics
JPH08154155A (en) 1994-09-29 1996-06-11 Ricoh Co Ltd Source document reader and adjusting method for optical axis of image forming lens
JPH0921613A (en) 1995-07-06 1997-01-21 Oki Electric Ind Co Ltd Optical axis adjusting apparatus
JP3437722B2 (en) 1996-10-07 2003-08-18 大日本スクリーン製造株式会社 Optical axis adjustment device for aspheric mirror
US5742383A (en) 1996-11-26 1998-04-21 Samsung Electronics Co., Ltd. Apparatus for measuring degree of inclination of objective lens for optical pickup
JPH1138736A (en) 1997-07-15 1999-02-12 Toshiba Corp Adjusting method and adjusting device for optical unit
JP3577905B2 (en) 1997-08-14 2004-10-20 富士ゼロックス株式会社 Manufacturing method of laser array image forming apparatus
JPH11215060A (en) * 1998-01-27 1999-08-06 Sony Corp Optical axis correcting device
FR2776068B1 (en) 1998-03-16 2000-06-23 Commissariat Energie Atomique METHOD FOR ALIGNING AN OBJECT WITH AN IMAGE ACQUISITION DEVICE AND A COUPLING OPTIC
JPH11308174A (en) * 1998-04-20 1999-11-05 Sony Corp Mirror holding body and optical axis correction device using the body
JP4111362B2 (en) 1998-11-26 2008-07-02 駿河精機株式会社 Optical component surface matching device
US6301284B1 (en) 1999-02-01 2001-10-09 Cymer, Inc. Narrow band UV laser with visible light guide laser
JP2000321165A (en) 1999-05-12 2000-11-24 Matsushita Electric Ind Co Ltd Apparatus and method for adjustment of optical axis as well as light-detecting-unit inspection apparatus and confirmation method for accuracy of light-detecting-unit inspection apparatus

Also Published As

Publication number Publication date
US20040027562A1 (en) 2004-02-12
CA2429363C (en) 2007-08-14
EP1337886B1 (en) 2009-01-14
DE60137446D1 (en) 2009-03-05
EP1337886A2 (en) 2003-08-27
WO2002044785A3 (en) 2003-04-03
WO2002044785A2 (en) 2002-06-06
US7119895B2 (en) 2006-10-10

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Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed

Effective date: 20131122