JP3773414B2 - Optical component optical axis detection method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an optical-axis detecting how the optical components of the laser optics.
[0002]
[Prior art]
Usually, for example, a laser processing apparatus, a laser measurement apparatus, or the like is employed as a laser optical apparatus using laser light. In this type of laser optical equipment, various types of optical components such as a lens system and a reflecting mirror are incorporated in order to guide laser light to a predetermined irradiation position. Furthermore, the reflecting mirror has various forms such as a plane mirror, a parabolic mirror, and an ellipsoidal mirror.
[0003]
Therefore, when assembling a laser optical device, it is desired to accurately perform alignment adjustment such as layout adjustment and focus measurement of various optical components. This is to ensure that high-quality laser processing work and high-precision laser measurement work are performed.
[0004]
[Problems to be solved by the invention]
In general, in the above alignment adjustment operation, the optical component is irradiated with reference light to detect reflected light from the optical component, and the position and angle of the optical component are adjusted based on the detected reflected optical axis. It has been broken.
[0005]
However, in order to accurately align optical components, it is necessary to detect the only accurate reflected optical axis that matches the mechanical axis. However, it is considerably difficult to accurately detect such a reflected optical axis, and it has been pointed out that the optical components cannot be aligned with high accuracy.
[0006]
The present invention solves this type of problem, and can detect a reflected optical axis with high accuracy with a simple configuration, and can perform alignment adjustment of an optical component efficiently and accurately. and to provide an optical axis detecting how.
[0007]
[Means for Solving the Problems]
In the optical-axis detecting how the optical component according to the present invention, first, by irradiating a reference laser beam to the optical axis detecting unit first optical axis position of the reference laser beam (light spot position) is detected The optical axis detection unit is detached from the optical path, and the reference laser beam is irradiated onto the optical component. At this time, the reflected light from the optical component is introduced into the optical axis detection unit disposed on the optical path of the reflected light, whereby the second optical axis position of the reference laser light is detected. Then, the position adjustment of the optical component is performed so that the first optical axis position matches the second optical axis position. Therefore, the optical axis position of the reflected light reflected from the optical component by the reference laser beam can be measured with high accuracy, and the absolute position of the reflected light from the optical component can be easily detected.
[0010]
At that time, the optical axis (optical axis) measurement surface of the optical axis detection unit is rotated around an axis that intersects the optical axis of the reference laser beam. Here, if the optical axis measurement surface does not coincide with the rotation axis, the detected optical axis moves due to the rotation of the optical axis detection unit. For this reason, the position of the optical axis measurement surface of the reference laser beam is detected by adjusting the position of the optical axis measurement surface in the optical axis direction so that the optical axis position of the reference laser beam does not fluctuate.
[0011]
Furthermore, in the present invention, the reference laser light is reflected by the optical component, and the reflected light is introduced into the optical axis detection unit, and the first optical axis position of the reference laser light is detected. Next, after the optical axis detection unit is moved by a predetermined distance in the optical axis direction of the reference laser light, the reference laser light is irradiated onto the optical component, and the reflected light is introduced into the optical axis detection unit and the reference laser A second optical axis position of the light is detected. Then, the alignment of the optical axis is easily performed by adjusting the position of the optical component so that the first and second optical axis positions coincide with each other.
[0012]
DETAILED DESCRIPTION OF THE INVENTION
Figure 1 is a perspective view of the reference light unit 10 constituting the optical axis detecting apparatus of an optical component that will be used in embodiments of the present invention, FIG. 2 is a side view of the reference optical unit 10.
[0013]
The reference light unit 10 has a function of irradiating a reference laser light L used for measurement of various optical components, and the laser light unit 14 in which a laser oscillator 12 such as a He-Ne laser is incorporated, A rotation mechanism 18 that rotates the laser light unit 14 around the optical axis with respect to the support tube 16, and the optical axis of the reference laser light L derived from the laser light unit 14 coincides with the rotation center of the reference light unit 10. And an optical center adjustment mechanism 20.
[0014]
The reference light unit 10 includes a unit base 24 fixed on the measurement base 22, and a support cylinder 16 is attached to the unit base 24 via a left / right slide mechanism 26 and an up / down slide mechanism 28. The left / right slide mechanism 26 has a guide rail 30 provided on the unit base 24 so as to extend in the arrow B direction orthogonal to the optical axis direction (arrow A direction), and can move forward and backward in the arrow B direction on the guide rail 30. A simple slide base 32 is arranged. A first micrometer 34 is fixed on the unit base 24 in the horizontal direction, and a rod 36 of the first micrometer 34 is fixed to the slide base 32.
[0015]
A column 38 is provided on the slide base 32, and a pair of guide rails 40 constituting the vertical slide mechanism 28 are fixed to the inner surface side of the column 38 in the vertical direction. A pair of guide portions 42 that can be moved up and down by engaging with the guide rails 40 are provided on both side portions of the support cylinder 16, and a second micrometer 44 is provided vertically upward at one end side of the column 38. Installed. A rod 46 protruding downward from the second micrometer 44 is fixed to the support cylinder 16.
[0016]
A rotating cylinder 50 is rotatably supported in the support cylinder 16 via a pair of bearings 48 constituting the rotating mechanism 18, and the laser oscillator 12 is accommodated in the rotating cylinder 50. Holding members 52 are attached to both ends of the laser oscillator 12, and a small diameter portion 54 of the holding member 52 is inserted into the rotating cylinder 50.
[0017]
The optical center adjusting mechanism 20 is provided with three adjusting screws 56 that are screwed into both end edges of the rotating cylinder 50 at equal angular intervals, and the tip of the adjusting screw 56 contacts the small diameter portion 54 of the holding member 52. By contacting, the optical axis of the laser oscillator 12 is tilt-adjusted.
[0018]
As shown in FIG. 2, a beam diameter enlarging means 66 for enlarging the beam diameter of the reference laser light L is detachably provided on the tip side of the laser light unit 14. The beam diameter enlarging means 66 converts, for example, a reference laser beam L having a diameter of about 0.8 mm into parallel light (collimated beam) having a diameter of 25 mm, and is a combination of various types of pinhole assemblies and focusing lenses. A filter unit 68 and a lens unit 69 including a beam expander lens set are provided.
[0019]
FIG. 3 is a perspective view of the optical axis unit 70 that constitutes the optical axis detection device and adjusts the optical axis of the reference light unit 10, and FIG. 4 is a side view of the optical axis unit 70.
[0020]
The optical axis unit 70 includes a unit base 72 fixed to the measurement base 22, and first and second pinhole plates 74 and 76 are mounted on the unit base 72 at a predetermined interval. The first pinhole plate 74 is supported by a first support plate 78 fixed on the unit base 72, and a first pore 80 having a predetermined diameter is formed at the center of the first pinhole plate 74. Is formed.
[0021]
The first pinhole plate 74 has a first pore 80 for adjusting the position of the first pore 80 in the horizontal direction (arrow B direction) and the vertical direction (arrow C direction) intersecting the optical axis (arrow A direction). A position adjustment mechanism 82 is provided. The first fine hole position adjusting mechanism 82 is arranged in the horizontal direction to move the first pinhole plate 74 forward and backward, and the first pinhole plate 74 arranged in the vertical direction. And a second adjustment screw 86 for adjusting the position in the vertical direction.
[0022]
The second pinhole plate 76 is supported on the second support plate 88 in the same manner as the first pinhole plate 74, and the second pinhole plate 76 has a second thin plate having a predetermined diameter at the center thereof. A hole 90 is formed. The second pinhole plate 76 is provided with a second pore position adjusting mechanism 92. The second fine hole position adjusting mechanism 92 is configured in the same manner as the first fine hole position adjusting mechanism 82. The same components are denoted by the same reference numerals, and detailed description thereof is omitted.
[0023]
The first and second pinhole plates 74 and 76 are used to adjust the so-called point light having a diameter of about 0.8 mm, like the reference laser light L. For example, the diameter is about 25 mm. In order to adjust the collimated reference laser light L0, which is collimated light, the first and second pinhole plates 94a and 94b shown in FIG. 5 are used in place of the first and second pinhole plates 74 and 76. Is done. The first and second pinhole plates 94a and 94b are provided with pores 96a and 96b at the centers, and four pores 98a on a circumference having a predetermined diameter around the pores 96a and 96b. 98b.
[0024]
FIG. 6 shows an optical axis (light spot) detection unit 100 for detecting the optical axis position of the reference laser light L that constitutes the optical axis detection device and is irradiated from the reference light unit 10, specifically, the optical axis position. FIG. 7 is a side explanatory view of the optical axis detection unit 100. FIG.
[0025]
The optical axis detection unit 100 includes a unit base 102 fixed on the measurement base 22, and a first slide base 104 is placed on the unit base 102 in the optical axis direction (arrow A direction) via an advance / retreat mechanism 105. Arranged freely. At the side of the first slide base 104, an end portion of a first slide knob 106 that constitutes an advance / retreat mechanism 105 and is supported by the unit base 102 is fixed. By rotating the first slide knob 106, the first slide knob 106 rotates. The first slide base 104 can advance and retreat in the arrow A direction.
[0026]
On the first slide base 104, a rotation base 110 that constitutes a rotation mechanism 108 is provided. The rotation base 110 is operated by operating a rotation knob 112 so that the Z axis (vertical) intersects the optical axis of the reference laser light L. It can be rotated around the axis. On the rotation base 110, the 2nd slide base 114 is arrange | positioned so that it can advance / retreat to the arrow A direction. An end of a second slide knob 116 is connected to the second slide base 114, and when the second slide knob 116 is rotated, the second slide base 114 can be advanced and retracted by a minute distance in the direction of arrow A.
[0027]
An optical axis position detection sensor 118 is mounted on the second slide base 114, and a monitor 122 is connected to the optical axis position detection sensor 118 (see FIG. 8). As will be described later, the monitor 122 displays the position of the reference laser light L introduced to the optical axis (light spot) measurement surface 120 of the optical axis position detection sensor 118 as a visible image.
[0028]
Next, the operation of the optical axis detection apparatus configured as described above will be described below in relation to the optical axis detection method according to the first embodiment of the present invention.
[0029]
First, the optical axis adjustment operation of the reference laser light L is performed so that the optical axis of the reference laser light L derived from the reference light unit 10 coincides with the rotation center of the reference light unit 10. Next, the optical axis alignment operation of the optical axis unit 70 and the optical axis detection unit 100 is performed using the reference laser light L with the optical axis set.
[0030]
Specifically, as shown in FIG. 9, the optical axis detection unit 100 is disposed on the optical axis of the reference light unit 10 in correspondence with a predetermined position. Therefore, when the reference laser light L is derived from the reference light unit 10, the reference laser light L is irradiated onto the light spot measurement surface 120 constituting the optical axis detection unit 100. In this state, the rotation base 110 constituting the rotation mechanism 108 is swung, and the second slide base 114 is advanced and retracted in the optical axis direction under the action of the second slide knob 116.
[0031]
Then, as shown in FIG. 8, the second slide base 114 is stopped at a position where the optical axis position P on the monitor 122 does not move. Thereby, the light spot measurement surface 120 and the rotation axis of the rotation mechanism 108 coincide with each other, and the position of the light spot measurement surface 120 is detected.
[0032]
On the other hand, in the optical axis alignment operation of the optical axis unit 70, the first pinhole plate 74 is disposed between the reference optical unit 10 and the optical axis detection unit 100 as shown in FIG. Then, the reference laser light L is derived from the reference light unit 10, and the reference laser light L passes through the first pores 80 formed in the first pinhole plate 74 and the light spot measurement surface 120 of the optical axis detection unit 100. Is irradiated. In the optical axis detection unit 100, the intensity of the reference laser light L that has passed through the first pore 80 is monitored, and the first pore position adjusting mechanism 82 is operated so that the intensity is maximized.
[0033]
Specifically, by operating the first and second adjustment screws 84 and 86, the position of the first pinhole plate 74 is adjusted in the vertical and horizontal directions, and the intensity of light passing through the first pore 80 is increased. At the maximum position, the first pore 80 coincides with the optical axis.
[0034]
Similarly, a second pinhole plate 76 is disposed between the reference light unit 10 and the optical axis detection unit 100, and the second pore 90 formed in the second pinhole plate 76 is aligned with the optical axis. Work to be done. Thereby, the optical axis adjustment of the optical axis unit 70 is performed.
[0035]
FIG. 11 is an explanatory perspective view of the position adjustment unit 140 to which the optical axis detection method according to the first embodiment of the present invention is applied, and FIG. 12 is a side view of the position adjustment unit 140.
[0036]
In this position adjustment unit 140, a reflecting mirror (including a non-planar reflecting mirror) 142, which is an optical component, is integrally mounted on a laser processing apparatus, a laser measuring apparatus, etc. It has a function to adjust.
[0037]
The position adjustment unit 140 includes a unit base 144 placed on the measurement base 22, and a support block 146 is provided on the unit base 144. On the support block 146, the 1st inclination member 150 which can adjust an angle in a horizontal direction via the 1st knob 148 is provided. A second tilting member 154 that can tilt in the vertical direction is supported on the first tilting member 150 via a second knob 152, and a reflecting mirror 142 is attached to the second tilting member 154.
[0038]
Therefore, as shown in FIG. 13, a position adjustment unit 140 in which the reflecting mirror 142 is incorporated on the optical axis S1 of the reference light unit 10 is arranged, and light is reflected on the optical axis S2 of the reflected light La by the reflecting mirror 142. A shaft unit 70 is arranged. When the reference laser light L is derived from the reference light unit 10, the reference laser light L is applied to the reflecting mirror 142 along the optical axis S1. When the reflecting mirror 142 is accurately positioned at a predetermined position, the reflected light La from the reflecting mirror 142 is the first and second pinhole plates of the optical axis unit 70 disposed on the optical axis S2. The measurement site 130 is irradiated through the first and second pores 80 and 90 formed in 74 and 76.
[0039]
At that time, in the optical axis unit 70, the first and second pinhole plates 74 and 76 are spaced apart at a predetermined interval along the optical axis S2, and the reflected light La from the reflecting mirror 142 is placed on the optical axis S2. Only when they match, the reflected light La passes through the first and second pores 80 and 90 and is irradiated to the measurement site 130. Therefore, when the reflecting mirror 142 deviates from a desired position as shown by a two-dot chain line in FIG. 13, it is blocked by the first pinhole plate 74 and / or the second pinhole plate 76 and reflected. The light La is not irradiated to the measurement site 130.
[0040]
Next, the first and second knobs 148 and 152 constituting the position adjustment unit 140 are selectively operated, and the position of the reflecting mirror 142 is adjusted via the first and second inclined members 150 and 154. Then, the reflected light La reflected by the reflecting mirror 142 passes through the first and second pinhole plates 74 and 76 and is irradiated to the measurement site 130, and the positioning of the reflecting mirror 142 is highly accurate. It will be surely done.
[0041]
In particular, in the first embodiment, the optical axis of the reference laser light L derived from the reference light unit 10 is adjusted with high accuracy so as to coincide with the mechanical axis, and at a predetermined interval on the optical axis S2. There are provided first and second pinhole plates 74 and 76 that are spaced apart from each other. Thereby, the effect that the optical axis alignment of the reflecting mirror 142 is performed with high accuracy and efficiency with a simple configuration is obtained.
[0042]
In the first embodiment, the measurement site 130 is arranged on the optical axis of the reflected light La and the reflected light La irradiated on the measurement site 130 is detected by visual inspection. In order to perform the measurement more easily and accurately, a measurement structure incorporating a reflecting mirror and a reticle can be employed.
[0043]
Next, an optical axis detection method according to the second embodiment of the present invention for adjusting the optical center position of the reflecting mirror 142 using the reference light unit 10 and the optical axis detection unit 100 will be described below.
[0044]
As shown in FIG. 14, on the optical axis S1, the optical axis detection unit 100 is temporarily disposed between the reference light unit 10 and the reflecting mirror 142 (see the two-dot chain line). Therefore, when the reference laser light L is derived from the reference light unit 10, the reference laser light L is irradiated onto the light spot measurement surface 120 constituting the optical axis detection unit 100. Therefore, as shown in FIG. 15, the first optical axis position P <b> 1 of the reference laser light L is displayed on the monitor 122 that is electrically connected to the optical axis position detection sensor 118.
[0045]
Next, the optical axis detection unit 100 is detached from the optical axis S1, and this optical axis detection unit 100 or another optical axis detection unit 100 is arranged on the optical axis S2 of the reflected light La by the reflecting mirror 142. Is done. In this state, when the reference laser light L is irradiated from the reference light unit 10, the reference laser light L is reflected by the reflecting mirror 142, and the reflected light La is disposed on the optical axis S2. 100. In the optical axis detection unit 100, the second optical axis position P2 is displayed on the monitor 122 by introducing the reflected light La to the light spot measurement surface 120 (see FIG. 15).
[0046]
Then, the position of the reflecting mirror 142 is adjusted such that the first optical axis position P1 detected in advance on the optical axis S1 and the second optical axis position P2 of the reflected light La from the reflecting mirror 142 coincide with each other. Is done. Thus, in the second embodiment, only the reference light unit 10 and the optical axis detection unit 100 need be used, and the optical axis positions P1, P2 of the reflecting mirror 142 can be set to the optical axes S1, S2 with a simple configuration and process. There is an advantage that it is possible to match with high accuracy and easily.
[0047]
Next, an optical axis detection method according to the third embodiment of the present invention performed using the reference light unit 10, the optical axis unit 70, and the optical axis detection unit 100 will be described with reference to FIG. In the third embodiment, the reflecting mirror 142 is also effectively used for position adjustment work of a non-planar reflecting mirror such as a parabolic mirror or an ellipsoidal mirror.
[0048]
The optical axis unit 70 is disposed on the optical axis S2 of the reflected light La from the reflecting mirror 142, and the optical axis detection unit 100 is disposed on the exit side of the optical axis unit 70. In the third embodiment, the reference laser light L derived from the reference light unit 10 is reflected by the reflecting mirror 142, and the reflected light La constitutes the first and second pinhole plates 74 constituting the optical axis unit 70, The position and angle of the reflecting mirror 142 are adjusted so that the light spot measuring surface 120 of the optical axis detection unit 100 is irradiated through the light beam 76.
[0049]
FIG. 17 is an explanatory diagram of an optical axis detection method according to the fourth embodiment in which the reflecting mirror 142 is adjusted using the reference light unit 10 and the optical axis detection unit 100.
[0050]
In the fourth embodiment, first, the optical axis detection unit 100 is arranged at the first position (see the two-dot chain line in FIG. 17) close to the reflecting mirror 142 on the optical axis S2, and the reference light unit 10 is Driven and irradiated with the reference laser beam L. The reference laser light L is reflected by the reflecting mirror 142, and the reflected light La is applied to the light spot measurement surface 120 of the optical axis detection unit 100 disposed at the first position. For this reason, the first optical axis position of the reflected light La is detected.
[0051]
Next, the optical axis detection unit 100 is disposed at a second position that is separated from the reflecting mirror 142 on the optical axis S2 (see a solid line in FIG. 17). In this state, the reference laser light L derived from the reference light unit 10 is reflected by the reflecting mirror 142, and the reflected light La is irradiated onto the light spot measurement surface 120 constituting the optical axis detection unit 100, and the reflected light La The second optical axis position P2 is detected. The first optical axis position P1 of the reflected light La at the first position obtained in advance matches the second optical axis position P2 of the reflected light La at the second position. The position of the reflecting mirror 142 is adjusted.
[0052]
As described above, in the first to fourth embodiments, the reference optical unit 10 for deriving the reference laser light L with the optical axis set is prepared, and the optical axis unit 70 and the optical axis detection unit 100 are selectively used. In addition, by using in combination, the optical axis adjustment of various optical components including the reflecting mirror 142 is performed with high accuracy and efficiency. As a result, the structure is simplified and the effect of extremely excellent versatility is obtained. In addition, the alignment adjustment of various optical components is performed with high accuracy, and high-quality laser processing work and laser measurement work are performed. Benefits are gained.
[0053]
【The invention's effect】
In the optical-axis detecting how the optical component according to the present invention, by an optical axis reference laser light is set to irradiate the optical component, it irradiates the reflected light from the optical component to the optical axis detecting unit, various Optical axis adjustment work for optical components can be performed with high accuracy.
[0054]
In addition, the reflected optical axis of the optical component can be detected with high accuracy, and the optical axis detection and adjustment operations of various optical components can be performed with high accuracy and efficiency with a simple process and structure.
[Brief description of the drawings]
FIG. 1 is a perspective view of a reference light unit constituting an optical axis detection device according to an embodiment of the present invention.
FIG. 2 is a side view of the reference light unit.
FIG. 3 is an explanatory perspective view of an optical axis unit constituting the optical axis detection device.
FIG. 4 is an explanatory side view of the optical axis unit.
FIG. 5 is a perspective view of an optical axis unit to which a pinhole plate is attached.
FIG. 6 is a perspective explanatory view of an optical axis detection unit constituting the optical axis detection device.
FIG. 7 is an explanatory side view of the optical axis detection unit.
FIG. 8 is an explanatory diagram of a display screen of a monitor that constitutes the optical axis detection unit.
FIG. 9 is a plan view for explaining an adjustment operation of the optical axis detection unit.
FIG. 10 is a side view for explaining the adjustment of the optical axis unit.
FIG. 11 is a perspective explanatory view of a position adjustment unit.
FIG. 12 is a side view of the position adjustment unit.
FIG. 13 is an explanatory diagram of an optical axis detection method according to the first embodiment of the invention.
FIG. 14 is an explanatory diagram of an optical axis detection method according to a second embodiment of the invention.
15 is a front view of a display screen of a monitor for explaining the detection method shown in FIG.
FIG. 16 is an explanatory diagram of an optical axis detection method according to a third embodiment of the present invention.
FIG. 17 is an explanatory diagram of an optical axis detection method according to a fourth embodiment of the invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 ... Reference light unit 12 ... Laser oscillator 14 ... Laser light unit 16 ... Support cylinder 18 ... Rotation mechanism 20 ... Optical center adjustment mechanism 22 ... Measurement base 24 ... Unit base 26 ... Left / right slide mechanism 28 ... Up / down slide mechanism 50 ... Rotation cylinder Body 56 ... Adjustment screw 66 ... Beam diameter expanding means 70 ... Optical axis unit 72 ... Unit bases 74, 76, 94a, 94b ... Pinhole plates 80, 90, 96a, 96b, 98a, 98b ... Fine holes 82, 92 ... Fine Hole position adjustment mechanism 100 ... Optical axis detection unit 102 ... Unit base 105 ... Advance / retreat mechanism 118 ... Optical axis position detection sensor 120 ... Light spot measurement surface 122 ... Monitor 130 ... Measurement site 140 ... Position adjustment unit 142 ... Reflector L ... Reference Laser light La ... reflected light

Claims (3)

An optical axis detection method for an optical component constituting a laser optical instrument,
An optical axis detection unit is arranged between a reference light unit for deriving a reference laser light having an optical axis set and an optical component, and the reference laser light is irradiated to the optical axis detection unit to Detecting a first optical axis position;
After the optical axis detection unit is separated from the optical path, the reference laser beam is irradiated onto the optical component, and the reflected light from the optical component is introduced into the optical axis detection unit disposed on the optical path of the reflected light. And detecting a second optical axis position of the reference laser beam;
Adjusting the position of the optical component such that the first optical axis position matches the second optical axis position; and
A method of detecting an optical axis of an optical component, comprising: 2. The optical axis detection method according to claim 1 , wherein the optical axis measurement surface of the optical axis detection unit is rotated about an axis intersecting the optical axis of the reference laser light, and the optical axis measurement surface is irradiated with the reference laser. A method of detecting an optical axis of an optical component, comprising the step of positioning the optical axis detection unit at a position where the optical axis position of light does not vary. An optical axis detection method for an optical component constituting a laser optical instrument,
The optical axis measurement surface of the optical axis detection unit is rotated around an axis that intersects the optical axis of the reference laser beam with the optical axis set, and the optical axis position of the reference laser beam irradiated on the optical axis measurement surface varies. Positioning the optical axis detection unit at a position where
A step of said irradiating a reference laser beam to the optical component by introducing the reflected light from the optical component to the optical axis detecting unit for detecting the first position of the optical axis of the reference laser beam,
After moving the optical axis detection unit in the optical axis direction of the reference laser light, the reference laser light is irradiated onto the optical component, and reflected light from the optical component is introduced into the optical axis detection unit, Detecting a second optical axis position of the reference laser beam;
Adjusting the position of the optical component such that the first optical axis position matches the second optical axis position; and
A method of detecting an optical axis of an optical component, comprising:

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