JP4619282B2 - X-ray analyzer - Google Patents

Description

  The present invention relates to an X-ray analyzer capable of always maintaining a predetermined relationship between an X-ray generator and an X-ray detector when a sample is analyzed using X-rays.

  The applicant of the present invention has already proposed an energy dispersive X-ray diffraction / spectrometer for analyzing a sample by irradiating the sample with white X-rays and simultaneously detecting the diffraction line and the fluorescent X-ray at the irradiation position (Patent Document) 1). This X-ray diffraction / spectroscopy apparatus moves white X-ray generation means and X-ray detection means to first and second discrete positions different from each other, and the X-ray for each energy by the X-ray detection means at each position. The intensity is obtained, and the obtained data is subjected to a predetermined process to obtain data relating to diffraction X-rays and fluorescence X-ray data.

International publication WO 2005/005969 A1

  With the X-ray diffraction / spectrometer described above, diffraction patterns and X-ray fluorescence data can be obtained in a short time, and the sample rotation mechanism is not required, simplifying the structure, making it compact and portable. It was possible. In this X-ray diffraction / spectroscopy apparatus, it is necessary to match the irradiation position of the white X-ray generation means with the detection position of the X-ray detection means. In addition, the irradiation angle by the X-ray generation means and the detection angle by the X-ray detection means, that is, the incident angle to the X-ray detection means must be maintained in a fixed relationship.

  A first object of the present invention is to match the irradiation position and the detection position of the X-ray generation means and the X-ray detection means with respect to the measurement target and to maintain a certain relationship with the measurement target. An object of the present invention is to provide an X-ray analyzer capable of moving the generating means and the X-ray detecting means.

  On the other hand, in order to provide good portability, it is necessary to reduce the weight of this type of X-ray analyzer. The X-ray generation means and the X-ray detection means must be structured to move with respect to the measurement object. During this movement, the mechanical device or the like may be slightly distorted or affected by external vibration or wind pressure. Therefore, the irradiation position and the detection position may not match. In order to prevent this kind of distortion and movement of the device, the mechanism device that guides the movement of the X-ray generation means and the X-ray detection means is robust. There is a risk of impairing portability.

  Accordingly, a second object of the present invention is to reliably match the irradiation position of the X-ray generation means and the detection position of the X-ray detection means without increasing the weight or the size of the apparatus and without impairing portability. An object of the present invention is to provide an X-ray analysis apparatus which can be used.

As technical means for achieving the above object, an X-ray analyzer according to the present invention comprises X-ray generation means for irradiating a measurement target position to be measured with white X-rays, and X-rays emitted from the measurement position. X-ray detection means for detecting energy and intensity, respectively, moving the X-ray generation means and the X-ray detection means while maintaining the irradiation angle and the detection angle in a predetermined relationship, and the X-ray detection means In the X-ray analyzer for performing diffraction X-ray analysis and fluorescent X-ray analysis based on energy and intensity, the X-ray generation means and the X-ray detection means are moved along the same arc, and the irradiation direction of the X-ray generation means and the X-rays Let the detection direction of the detection means intersect at the center of this arc A guide means for guiding for, and the X-ray generating means and the X-ray detecting means, and each of said guide means generating means moving device which moves along the detection means moving device, supports the guide means, the guide means in the horizontal plane A support base that is movable in the radial direction of the arc, a support plate that supports the support base and is movable in a radial direction perpendicular to the radial direction in a horizontal plane, a reference point on the support base, and the guide A straight line connecting the center of the arc of the means as a distance measuring direction, a distance measuring means for measuring a distance from the reference point of a measurement object in the distance measuring direction, and the support base is moved in the radial direction The distance measuring means includes a support stage moving means and a support plate moving means for moving the support plate in the direction perpendicular to the diameter, and the support plate moving means moves the support plate in the direction perpendicular to the diameter. The support base is oriented so that the measurement target position coincides with the planned measurement position that is the center of the arc based on the distance information acquired by the distance measurement means with the distance measurement direction directed to the measurement target position. The support table is moved in the radial direction by moving means.

  In order to perform X-ray analysis, it is necessary to keep the irradiation angle of the surface including the measurement target position and its radiation angle, that is, the detection angle, equal, and move the X-ray generation means and the X-ray detection means to a plurality of positions. Must be detected at each position. For this reason, the X-ray generating means and the X-ray detecting means are moved along an arc centered on the planned measurement position, that is, the X-ray generating means and the X-ray detection means are appropriately separated from each other by rotating around the planned measurement position. Even in the case of being positioned at different positions, the irradiation direction and the detection direction can be crossed at the measurement position.

  In order to guide the irradiation direction and the detection direction of the X-ray generation means and the X-ray detection means so as to intersect at the measurement planned position, for example, a pair of swinging arms that swing about the measurement planned position is provided, This can be done by positioning the base end portions that are the swing centers of the pair of swing arms on a straight line passing through the planned measurement position, and attaching X-ray generation means and X-ray detection means to the respective tip portions. Further, if a drive device that swings the swing arm at a predetermined angle is provided and the irradiation angle and the detection angle are adjusted by controlling the drive device, the adjustment work becomes simple.

Further, when the detection at the first position is finished and the X-ray generation means and the X-ray detection means are moved to the second position, there is a possibility that the measurement target position to be measured and the measurement planned position are shifted. Therefore, if the distance between the position to be measured and the reference point is measured and adjusted so that the distance is constant, the reference point is in a fixed positional relationship with the X-ray generation means and the X-ray detection means. The measurement position and the measurement planned position can be matched. As the distance measuring means, a distance measuring device that irradiates a measured position with a laser beam or measuring light, a distance measuring device that uses ultrasonic waves, or the like can be used.

  The X-ray analyzer according to the invention of claim 2 is characterized in that the guide means is formed by an arcuate guide rail.

  As described above, the X-ray generation means and the X-ray detection means may be attached to a pair of swinging arms that can swing around the planned measurement position, but the X-ray generation means and the X-ray detection means are scheduled to measure. The movement centered on the position is performed by an arc-shaped guide rail centered on the planned measurement position. The X-ray generation means and the X-ray detection means are directed to the measurement planned position in the irradiation direction and the detection direction regardless of the position on the guide rail.

In particular, the X-ray analyzer according to the invention of claim 3 is characterized in that a laser range finder is used as the distance measuring means.

  According to the X-ray analyzer according to the present invention, the irradiation angle of the X-ray generation means and the detection angle of the X-ray detection means can be changed with a simple structure. In addition, since this change is made by moving along the arc, it can be easily changed, the measurement work becomes simple, and the detection time can be shortened.

In addition , since the position to be measured can always coincide with the planned measurement position where the irradiation direction of the X-ray generation means and the detection direction of the X-ray detection means intersect, reliable analysis data can be acquired. In addition, since processing can be performed based on the distance information acquired by the distance measuring means, the support base can be moved by operating the actuator based on this information. For this reason, it is possible to perform the adjustment for matching the measured position and the planned measurement position in a short time, and it is possible to acquire reliable data in a shorter time.

  Moreover, according to the X-ray analyzer according to the invention of claim 2, the X-ray generation means and the X-ray detection means are reliably maintained in a state where these irradiation positions and detection positions intersect at the measurement planned positions, These irradiation angles and detection angles can be easily changed.

In addition, according to the X-ray analysis apparatus of the invention of claim 3 , by using a laser beam, the diameter of the beam is made as small as possible to reduce the irradiation range, thereby grasping the position to be measured as a point and measuring the distance. Therefore, reliable distance data can be obtained and the accuracy of X-ray analysis can be improved.

  The X-ray analyzer according to the present invention will be specifically described below based on the preferred embodiments shown in the drawings.

  FIG. 1 is a perspective view from the front of the X-ray analyzer 1 according to this embodiment, FIG. 2 is a plan view, and FIG. 3 is a rear view. The X-ray analyzer 1 detects a generator 2 as an X-ray generator that generates white X-rays, and the energy and intensity of the X-rays at the position where the white X-ray generated by the generator 2 irradiates the measurement object O. The X-ray detection unit 3 includes a detection device 3 as a means for detecting X-rays, a guide rail 4 serving as a guide unit for guiding the movement of the generation device 2 and the detection device 3, and the like. The white X-ray generated from the generating means 2 is emitted from the tip of the generating means 2 through the capillary 2a extending in the irradiation direction, and captured through the capillary 3a extending from the leading end of the detecting means 3 in the detection direction.

  The generating device 2 and the detecting device 3 are held by holding brackets 21 and 31, respectively. The holding brackets 21 and 31 are slidable with respect to the holding plates 22 and 32 in the irradiation direction and the detection direction, respectively. ing. As shown in FIG. 3, this sliding is performed by passing through the long holes 22 d and 32 d whose longitudinal direction is the sliding direction of the generator 2 and the detector 3 in the holding plates 22 and 32, respectively. This is done by operating the operation knobs 22a and 32a linked to the detection device 3, respectively. The holding plates 22 and 32 are mounted upright from the base plates 22b and 32b. The base plates 22b and 32b are connected to the guide rail 4 and are guided by the guide rail 4 to be movable. .

  As shown in FIGS. 1 and 2, the guide rail 4 is formed in an arc shape. As shown in FIG. 2, the center of the arc of the guide rail 4 is an intersection C between the irradiation direction Do of the generator 2 and the detection direction Di of the detector 3, and this intersection C is a planned measurement position. Further, as shown in FIG. 3, the guide rail 4 is formed in a cross-sectional dovetail shape, and the base plates 22b and 32b are formed with connecting grooves 22c and 32c having a shape matching the cross-sectional shape. The longitudinal directions of 22c and 32c are curved in an arc shape with the same curvature as that of the guide rail 4, and the base plates 22b and 32b are connected to the guide rail 4 through the connecting grooves 22c and 32c. Therefore, the irradiation direction of the generator 2 and the detection direction of the detection device 3 can be moved while maintaining a state in which the intersection C is directed.

Outside the guide rail 4, a rack 5 having teeth 5a formed on the outer side along an arc concentric with the arc along which the guide rail 4 extends is disposed. On the other hand, drive motors 23 and 33 for moving the generating device 2 and the detecting device 3 are respectively attached to the opposite sides of the generating device 2 and the detecting device 3 with the holding plates 22 and 32 interposed therebetween. Pinions 23 a and 33 a that mesh with the rack 5 are fitted to output shafts of the drive motors 23 and 33. That is, the rack 5 , the driving motor 23, and the pinion 23a constitute a generating means moving device, and the rack 5 , the driving motor 33, and the pinion 33a constitute a detecting means moving device. In FIG. 2, the rack 5 and the pinions 23a and 33a are indicated by pitch circles.

As shown in FIG. 3, the guide rail 4 is attached to the upper surface of a base plate 6 as a support base. A support plate 7 is disposed below the base plate 6, and the base plate 6, the support plate 7, Are connected via a pair of linear motion guide devices G67. Further, the support plate 7 is disposed above the gantry plate 8, and the support plate 7 is connected to the gantry plate 8 through a pair of linear motion guides G78. The pair of linear guide devices G67 guides the base plate 6 to move with respect to the support plate 7 in the radial direction of the guide rail 4 , that is, the direction that coincides with the distance measuring direction of the distance measuring device 9 described later. It is like that. Also, the linear motion guide unit G78 is relative to the support plate 7 is frame plate 8, are to be guided to move in径直angle direction perpendicular in the radial direction and the horizontal plane of the guide rails 4. The movement of the base plate 6 with respect to the support plate 7 is performed by the operation of the radial drive motor 61, and the movement of the support plate 7 with respect to the gantry plate 8 is performed by a radial drive motor 71 (shown in FIG. 3). The moving mechanism has a structure in which a drive screw is rotated by the output rotation of the drive motors 61 and 71, and a nut portion screwed with the drive screw is provided on each of the base plate 6 and the support plate 7. be able to.

As shown in FIGS. 1 and 2, the base plate 6 is formed in an arc shape with the intersection C as a center, and a distance measuring device 9 as a distance measuring means is disposed on the intersection C side. . The distance measuring device 9 includes a laser light source 91 that emits a laser beam, and a light receiving unit 92 that reflects the reflected laser beam reflected by the measurement target. Further, it is preferable that the laser beam has a traveling direction passing through the intersection C and has a diameter as small as possible. The range measured by the distance measuring device 9 is a position in the radial direction including the intersection C, and may be a range of several millimeters before and after the intersection C. In particular, the distance to the intersection C is accurately measured. If possible, it is preferable. In the distance measuring device 9, the distance measuring device 9 itself becomes a reference point, and the distance from the distance measuring device 9 to the intersection C is measured.

  The operation of the X-ray analyzer 1 according to this embodiment configured as described above will be described below.

The measurement object to be measured in the measurement object O that is a sample is set so that the intersection C is the measurement position. In this state, if the distance to the measurement position is measured by the distance measuring device 9, it can be determined whether or not the measurement position is on the intersection C. When the position to be measured does not coincide with the intersection C, the radial drive motor 61 and the radial direction drive motor 71 are operated as necessary. That is, when the radial direction perpendicular drive motor 71 is operated, the support plate 7 is guided by the linear motion guide device G ₇₈ and moves in a direction perpendicular to the radial direction of the guide rail 4 with respect to the gantry plate 8. Adjustment is performed so that the laser beam emitted from the distance device 9 enters the measuring object O. Further, when the distance obtained by the distance measuring device 9 is different from the distance between the reference point (not shown) set on the base plate 6 and the intersection C, the radial drive motor 61 is operated, and the base plate 6 is moved. Move relative to the support plate 7. Thereby, the distance from the reference point (not shown) to the intersection C can be made equal to the distance from the measurement target O to the measurement position. As a result of these adjustments, the position to be measured is located at the intersection C. Therefore, a white X-ray is generated from the generator 2 and the energy and intensity of the X-ray at the position to be measured are detected by the detector 3.

  Next, the generation device 2 and the detection device 3 are moved to change the irradiation angle and the detection angle. These generators 2 and 3 are moved by operating the drive motors 23 and 33. When the drive motors 23 and 33 are operated, the pinions 23a and 33a fitted to these output shafts rotate, and these pinions 23a. The pinions 23 a and 33 a roll along the rack 5 by meshing the 33 a with the rack 5. As a result, the base plates 22b and 32b supporting the drive motors 23 and 33 are moved by being guided by the guide rail 4, and are attached to the base plates 22b and 32b via the holding brackets 21 and 31. The generating device 2 and the detecting device 3 are moved along an arc centered on the intersection C. Moreover, the irradiation direction and the detection direction of the generator 2 and the detection device 3 are both maintained in a state where the intersection C is pointed.

  By the way, when the positions of the generating device 2 and the detecting device 3 are changed, if the base plate 6, the gantry plate 8, the support plate 7, etc. described above are made robust and the X-ray analyzer 1 is made robust, these are generated. Even when the device 2 and the detection device 3 and the drive motors 23 and 33 for driving them move, the irradiation direction of the generation device 2 and the detection direction of the detection device 3 pass through the intersection C with the generation device 2. The attitude of the detection device 3 can be maintained. However, if the X-ray analyzer 1 is robust, the X-ray analyzer 1 is increased in size and weight, and portability is impaired. In order to ensure portability, it is necessary to reduce the weight, and a robust structure cannot be obtained. For this reason, the weight distribution of the X-ray analyzer 1 varies depending on the movement of the generator 2 and the detector 3, etc., and the irradiation direction and the detection direction are changed from the initial measurement position due to the occurrence of distortion or external vibration. There is a risk of shifting. However, in the X-ray analysis apparatus 1 according to the embodiment of the present invention, the distance to the measurement position of the measurement object O is measured by the distance measurement apparatus 9, so that the measurement is performed from a reference point determined on the base plate 6. The distance to the position can be surely matched with the distance from the reference point to the intersection C. That is, based on the distance information acquired by the distance measuring device 9, if the radial drive motor 61 is operated and the base plate 6 is moved in the radial direction, before and after the movement of the generating device 2 and the detecting device 3, The intersection C and the position to be measured can be matched.

  Furthermore, as shown in the present embodiment, if the apparatus has a radial direction perpendicular drive motor 71, the X-ray analyzer 1 may be unexpectedly distorted by the movement of the generator 2 and the detector 3, or from the outside. Even when this vibration is applied, the intersection C can be moved in the plane by operating the radial drive motor 71 together with the operation of the radial drive motor 61 described above. Before and after the movement of the detection device 3, the intersection C and the position to be measured can be reliably matched.

In the embodiment described above, the radial direction drive motor 61 and the radial direction perpendicular direction drive motor 71 are provided, and the intersection C is made to coincide with the measurement position of the measurement object O. However, the X-ray analyzer 1 performs the measurement. If the object O is in a stationary state with respect to the object O , it is sufficient to move the intersection C within the plane. However, the measurement object O includes historical sites, ruins, and the like, and it becomes unstable depending on the place where the X-ray analyzer 1 is installed, and the X-ray analyzer 1 tilts when the generator 2 and the detector 3 are moved. There is a risk that. For this reason, it is preferable to provide a level on the base plate 6 so that it can be confirmed that the base plate 6 is in a horizontal state because the base plate 6 can be easily maintained in a horizontal state. Further, the gantry plate 8 can be supported to be movable up and down, and the height position of the intersection C can be adjusted. In this case, the gantry plate 8 can be moved up and down by power of a motor, an air cylinder or the like, and the intersection C can be moved in three dimensions, so that the X-ray analyzer 1 can be further preferred.

  Since the X-ray analyzer according to the present invention is excellent in portability, even if a measurement object that needs to be inspected by X-rays cannot be moved, it can be easily carried on site and inspected. it can. In addition, even if the measurement position in the measurement object is shifted, it can be easily corrected and the inspection can be performed on almost the same measurement position, so the inspection time is shortened. It is effective for inspecting the material composition etc. of a modeled object.

It is a perspective view from the front which shows schematic structure of the X-ray analyzer which concerns on embodiment of this invention. It is a top view which shows schematic structure of the X-ray analyzer which concerns on embodiment of this invention. It is a rear view of the X-ray analyzer shown in FIG. It is an AA arrow line view in FIG. FIG. 6 is a partial detail view of FIG. 5. It is a BB arrow line view in FIG.

Explanation of symbols

1 X-ray analyzer 2 Generator (X-ray generating means)
23 Drive motor
23a Pinion 3 detector (X-ray detector)
33 Drive motor
33a Pinion 4 Guide rail (guide means)
5 racks 6 base plate (support)
61 Radial drive motor G ₆₇ Linear motion guide device 7 Support plate
71 radial drive motor G ₇₈ linear motion guide device 8 frame plate 9 distance measuring device
91 Laser light source
92 Receiver O Object to be measured

Claims (3)

X-ray generation means for irradiating white X-rays to the measurement position to be measured and X-ray detection means for detecting energy and intensity of the X-rays emitted from the measurement position, and the irradiation angle and detection angle are predetermined. In the X-ray analysis apparatus that moves the X-ray generation means and the X-ray detection means while maintaining the relationship, and performs diffraction X-ray analysis and fluorescence X-ray analysis based on the energy and intensity of the X-ray acquired by the X-ray detection means,
Guiding means for moving the X-ray generation means and the X-ray detection means along the same arc and guiding the irradiation direction of the X-ray generation means and the detection direction of the X-ray detection means to intersect at the center of the arc;
A generating means moving device and a detecting means moving device for moving the X-ray generating means and the X-ray detecting means respectively along the guide means;
A support base that supports the guide means and is movable in the radial direction of the arc of the guide means in a horizontal plane;
A support plate that supports the support and is movable in a radial direction perpendicular to the radial direction in a horizontal plane;
Ranging means for measuring the distance from the reference point of the measurement object in the distance measurement direction, with a straight line connecting the reference point on the support base and the center of the arc of the guide means as the distance measurement direction;
Support base moving means for moving the support base in the radial direction;
Support plate moving means for moving the support plate in the direction perpendicular to the diameter,
The support plate moving means moves the support plate in a direction perpendicular to the diameter, and directs the distance measuring direction of the distance measuring means to the position to be measured,
Based on the distance information acquired by the distance measuring means, the support base is moved in the radial direction by the support base moving means so that the measurement target position of the measurement object coincides with the planned measurement position that is the center of the arc. An X-ray analyzer characterized by causing   2. The X-ray analysis apparatus according to claim 1, wherein the guide means is formed by an arcuate guide rail.   The X-ray analyzer according to claim 1 or 2, wherein a laser range finder is used as the distance measuring means.

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