JP3507431B2 - Non-planar mirror adjustment method and apparatus - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for adjusting a non-planar mirror that constitutes a laser optical device.

[0002]

2. Description of the Related Art Normally, as a laser optical device utilizing a laser beam, for example, a laser processing device or a laser measuring device is adopted. In this type of laser optical device, various kinds of optical components such as a lens system and a reflecting mirror are incorporated in order to guide the laser light to a predetermined irradiation position. Further, the reflecting mirror has various forms such as a plane mirror, a parabolic mirror and an ellipsoidal mirror.

Therefore, when assembling a laser optical device, it is desired to accurately perform alignment adjustment such as layout adjustment and focus measurement of various optical parts, especially non-planar mirrors. This is to ensure that high-quality laser processing work and high-precision laser measurement work are performed.

[0004]

Generally, when performing the above-mentioned alignment adjustment work, a He-Ne laser is generally used, and the laser light emitted from this is used for the layout adjustment and focus of optical parts. It is used as a reference light for measurement. However, since this type of laser light has no center (optical core), there is a problem that the absolute position of the laser light cannot be easily obtained.

On the other hand, in order to perform the alignment adjustment of the optical parts with high precision, it is necessary to detect the only accurate reflected light axis that coincides with the mechanical axis. However, it has been pointed out that it is extremely difficult to accurately detect such a reflected optical axis, and the alignment of the optical component cannot be adjusted with high accuracy.

Particularly, in the work of measuring the focus position of a focus optical system such as a parabolic mirror or an ellipsoidal mirror, the reflected light from the focus optical system is actually applied to a wall or the like and the condensed state thereof is directly observed. It is done by. Due to this, it has been pointed out that the focus position of the focus optical system cannot be detected accurately and efficiently.

The present invention solves this kind of problem, and provides a non-planar mirror adjusting method and device capable of performing alignment adjustment of a non-planar mirror efficiently and accurately with a simple process and configuration. The purpose is to

[0008]

In a method and apparatus for adjusting a non-planar mirror according to the present invention, first, a laser light unit in which a laser oscillator is incorporated is rotated around an optical axis and is a reference derived from the laser oscillator. The optical axis of the laser light coincides with the rotation center of the reference unit incorporating the laser light unit, and this rotation center coincides with the optical core (optical axis) and the mechanical axis. Furthermore, by adjusting the optical axis position of the reference laser light, it becomes possible to obtain the reference laser light as the desired reference light with high accuracy and reliability.

Next, the reference laser beam having the optical axis set is applied to the non-planar mirror, and the reflected light from the non-planar mirror is measured to detect the optical axis and focus of the non-planar mirror. Then, since the position and / or the angle of the non-planar mirror is adjusted based on the measurement result, the work of adjusting the non-planar mirror can be performed with high accuracy and efficiency by a simple process and configuration.

Further, the reference laser light or the reflected light is applied to the respective pores of the first and second pinhole plates which are arranged at a predetermined distance from each other. At that time, only when the laser light unit or the non-planar mirror is arranged at a predetermined angle and at a predetermined position, the reference laser light or the reflected light is transmitted through the respective pores of the first and second pinhole plates. Is detected at the measurement site. Therefore, the laser light unit or the non-planar mirror (such as a parabolic mirror or an ellipsoidal mirror) can be aligned with high accuracy.

Furthermore, the optical axis position of the reference laser light or the reflected light is detected by irradiating the optical axis detection unit with the reference laser light or the reflected light.
As described above, the reference laser light is adjusted with high accuracy, the optical axis position of the reference laser light or the reflected light is detected with high accuracy and efficiency, and the efficiency of the adjustment work of the non-planar mirror is facilitated. Carried out.

The reflected light from the non-planar mirror irradiated with the reference laser light is incident on the optical axis detection unit, while the optical axis detection unit is moved in the optical axis direction of the reference laser light. Then, by setting the position where the movement of the optical axis (light spot) of the reflected light detected by the optical axis detection unit is the smallest as the focus position of the non-planar mirror, the focus position is a simple process and configuration. Highly accurate and efficient detection.

At this time, the optical axis (light spot) of the optical axis detection unit
The measurement surface is rotated around an axis that intersects the optical axis of the reference laser light. Here, if the optical axis measurement surface and the rotation axis do not match,
The detected optical axis moves by the rotation of the optical axis detection unit. Therefore, by adjusting the position of the optical axis measurement surface in the optical axis direction so that the optical axis position of the reference laser light does not change, the optical axis measurement surface position of the reference laser light is detected.

[0014]

1 is a perspective view of a reference light unit 10 which constitutes an adjusting apparatus for a non-planar mirror according to an embodiment of the present invention, and FIG. 2 is a side view of the reference light unit 10. 3 is a plan view of the reference light unit 10. As shown in FIG.

The reference light unit 10 has a function of irradiating the reference laser light L used for measurement of various optical parts and the like, and a laser light unit 14 in which a laser oscillator 12 such as a He-Ne laser is incorporated. A rotation mechanism 18 for rotating the laser light unit 14 around the optical axis with respect to the support cylinder 16; and an optical axis of the reference laser light L derived from the laser light unit 14 with respect to the reference light unit 10.
And a light center adjusting mechanism 20 for matching the rotation center of

The reference light unit 10 includes a unit base 24 fixed on a measurement base 22, and a support barrel 16 is mounted on the unit base 24 via a left / right slide mechanism 26 and a vertical slide mechanism 28. The left and right slide mechanism 26 has a guide rail 30 provided on the unit base 24 so as to extend in the arrow B direction orthogonal to the optical axis direction (arrow A direction).
A slide base 32 that can move back and forth in the direction of arrow B is arranged at 0. The first micrometer 34 is fixed on the unit base 24 in the horizontal direction, and the rod 36 of the first micrometer 34 is fixed to the slide base 32.

A column 38 is provided on the slide base 32, and a pair of guide rails 40 constituting the vertical slide mechanism 28 are fixed to the inner surface of the column 38 in the vertical direction. A pair of guide portions 42 that engage with the guide rails 40 and can move up and down are provided on both sides of the support cylinder 16, and a second micrometer 44 is provided vertically downward in the upper part of one end side of the column 38. It is installed.
Rod 46 protruding downward from the second micrometer 44
Are fixed to the support cylinder 16.

A rotary cylinder 50 is rotatably supported in the support cylinder 16 via a pair of bearings 48 constituting the rotary mechanism 18, and the laser oscillator 12 is accommodated in the rotary cylinder 50. . The holding member 52 is attached to both ends of the laser oscillator 12, and the small diameter portion 54 of the holding member 52 is inserted into the rotary cylinder 50.

The optical center adjusting mechanism 20 is provided with three adjusting screws 56, which are respectively screwed into the both ends of the rotary cylinder 50 at equal angular intervals, and the tip end of the adjusting screw 56 is a small diameter portion of the holding member 52. By touching 54, the optical axis of the laser oscillator 12 is tilted and adjusted.

As shown in FIGS. 2 and 3, the reference light unit 10 has a tilting mechanism capable of tilting and fixing the reference light unit 10 in a direction (arrow B direction) intersecting the optical axis direction (arrow A direction). 58 is provided. The tilting mechanism 58 includes knock pins 60a and 60b provided on the measurement base 22. The knock pin 60a fits into a hole 62 formed on the tip side of the unit base 24 in the direction of arrow A, while the knock pin 60b is The unit base 24 is selectively fitted into three holes 64a, 64b and 64c provided on the rear end side in the direction of arrow A.

As shown in FIG. 2, the laser light unit 14
A beam diameter enlarging means 66 for enlarging the beam diameter of the reference laser light L is detachably provided on the tip side of the.
The beam diameter expanding means 66 has, for example, a diameter of 0.8 mm.
A lens that includes a filter unit 68 that combines various types of pinhole assemblies and a focusing lens, and a lens set for a beam expander, which converts a standard reference laser beam L into a parallel beam (collimated beam) having a diameter of 25 mm. And a unit 69.

FIG. 4 is a perspective view of an optical axis unit 70 which constitutes the adjusting device according to this embodiment, and FIG. 5 is a side view of the optical axis unit 70.

The optical axis unit 70 includes a unit base 72 fixed to the measuring base 22, and the first and second pinhole plates 74 and 76 are mounted on the unit base 72 with a predetermined space therebetween. The first pinhole plate 74 is
The first pinhole plate 74 is supported by a first support plate 78 fixed on the unit base 72, and a first fine hole 80 having a predetermined diameter is formed in the central portion of the first pinhole plate 74.

The first pinhole plate 74 has a first fine hole 80.
A first pore position adjusting mechanism 82 for adjusting the position in the left-right direction (arrow B direction) and the up-down direction (arrow C direction) intersecting the optical axis (arrow A direction) is provided. The first fine hole position adjusting mechanism 82 is arranged in the horizontal direction, and the first adjusting screw 8 for moving the first pinhole plate 74 forward and backward is provided.
4 and the first pinhole plate 74 arranged vertically.
And a second adjusting screw 86 for vertically adjusting the position.

The second pinhole plate 76 is supported on the second support plate 88 similarly to the first pinhole plate 74, and has a predetermined diameter in the center of the second pinhole plate 76. The second pores 90 are formed. The second pinhole plate 76 is provided with a second pore position adjusting mechanism 92. The second fine hole position adjusting mechanism 92 has the same structure as the first fine hole position adjusting mechanism 82, and the same components are designated by the same reference numerals and detailed description thereof will be omitted.

First and second pinhole plates 74, 76
Has a diameter of about 0.8 mm like the reference laser beam L,
This is used for adjusting so-called point light. For example, in order to adjust the collimated reference laser light L0 which is a collimated light having a diameter of about 25 mm, FIG.
The first and second pinhole plates 94a, 94b shown in
It is used by replacing the first and second pinhole plates 74 and 76. The first and second pinhole plates 94a,
94b is provided with pores 96a and 96b at the center, and four pores 98a and 98b are provided on the circumference having a predetermined diameter around the pores 96a and 96b, respectively.

FIG. 7 is a perspective explanatory view of the optical axis detecting unit 100 which constitutes the adjusting device according to the present embodiment, and FIG.
FIG. 4 is a side view of the optical axis detection unit 100.

The optical axis detection unit 100 comprises a measurement base 2
2 includes a unit base 102 fixed onto the unit base 102, and a first slide base 104 is provided on the unit base 102.
Are arranged so as to be movable back and forth in the optical axis direction (arrow A direction) via the moving back and forth mechanism 105. An end of a first slide knob 106, which constitutes an advancing / retreating mechanism 105 and is supported by the unit base 102, is fixed to the side of the first slide base 104, and the first slide knob 106 is rotated to rotate the first slide knob 106. The first slide base 104 can move back and forth in the direction of arrow A.

On the first slide base 104, a rotary base 110 which constitutes a rotary mechanism 108 is provided, and this rotary base 110 is operated by operating a rotary knob 112 so as to intersect with the optical axis of the reference laser beam L. It is rotatable around the axis (vertical axis). On the rotating base 110,
The second slide base 114 is arranged so that it can move back and forth in the direction of arrow A. An end portion of a second slide knob (measuring position adjusting mechanism) 116 is connected to the second slide base 114, and the second slide knob 116 is rotated so that the second slide knob 116 can advance and retreat in the direction of arrow A by a minute distance.

An optical axis position detecting sensor 118 is mounted on the second slide base 114, and this optical axis position detecting sensor 1
A monitor 122 is connected to 18 (see FIG. 9). As will be described later, the monitor 122 displays the position of the reference laser light L introduced on the optical axis (light spot) measuring surface 120 of the optical axis position detection sensor 118 as a visible image.

Next, the operation of the adjusting device configured as described above will be described below in connection with the adjusting method according to the embodiment of the present invention.

First, the optical center of the reference laser light L derived from the reference light unit 10 is adjusted. As shown in FIG. 10, an optical axis detection unit 100 is arranged on the optical axis of the reference light unit 10 corresponding to the first measurement position close to the reference light unit 10. Therefore, when the reference laser light L is derived from the reference light unit 10, the reference laser light L is applied to the light spot measurement surface 120 forming the optical axis detection unit 100. Therefore, as shown in FIG. 9, the monitor 122 electrically connected to the optical axis position detection sensor 118 displays the first optical axis position P1 of the reference laser light L.

In this state, the laser beam unit 14 is mounted on the support cylinder 16 via the bearing 48 constituting the rotating mechanism 18.
Is rotated against. When the first optical axis position P1 displayed on the monitor 122 moves when the laser light unit 14 rotates around the optical axis, the left / right slide mechanism 26, the vertical slide mechanism 28, and the optical center adjustment mechanism 20 are selectively operated. To be done.

Specifically, as shown in FIG. 1, the first micrometer 34 constituting the left and right slide mechanism 26 is rotated, and the rod 36 moves back and forth in the direction of arrow B,
The slide base 32 fixed to the rod 36 advances and retreats in the direction of arrow B along the guide rail 30. On the other hand, when the second micrometer 44, which constitutes the vertical slide mechanism 28, is rotated, the support cylinder 16 is moved through the rod 46.
Moves up and down (direction of arrow C). Further, by adjusting the adjusting screw 56 constituting the optical center adjusting mechanism 20, the laser light unit 14 is tilted with respect to the rotary cylinder 50 via the holding member 52 (see FIG. 2).

By adjusting the left and right slide mechanism 26, the up and down slide mechanism 28, and the optical center adjusting mechanism 20 in this manner, the first image displayed on the monitor 122 when the laser light unit 14 rotates around the optical axis is displayed. Optical axis position P1
Will be stuck with respect to the X and Y axes.
As a result, the center of rotation of the reference light unit 10 coincides with the optical axis of the reference laser light L.

Next, the optical axis detecting unit 100 is arranged at the second measuring position which is separated from the first measuring position by the distance H1 rearward along the optical axis of the reference laser beam L (in FIG. 10,
See the chain double-dashed line). In this state, when the reference laser light L is emitted from the reference light unit 10, the reference laser light L is introduced into the optical axis detection unit 100. In this optical axis detection unit 100, the reference laser light L is applied to the light spot measurement surface 120.
Is introduced, the second optical axis position P2 is displayed on the monitor 122 (see FIG. 9).

Then, the laser light unit 14 is rotated and adjustment by the optical center adjusting mechanism 20 is performed so that the deviation of the second optical axis position P2 displayed on the monitor 122 does not move with respect to the X axis and the Y axis. Is done. At that time, the first
And confirm that the second optical axis positions P1 and P2 are displayed so as not to move with respect to the X axis and the Y axis.

Then, the optical axis detection unit 100 is again placed at the first measurement position, and the first optical axis position P1 does not move when the laser light unit 14 rotates around the optical axis, similarly to the above. Check that it is adjusted as follows. As a result, if the amount of deviation is large, the optical axis of the reference laser beam L coincides with the rotation center of the reference optical unit 10 by repeating the above procedure, and the optical axis adjustment work can be performed with high accuracy. .

As a result, the reference light unit 10 can irradiate the reference laser light L whose optical axis and optical core position are set with high precision, and various kinds of reference laser light L will be described later. It is possible to obtain the effect that various measuring operations of the non-planar mirror can be performed with high accuracy.

Next, an adjusting method according to another embodiment of the present invention will be described below.

As shown in FIG. 11, the reference light unit 10
A measurement site 130 such as a machine or a wall is arranged on the optical axis of the reference light unit 1 as in the present embodiment.
The reference laser light L is derived from 0, and the laser light unit 14 is rotated with respect to the support cylinder 16. Then, the optical center adjusting mechanism 20 is adjusted so that the movement of the light spot of the reference laser light L with which the measurement site 130 is irradiated does not move with respect to the X axis and the Y axis. The measurement site 13
Instead of 0, the optical axis detection unit 100 may be used.

Therefore, as shown in FIG. 12, the optical axis unit 70 is arranged on the optical axis of the reference light unit 10.
When the reference laser light L is derived from the reference light unit 10, the reference laser light L is supplied to the first optical axis unit 70 of the first optical axis unit 70.
And the optical axis detection unit 1 through the first and second fine holes 80 and 90 formed in the second pinhole plates 74 and 76.
The light spot measuring surface 120 which constitutes 00 is irradiated. In the optical axis unit 70, the first and second pinhole plates 74, 7
6 are spaced at a predetermined distance along the optical axis, and only when the reference laser light L coincides with the optical axis, the light is transmitted through the first and second fine holes 80 and 90 and the light spot measurement surface 120. Is irradiated.

Therefore, when the reference laser beam L deviates from the optical axis, it is blocked by the first pinhole plate 74 and / or the second pinhole plate 76, and the light spot measuring surface 12
The reference laser beam L is slightly irradiated on 0 or not irradiated at all. Then, the horizontal slide mechanism 26 and the vertical slide mechanism 28 are operated to monitor the beam intensity of the reference laser light L with which the light spot measurement surface 120 is irradiated. The adjustment by the left and right slide mechanism 26 and the up and down slide mechanism 28 is completed at the position where the beam intensity is maximized, so that the reference laser light L coincides with the optical axis. The measurement site 130 may be used instead of the optical axis detection unit 100.

Further, as shown in FIG. 2, when the beam diameter expanding means 66 is attached to the laser light unit 14 and the collimated reference laser light L0 is led out, the optical axis of the collimated reference laser light L0 is adjusted. There is a need to do. At this time, in the optical axis unit 70, the first and second pinhole plates 74 and 76 are replaced with the first and second pinhole plates 94a and 94b, and the procedure is the same as that of the present embodiment. To do.

Specifically, first, the left and right slide mechanism 26 of the reference light unit 10 and the vertical slide mechanism 26 are moved so that the collimated reference laser light L0 enters within a predetermined range of the first pinhole plate 94a arranged on the front side. The slide mechanism 28 is operated. Then, the collimator reference laser light L0 transmitted through the first pinhole plate 94a on the front side is transmitted through the second pinhole plate 94b arranged on the rear side.
The left and right slide mechanism 26 and the up and down slide mechanism 28 of the reference light unit 10 are operated.

As a result, the pores 96a, 96b, 98a and 9 of the first and second pinhole plates 94a and 94b are formed.
8b is a light spot measurement surface 1 of the optical axis detection unit 100 that passes through 8b.
The adjustment work of the reference light unit 10 may be performed so that the beam intensity of the collimated reference laser light L0 with which 20 is irradiated is maximized.

Next, the reference laser light L whose optical axis is set
Using, the optical axis alignment work of the optical axis unit 70 and the optical axis detection unit 100 is performed.

Specifically, as shown in FIG. 13, an optical axis detection unit 100 is arranged on the optical axis of the reference light unit 10 in correspondence with a predetermined position. Therefore, when the reference laser light L is derived from the reference light unit 10, the reference laser light L is applied to the light spot measurement surface 120 forming the optical axis detection unit 100. In this state, the rotation mechanism 108
The rotation base 110 constituting the above is rocked, and the second slide base 114 is moved back and forth in the optical axis direction under the action of the second slide knob 116.

Then, as shown in FIG.
The second slide base 114 is stopped at a position where the upper first optical axis position P1 does not move. As a result, the light spot measuring surface 120 and the rotation axis of the rotating mechanism 108 coincide with each other, and the position of the light spot measuring surface 120 is detected.

On the other hand, in the optical axis alignment work of the optical axis unit 70, as shown in FIG. 14, the first pinhole plate 74 is arranged between the reference light unit 10 and the optical axis detection unit 100. Then, the reference laser light L is derived from the reference light unit 10, the reference laser light L passes through the first fine hole 80 formed in the first pinhole plate 74, and the light spot measurement surface 120 of the optical axis detection unit 100. Is irradiated. In this optical axis detection unit 100, the intensity of the reference laser light L that has passed through the first aperture 80 is monitored, and the first aperture position adjusting mechanism 82 is operated so that this intensity becomes maximum.

Specifically, the first and second adjusting screws 8
By operating 4, 86, the first pinhole plate 7
4 is vertically and laterally adjusted in position, and the first pore 80
The first pores 80 coincide with the optical axis at the position where the intensity of the light passing through is maximum.

Similarly, a second pinhole plate 76 is arranged between the reference light unit 10 and the optical axis detection unit 100, and a second pinhole plate 76 is formed on the second pinhole plate 76.
The work of aligning the pores 90 with the optical axis is performed. As a result, the optical axis adjustment of the optical axis unit 70 is performed.

Next, a method of adjusting the optical component by using the reference light unit 10 and the optical axis unit 70 thus adjusted will be described.

FIG. 15 is a perspective view of the position adjusting unit 140, and FIG. 16 is a side view of the position adjusting unit 140. The position adjusting unit 140 has a function of integrally mounting the non-planar mirror 142 in a laser processing device, a laser measuring device, or the like, and adjusting the position and angle of the non-planar mirror 142 in advance.

The position adjustment unit 140 includes the measurement base 2
2 is provided with a unit base 144, and a support block 146 is provided on the unit base 144. On the support block 146, a first tilting member 150 whose angle can be adjusted in the horizontal direction is provided via a first knob 148. The first tilting member 150 has a second knob 152.
A second tilting member 154, which is tiltable in the vertical direction, is supported via the, and the non-planar mirror 142 is attached to the second tilting member 154.

Therefore, as shown in FIG. 17, the position adjusting unit 140 incorporating the non-planar mirror 142 is arranged on the optical axis S1 of the reference light unit 10, and the optical axis S2 of the reflected light La by the non-planar mirror 142 is arranged. The optical axis unit 70 is arranged above. Then, the reference light unit 10
When the reference laser light L is derived from the reference laser light L, the non-planar mirror 142 is irradiated with the reference laser light L along the optical axis S1.
When the non-planar mirror 142 is accurately positioned at a predetermined position, the reflected light La from the non-planar mirror 142 is reflected by the first and second pinhole plates of the optical axis unit 70 arranged on the optical axis S2. The light is transmitted through the first and second fine holes 80 and 90 formed in 74 and 76, and is irradiated to the measurement site 130.

At this time, in the optical axis unit 70, the first and second pinhole plates 74 and 76 are separated from each other by a predetermined distance along the optical axis S2, and the reflected light L from the non-planar mirror 142 is formed.
Only when a coincides with this optical axis S2, the reflected light L
The “a” passes through the first and second pores 80 and 90 and is applied to the measurement site 130. Thus, the non-planar mirror 142 is shown in FIG.
In FIG. 7, as indicated by the chain double-dashed line, when it is displaced from the desired position, the reflected light La is blocked by the first pinhole plate 74 and / or the second pinhole plate 76 and the reflected light La is measured.
It is never exposed to zero.

Next, the first and second knobs 148 and 152 constituting the position adjusting unit 140 are selectively operated, and the position of the non-planar mirror 142 is adjusted via the first and second tilting members 150 and 154. Be seen. Then, at the position where the reflected light La reflected by the non-planar mirror 142 passes through the first and second pinhole plates 74, 76 and is irradiated to the measurement site 130, the non-planar mirror 142 is accurately aligned. It will be surely done.

In particular, in this embodiment, the reference light unit 1
The optical axis of the reference laser light L derived from 0 is adjusted with high accuracy so as to coincide with the mechanical axis, and the optical axis S2
First and second spaced apart by a predetermined distance above
It is provided with pinhole plates 74 and 76. As a result, it is possible to obtain the effect that the optical axis alignment of the non-planar mirror 142 is performed with high accuracy and efficiency with a simple configuration.

In this embodiment, the measuring portion 130 is arranged on the optical axis of the reflected light La and the reflected light La radiated to the measuring portion 130 is visually detected.
In order to perform this visual inspection work more easily and accurately, it is possible to employ a measurement structure incorporating a reflecting mirror and a reticle.

Next, an adjusting method for adjusting the optical core position of the non-planar mirror 142 using the reference light unit 10 and the optical axis detecting unit 100 will be described below.

As shown in FIG. 18, the optical axis detection unit 100 is once arranged on the optical axis S1 between the reference light unit 10 and the non-planar mirror 142 (see the chain double-dashed line). Therefore, the reference laser light L from the reference light unit 10
Is derived, the reference laser light L is applied to the light spot measurement surface 120 forming the optical axis detection unit 100. For this reason, as shown in FIG.
The first optical axis position P1 of the reference laser light L is displayed on the monitor 122 electrically connected to.

Next, the optical axis detection unit 100 sets the optical axis S1.
This optical axis detection unit 10 is removed from above
0 or another optical axis detection unit 100 is arranged on the optical axis S2 of the reflected light La by the non-planar mirror 142. When the reference laser light L is emitted from the reference light unit 10 in this state, the reference laser light L is reflected by the non-planar mirror 142, and the reflected light La is arranged on the optical axis S2. Introduced in 100. In this optical axis detection unit 100, the second optical axis position P is displayed on the monitor 122 by introducing the reflected light La into the light spot measurement surface 120.
2 is displayed (see FIG. 9).

Then, the first detected in advance on the optical axis S1
The position adjustment of the non-planar mirror 142 is performed such that the optical axis position P1 of the non-planar mirror 142 and the second optical axis position P2 of the reflected light La from the non-planar mirror 142 coincide with each other. Thus, in the present embodiment, it is only necessary to use the reference light unit 10 and the optical axis detection unit 100, and the second optical axis position P2 of the non-planar mirror 142 is set with respect to the optical axis S2 with a simple configuration and process. There is an advantage that matching can be performed easily with high accuracy.

Then, using the reference light unit 10 and the optical axis detection unit 100, focusing is performed in accordance with the respective procedures described below, when the non-planar mirror 142 is a parabolic mirror and when it is an ellipsoidal mirror. Position measurements are taken.

First, in the parabolic mirror, as shown in FIG. 19, the reference light unit 10 is translated in the horizontal direction (arrow B direction) under the rotating action of the first micrometer 34 constituting the left and right slide mechanism 26. Meanwhile, the reference laser light L is derived. On the other hand, the optical axis detection unit 100 arranged in the vicinity of the focal position of the non-planar mirror 142 includes the first slide base 104 under the rotating action of the first slide knob 106.
Moves back and forth in the direction of the optical axis S2. The reference laser light L derived from the reference light unit 10 is reflected by the non-planar mirror 142 to form the light spot measurement surface 12 that constitutes the optical axis detection unit 100.
It is irradiated to 0. At this time, the position where the optical axis moves the least is measured as the focal position (distance) of the non-planar mirror 142.

On the other hand, in the ellipsoidal mirror, as shown in FIG. 20, the reference light unit 10 includes the knock pin 60a and the hole 62.
The reference laser light L is tilted horizontally with respect to
And the optical axis detection unit 100 causes the optical axis S
2 Move up and down along the top. Then, the position where the movement of the optical axis detected on the light spot measurement surface 120 of the optical axis detection unit 100 is the smallest is measured as the focus position (distance) of the ellipsoidal mirror.

Further, in the parabolic mirror, as shown in FIG. 21, the beam diameter expanding means 66 is attached to the reference light unit 10 and the focal position of the non-planar mirror 142 can be measured using the collimated light L1. .

In the reference light unit 10, the reference laser light L derived from the laser light unit 14 is converted into the collimated light L1 via the beam diameter expanding means 66, and the collimated light L1 is reflected by the non-planar mirror 142. The light spot measurement surface 120 that constitutes the optical axis detection unit 100 is irradiated. Here, the optical axis detection unit 100 moves back and forth in the optical axis S2 direction, and the position where the area of the light spot on the light spot measurement surface 120 is the smallest is measured as the focus position of the non-planar mirror 142. Therefore, in the present embodiment, it is not necessary to move the reference light unit 10, and it is possible to quickly measure the focal position of the parabolic mirror with a simple process.

As described above, in each embodiment, the optical axis of the reference light unit 10 for deriving the reference laser light L is accurately set, and the reference light unit 10 is used to set the optical axis unit 70 and the optical axis. The axis detection unit 100 is adjusted with high accuracy.

As a result, by using the optical axis unit 70 and the optical axis detecting unit 100 selectively or in combination with the reference light unit 10, the optical axis adjusting work and the focus adjusting work of the non-planar mirror 142 can be performed. It is possible to obtain the effect that the processing is performed with high accuracy and efficiency. Moreover,
There is an advantage that the alignment adjustment of various non-planar mirrors 142 is accurately performed, and high-quality laser processing work, laser measurement work, and the like are performed.

[0072]

In the method and apparatus for adjusting a non-planar mirror according to the present invention, the reference laser light whose optical axis is set is applied to the non-planar mirror, and the reflected light from the non-planar mirror is reflected by the optical axis unit and / or the optical axis. By irradiating the detection unit, the optical axis adjustment and focus adjustment work of various non-planar mirrors can be performed with high accuracy by a simple process and structure.

[Brief description of drawings]

FIG. 1 is a perspective view of a reference light unit that constitutes an adjusting device for a non-planar mirror according to an embodiment of the present invention.

FIG. 2 is a side view of the reference light unit.

FIG. 3 is a plan view of the reference light unit.

FIG. 4 is a perspective explanatory view of an optical axis unit that constitutes the adjusting device.

FIG. 5 is a side view of the optical axis unit.

FIG. 6 is a perspective view of an optical axis unit in which a pinhole plate is mounted.

FIG. 7 is a perspective explanatory view of an optical axis detection unit that constitutes the adjustment device.

FIG. 8 is a side view of the optical axis detection unit.

FIG. 9 is an explanatory diagram of a display screen of a monitor that constitutes the optical axis detection unit.

FIG. 10 is a plan view illustrating an optical core adjustment work of the optical axis detection unit.

FIG. 11 is a side view illustrating the adjustment of the reference light unit.

FIG. 12 is a side view illustrating the adjustment of the optical axis unit.

FIG. 13 is a plan view illustrating an optical axis alignment operation of the optical axis detection unit.

FIG. 14 is a side view illustrating an optical axis aligning operation of the optical axis unit.

FIG. 15 is an explanatory diagram of a position adjustment unit.

FIG. 16 is a side view of the position adjustment unit.

FIG. 17 is an explanatory diagram when detecting an optical axis using the optical axis unit.

FIG. 18 is an explanatory diagram when an optical axis is detected using the optical axis detection unit.

FIG. 19 is an explanatory diagram for detecting the focal position of the parabolic mirror.

FIG. 20 is an explanatory diagram for detecting the focal position of the ellipsoidal mirror.

FIG. 21 is an explanatory diagram when detecting the focal position of the parabolic mirror using collimated light.

[Explanation of Codes] 10 ... Reference Light Unit 12 ... Laser Oscillator 14 ... Laser Light Unit 16 ... Support Tube 18 ... Rotation Mechanism 20 ... Optical Center Adjusting Mechanism 22 ... Measurement Base 24 ... Unit Base 26 ... Horizontal Slide Mechanism 28 ... Vertical Slide Mechanism 50 ... Rotating cylinder 56 ... Adjusting screw 66 ... Beam diameter expanding means 70 ... Optical axis unit 72 ... Unit bases 74, 76, 94a, 94b ... Pinhole plates 80, 90, 96a, 96b, 98a, 98b ... Pores 82, 92 ... Pore position adjusting mechanism 100 ... Optical axis detecting unit 102 ... Unit base 105 ... Advance / retract mechanism 118 ... Optical axis position detecting sensor 120 ... Optical axis measuring surface 122 ... Monitor 130 ... Measuring site 140 ... Position adjusting unit 142 ... Non-planar mirror L ... Reference laser light La ... Reflected light

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Claims (6)

(57) [Claims] 1. A method for adjusting a non-planar mirror which constitutes a laser optical apparatus, wherein a reference light unit in which the optical axis of a reference laser light derived from a laser light unit in which a laser oscillator is incorporated is incorporated. And the optical axis detection unit is arranged on the optical axis of the reference laser light.
Irradiates the optical axis detection unit with the reference laser light
Thereby detecting the optical axis position of the reference laser light
When the step of adjusting the optical axis position of the reference laser beam on the basis of the detected optical axis position, the reference laser beam optical axis is set irradiating the non-planar mirror, reflection from the non-planar mirror Detecting the optical axis and focus of the non-planar mirror by measuring light; and the position and / or the position of the non-planar mirror based on the measurement result.
Or a step of adjusting an angle, and a method of adjusting a non-planar mirror, comprising: 2. The adjusting method according to claim 1, wherein the light
Axis detection unit for the first measurement on the optical axis of the reference laser light
Position to adjust the optical axis position of the reference laser light
After the process and the adjustment at the first measurement position are completed, the optical axis detection is performed.
Move the unit to the second measurement position on the optical axis of the reference laser beam.
Arranging and adjusting the optical axis position of the reference laser light
And after the adjustment at the second measurement position is completed, the optical axis detection is performed.
The unit is again mounted on the optical axis of the reference laser beam for the first measurement.
Place it at a fixed position and adjust the optical axis position of the reference laser light.
And a step of adjusting the non-planar mirror. 3. The adjusting method according to claim 1, wherein
Between the laser light unit and the optical axis detection unit
Arranging the first and second pinhole plates at a predetermined distance
Then, the reference laser light is supplied to the first and second pinhoes.
The optical axis through each of the pores provided in the
And whether the reference laser light is not detected by the optical axis detection unit.
Position and / or angle of the laser light unit
And a step of adjusting the degree, the method of adjusting a non-planar mirror. 4. The adjustment method according to any one of claims 1 to 3, respectively the front SL reflected light, provided on the first and second pin hole plate is disposed a predetermined distance apart from each other the step of adjusting the step of determining whether or not detected at the measurement site through the pores, when the prior SL reflected light is not detected by the measurement site, the position and / or angle of the front Symbol nonplanar mirror And a method for adjusting a non-planar mirror, comprising: 5. A regulating process according to claim 1, wherein irradiating the pre SL reflected light to the optical axis detecting unit, a non-planar mirror, characterized by comprising the step of detecting the position of the optical axis of the SL reflected light Adjustment method. 6. A non-planar mirror adjusting device constituting a laser optical device, comprising: a reference light unit for deriving a reference laser light and setting an optical axis of the reference laser light; and a light of the reference laser light. performs axis adjustment, and an optical axis unit and / or the optical axis detecting unit for detecting the optical axis and focal point of the reflected light from the non-planar mirror the reference laser beam is irradiated, the optical axis detecting unit Is the optical axis of the optical axis detection unit
Interchange the measurement surface with the optical axes of the reference laser light and the reflected light.
A rotating mechanism for rotating about the different axes, and the optical axis measuring surface for the optical axis with respect to the rotating axis of the rotating mechanism.
Direction adjusting mechanism for moving the optical axis detection unit to the reference laser beam and the reverse direction.
An adjusting device for a non-planar mirror , comprising: an advancing / retreating mechanism for advancing / retreating in the optical axis direction of the emitted light .