JP2002162548A - Method for detecting optical axis of optical component and equipment thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately detect the optical axis of reflection using a simple constitution, and to efficiently adjust the alignment of an optical component. SOLUTION: The equipment for detecting the optical axis of an optical component has a standard light unit 10, which emits a standard laser beam L, having a set optical axis and an optical axis unit 70 for detecting the optical axis of a reflecting mirror 142 via the standard laser light L. The optical axis unit 70 has first and second pinhole plates 74, 76, disposed separated by a prescribed interval and first, and second pinholes 80, 90 have been formed in the first and second pinhole plates 74, 76.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for detecting an optical axis of an optical component constituting a laser optical device.

[0002]

2. Description of the Related Art Usually, for example, a laser processing device, a laser measuring device, and the like are employed as laser optical devices using laser light. In this type of laser optical device, various types of optical components such as a lens system and a reflecting mirror are incorporated in order to guide a laser beam to a predetermined irradiation position. Further, the reflecting mirror has various forms such as a plane mirror, a parabolic mirror, and an elliptical mirror.

[0003] Therefore, when assembling a laser optical device, it is desired to accurately perform layout adjustment of various optical components and alignment adjustment such as focus measurement. This is to ensure high-quality laser processing and high-precision laser measurement.

[0004]

Generally, in the above-mentioned alignment adjustment operation, the optical component is irradiated with reference light to detect reflected light from the optical component, and the optical component is detected based on the detected reflected optical axis. The position and the angle of the optical component are adjusted.

However, in order to accurately adjust the alignment of the optical components, it is necessary to detect the only accurate reflected optical axis that coincides with the mechanical axis. However, it is considerably difficult to accurately detect such a reflected optical axis,
It has been pointed out that the alignment of optical components cannot be adjusted with high precision.

The present invention solves this kind of problem. With a simple structure, the reflected optical axis can be detected with high accuracy, and the alignment adjustment of optical components can be performed efficiently and accurately. It is an object to provide a method and an apparatus for detecting an optical axis of an optical component.

[0007]

According to the method and apparatus for detecting the optical axis of an optical component according to the present invention, a reference laser beam is applied to the optical component, and light reflected from the optical component is incident on the optical axis unit. This optical axis unit has first and second pinhole plates that are arranged at a predetermined distance from each other, and has pores formed in the first and second pinhole plates. Thus, only when the optical component is arranged at a predetermined angle and at a predetermined position, the reflected light from this optical component passes through the respective pores of the first and second pinhole plates, and Is detected by
The optical component can be positioned with high accuracy.

In other words, when the reflected light from the optical component is measured at a single measuring point, the deviation of the reflected optical axis, which is likely to be caused, is reliably detected, and the positioning accuracy of the optical component can be improved with a simple configuration. To improve. This optical component is a flat mirror,
It is also effectively applied to non-planar reflecting mirrors such as parabolic mirrors and elliptical mirrors. Furthermore, if the optical axis detection unit is arranged corresponding to the measurement position, the optical axis position of the reflected light that passes through the optical axis unit and irradiates the optical axis detection unit can be accurately detected.

In the present invention, first, the optical axis detection unit is irradiated with a reference laser beam to detect a first optical axis position (light spot position) of the reference laser beam. From the optical path and irradiates the optical component with the reference laser light. At this time, the second light axis position of the reference laser light is detected by introducing the reflected light from the optical component into the optical axis detection unit arranged on the optical path of the reflected light. Then, the position adjustment of the optical component is performed so that the first optical axis position and the second optical axis position match. Therefore, the optical axis position of the reflected light of the reference laser light reflected by the optical component can be measured with high accuracy, and the absolute position of the reflected light from the optical component can be easily detected.

At this time, the optical axis (optical axis) of the optical axis detection unit
The measurement surface is rotated around an axis intersecting the optical axis of the reference laser light. Here, if the optical axis measurement surface and the rotation axis do not match,
The detected optical axis moves due to the rotation of the optical axis detection unit. Therefore, by adjusting the position of the optical axis measurement surface in the optical axis direction so that the optical axis position of the reference laser light does not change, the optical axis measurement surface position of the reference laser light is detected.

Further, in the present invention, the reference laser light is reflected by the optical component, and the reflected light is introduced into the optical axis detecting unit, and the first optical axis position of the reference laser light is detected. Next, after the optical axis detection unit is moved by a predetermined distance in the optical axis direction of the reference laser beam, the reference laser beam is irradiated on the optical component, and the reflected light is introduced into the optical axis detection unit and the reference laser beam is emitted. A second optical axis position of the light is detected. Then, by adjusting the position of the optical component so that the first and second optical axis positions match, the alignment of the optical axis is easily performed.

[0012]

FIG. 1 shows a reference light unit 10 constituting an optical axis detecting device for an optical component according to an embodiment of the present invention.
FIG. 2 is a side view of the reference light unit 10.

The reference light unit 10 has a function of irradiating a reference laser beam L used for measurement of various optical components and the like, and has a laser light unit 14 in which a laser oscillator 12 such as a He-Ne laser is incorporated. A rotation mechanism 18 for rotating the laser light unit 14 around an optical axis with respect to a support cylinder 16, and an optical axis of the reference laser light L derived from the laser light unit 14 to the reference light unit 10.
And a light center adjusting mechanism 20 for making the rotation center coincide with the rotation center.

The reference light unit 10 includes a unit base 24 fixed on a measurement base 22. The support cylinder 16 is mounted on the unit base 24 via a left and right slide mechanism 26 and a vertical slide mechanism 28. The left and right slide mechanism 26 has a guide rail 30 provided on the unit base 24 in the direction of arrow B perpendicular to the optical axis direction (direction of arrow A).
A slide base 32 that can move forward and backward in the direction of arrow B is disposed at 0. A first micrometer 34 is fixed on the unit base 24 in the horizontal direction, and a rod 36 of the first micrometer 34 is fixed to the slide base 32.

A column 38 is provided on the slide base 32, and a pair of guide rails 40 constituting the vertical slide mechanism 28 are fixed to the inner side of the column 38 in the vertical direction. A pair of guide portions 42 are provided on both sides of the support cylinder 16 so as to be movable up and down by engaging with the guide rails 40, and a second micrometer 44 is provided vertically above the one end of the column 38 in a vertically downward direction. Be attached.
A rod 46 projecting downward from the second micrometer 44
Are fixed to the support cylinder 16.

A rotary cylinder 50 is rotatably supported in the support cylinder 16 via a pair of bearings 48 constituting the rotation mechanism 18, and the laser oscillator 12 is accommodated in the rotary cylinder 50. . The holding members 52 are attached to both ends of the laser oscillator 12, and the small-diameter portions 54 of the holding members 52 are inserted into the rotary cylinder 50.

The optical center adjusting mechanism 20 has three adjusting screws 56 which are screwed into the opposite end portions of the rotary cylinder 50 at equal angular intervals, respectively, and the tip of the adjusting screw 56 is a small diameter portion of the holding member 52. The contact with 54 causes the optical axis of the laser oscillator 12 to be tilted and adjusted.

As shown in FIG. 2, the laser light unit 14
A beam diameter enlarging means 66 for enlarging the beam diameter of the reference laser beam L is detachably provided on the tip side of the laser beam.
The beam diameter expanding means 66 is, for example, 0.8 mm in diameter.
And converts the reference laser light L into parallel light (collimated light) having a diameter of 25 mm. The filter unit 68 includes a combination of various types of pinhole assemblies and focusing lenses, and a lens including a lens set for a beam expander. And a unit 69.

FIG. 3 is a perspective view of an optical axis unit 70 which constitutes the optical axis detecting device and adjusts the optical axis of the reference optical unit 10, and FIG. 4 is a side view of the optical axis unit 70. .

The optical axis unit 70 has a unit base 72 fixed to the measurement base 22, and first and second pinhole plates 74 and 76 are mounted on the unit base 72 at a predetermined interval. The first pinhole plate 74 is
The first pinhole plate 74 is supported by a first support plate 78 fixed on the unit base 72, and a first hole 80 having a predetermined diameter is formed in the center of the first pinhole plate 74.

The first pinhole plate 74 has a first fine hole 80.
A first pore position adjusting mechanism 82 is provided for adjusting the position in the horizontal direction (arrow B direction) and the vertical direction (arrow C direction) crossing the optical axis (arrow A direction). The first fine hole position adjusting mechanism 82 is provided in the horizontal direction to move the first pinhole plate 74 forward and backward in the left-right direction.
4 and the first pinhole plate 74 disposed vertically
And a second adjusting screw 86 for adjusting the position of the second member in the vertical direction.

The second pinhole plate 76 is supported on a second support plate 88 like the first pinhole plate 74, and has a predetermined diameter at the center of the second pinhole plate 76. The second pore 90 is formed. The second pinhole plate 76 is provided with a second fine hole position adjusting mechanism 92. The second fine hole position adjusting mechanism 92 is configured in the same manner as the first fine hole position adjusting mechanism 82, and the same components are denoted by the same reference numerals and detailed description thereof will be omitted.

First and second pinhole plates 74 and 76
Has a diameter of about 0.8 mm like the reference laser beam L,
It is used to adjust so-called point light. For example, in order to adjust the collimated reference laser light L0 which is a collimated light having a diameter of about 25 mm, FIG.
The first and second pinhole plates 94a and 94b shown in FIG.
It is used in place of the first and second pinhole plates 74 and 76. The first and second pinhole plates 94a,
94b has pores 96a and 96b at the center, and four pores 98a and 98b on the circumference having a predetermined diameter with the pores 96a and 96b as the centers.

FIG. 6 shows an optical axis detection device, which detects the optical axis position of the reference laser beam L emitted from the reference optical unit 10, specifically, the optical axis (light spot) for detecting the optical axis position. FIG. 7 is a perspective view of the unit 100, and FIG. 7 is a side view of the optical axis detection unit 100.

The optical axis detection unit 100 includes a measurement base 2
2 and a unit base 102 fixed on the unit base 102, and a first slide base 104 on the unit base 102.
Are arranged to be able to advance and retreat in the optical axis direction (the direction of arrow A) via the advance and retreat mechanism 105. An end of a first slide knob 106 that constitutes an advance / retreat mechanism 105 and is supported by the unit base 102 is fixed to the side of the first slide base 104. The first slide knob 106 is rotated to rotate the first slide knob 106. The first slide base 104 can move forward and backward in the direction of arrow A.

On the first slide base 104, there is provided a rotary base 110 constituting a rotary mechanism 108. The rotary base 110 is operated by operating a rotary knob 112 so as to intersect the optical axis of the reference laser beam L. It is rotatable around an axis (vertical axis). On the rotating base 110,
The second slide base 114 is disposed so as to be able to advance and retreat in the direction of arrow A. An end of a second slide knob 116 is connected to the second slide base 114, and the second slide knob 116 is rotated by a small distance in the direction of arrow A by rotating the second slide knob 116.

An optical axis position detection sensor 118 is mounted on the second slide base 114, and the optical axis position detection sensor 1
A monitor 122 is connected to 18 (see FIG. 8). As described later, the position of the reference laser beam L introduced on the optical axis (light spot) measuring surface 120 of the optical axis position detection sensor 118 is displayed on the monitor 122 as a visible image.

Next, the operation of the optical axis detecting device thus configured will be described below in relation to the optical axis detecting method according to the first embodiment of the present invention.

First, the optical axis adjustment of the reference laser light L is performed so that the optical axis of the reference laser light L derived from the reference light unit 10 coincides with the center of rotation of the reference light unit 10. Next, the optical axis alignment of the optical axis unit 70 and the optical axis detection unit 100 is performed using the reference laser beam L with the optical axis set.

Specifically, as shown in FIG. 9, on the optical axis of the reference light unit 10, an optical axis detecting unit 100 is arranged at a predetermined position. Then, when the reference laser light L is derived from the reference light unit 10, the reference laser light L is applied to the light spot measurement surface 120 of the optical axis detection unit 100. In this state, while rotating the rotation base 110 constituting the rotation mechanism 108,
The second slide base 1 under the action of the slide knob 116
14 is moved back and forth in the optical axis direction.

Then, as shown in FIG.
The second slide base 114 is stopped at a position where the upper optical axis position P does not move. Thereby, the light spot measurement surface 120 and the rotation axis of the rotation mechanism 108 coincide with each other, and the light spot measurement surface 1
Twenty positions will be detected.

On the other hand, in the optical axis alignment operation of the optical axis unit 70, as shown in FIG. 10, a first pinhole plate 74 is disposed between the reference optical unit 10 and the optical axis detection unit 100. Then, the reference laser light L is derived from the reference light unit 10, and the reference laser light L passes through the first fine holes 80 formed in the first pinhole plate 74, and the light spot measurement surface 120 of the optical axis detection unit 100. Is irradiated. In the optical axis detection unit 100, the intensity of the reference laser beam L passing through the first pore 80 is monitored, and the first pore position adjusting mechanism 82 is operated so that the intensity becomes maximum.

Specifically, the first and second adjusting screws 8
The first pinhole plate 7 is operated by operating
4 is adjusted in the vertical and horizontal directions, and
At the position where the intensity of light passing through the first pore 80 becomes maximum, the first pore 80 coincides with the optical axis.

Similarly, a second pinhole plate 76 is arranged between the reference light unit 10 and the optical axis detection unit 100, and the second pinhole plate 76 is formed on the second pinhole plate 76.
An operation for aligning the pores 90 with the optical axis is performed. Thus, the optical axis adjustment of the optical axis unit 70 is performed.

FIG. 11 is a perspective view of a position adjusting unit 140 to which the optical axis detecting method according to the first embodiment of the present invention is applied, and FIG.
0 is a side view.

The position adjusting unit 140 has a reflecting mirror (including a non-planar reflecting mirror) 142 as an optical component integrally mounted on a laser processing device, a laser measuring device, or the like. And a function to adjust the angle.

The position adjustment unit 140 includes the measurement base 2
2, a unit base 144 is mounted on the unit base 144, and a support block 146 is provided on the unit base 144. On the support block 146, a first tilt member 150 that can be horizontally adjusted in angle via a first knob 148 is provided. The first knob 150 has a second knob 152.
A second tilting member 154 that can be tilted in the vertical direction is supported via the second tilting member 154, and the reflecting mirror 142 is mounted on the second tilting member 154.

Therefore, as shown in FIG. 13, a position adjusting unit 140 incorporating a reflecting mirror 142 is disposed on the optical axis S1 of the reference light unit 10, and the optical axis S2 of the reflected light La by the reflecting mirror 142 is arranged. Optical axis unit 7 on top
0 is arranged. When the reference laser light L is derived from the reference light unit 10, the reference laser light L
Is applied to the reflecting mirror 142 along the optical axis S1. When the reflecting mirror 142 is accurately positioned at a predetermined position, the reflected light La from the reflecting mirror 142 is transmitted to the first and second pinhole plates of the optical axis unit 70 disposed on the optical axis S2. The light passes through the first and second pores 80 and 90 formed in 74 and 76 and irradiates the measurement site 130.

At this time, in the optical axis unit 70, the first and second pinhole plates 74 and 76 are separated at a predetermined interval along the optical axis S2, and the reflected light La
Is only coincident with the optical axis S2, the reflected light La
Penetrates through the first and second pores 80 and 90 and
30 is irradiated. Therefore, the reflecting mirror 142 is
As shown by the two-dot chain line, when it is deviated from the desired position, the first pinhole plate 74 and / or the second pinhole plate 76 blocks the reflected light La and
Is not irradiated.

Next, the first and second knobs 148 and 152 constituting the position adjusting unit 140 are selectively operated, and the position of the reflecting mirror 142 is adjusted via the first and second inclined members 150 and 154. Will be And the reflecting mirror 14
At a position where the reflected light La reflected by 2 is transmitted through the first and second pinhole plates 74 and 76 to the measurement site 130, the positioning of the reflecting mirror 142 is performed with high accuracy and reliability. Will be.

In particular, in the first embodiment, the optical axis of the reference laser beam L derived from the reference optical unit 10 is adjusted with high precision so as to coincide with the mechanical axis, and is adjusted on the optical axis S2. First and second pinhole plates 74 and 76 are provided at predetermined intervals. Thus, an effect is obtained that the optical axis alignment of the reflecting mirror 142 can be performed with high accuracy and efficiency with a simple configuration.

In the first embodiment, the measuring part 130 is arranged on the optical axis of the reflected light La,
Although the reflected light La irradiated to the light source is visually detected, a measuring structure incorporating a reflecting mirror and a reticle can be adopted in order to more easily and accurately perform the visual inspection work.

Next, an optical axis detecting method according to a second embodiment of the present invention for adjusting the optical axis position of the reflecting mirror 142 using the reference optical unit 10 and the optical axis detecting unit 100 will be described below. .

As shown in FIG. 14, an optical axis detecting unit 100 is temporarily disposed on the optical axis S1 between the reference optical unit 10 and the reflecting mirror 142 (see a two-dot chain line). Therefore, the reference laser beam L
Is derived, the reference laser beam L is applied to the light spot measurement surface 120 constituting the optical axis detection unit 100. For this reason, as shown in FIG.
The first optical axis position P1 of the reference laser beam L is displayed on the monitor 122 electrically connected to the monitor 8.

Next, the optical axis detection unit 100 is connected to the optical axis S1.
The optical axis detection unit 10
0 or another optical axis detection unit 100
42 is disposed on the optical axis S2 of the reflected light La. In this state, when the reference laser light L is emitted from the reference light unit 10, the reference laser light L is reflected by the reflecting mirror 142, and the reflected light La is reflected on the optical axis S2 by the optical axis detection unit. 100 is introduced. In this optical axis detection unit 100, the reflected light La is introduced into the light spot measurement surface 120, so that the second optical axis position P 2
Is displayed (see FIG. 15).

Then, the first detected on the optical axis S1
And the second optical axis position P2 of the reflected light La from the reflecting mirror 142.
2 is performed. Thus, in the second embodiment, it is only necessary to use the reference light unit 10 and the optical axis detection unit 100, and the optical axis positions P1, P2 of the reflecting mirror 142 can be changed with the optical axes S1, S2 by a simple configuration and process. There is an advantage that it is possible to match with high accuracy and easily.

Next, an optical axis detecting method according to a third embodiment of the present invention performed using the reference light unit 10, the optical axis unit 70 and the optical axis detecting unit 100 will be described.
This will be described with reference to FIG. In this third embodiment,
The reflecting mirror 142 is also effectively used for adjusting the position of a non-planar reflecting mirror such as a parabolic mirror or an elliptical mirror.

The optical axis S2 of the reflected light La from the reflecting mirror 142
The optical axis unit 70 is disposed on the upper side, and the optical axis detection unit 100 is disposed on the exit side of the optical axis unit 70. In the third embodiment, the reference light unit 10
Is reflected by the reflecting mirror 142, and the reflected light La is the first laser light L constituting the optical axis unit 70.
The position and angle of the reflecting mirror 142 are adjusted so that the light passes through the second pinhole plates 74 and 76 and irradiates the light spot measurement surface 120 of the optical axis detection unit 100.

FIG. 17 is an explanatory diagram of an optical axis detecting method according to the fourth embodiment in which the reflecting mirror 142 is adjusted using the reference light unit 10 and the optical axis detecting unit 100.

In the fourth embodiment, first, the optical axis detecting unit 100 is arranged at a first position (see a two-dot chain line in FIG. 17) close to the reflecting mirror 142 on the optical axis S2, The unit 10 is driven to emit the reference laser light L. The reference laser light L is reflected by the reflecting mirror 142, and the reflected light La is applied to the light spot measurement surface 120 of the optical axis detection unit 100 disposed at the first position.
Therefore, the first optical axis position of the reflected light La is detected.

Next, the optical axis detection unit 100 sets the optical axis S
2 is disposed at a second position apart from the reflecting mirror 142 (see the solid line in FIG. 17). In this state, the reference laser light L derived from the reference light unit 10 is reflected by the reflecting mirror 142, and the reflected light La is applied to the light spot measuring surface 120 constituting the optical axis detection unit 100, and the reflected light La
Is detected as the second optical axis position P2. Then, the first optical axis position P of the reflected light La at the first position obtained in advance.
The position of the reflecting mirror 142 is adjusted so that 1 and the second optical axis position P2 of the reflected light La at the second position match.

As described above, in the first to fourth embodiments, the reference optical unit 10 for deriving the reference laser beam L having the optical axis set is prepared, and the optical axis unit 70 and the optical axis detection unit 100 are provided. By selectively or in combination, the optical axis adjustment of various optical components including the reflecting mirror 142 can be performed with high accuracy and efficiency. This simplifies the configuration, achieves the advantage of being extremely versatile, and achieves high-precision alignment adjustment of various optical components, and performs high-quality laser processing and laser measurement. Benefits are obtained.

[0053]

According to the method and apparatus for detecting the optical axis of an optical component according to the present invention, a reference laser beam having an optical axis set is applied to the optical component, and the light reflected from the optical component is reflected by the optical axis unit and / or By irradiating the optical axis detection unit, the optical axis adjustment work of various optical components can be performed with high accuracy.

Moreover, the reflected optical axis of the optical component can be detected with high accuracy, and the optical axis detection and adjustment work of various optical components can be performed with high accuracy and efficiency with a simple process and structure.

[Brief description of the drawings]

FIG. 1 is a perspective view of a reference light unit included in an optical axis detection device according to an embodiment of the present invention.

FIG. 2 is a side view of the reference light unit.

FIG. 3 is an explanatory perspective view of an optical axis unit constituting the optical axis detecting device.

FIG. 4 is an explanatory side view of the optical axis unit.

FIG. 5 is a perspective view of an optical axis unit on which a pinhole plate is mounted.

FIG. 6 is an explanatory perspective view of an optical axis detection unit constituting the optical axis detection device.

FIG. 7 is an explanatory side view of the optical axis detection unit.

FIG. 8 is an explanatory diagram of a display screen of a monitor constituting the optical axis detection unit.

FIG. 9 is a plan view illustrating an adjustment operation of the optical axis detection unit.

FIG. 10 is an explanatory side view when the optical axis unit is adjusted.

FIG. 11 is an explanatory perspective view of a position adjustment unit.

FIG. 12 is a side view of the position adjustment unit.

FIG. 13 is an explanatory diagram of an optical axis detection method according to the first embodiment of the present invention.

FIG. 14 is an explanatory diagram of an optical axis detection method according to a second embodiment of the present invention.

15 is a front view of a display screen of a monitor for explaining the detection method shown in FIG.

FIG. 16 is an explanatory diagram of an optical axis detection method according to a third embodiment of the present invention.

FIG. 17 is an explanatory diagram of an optical axis detection method according to a fourth embodiment of the present invention.

[Description of Signs] 10 ... Reference light unit 12 ... Laser oscillator 14 ... Laser light unit 16 ... Support cylinder 18 ... Rotating mechanism 20 ... Optical center adjustment mechanism 22 ... Measurement base 24 ... Unit base 26 ... Left and right slide mechanism 28 ... Vertical slide Mechanism 50: Rotating cylinder 56: Adjusting screw 66: Beam diameter expanding means 70: Optical axis unit 72: Unit base 74, 76, 94a, 94b: Pinhole plate 80, 90, 96a, 96b, 98a, 98b: Micropore 82, 92: fine hole position adjusting mechanism 100: optical axis detecting unit 102: unit base 105: forward / backward mechanism 118: optical axis position detecting sensor 120: light spot measuring surface 122: monitor 130: measuring part 140: position adjusting unit 142: Reflecting mirror L: Reference laser beam La: Reflected light

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F065 AA19 AA31 EE00 FF23 FF67 GG05 JJ03 JJ19 JJ26 LL04 LL09 LL21 LL30 PP03 PP05 QQ28 2H043 AD03 AD07 AD11 AD17 AD21 AD23 4E068 CA06 CB09 CD08 CD10

Claims (10)

[Claims] 1. A method for detecting an optical axis of an optical component constituting a laser optical device, comprising: irradiating the optical component with a reference laser beam having an optical axis set, and reflecting light reflected from the optical component on an optical axis unit. Incident on the optical axis unit, and the reflected light is detected at the measurement site by passing through the respective pores provided in the first and second pinhole plates arranged at a predetermined distance from each other in the optical axis unit. An optical axis of the optical component, comprising: determining whether or not the reflected light is not detected at the measurement site; and adjusting the position and / or angle of the optical component. Detection method. 2. The optical axis detecting method according to claim 1, further comprising the step of: irradiating the reflected light to an optical axis detecting unit arranged corresponding to the measurement position, and detecting an optical axis position of the reflected light. A method for detecting an optical axis of an optical component, comprising: 3. A method for detecting an optical axis of an optical component constituting a laser optical apparatus, comprising: a reference optical unit for deriving a reference laser beam having an optical axis set; and an optical axis detecting unit between the optical component. Arranging, irradiating the optical axis detection unit with the reference laser light to detect a first optical axis position of the reference laser light, and after detaching the optical axis detection unit from an optical path, the reference The optical component is irradiated with a laser beam, and the reflected light from the optical component is introduced into an optical axis detection unit disposed on the optical path of the reflected light, and a second optical axis position of the reference laser beam is detected. And a step of adjusting the position of the optical component so that the first optical axis position and the second optical axis position coincide with each other. . 4. A method for detecting an optical axis of an optical component constituting a laser optical apparatus, comprising: irradiating a reference laser beam having an optical axis set to the optical component to detect reflected light from the optical component; Detecting the first optical axis position of the reference laser light, and moving the optical axis detection unit in the optical axis direction of the reference laser light. Irradiating the first optical axis position with the second optical axis position of the reference laser beam by introducing the reflected light from the optical component into the optical axis detection unit, and detecting the second optical axis position of the reference laser light. Adjusting the position of the optical component so that the optical axis position coincides with the optical axis position. 5. The optical axis measuring surface according to claim 3, wherein the optical axis measuring surface of the optical axis detecting unit is rotated around an axis intersecting the optical axis of the reference laser beam. A step of positioning the optical axis detection unit at a position where the optical axis position of the reference laser light applied to the optical disk does not fluctuate. 6. An optical axis detecting device for an optical component constituting a laser optical apparatus, comprising: a reference light unit for deriving a reference laser beam having an optical axis set; An optical axis unit for detecting an optical axis, wherein each of the optical axis units has first and second apertures formed therein and spaced apart from each other by a predetermined distance;
An optical axis detecting device for an optical component, comprising: a pinhole plate; and a fine hole position adjusting mechanism for adjusting the positions of the first and second pinhole plates in a direction intersecting the optical axis. 7. An optical axis detecting device according to claim 6, further comprising an optical axis detecting unit for detecting an optical axis position of said reference laser beam transmitted through said first and second pinhole plates. Optical axis detection device for optical parts. 8. An optical axis detection device for an optical component constituting a laser optical device, comprising: a reference light unit for deriving a reference laser beam having an optical axis set; An optical axis detection device for an optical component, comprising: an optical axis detection unit for detecting an optical axis position. 9. The optical axis detection device according to claim 8, further comprising a rotation mechanism for rotating an optical axis measurement surface of the optical axis detection unit around an axis intersecting an optical axis of the reference laser beam. Axis detection device for optical components. 10. The optical axis detecting device according to claim 8, further comprising an advance / retreat mechanism for causing the optical axis detection unit to advance / retreat in the optical axis direction of the reference laser beam. apparatus.