KR100945575B1 - Apparatus for inspecting glass - Google Patents

Abstract

The present invention relates to a novel glass surface inspection apparatus including an illumination system and a camera of the upper and lower parts of which angle is adjustable, and a glass substrate jig means capable of moving and rotating in the X-Y direction.

The present invention enables all the scattering components according to the surface state of the glass substrate while operating in a total of six axes, such as to enable the 360 ° rotation and XY direction movement of the glass substrate, and to adjust the angle of the illumination system and the camera installed on the upper and lower parts. The present invention provides a glass surface inspection apparatus capable of analyzing the light, and analyzing the transmitted light according to the top and bottom surface materials and surface roughness of the glass substrate and inspecting the glass internal components.

Optical Glass Substrates, Machine Vision, Lasers, Cameras

Description

Apparatus for inspecting glass

1 is a perspective view showing a surface inspection apparatus of glass according to an embodiment of the present invention

Figure 2 is a front view showing a surface inspection apparatus of the glass according to an embodiment of the present invention

Figure 3 is a perspective view showing the illumination system / camera mounting stand in the surface inspection apparatus of the glass according to an embodiment of the present invention

Figure 4 is a front view showing the installation state of the surface inspection apparatus of the glass according to an embodiment of the present invention

Figure 5 is a perspective view showing the working state of the surface inspection apparatus of the glass according to an embodiment of the present invention

6 is a schematic view showing a surface inspection method of a conventional glass

<Description of the symbols for the main parts of the drawings>

10 glass jig device 11: the upper plate

12: lighting system 13: camera

14: lighting system mount 15a, 15b: camera mount

16: upper vision device 17: lower plate

18: lower vision device 19: glass fixing portion

20: rotating plate 21: guide hole

22: screw adjusting device 23a, 23b: fine screw adjusting device

24: base 25: frame structure

26: motor 27: guide rail

28: motion block

The present invention relates to a surface inspection apparatus of glass, and more particularly, by implementing a new type inspection system including an illumination system and a camera having an angle adjustable, and a glass substrate jig means capable of moving and rotating in the XY direction. The present invention relates to a glass surface inspection apparatus capable of inspecting not only the upper surface of the glass substrate but also the lower surface and the interior thereof, and thus greatly reducing inspection time and post-treatment.

Generally, the surface inspection apparatus of glass using machine vision technology is applied differently according to each field and use.

The surface state of the glass substrate is usually inspected using a combination of a camera and an illumination system having a visible light wavelength range.

As a conventional glass substrate inspection method, there is a method of inspecting a surface using a dark field method or a bright field method.

For example, as shown in FIG. 6, after irradiating light to the surface of the inspection object 110 using the illumination system 100, the light reflected from the surface is detected by the camera 120 to confirm a defective state. There is a way.

Here, reference numeral 130 is a means for analyzing / determining the detection value provided from the camera.

This method uses two cameras to detect the reflected light and the light reflected in different directions depending on the surface condition.

However, the above inspection method can only inspect the upper surface of the glass, it is impossible to inspect under and inside the glass.

In addition, the inspection of the glass bottom surface requires the manual labor and post-treatment of the worker twice, there is a disadvantage that the glass top and bottom surface can not be inspected at the same time.

When the surface inspection uses an illumination system having a visible light wavelength range, that is, in the case of halogen lighting, the characteristics reflected from the surface will vary the transmission and reflection characteristics of light depending on the wavelength band.

In the visible wavelength range, the variable illumination state cannot be maintained at a specific wavelength when the dark field inspection method is applied, and its characteristics do not appear uniformly in the image but appear as a lot of noise.

In addition, the light reflected from the surface depends on the material of the object, the height of the surface shape, the inclination, the surface state, the curvature, etc. In the conventional inspection method can not detect the light scattered in all directions, so the reliability of the inspection is inferior do.

Therefore, the present invention has been devised in view of such a point, and enables operation of a total of 6 axes such as 360 ° rotation and XY direction movement of the glass substrate, and angle adjustment of the illumination system and the camera installed in the upper and lower parts. While analyzing the scattering components according to the surface state of the glass substrate, and analyzes the transmitted light according to the top and bottom surface materials and surface roughness of the glass substrate and a glass surface inspection device that can inspect the internal components of the glass The purpose is to provide.

Glass surface inspection apparatus according to an embodiment of the present invention for achieving the above object is a glass jig device that can move the glass substrate in the XY direction through the motor transfer as a portion is set the glass substrate, the glass substrate The upper vision, which includes an illumination system mount and a camera mount arranged at a certain distance from each other, having an illumination system for illuminating light and a camera for detecting light, and having an angle control on a vertically arranged upper plate as a part for inspecting a surface. A lower vision comprising a device and a camera mount having a camera for light detection arranged angularly on a lower plate arranged vertically as a part for inspecting the bottom surface of the glass substrate and inspecting the components refracted through the top surface It is characterized by consisting of a device.

In addition, the glass jig device is characterized in that it comprises a rotating plate to enable the 360 ° rotation of the glass fixing portion is set the glass substrate.

In addition, the glass fixing part of the glass jig device is characterized in that it is installed in a structure that can be attached and detached in case of changing the size of the glass substrate.

In addition, the illumination system mount and the camera mount of the upper vision device is guided by using at least two rows of guide holes formed over a predetermined period while having a curved track on the upper plate, ± 20 ° to 85 ° in both directions with respect to the surface normal. It is characterized in that the angle adjustable to °.

In addition, the camera mounting unit of the lower vision device is guided using at least two rows of guide holes formed over a predetermined period while having a curved track on the lower plate, and ± 55 ° (110 ° total) in both directions with respect to the surface normal. It is characterized in that the angle adjustable to be possible.

In addition, the illumination system / camera mounting of the upper vision device and the lower vision device is characterized in that it is possible to adjust the position of the illumination system and the camera up and down by the operation of the screw adjustment device.

In addition, the illumination system / camera mount of the upper vision device and the lower vision device is characterized in that the fine position of the illumination system and the camera can be adjusted by the operation of the two fine screw adjustment device.

In addition, the illumination system of the upper vision device is characterized in that the laser slit beam illumination system.

The surface inspection apparatus of glass provided by this invention consists of a combination of the part which sets a glass substrate largely, the part which inspects the upper surface of a glass substrate, and the part which inspects the lower surface and a permeation | transmission component of a glass substrate. .

For example, the glass substrate is installed in a jig device which can be moved in the X-Y direction through motor transfer, and the jig device is provided with a rotating plate which rotates the glass fixing part holding the glass substrate by 360 °.

In addition, the glass fixing part is detachably configured according to whether or not the size of the glass substrate is changed, so that the fixing part can be replaced according to the size change.

In addition, the jig device is configured to allow motor control in the X-Y direction so that the entire glass substrate can be inspected.

In addition, a vision system is provided so that the illumination system, for example, the laser slit beam and the camera can accurately inspect one point of the glass substrate.

The illuminator and camera of this vision device can adjust its angle and are divided into upper side and lower side.

The upper side may inspect the upper surface of the glass substrate according to the angle of the illumination system and the camera, and the lower side may inspect the lower surface of the glass substrate and the components that are refracted through the upper surface.

The mounting table provided in the vision device is capable of reciprocating up and down, and the illumination system and the camera are configured to enable fine scale adjustment in the up / down / left / right directions.

Hereinafter, with reference to the accompanying drawings will be described in detail the surface inspection apparatus of the glass according to an embodiment of the present invention.

1 is a perspective view showing a surface inspection apparatus of a glass according to an embodiment of the present invention, Figure 2 is a front view showing a surface inspection apparatus of a glass according to an embodiment of the present invention.

1 and 2, the glass jig device 10 for setting the glass substrate includes a glass fixing portion 19 for holding the glass substrate, and a glass substrate while supporting the glass fixing portion 19. Rotating plate 20 for rotating the entire glass fixing portion to 360 °, as a drive means for moving the glass substrate in the XY direction includes a motor 26, a guide rail 27 for guiding and the like.

For example, the base 24 is provided with two guide rails 27 parallel to the Y-axis direction, and the guide rails 27 are attached to a screw transmission device (not shown) at the bottom according to the drive of the motor 26. A plate movable in the Y axis is provided, and the plate is provided with a motion block 28 that can be driven in the X axis direction, for example, a linear block and a plate movable in the X axis direction by the linear block. The glass substrate, the glass fixing part 19, and the rotating plate 20 are installed on it.

Here, the linear motor 28 of FIG. 1 is a linear stepping motor, and the entire frame of the glass fixing part 19 supporting the glass fixing part 19 and the rotating plate 20 is a linear moving table of the linear motor 28. It is fastened to and moved in the X direction.

Accordingly, the position of the glass substrate may be moved in the X-Y direction through the motor transfer.

Here, the shape of setting the glass substrate on the glass fixing part can be applied in various forms.

For example, the glass fixing portion 19 is provided with a seating portion having a stepped jaw structure formed along an inner edge thereof, so that the glass fixing portion 19 can be set in such a manner that both ends of the glass substrate are placed on the seating portion.

At this time, the glass fixing portion 19 may be installed to be detachable with a conventional fastening structure while being positioned inside the rotating plate 20 having a substantially ring shape.

As the glass fixing unit 19 is detachable, the glass fixing unit 19 can be easily replaced with a glass substrate that is changed when the glass substrate is changed in size.

The rotating plate 20 serves to rotate the entire glass fixing portion including the glass substrate 360 °.

At this time, the rotating plate may be installed in a manner similar to that in which the glass substrate is seated on the glass fixing part. For example, the rotating plate may be installed in the form of a stepped jaw structure formed along the edge of the circular hole of the plate. If the rotating plate is rotated by hand in a state where the clamping means is released, it is possible to rotate 360 ° regardless of the direction.

Accordingly, when the illumination system and the camera angle setting are completed in the upper and lower vision apparatuses, the glass substrate can be rotated using the rotating plate, and since the rotating plate can rotate 360 °, the components scattered in an arbitrary three-dimensional direction depending on the surface state of the glass substrate can be obtained. All can be analyzed.

The upper vision device 16 and the lower vision device 18 for inspecting the upper surface, the lower surface, and the transmissive components of the glass substrate are vertically arranged in parallel with the upper plate 11 and the lower plate 17. And an illumination system mount 14 and camera mounts 15a and 15b which are assembled to allow angle adjustment on the plate, and an illumination system 12 and a camera 13 attached to each mount.

The illumination system mount 14 and the camera mounts 15a and 15b of the upper vision device 16 and the lower vision device 18 are curved while having a curved track on the upper plate 11 and the lower plate 17. The position may be moved while being guided using at least two side-by-side guide holes 21 formed over the section.

As illustrated in FIG. 2, the guide hole 21 may be disposed in a circle shape forming one concentric circle with the position (height) of the glass substrate as a virtual center point when the apparatus is viewed from the front.

The mounting table is fixed by a bolt member extending through the upper and lower plates at the rear surface of the bracket and a nut member fastened to the bolt member at the rear surface of the upper and lower plates, or when the bolt member and the nut member are released from the guide hole ( After moving the position along 21), it is installed in the structure that can be fixed again at that position.

Further, the illumination system 12 and the camera 13 provided in the illumination system mount 14 and the camera mounts 15a and 15b may be installed in a conventional fastening structure on the front surface of the bracket in the mount.

In addition, the illumination system / camera mounts 14, 15a, and 15b of the upper vision device 16 and the lower vision device 18 may adjust the up and down positions of the illumination system and the camera through the operation of the screw adjuster 22. It is possible to adjust, and in particular through the operation of the two fine screw adjusting devices (23a, 23b) installed in the direction intersecting with each other is also possible to adjust the fine position in the vertical direction.

To this end, as shown in FIG. 3, the illumination system / camera mounts 14, 15a, and 15b are formed by stacking three “C” shaped brackets and interposing two blocks therebetween. Each block is assembled so as to be screw-driven through the screw adjusting device 22 and the fine screw adjusting devices 23a and 23b supported on both sides of the bracket while being closely adhered to the bracket surface. It consists of a structure guided by a guide bar.

In particular, the two fine screw adjusting devices (23a, 23b) are arranged in the form of 90 degrees cross each other, it is possible to fine-tune the vertical and horizontal direction of the illumination system or the camera.

The illumination system 12 and the camera 13 are installed on the front of the bracket located at the top, the bracket located at the bottom is in close contact with the front of the upper and lower plates 11, 17, the bolt member and the nut member Using the fastening of the to support the entire installation.

Accordingly, when the knob of the screw adjusting device 22 is operated, the illumination system and the camera can be moved up and down by using the movement of the screw adjusting device 22 and the screw-driven lower block. By operating the knob of (23a), the illumination system or the camera can be finely moved up and down by using the movement of the upper block, and by operating the knob of the other fine screw adjusting device 23b, the movement of the upper bracket is used. To finely move the illumination system or the camera in the left and right directions.

Figure 4 is a front view showing the installation state of the surface inspection apparatus of the glass according to an embodiment of the present invention.

As shown in FIG. 4, an apparatus for inspecting the surface of the glass is supported using the frame structure 25.

For example, the upper plate 11 and the lower plate 17 including the illumination system / camera are installed on the frame structure 25 while being vertically positioned up and down, and a base including a glass jig device in which a glass substrate is set. 24 is installed on the frame structure 25 while being disposed in a horizontal position between the upper and lower plates 11 and 17.

5 is a perspective view showing a working state of the surface inspection apparatus of the glass according to an embodiment of the present invention.

As shown in FIG. 5, the glass surface inspection apparatus configured to move in total six axes in order to be able to analyze all the scattering components according to the glass surface state is shown.

First, the glass jig apparatus 10 may be set to the glass substrate G, and the entire glass substrate may be automatically inspected by controlling the transfer of the glass substrate in the X-Y direction through motor control.

In addition, when the glass substrate is rotated using a rotating plate capable of rotating 360 °, all components scattered in an arbitrary three-dimensional direction can be analyzed according to the surface state.

Next, looking at the case of the upper and lower vision apparatus 16, 18, after the angle adjustment on the upper and lower plates 11, 17 in the case of the illumination system / camera mount 14, 15a, 15b, respectively, When the angle of the illumination system and the camera is set, it can be moved up and down along the set angle axis in a fixed state.

In addition, the illumination system 12 and the camera 13 can finely adjust the scale up / down / left / right.

After completing any transfer of the mount, fine adjustment can be made in the up / down direction to precisely focus the respective illumination system and camera.

Then, irradiating an incident beam of an illumination system, for example a laser, on a surface on a glass substrate, the fine scale can be adjusted in the left / right direction along the angular axis to center it.

The degree and direction of scattering of light vary depending on the surface and the internal state of the glass substrate.

Therefore, in order to accurately analyze the surface state using the illumination system 12 such as a laser slit beam, a mechanism capable of inspecting the direction in which main scattering occurs is required.

To this end, it is possible to analyze all the components scattered according to the upper surface state in the upper vision device 16, the upper vision device 16 at this time can be adjusted to ± 20˚ ~ 85˚ in both directions based on the surface normal In addition, the mounting table is detachably formed in the normal direction of the surface, so that scattering components can be analyzed even in a direction perpendicular to the surface.

Basically, the reflection of the glass can be seen as two components that are reflected from the upper surface and light is transmitted and refracted by the upper surface and reflected downward in the glass.

In this case, since the reflection refracted by the transmission is not an independent component with respect to the upper surface, the angle of the transmission refracted reflection is changed according to up / down and internal states, and various scattered in the downward direction of the glass surface.

Therefore, in order to detect and analyze the components that cause scattering in the downward direction, the lower vision device 18 can be angled up to ± 55 ° (total 110 °) in both directions with respect to the surface normal, thereby downwards. All components that cause scattering can be detected and analyzed.

Here, the most important factor that causes scattering in any arbitrary direction depending on the surface condition is the most important angle of illumination of the laser, and the reliable analysis of the surface state is achieved while adjusting the detection angle of the camera according to the laser illumination angle. do.

Through the operation of each upper / lower vision device, it is possible to acquire all scattering components according to the glass upper / lower surface and internal condition, and to simultaneously inspect and analyze the upper / lower surface and internal condition.

At this time, the method for analyzing the surface and the internal state of the glass substrate with the detection value provided from the camera can be adopted without particular limitation as long as it is a method commonly known in the art.

As described above, the present invention has the advantage of being able to analyze all the scattering components according to the surface state and at the same time analyze the transmitted light according to the upper and lower surface material and surface roughness and inspect the glass internal components.

In addition, there is an advantage that can analyze the reflection characteristics of the upper surface of the glass substrate in the upper side camera, and the reflection characteristics refracted through the upper and lower surfaces and the inside of the glass substrate in the lower side camera.

In addition, by applying a laser slit beam having a constant wavelength to the illumination system, the angle is deflected according to the surface state when inspecting defects such as dents at grazing incidence angle without affecting the change in reflection characteristics of the surface state There is an advantage that can be analyzed.

In addition, not only the upper surface inspection as before, but also the glass surface and upper and lower surface inspection can be performed at the same time, there is an advantage that can significantly reduce the inspection time and post-treatment work.

Therefore, it is possible to accurately classify all the defective standards required in the industrial site, and there is an effect that can detect ultra-fine defects according to the scattering analysis of defects.

In addition, it can be applied to all glass-based surface inspection, which can bring various effects in terms of industrial and economic aspects.

Claims (8)

A glass jig device 10 capable of moving the glass substrate in the X-Y direction through motor transfer as a portion to which the glass substrate is set; As a part for inspecting the upper surface of the glass substrate, the angle can be adjusted on the upper plate 11 which is vertically arranged and has a predetermined distance from each other while having an illumination system 12 for light irradiation and a camera 13 for light detection. An upper vision device 16 including an illumination system mount 14 and a camera mount 15a disposed therein; And A camera mount 15b having a camera 13 for detecting light and arranged at an angle on the lower plate 17 arranged vertically as a portion for inspecting the lower surface of the glass substrate and the components that are refracted through the upper surface. It consists of a lower vision device 18, including, The illumination system mount 14 and the camera mount 15a of the upper vision device 16 and the camera mount 15b of the lower vision device 18 are curved on the upper plate 11 and the lower plate 17, respectively. The surface inspection apparatus of the glass, characterized in that it is possible to adjust the angle while being guided along the guide holes 21 of at least two rows formed over a predetermined period while having a trajectory. The glass surface inspection apparatus according to claim 1, wherein the glass jig device (10) includes a rotating plate (20) which enables 360 ° rotation of the glass fixing portion (19) on which the glass substrate is set. The glass surface inspection apparatus according to claim 1 or 2, wherein the glass fixing part (19) of the glass jig device (10) is installed in a detachable structure in preparation for changing the size of the glass substrate. delete 2. The surface inspection apparatus of claim 1, wherein the camera mount 15b of the lower vision device 18 is capable of adjusting an angle up to ± 55 ° (total 110 °) in both directions with respect to the surface normal. . The illumination system / camera mounts 14, 15a, 15b of the upper vision device 16 and the lower vision device 18 are operated by the screw adjusting device 22. Surface inspection apparatus of the glass, characterized in that the vertical position of the camera can be adjusted. The illumination system / camera mounts 14, 15a, and 15b of the upper vision device 16 and the lower vision device 18 are two fine screw adjusting devices 23a and 23b. The apparatus for inspecting a glass surface, characterized in that the fine position of the illumination system and the camera can be adjusted in the vertical direction by the manipulation of the camera). The surface inspection apparatus according to claim 1, wherein the illumination system (12) of the upper vision device (16) is a laser slit beam illumination system.

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