JP2004219251A - Surface property measuring instrument, tool for surface property measuring instrument, and adjustment method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To adjust an optical axis for measuring the curvature radius of a specimen such as a diamond indenter. <P>SOLUTION: In using this surface property measuring instrument 10, a diamond indenter 16 is fixed to an indenter holder to measure the curvature radius of its end part by a microscopic collimation method. Prior to the measurement of the curvature radius, a tool for optical axis adjustment is fixed to the indenter holder, the tool having the same flange as the diamond indenter 16 has and having a single lens on its end. While moving the tool for optical axis adjustment along the optical axis of irradiation, a pinhole image at the center of curvature and that at an apparent center of the curvature are observed to adjust the inclination of the indenter holder. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a surface texture measuring instrument, and more particularly, to optical axis adjustment when measuring a radius of curvature of a subject.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, various optical instruments have been used for measuring surface properties such as roughness, undulation, and shape of a surface of a subject. Typically, a reference surface is prepared for the surface portion of the subject of interest, and the interference of the subject of interest is generated using interference fringes generated by light reflected from the surface portion and the reference surface. It measures the surface properties.
[0003]
As an example of the subject, there is a diamond indenter used for measuring hardness of a mechanical device or the like. The Rockwell hardness tester presses a diamond indenter into a specimen and measures the hardness of the specimen based on the amount of permanent deformation of the hollow. As the diamond indenter to be press-fitted, a conical shape having a vertex angle of 120 degrees and a vertex of a tip portion machined into a spherical surface having a radius of curvature of 0.2 mm is used. Since errors in the apex angle and radius of curvature of the conical shape greatly affect the results of the hardness measurement, it is necessary to accurately evaluate these errors before performing the hardness measurement.
[0004]
Among these methods, a micro-collimation method (micro-collimator method) is known for measuring the radius of curvature of the spherical surface at the tip of a diamond indenter. The micro-collimation method utilizes the fact that the amount of light observed when an image of a light source is formed at the tip of the spherical surface and the center of curvature is peaked.
[0005]
FIG. 8 shows an optical system (spherical meter) for measuring a radius of curvature using a microscopic collimation method. The light from the light source passes through a pinhole 200, is converted into parallel light by a lens 202, is reflected by a half mirror 204, is condensed by an objective lens 206, and is irradiated on a diamond indenter 208. In the figure, the tip (indenter) of the diamond indenter is represented by a spherical surface. The diamond indenter 208 is mounted on a holder, and the holder is driven by a driving mechanism along the optical axis. The reflected light from the diamond indenter 208 enters the CCD sensor 212 via the objective lens 206, the half mirror 204, and the lens 210. The pinhole 200 forms an image on the CCD sensor 212, and the pinhole image is focused when reflected at the vertex of the diamond indenter 208 and when reflected at the center of curvature. The amount of movement along the radius becomes the radius of curvature of the diamond indenter 208.
[0006]
[Patent Document 1]
JP-A-2002-54910
[Problems to be solved by the invention]
However, in the measurement of the radius of curvature using the micro-collimation method, it is premised that the central axis of the conical portion of the diamond indenter coincides with the optical axis of the light applied to the diamond indenter as the subject. Since the diamond indenter is mounted on the seat surface of the holder of the surface texture measuring device, in other words, it is assumed that the seat surface of the holder, that is, the reference surface of the holder is perpendicular to the optical axis.
[0008]
In particular, when measuring the apex angle of the conical portion of the diamond indenter using a surface texture measuring device, since the measurement is performed with the diamond indenter inclined with respect to the optical axis, the positional relationship between the optical axis and the holder seat surface changes. Therefore, for example, when measuring the radius of curvature of the conical portion after measuring the apex angle of the conical portion, check whether the holder seating surface is perpendicular to the optical axis, and if not, adjust the holder seating surface vertically. There is a need.
[0009]
An object of the present invention is to provide a surface texture measuring instrument capable of easily and surely adjusting an optical axis, a jig used for the same, and a method.
[0010]
[Means for Solving the Problems]
The present invention is a surface texture measuring device that irradiates a subject with light from a light source and measures a radius of curvature of the subject using a microscopic collimation method, wherein the light from the light source is directed along a predetermined optical axis. An optical system that guides the reflected light from the subject to an observation device, a holder that supports the subject, and a first adjustment unit that moves the holder along the optical axis. A second adjusting means for adjusting the inclination of the holder with respect to the optical axis; and an optical axis adjusting jig having a single lens at the tip and attached to the holder. The positional relationship between the optical axis and the holder by driving the second adjusting means based on the observation result of the observation device when the lens is irradiated with light from the optical system and driving the first adjusting means. Is adjusted.
[0011]
In the present invention, when measuring a radius of curvature by mounting a subject such as a diamond indenter on a holder, the optical axis is adjusted by mounting an optical axis adjusting jig having a single lens at the tip instead of the diamond indenter. . That is, the observation result when the optical axis adjusting jig is mounted on the holder and driven along the optical axis reflects the inclination between the central axis of the single lens and the optical axis. Since the positional relationship between the central axis of the single lens and the holder is fixed, this reflects the positional relationship between the optical axis and the holder. The holder can be accurately positioned with respect to the optical axis by driving the second driving means in accordance with the observation result and adjusting the positional relationship between the optical axis and the holder. More specifically, a reference surface of a holder on which a subject such as a diamond indenter is mounted is made perpendicular to the optical axis. Thus, even when a subject such as a diamond indenter is mounted on the holder, the subject is accurately positioned without being inclined with respect to the optical axis.
[0012]
In one embodiment of the present invention, a plano-convex lens or a plano-concave lens is used as the single lens.
[0013]
Further, the present invention provides a jig used for a surface texture measuring device. The jig has a flange having the same shape as a flange of a diamond indenter, which is an object of the surface texture measuring device, and has a single lens at a tip end.
[0014]
The present invention also provides an adjustment method for adjusting the angle between the optical axis of the surface texture measuring instrument and the reference plane of the subject holder. This method includes attaching an optical axis adjusting jig having a single lens to the reference surface to the reference plane, moving the optical axis adjusting jig along the optical axis, and detecting the reflected light of the single lens. Detecting a center of curvature of the single lens and an apparent center of curvature; and adjusting an angle of the reference plane according to a positional relationship between the center of curvature and the apparent center of curvature.
[0015]
In one embodiment of the present invention, in the adjusting, the angle of the reference surface is adjusted such that the center of curvature and the apparent center of curvature match on the projection surface of the reflected light of the single lens. Makes the optical axis perpendicular to the reference plane. The center of curvature is the center of curvature of the lens surface of the single lens, and the apparent center of curvature is the optical center of curvature formed by a surface other than the lens surface of the single lens. The apparent center of curvature is defined as a condensing point of light incident from a surface other than the lens surface of the single lens.
[0016]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0017]
FIG. 1 shows a configuration of a surface texture measuring device 10 of the present embodiment. The surface texture measuring device 10 measures the surface texture, the apex angle and the radius of curvature of the conical shape of the tip of the diamond indenter 16 as an object, and includes an optical system 1, a laser head 2 as a light source, and indenter position adjustment. It comprises a mechanism 86 and a reference body position adjusting mechanism 88. It should be noted that the reference body position adjusting mechanism 88 is necessary when measuring the surface properties of the distal end portion, and is not directly used when measuring the radius of curvature.
[0018]
The indenter position adjusting mechanism 86 adjusts the position and orientation of the diamond indenter 16, and includes an XY stage 86a, a translation mechanism 86b, a rotation mechanism 86c, and a tilt mechanism 86d.
[0019]
The XY stage 86a is a mechanism for moving the diamond indenter 16 in a plane orthogonal to the irradiation optical axis, has a horizontal direction and a vertical direction as operation directions, and includes a coarse movement mechanism and a fine movement mechanism for each direction. ing. A combination of a stepping motor and a micrometer mechanism is used for the coarse movement mechanism, and the movable range is 5 mm. A piezoelectric element is used for the fine movement mechanism, and the movable range is 20 μm. The XY stage 86a can control movement in an orthogonal plane with a resolution of 0.01 μm under the control of a position control unit 82 described later.
[0020]
The translation mechanism 86b is a mechanism that translates the diamond indenter 16 in the same direction as the irradiation optical axis, and includes a drive mechanism including the inch worm motor 52. The translation mechanism 86b can control the translation position of the diamond indenter 16 with a resolution of 0.01 μm under the control of the position control unit 82 described later.
[0021]
The rotation mechanism 86c is a mechanism for rotating the diamond indenter 16 about its axis, and uses a stepping motor. The rotation mechanism 86c can irradiate an arbitrary generatrix on the surface of the diamond indenter 16 with light.
[0022]
The tilting mechanism 86d is a mechanism for tilting the diamond indenter 16 about an axis orthogonal to the irradiation optical axis, and uses a piezoelectric element. By the tilt mechanism 86d, the diamond indenter 16 can be inclined up to ± 30 degrees in the pitch direction with respect to the irradiation optical axis, whereby the attitude of the diamond indenter 16 can be finely adjusted.
[0023]
The reference body position adjusting mechanism 88 adjusts the position of the reference body 66, and includes XY stages 88a substantially the same as those in the indenter position adjusting mechanism 86, respectively.
[0024]
The linear encoder 54 is used to read the moving distance of the diamond indenter 16 in the irradiation optical axis direction. The rotary encoder 80 is used to read a rotation angle when the diamond indenter 16 is rotated around an axis orthogonal to the irradiation optical axis.
[0025]
FIG. 2 shows the internal structure of the optical system 1 in FIG. In particular, the state of use when the radius of curvature of the tip of the diamond indenter 16 is measured by the micro-collimation method is shown.
[0026]
Laser light incident from the laser head 2 through the optical fiber 18 is emitted from the pinhole 12, condensed by the objective lens 14, and radiated to the tip 17 of the diamond indenter 16.
[0027]
Here, the light from the optical fiber 18 is condensed by the lenses 20 and 22 sandwiching the optical isolator 19, and then diffused by the rotating diffuser 24. The optical isolator 19 includes a polarizing plate 19a and a quarter-wave plate 19b, and the amount of light is adjusted by rotating the optical isolator 19. The rotating diffuser 24 is provided for reducing interference noise. The diffused light is condensed on the pinhole 12 by the lenses 26 and 28, and then collimated by the lens 30 to be incident on the half mirror 32 (or the beam splitter). The light reflected by the half mirror 32 is condensed by the objective lens 14 on the tip 17 of the diamond indenter 16.
[0028]
The light reflected from the tip 17 of the diamond indenter 16 returns to the objective lens 14, and the light from the objective lens 14 is split by a half mirror 46 (beam splitter). It is detected by the photo sensor 42. The detection light is converted into an electric signal and supplied to the analysis unit 50. The other split light is condensed by the lenses 38 and 40 and is converted by the CCD sensor 44 into an image signal of a pinhole image.
[0029]
The iris diaphragm 56 is variable, and the numerical aperture can be adjusted according to the size of the region having the curvature at the top of the diamond indenter 16, and can be set to a maximum of 0.65 in the present embodiment.
[0030]
On the other hand, of the light split by the half mirror 32, the light heading for the reference-object-side objective lens 58 can be selectively shielded by the shutter 60. The shutter 60 is made of a material having high absorption efficiency so that incident light is reflected and does not interfere with light from the objective lens 14. When measuring the surface properties of the indenter and the apex angle of the indenter by the interference optical system, the shutter 60 is opened and used. Conversely, when measuring the radius of curvature, the shutter 60 is closed. When performing position adjustment and measurement of the subject or the reference body, the other side of the adjustment / measurement side closes the shutter, so that it is in front of the iris diaphragm 56, that is, on the optical path between the half mirror 32 and the iris diaphragm 56. A shutter can also be provided.
[0031]
FIG. 3A is a side view of the diamond indenter 16, and FIG. 3B is an enlarged view of a part of a tip portion 17 of the diamond indenter 16 (a portion surrounded by a dotted line in FIG. 3A). The figure is shown. The diamond indenter 16 is a Rockwell diamond indenter 16, the tip 17 of which has a substantially conical shape, and the top 17a of which is machined to be a part of a spherical surface having a predetermined radius of curvature. The apex angle of the conical shape is approximately 120 degrees, and the radius of curvature of the apex portion 17a is approximately 0.2 mm. By measuring the apex angle and the radius of curvature, the error is evaluated. The diamond indenter 16 has a flange, and the indenter flange is pressed against the holder seat surface of the surface texture measuring instrument 10 and fixed. When measuring the radius of curvature, it is necessary that the irradiation optical axis and the holder seat surface are perpendicular to each other. The central axis of the conical portion of the diamond indenter 16 is defined to be perpendicular to the flange seating surface. Therefore, by setting the irradiation optical axis and the holder seating surface to be perpendicular, the diamond indenter 16 is pressed against the holder seating surface. When fixed, the central axis of the conical portion of the diamond indenter 16 is substantially parallel to the irradiation optical axis. By adjusting the position of the diamond indenter 16 on the XY stage, the center of curvature of the spherical tip of the diamond indenter 16 can be accurately aligned with the irradiation optical axis.
[0032]
FIG. 4 is a conceptual diagram of a control system according to the present embodiment. The position control unit 82 is connected to the indenter position adjusting mechanism 86. Outputs of the rotary encoder 80 and the linear encoder 54 provided in the indenter position adjusting mechanism 86 are supplied to a position control unit 82, respectively, so that the current position and posture of the diamond indenter 16 can be always detected. Further, an input device 85 including, for example, a keyboard and a mouse is connected to the position control unit 82.
[0033]
The analysis unit 50 is connected to the photo sensor 42 and the CCD sensor 44, whereby the light intensity signal from the photo sensor 42 and the image information such as the pinhole image detected by the CCD sensor 44 are supplied to the analysis unit 50. You. The output side of the analysis unit 50 is connected to the position control unit 82 and the display device 84, and can output, for example, an intensity change of an optical signal, an image of a pinhole image, and the like.
[0034]
Note that the analysis unit 50, the position control unit 82, the display device 84, and the input device 85 are mounted on a personal computer known as computer hardware and a program for executing these functions.
[0035]
In the above configuration, the radius of curvature of the tip portion 17 of the diamond indenter 16 is measured as follows. When the diamond indenter 16 is translated in the same direction as the irradiation optical axis, the amount of light detected by the photo sensor 42 changes. That is, at the position where the irradiation light forms an image on the vertex of the diamond indenter 16, all the light reflected on the vertex returns to the lens 14 assuming that the vertex is an ideal spherical surface. Is maximized at that position and appears as a first peak. Next, when the diamond indenter 16 is moved along the irradiation optical axis toward the objective lens 14, the light intensity once decreases, but after passing through a minimum point, starts to rise again, and the irradiation light forms an image at the center of curvature. Appears as a second peak at the position where it occurs. This is because light incident from the objective lens 14 is regularly reflected. By precisely measuring the distance between the first peak position and the second peak position using the linear encoder 54, the radius of curvature of the tip portion 17 of the diamond indenter 16 can be measured.
[0036]
On the other hand, in such a curvature radius measurement, the apex of the diamond indenter 16 needs to be accurately arranged on the irradiation optical axis. More specifically, the vertex of the diamond indenter 16 needs to be located on the irradiation optical axis, and the center axis of the conical portion needs to be located on the irradiation optical axis. Therefore, the XY stage 86 may be driven to position the vertex of the diamond indenter 16 on the irradiation optical axis. However, in order to position the center axis of the conical portion on the irradiation optical axis, the inclination of the diamond indenter 16 must be changed. It is necessary to adjust by the tilt mechanism 86d. The diamond indenter 16 is mounted on an indenter holder and attached to an inchworm motor 52. The indenter holder has a reference surface with which the flange seating surface of the diamond indenter 16 abuts. Therefore, by adjusting the inclination of the reference surface of the indenter holder and adjusting the reference surface to be perpendicular to the irradiation optical axis by the tilting mechanism 86d, the diamond indenter 16 is pressed against the indenter holder and mounted. The central axis of the cone of the tip 17 is substantially parallel to the irradiation optical axis.
[0037]
In the present embodiment, the inclination of the reference surface of the indenter holder, that is, the inclination of the seat surface against which the flange of the diamond indenter 16 contacts, is simply adjusted using a specific optical axis adjusting jig.
[0038]
FIG. 5 shows a jig 215 used to adjust the reference surface (the seat surface on which the flange abuts) of the indenter holder perpendicular to the irradiation optical axis. The jig 215 includes a main body 216 and a tip 217, and the main body 216 has a flange having the same shape as the diamond indenter 16. Accordingly, the jig 215 can be mounted on the indenter holder 210 (indicated by a dashed line in the figure) on which the diamond indenter 16 is mounted, in exactly the same manner as the diamond indenter 16. The flange of the jig 215 abuts the reference surface 210a of the indenter holder 210, and in this state, the center axis of the jig 215 is perpendicular to the reference surface 210a of the indenter holder 210. On the other hand, a single lens (hereinafter, referred to as a single lens 217) is provided at the tip 217 of the jig 215. As the single lens 217, a centered lens may be used, but by using a plano-convex lens or a plano-concave lens and arranging the plane of the lens parallel to the seat of the jig body 216, the trouble of centering the lens can be reduced. It is possible to reduce the accuracy and suppress the decrease in accuracy due to centering. In the figure, a plano-convex lens having a flat surface formed on the lower side is shown.
[0039]
After attaching the jig 215 shown in FIG. 5 to the indenter holder 210, the inclination of the reference surface 210a of the indenter holder 210 is adjusted as follows.
[0040]
FIGS. 6A and 6B schematically show an adjustment method using the jig 215. After pressing the flange of the jig 215 against the reference surface (seat surface) 210a of the indenter holder 210 and fixing it, the position of the jig 215 is adjusted by driving the XY stage 86a, and then the translation mechanism 86b is driven to adjust the position. The tool 215 is moved along the irradiation optical axis. When the irradiation light from the objective lens 14 forms an image at the apparent center of curvature of the single lens 217 as shown in FIG. 6A, the light intensity detected by the photo sensor 42 becomes maximum at that position, and the display device 84 , A focused pinhole image detected by the CCD sensor 44 is observed. The apparent center of curvature is the center of curvature that is apparently formed by a plane formed on the lower surface of the single lens 217, and is determined by the refractive power of the single lens 217. different. The apparent center of curvature is a point at which light incident from the plane side of the single lens 217 is collected.
[0041]
Next, when the jig 215 is moved in the direction of the objective lens 14 along the irradiation optical axis, the light intensity once decreases, but starts to rise again, so that the irradiation light is irradiated with the center of curvature of the single lens 217 (the single lens 217). When the image is formed on the center of curvature of the convex surface formed on the upper surface, the image becomes a maximum and a pinhole image in a focused state is observed again. A straight line connecting the center of curvature of the single lens 217 and the apparent center of curvature is parallel to the center axis of the jig 215 and perpendicular to the flange of the jig 215. Therefore, the position of the pinhole image obtained at the position shown in FIG. 6A is compared with the position of the pinhole image obtained at FIG. 6B. A straight line connecting the center of curvature of the lens 217 and the apparent center of curvature is parallel to the irradiation optical axis, and it can be determined that the irradiation optical axis and the reference surface 210a of the indenter holder 210 are perpendicular. On the other hand, if the positions are different, it is determined that the straight line connecting the center of curvature of the single lens 217 and the apparent center of curvature is not parallel to the irradiation optical axis, and that the irradiation optical axis and the reference surface 210a of the indenter holder 210 are not perpendicular. it can. In this case, the tilt mechanism 86d and, if necessary, the XY stage 86a are driven until the two positions match.
[0042]
If the angle (inclination) between the straight line connecting the center of curvature of the single lens 217 and the apparent center of curvature with the irradiation optical axis is β, and the distance between the centers of curvature is D, the moving amount d of the pinhole image is
(Equation 1)
d = β · D (1)
Therefore, if the two positions do not match, the inclination adjustment angle may be calculated based on the equation (1). To adjust the tilt, the operator may manually drive the tilt mechanism 86d while visually recognizing the pinhole image on the display device 84, or detect d from the screen and store it in a memory or the like in advance. May be used to calculate β based on equation (1), and the tilt mechanism 86d may be automatically driven. The photo sensor 42, the CCD sensor 44, the analysis unit 50, and the display device 84 function as an observation device that observes a pinhole image.
[0043]
FIG. 7 shows a flowchart of an optical axis adjustment method using the jig 215 in the present embodiment. First, prior to mounting the diamond indenter 16 on the indenter holder 210 of the surface shape measuring device, the jig 215 is mounted on the indenter holder 210 (S101). That is, the flange of the jig is pressed against and fixed to the reference surface (seat surface) 210a of the indenter holder 210. The position of the jig 215 (diamond indenter 16) is adjusted by driving the XY stage 86a, and then the translation mechanism 86b is driven to move the jig 215 along the irradiation optical axis along with the indenter holder 210. Irradiation light is condensed on the center of curvature and the apparent center of curvature of the single lens 217 provided at the tip of the lens 215, and a pinhole image is formed on the CCD sensor 44 (S102). Then, the pinhole image positions at the two positions are compared, and it is determined whether or not the two positions match (S103).
[0044]
If the two positions do not match, it means that the irradiation optical axis is not perpendicular to the reference surface 210a of the indenter holder 210. Therefore, the inclination mechanism 86d is driven to adjust the inclination of the reference surface 210a of the indenter holder 210 (S104). ). Note that the inclination of the irradiation optical axis itself may be adjusted. After adjusting the tilt, the pinhole images at the two curvature positions are observed again to confirm whether or not the positions of the two pinhole images match. If the two positions coincide with each other, it means that the irradiation optical axis is perpendicular to the reference surface 210a of the indenter holder 210. Therefore, it is determined that the optical axis adjustment has been completed, and the jig 215 is removed from the indenter holder 210 (S105). The indenter 16 is mounted on the indenter holder 210, and the radius of curvature of the tip 17 of the diamond indenter 16 is measured (S106). That is, the position of the jig 215 is adjusted by driving the XY stage 86a, the translation mechanism 86b is driven to move the diamond indenter 16 along the irradiation optical axis, and the irradiation light is moved to the top of the tip 17 and the center of curvature. The light is condensed and the movement amount at that time is measured.
[0045]
As described above, in the present embodiment, since the optical axis is adjusted by using the jig having the same flange as the diamond indenter 16 and having a single lens at the tip, the irradiation optical axis and the indenter can be easily and surely secured. The reference plane of the holder can be adjusted perpendicularly, so that the radius of curvature of the diamond indenter can be measured accurately.
[0046]
In the present embodiment, the optical axis adjustment when measuring the radius of curvature of the distal end portion 17 of the diamond indenter 16 using the surface texture measuring device 10 has been described. Other functions of the surface texture measuring device 10 include the measurement of the apex angle of the tip 17 of the diamond indenter 16 and the measurement of the surface texture of the tip. When the curvature measurement is performed after the apex angle measurement, the angle between the irradiation optical axis and the reference surface 210a of the indenter holder 210 is necessarily vertical after the apex angle measurement because the indenter holder 210 is inclined and measured during the apex angle measurement. Not. In this case, it is effective to measure the radius of curvature after setting the reference surface 210a of the indenter holder 210 perpendicular to the irradiation optical axis using the optical axis adjusting jig 215 of the present embodiment.
[0047]
【The invention's effect】
As described above, according to the present invention, it is possible to easily and reliably adjust the optical axis.
[Brief description of the drawings]
FIG. 1 is an overall configuration diagram of an embodiment.
FIG. 2 is a configuration diagram of an optical system in FIG. 1;
FIG. 3 is an explanatory diagram of a diamond indenter.
FIG. 4 is a configuration block diagram of a control system.
FIG. 5 is an explanatory view of an optical axis adjusting jig.
FIG. 6 is an explanatory diagram of an optical axis adjusting method using an optical axis adjusting jig.
FIG. 7 is a processing flowchart of optical axis adjustment.
FIG. 8 is an explanatory diagram of a microscopic collimation method.
[Explanation of symbols]
Reference Signs List 1 optical system, 16 diamond indenter, 17 tip, 42 photo sensor, 44 CCD sensor, 52 inch worm motor, 86a XY stage, 86b translation mechanism, 86c rotation mechanism, 86d tilt mechanism, 210 indenter holder, 215 for optical axis adjustment jig.

Claims (7)

A surface texture measuring device that irradiates the subject with light from a light source and measures the radius of curvature of the subject using a microscopic collimation method,
An optical system that guides light from the light source to the subject along a predetermined optical axis and guides reflected light from the subject to an observation device,
A holder for supporting the subject,
First adjusting means for moving the holder along the optical axis;
Second adjusting means for adjusting the inclination of the holder with respect to the optical axis;
An optical axis adjustment jig having a single lens at the tip and mounted on the holder,
And irradiating the single lens of the optical axis adjusting jig with light from the optical system to drive the first adjusting unit, and based on an observation result by the observation device when the second adjusting unit is driven, A surface texture measuring device which is driven to adjust a positional relationship between the optical axis and the holder. The surface texture measuring device according to claim 1,
A surface texture measuring device, wherein the single lens is a plano-convex lens or a plano-concave lens. A jig used for a surface texture measuring device,
A jig for a surface texture measuring device, comprising a flange having the same shape as a flange of a diamond indenter as an object of the surface texture measuring device, and having a single lens at a tip portion. The jig according to claim 3,
The jig for a surface texture measuring device, wherein the single lens is a plano-convex lens or a plano-concave lens. An adjustment method for adjusting the angle between the optical axis of the surface texture measuring device and the reference plane of the subject holder,
Attaching an optical axis adjusting jig having a single lens at the tip to the reference surface,
Moving the optical axis adjusting jig along the optical axis, detecting the center of curvature and the apparent center of curvature of the single lens from the reflected light of the single lens;
Adjusting the angle of the reference plane according to the positional relationship between the center of curvature and the apparent center of curvature;
An adjustment method comprising: The method of claim 5, wherein
In the adjusting step, the optical axis and the reference surface are adjusted by adjusting an angle of the reference surface such that the center of curvature and the apparent center of curvature match on the projection surface of the reflected light of the single lens. Are adjusted orthogonally. The method according to any one of claims 5 and 6,
The adjustment method, wherein the single lens is a plano-convex lens or a plano-concave lens.

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