JP2003148939A - Autocollimator provided with microscope, and instrument for measuring shape using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To measure an inclination and a distance of an object to be measured after being positioned using a microscope, without limiting the kind (wavelength) of measuring light. SOLUTION: This autocollimetor for irradiating an object to be measured with parallel light, and for measuring the inclination of the object to be measured by confirming reflected light thereof has a collimator lens for collimating the light to irradiate the object to be measured into the parallel light, and a microscope lens provided to be put in and out freely between the collimator lens and the object to be measured to converge the parallel light by the collimator lens.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an autocollimator for measuring the inclination of an object to be measured, and in particular, it is combined with a microscope for enlarging the measurement site of the object to be measured and a distance measuring system for measuring the distance to the object to be measured. Auto collimator and shape measuring device.

[0002]

2. Description of the Related Art Constituent parts of equipment are required to be measured with a high degree of accuracy in order to improve the accuracy of the equipment. The shape of the device is becoming smaller, and accordingly, the component parts thereof are also made smaller, and it is necessary to accurately measure the mounting state in the extremely minute area and the shape of the minute part. For example,
For inspection of a probe of a hard disk, it is required to measure 0.5 mmφ measuring light into a 1 mm ² area to measure the mounting position and inclination of the components.

FIG. 2 is a diagram showing a conventional optical system used for measuring the mounting state of component parts of equipment. 2 (a) is an autocollimator for measuring the inclination of the object to be measured, FIG. 2 (b) is a microscope for confirming the measurement site of the non-object, and FIG. 2 (c) is the distance from the object. The respective basic configurations of displacement meters for measuring are shown.

The autocollimator shown in FIG. 2 (a) irradiates the object to be measured 24 with the measurement light emitted from the light source 21 through the beam splitter 22 and the collimator lens 23 for making parallel light. The reflected light from the DUT 24 collimates the lens 23 and the beam splitter 22.
The light enters the light receiving element 25 through The light receiving element 25 is C
The inclination of the object to be measured 24 is measured by checking an image formed by reflected light from the object to be measured 24, which is an image detection element such as a CD.

The microscope is used to confirm the measurement site of the object to be measured. While the autocollimator shown in FIG. 2A irradiates parallel light to measure the inclination of the DUT 24, a microscope needs to be a condensing optical system. In the configuration shown in FIG. 2B, the image formed by the objective lens 42 that is focused at the measurement site of the DUT 41 is collimated by the eyepiece lens 43 and enters the eye.

The displacement meter shown in FIG. 2 (c) is used to measure the distance to the object to be measured. Light receiving element 33
Is a signal that outputs a signal corresponding to an incident position such as a PSD (Position Sensitive Device) or a CCD (Charge Coupled Device). Reflected light of the emitted light of the light source 31 on the measurement surface of the DUT 32 is incident. It is provided at the position where As the distance to the measured object changes,
The incident position on the light receiving element 33 changes, and the distance to the DUT 32 is measured by this.

Each of these autocollimator, microscope and displacement meter had an independent structure. When measuring with an autocollimator or displacement meter, use visible light as the measurement light, and confirm with a microscope whether the target measurement area is irradiated with the measurement light. The tilt of the object to be measured and the distance to the object to be measured have been measured using.

[0008]

Each of the above-described autocollimator, microscope, and displacement meter has an independent structure, and it is confirmed by a microscope whether visible measurement light is applied to a target measurement site. However, the distance and the inclination with respect to the measured object have been measured.

However, it is necessary to observe the measurement site with a microscope from a direction different from that of the measurement light. As described above, the observation site is in an extremely fine area, and therefore the configuration can be confirmed with a microscope. It's becoming more difficult.

Further, it is necessary to use visible light as the measuring light. However, depending on the object to be measured, the visible light may be harmful, and such an object cannot irradiate visible light. The microscope could not be used.

If the microscope cannot be used because the observation area is in an extremely minute area, the measurement is performed by visually confirming whether or not the measurement light is applied to the measurement area. When invisible light is used as the measurement light, the object to be measured is positioned and measured according to the design values of the object to be measured and the measurement system.
The positioning when these microscopes cannot be used is not suitable for measuring a minute area in recent years.

The present invention has been made in view of the problems of the above-described conventional technique, and the positioning is performed using a microscope without limiting the type (wavelength) of the measuring light. It is an object of the present invention to realize an autocollimator capable of measuring the tilt and distance of the object to be measured.

[0013]

SUMMARY OF THE INVENTION An autocollimator equipped with a microscope of the present invention is an autocollimator for illuminating an object to be measured with parallel light and checking the reflected light to measure the inclination of the object to be measured. The collimator lens for collimating the irradiation light to the object to be measured and the collimator lens and the object to be measured are provided so as to be freely put in and taken out, and the parallel light by the collimator lens is condensed. It has a microscope lens which does.

In the autocollimator equipped with the microscope of the present invention configured as described above, a finite amount is obtained by inserting a microscope lens that produces a focusing action into the autocollimator of an infinite optical system that measures the tilt by a parallel light beam. It is made to be an optical system. These optical axes are the same, and the application can be switched depending on whether the microscope lens is taken in or out. For this reason, the center point of both the image when used as an autocollimator and the image when used as a microscope is the same part. The measurement as a collimator will be performed.

The shape measuring apparatus of the present invention measures the tilt of the object to be measured by irradiating the object to be measured with the first and second measuring lights and confirming the reflected light of the first measuring light. A shape measuring device for measuring a distance to an object to be measured by confirming reflected light of the second measuring light, wherein a collimating lens for converting the first measuring light to the object to be measured into parallel light. And a microscope lens which is provided between the collimator lens and the object to be measured so that the collimator lens can collect parallel light, a light source which generates the second measurement light, and the second A detection element for confirming the reflected light of the measurement light by the object to be measured, wherein the detection element is a surface perpendicular to the optical axis passing through the microscope lens, and the second measurement at the focal position of the microscope lens. Reflected light of light is incident on the center Characterized in that provided in earthenware pots.

In the shape measuring apparatus of the present invention constructed as described above, the distance between the center of the image confirmed when used as a microscope is measured as an autocollimator and the distance is also measured. Will be things.

[0017]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a diagram showing the configuration of an embodiment of the present invention.

This embodiment is used as an autocollimator or a microscope by putting in and taking out a microscope lens. FIG. 1A shows a state of being used as an autocollimator, and FIG. 1B shows a microscope. The condition used is indicated.

First, a state used as the autocollimator shown in FIG. 1A will be described. The light emitted from the semiconductor laser (LD) 11 is once focused by the condenser lens 10 and then reflected by the mirror 9 and the beam splitter 13 as diffused light.
To make parallel light. A displacement meter 3 including an LD 4 and a PSD 6 is provided between the collimator lens 12 and the DUT 1.
Is provided. A hole 17 is formed in the displacement meter 3, the parallel light from the collimator lens 12 enters the DUT 1 through the hole 15, and the reflected light passes through the hole 17, the collimator lens 12 and the beam splitter 13. And enters the CCD 14, which is an image sensor. CCD14
Is arranged at a position where the image collected by the collimator lens 12 is formed on the incident surface, and the measurer confirms the image by the reflected light from the DUT 1,
The inclination of the DUT 1 is measured. The tilt measurement performed here uses a general crosshair. Further, the DUT 1 is mounted on a stage (not shown) that is movable in the XY plane perpendicular to the paper surface.

The distance measurement by the displacement meter 3 is performed independently of the above-mentioned auto-collimating operation. The measurement light 2 emitted from the LD 4 is PS as the reflection light 5 by the DUT 1.
It is incident on D6, and the distance from the DUT 1 is confirmed by the light receiving state (incident position) of the PSD 6.

Next, the state used as the microscope shown in FIG. 1B will be described. The auto collimator of this embodiment is provided with a microscope lens 8 mounted on the mount 7. Mount 7 is collimating lens 1
It is configured so that it can be inserted and removed between 2 and the displacement gauge 3,
With the movement of the mount 7, the microscope lens 8 is moved in and out of the measurement optical path, and when the microscope lens 8 as shown in FIG. 1B is inserted, the microscope lens 8 is used as a microscope.

Illumination light 16 from a light source 15 is applied to the measurement site of the DUT 1. As the microscope lens 8, a lens that focuses on the measurement site of the DUT 1 is used.
The light enters the CCD 14 through the microscope lens 8, the collimator lens 12 and the beam splitter 13. The measurer confirms the position where the measurement light is incident on the DUT 1 by checking the enlarged image of the measurement site of the DUT 1 detected by the CCD 14.

Regarding the positions of the LD 4 and the PSD 6 provided in the displacement meter 3, it is a plane perpendicular to the optical axis passing through the microscope lens 8, and the reflected light 5 of the measurement light 2 at the focus position of the microscope lens 8 is almost the same as the PSD 6. It is provided so as to enter the center.

A specific method of using this embodiment having the above-described structure will be described. First, the microscope lens 8 is used.
Is inserted between the collimator lens 12 and the displacement meter 3 to confirm an enlarged image of the measurement site with the CCD 14, the microscope lens 8 is removed from between the collimator lens 12 and the displacement meter 3, and the inclination of the measurement site is measured with the CCD 14. Check. Further, the displacement meter 3 measures the distance to the DUT 1 with high accuracy. After that, the position of the DUT 1 on the XY plane is moved, the inclination is confirmed, and the distance is confirmed by the displacement meter 3 is repeated. As a result, the shape of the DUT 1 is confirmed.

In the present embodiment constructed as described above, the measurement site of the object to be measured and the detector (CCD 14) in any state light when used as an autocollimator or when used as a microscope. The axes connecting and become the same. Therefore, the region of the magnified image confirmed by the microscope is surely irradiated with the measurement light when used as an autocollimator, so that it is surely confirmed whether or not the target measurement region is irradiated with the measurement light. It has become possible.

Further, since the measuring light is surely applied to the portion confirmed by the microscope, the work of confirming the irradiation state of the measuring light with the microscope, which has been performed conventionally, is unnecessary. At the same time, the measurement light (and the illumination light) having an arbitrary wavelength can be used.

As for the object to be measured in which visible light is harmful,
The LD 11 and the light source 15 may be those whose emitted light is not visible light such as infrared light, and the CCD 14 may be one having a detection sensitivity with respect to the emitted light of the LD 11 and the light source 15.

Although the collimator lens 12 is described as being provided between the beam splitter 13 and the microscope lens 8 which can be freely taken in and out, the collimator lens 12 is not particularly limited to this position. For example, if two lenses having the same power are used, one of which is provided between the mirror 9 and the beam splitter 13 and the other of which is provided between the beam splitter 13 and the CCD 14, the same operation as that described above is performed. However, such a configuration may be adopted.

Regarding the position of the light source 15 for the microscope, FIG. 1 shows a reflection type light source that obliquely illuminates the measurement site. However, the LD 11 and the switchable light source are arranged at the position of the LD 11. It may be an epi-illumination type light source. Further, the light emitted from the LD 11 may be used as it is as the light source of the microscope.

Further, although the image when used as an autocollimator and the image when used as a microscope have been described as being detected by the CCD 14, they may be configured to be incident on the eye similarly to general optical equipment.

[0032]

Since the present invention is constructed as described above, the kind (wavelength) of measuring light is not restricted, and the tilt of the object to be measured and There is an effect that the distance can be measured.

[Brief description of drawings]

FIG. 1 is a diagram showing a configuration of an embodiment of the present invention,
A state used as an autocollimator is shown in (a), and a state used as a microscope is shown in (b).

FIG. 2 is a diagram showing an optical system used to measure the mounting state of component parts of a conventional device,
(A) is an autocollimator for measuring the inclination of the object to be measured, (b) is a microscope for confirming the measurement site of the non-object, and (c) is a displacement for measuring the distance from the object. The basic configuration of the total is shown respectively.

[Explanation of symbols]

1 DUT 2 Measuring light 3 displacement meter 4 LD 5 reflected light 6 PSD 7 mount 8 microscope lens 9 mirror 10 Condensing lens 11 LD 12 Collimating lens 13 Beam splitter 14 CCD 15 light source 16 Illumination light

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 2F065 AA06 AA35 AA53 BB05 FF04                       GG02 GG04 HH03 HH04 HH12                       HH13 JJ02 JJ03 JJ05 JJ16                       JJ26 LL04 LL12 PP12 UU07                 2H052 AC04 AC09 AF02

Claims (2)

[Claims] 1. An autocollimator for irradiating parallel light to an object to be measured, and checking the reflected light to measure the inclination of the object to be measured, wherein the parallel light is the light to be irradiated onto the object to be measured. And a collimator lens for adjusting the collimator lens, and a microscope lens that is provided between the collimator lens and the object to be measured so that the collimator lens collects parallel light. Auto collimator. 2. The tilt of the object to be measured is measured by irradiating the object to be measured with the first and second measuring lights and confirming the reflected light of the first measuring light to obtain the second measuring light. A shape measuring device for measuring a distance to an object to be measured by confirming reflected light of the collimator lens for collimating the first measuring light to the object to be measured, and the collimator lens, A microscope lens that is provided so as to be freely inserted into and removed from the object to be measured and that collects parallel light by the collimator lens; a light source that generates the second measuring light; and an object to be measured with the second measuring light. And a detection element for confirming the reflected light by the detection element, wherein the detection element is a surface perpendicular to the optical axis passing through the microscope lens, and the reflected light of the second measurement light at the focus position of the microscope lens is approximately It is provided so as to enter the center Shape measuring apparatus according to claim and.