CN107843413A - A kind of high accuracy reversely double optical axises and more plain shaft parallelism adjusting process - Google Patents
A kind of high accuracy reversely double optical axises and more plain shaft parallelism adjusting process Download PDFInfo
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- CN107843413A CN107843413A CN201710828866.5A CN201710828866A CN107843413A CN 107843413 A CN107843413 A CN 107843413A CN 201710828866 A CN201710828866 A CN 201710828866A CN 107843413 A CN107843413 A CN 107843413A
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- optical axis
- autocollimator
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- plane mirror
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
Abstract
The present invention provides a kind of high accuracy reversely double optical axises and more plain shaft parallelism adjusting process, can further simplify calibration procedures on the premise of adjusting accuracy is ensured, improves adjustment efficiency.Wherein reverse double-plain shaft parallelism adjusting process includes：It is coaxial to adjust two autocollimators；It is coaxial with the first autocollimator to adjust primary optic axis；Plane mirror is placed between the second autocollimator and primary optic axis, makes reflection image and the second autocollimator center superposition；Before first autocollimator is moved into plane mirror, its center is set to be overlapped with the reflection image of plane mirror；To the second optical axis direction plane of motion speculum and the second autocollimator, the second autocollimator is set to be in plane mirror effective range corresponding to the region in front of the second optical axis；Adjust plane mirror；The second autocollimator is adjusted, overlaps its picture sent and reflection image；Plane mirror is removed, the second optical axis of adjustment is coaxial with the second autocollimator center.
Description
Technical field
The invention belongs to optics integration techno logy field, is related to a kind of double optical axises of high accuracy and more plain shaft parallelism adjustment sides
Method.
Background technology
Plain shaft parallelism is more optical axises, the important indicator of multi-sensor photoelectric measuring apparatus.At present, photoelectric measurement equipment is all
Multiple optical systems equipped with different-waveband simultaneously, round-the-clock measurement can be carried out to measured target simultaneously.To ensure light more
The measurement accuracy of axle optical system, the collimation in more optical axis optical systems between each optical axis preferably must be held in certain precision it
It is interior, it is therefore desirable to collimation adjustment periodically is carried out to more optical axises.It is presently used for the big multisystem of method of more plain shaft parallelism adjustment
Complex, measuring accuracy is relatively low, or has certain limitation.
Patent document (CN201410665912.0) proposes " a kind of plain shaft parallelism calibration apparatus of double optical axis systems and side
Method ", the program is using two panels size is identical, orthogonal speculum and the supporting construction that can be rotated, according to geometric optics
Principle, light beam can be reflected abreast, double optical axises correspond to incident and anti-respectively by the orthogonal speculum reflection of two panels
Irradiating light beam.But this method is only applicable to the collimation adjustment between double optical axises, and need the distance between double optical axises of adjustment by
Calibration apparatus bore is limited, and use range is restricted.
The content of the invention
The present invention provides a kind of high accuracy, and reversely double optical axises and more plain shaft parallelism adjusting process, main purpose are to protect
It can further simplify calibration procedures on the premise of card adjusting accuracy, improve adjustment efficiency.
To reach above-mentioned purpose, the technical proposal of the invention is realized in this way：
The reverse double-plain shaft parallelism adjusting process of the high accuracy, the exit direction phase of primary optic axis therein and the second optical axis
Instead, it is characterised in that comprise the following steps：
Step 1)：It is coaxial that both the second autocollimators, adjustment are aimed at the first autocollimator；
Step 2)：Between the double optical axises for treating adjustment are moved into two autocollimators, adjustment primary optic axis makes itself and first
Autocollimator is coaxial；
Step 3)：Plane mirror is placed between the second autocollimator and primary optic axis, reflecting surface direction second is certainly
Collimating light pipe, plane mirror is adjusted, make reflection image and the second autocollimator center superposition, be i.e. calibration plane speculum reflects
Face is vertical with the second autocollimator optical axis；
Step 4)：Before first autocollimator is moved into plane mirror, the first autocollimator is adjusted, makes the first autocollimatic
Direct light tube hub overlaps with the reflection image of plane mirror；
Step 5)：To the second optical axis direction plane of motion speculum and the second autocollimator, make the second autocollimator
The region corresponded in plane mirror effective range in front of the second optical axis；Plane mirror is adjusted, makes the first auto-collimation
The picture and reflection image that light pipe is sent overlap, i.e., calibration plane mirror reflection surface is vertical with the first autocollimator optical axis；
Step 6)：The second autocollimator is adjusted, makes picture and reflection image coincidence that the second autocollimator is sent；
Step 7)：Plane mirror is removed, the second optical axis is adjusted, makes it coaxial with the second autocollimator center, now,
Primary optic axis is parallel with the second optical axis.
When apart from each other between two optical axises, plane mirror effective range can not meet once to put a certain autocollimator
When the region in front of the second optical axis is corresponded to, then：
With reference to step 5), step 6), plane of motion speculum and another autocollimator, until at a certain autocollimator
In the region corresponded in plane mirror effective range in front of the second optical axis.
Or the second autocollimator position is no longer adjusted, only it is repeated in adjusting plane mirror and the first auto-collimation
The position of light pipe, i.e.,：To the second optical axis direction successively plane of motion speculum and the first autocollimator, each step only moves it
In one adjustment is carried out on the basis of another, until the first autocollimator is moved in plane mirror effective range and corresponded to
Region in front of second optical axis.
Reversely double-plain shaft parallelism adjusting process, the present invention also propose following several more plain shaft parallelism adjustment based on more than
Method.
The first：
Adjustment primary optic axis makes it horizontal first, as reference axis；Then it is sequentially adjusted in and in the same direction each of primary optic axis
Optical axis is parallel；Finally it is sequentially adjusted in parallel with each optical axis that primary optic axis is reverse；Wherein：
A, adjusting the parallel method of optical axis in the same direction is：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between autocollimator and primary optic axis, reflecting surface towards autocollimator,
Speculum is adjusted, makes reflection image and autocollimator center superposition, i.e. calibration plane mirror reflection surface and autocollimator light
Axle is vertical；
Step 4)：Autocollimator is moved to the region corresponded in plane mirror effective range in front of the i-th optical axis, adjusted
Whole autocollimator, autocollimator center is set to be overlapped with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with autocollimator center, now
Primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, during beyond plane mirror effective range, then moved successively to the i-th optical axis direction
Plane mirror and autocollimator, each step are only moved one of them and adjustment are carried out on the basis of another, until auto-collimation
Light pipe is moved in plane mirror effective range corresponding to the region in front of the i-th optical axis；
For remaining equidirectional optical axis：With reference to above step 2) redefine successively to step 5) and nearby respectively modulated
It is parallel to adjust equidirectional each optical axis as reference axis for a certain optical axis that school is completed；Or base is used as using primary optic axis all the time
Fiducial axis, with reference to above step 2) to adjust remaining each equidirectional optical axis respectively to step 5) parallel with the reference axis；
B, adjusting the parallel method of reverse optical axis is：
According to the opposite direction optical axis for treating adjustment, a certain optical axis in link A adjustment completion is redefined nearby as base
Fiducial axis,
With reference to the reverse double-plain shaft parallelism adjusting process of above-mentioned high accuracy, corresponding an opposite direction optical axis and benchmark are adjusted
Axle is parallel；This opposite direction optical axis is equidirectional for remaining opposite direction optical axis, is designated as kth optical axis；
Therefore, for remaining opposite direction optical axis：Using kth optical axis as initial baseline axle, with reference to above step 2) extremely walk
It is rapid 5) and redefine nearby successively respectively adjustment completion a certain optical axis be used as reference axis, adjust it is equidirectional with kth optical axis
Each optical axis it is parallel；Or all the time using kth optical axis as reference axis, with reference to above step 2) it is adjusted respectively to step 5)
Remaining is parallel with kth optical axis with the equidirectional optical axis of kth optical axis.
Above scheme is that first to adjust wherein all optical axises in the same direction parallel, then to adjust all optical axises reverse therewith parallel.
All optical axises that can also first adjust with primary optic axis reversely are parallel, then all optical axises adjusted with primary optic axis in the same direction are parallel,
Such scheme belongs to the equivalent of above scheme, it should also is considered as the protection domain of present patent application.
Second：
Adjustment primary optic axis makes it horizontal first, as reference axis；Then a certain optical axis conduct is redefined nearby successively
Reference axis is parallel to adjust optical axis adjacent thereto；Wherein：
A, adjusting the parallel method of optical axis in the same direction is：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between autocollimator and primary optic axis, reflecting surface towards autocollimator,
Speculum is adjusted, makes reflection image and autocollimator center superposition, i.e. calibration plane mirror reflection surface and autocollimator light
Axle is vertical；
Step 4)：Autocollimator is moved to the region corresponded in plane mirror effective range in front of the i-th optical axis, adjusted
Whole autocollimator, autocollimator center is set to be overlapped with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with autocollimator center, now
Primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, during beyond plane mirror effective range, then moved successively to the i-th optical axis direction
Plane mirror and autocollimator, each step are only moved one of them and adjustment are carried out on the basis of another, until auto-collimation
Light pipe is moved in plane mirror effective range corresponding to the region in front of the i-th optical axis；
B, the parallel method of reverse optical axis is adjusted, with reference to the reverse double-plain shaft parallelism adjusting process of above-mentioned high accuracy.
The third：
Adjustment primary optic axis makes it horizontal first, as reference axis；Then it is sequentially adjusted in and in the same direction each of primary optic axis
Optical axis is parallel；Finally it is sequentially adjusted in parallel with each optical axis that primary optic axis is reverse；Wherein：
A, adjusting the parallel method of optical axis in the same direction is：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at the first autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between the first autocollimator and primary optic axis, reflecting surface direction first is certainly
Collimating light pipe, plane mirror is adjusted, make reflection image and the first autocollimator center superposition, be i.e. calibration plane speculum reflects
Face is vertical with the first autocollimator optical axis；
Step 4)：Second autocollimator and the first autocollimator is placed side by side, it is in the second autocollimator
Corresponding to the region in front of the i-th optical axis in plane mirror effective range, the second autocollimator is adjusted, makes the second autocollimatic direct light
Tube hub overlaps with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with the second autocollimator center,
Now primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, plane mirror effective range can not meet once to put a certain autocollimator
During region in front of corresponding i-th optical axis, then plane of motion speculum and another autocollimator, until a certain autocollimator
The region corresponded in plane mirror effective range in front of the i-th optical axis；
For remaining equidirectional optical axis：With reference to above step 2) redefine successively to step 5) and nearby respectively modulated
It is parallel to adjust equidirectional each optical axis as reference axis for a certain optical axis that school is completed；Or base is used as using primary optic axis all the time
Fiducial axis, with reference to above step 2) to adjust remaining each equidirectional optical axis respectively to step 5) parallel with the reference axis；
B, adjusting the parallel method of reverse optical axis is：
According to the opposite direction optical axis for treating adjustment, a certain optical axis in link A adjustment completion is redefined nearby as base
Fiducial axis,
With reference to the reverse double-plain shaft parallelism adjusting process of above-mentioned high accuracy, corresponding an opposite direction optical axis and benchmark are adjusted
Axle is parallel；This opposite direction optical axis is equidirectional for remaining opposite direction optical axis, is designated as kth optical axis；
Therefore, for remaining opposite direction optical axis：Using kth optical axis as initial baseline axle, with reference to above step 2) extremely walk
It is rapid 5) and redefine nearby successively respectively adjustment completion a certain optical axis be used as reference axis, adjust it is equidirectional with kth optical axis
Each optical axis it is parallel；Or all the time using kth optical axis as reference axis, with reference to above step 2) it is adjusted respectively to step 5)
Remaining is parallel with kth optical axis with the equidirectional optical axis of kth optical axis.
4th kind：
Adjustment primary optic axis makes it horizontal first, as reference axis；Then a certain optical axis conduct is redefined nearby successively
Reference axis is parallel to adjust optical axis adjacent thereto；Wherein：
A, adjusting the parallel method of optical axis in the same direction is：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at the first autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between the first autocollimator and primary optic axis, reflecting surface direction first is certainly
Collimating light pipe, plane mirror is adjusted, make reflection image and the first autocollimator center superposition, be i.e. calibration plane speculum reflects
Face is vertical with the first autocollimator optical axis；
Step 4)：Second autocollimator and the first autocollimator is placed side by side, it is in the second autocollimator
Corresponding to the region in front of the i-th optical axis in plane mirror effective range, the second autocollimator is adjusted, makes the second autocollimatic direct light
Tube hub overlaps with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with the second autocollimator center,
Now primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, plane mirror effective range can not meet once to put a certain autocollimator
During region in front of corresponding i-th optical axis, then plane of motion speculum and another autocollimator, until a certain autocollimator
The region corresponded in plane mirror effective range in front of the i-th optical axis；
B, the parallel method of reverse optical axis is adjusted, with reference to the reverse double-plain shaft parallelism adjusting process of above-mentioned high accuracy.
Compared with prior art, the invention has the advantages that：
1st, this method is simple and easy, need to only utilize conventional detection device to complete, adjusting accuracy is high.
2nd, this method can be realized parallel between more optical axises of a wide range of, more bores, each optical axis of multiband optical system
Property adjustment.
Brief description of the drawings
Fig. 1 is the schematic diagram of plain shaft parallelism adjustment when double optical axis beam exits of the present invention are in opposite direction.
Fig. 2 is a kind of schematic diagram of equidirectional plain shaft parallelism adjustment in more plain shaft parallelism calibration procedures.
Fig. 3 is the schematic diagram of another equidirectional plain shaft parallelism adjustment in more plain shaft parallelism calibration procedures.
Drawing reference numeral explanation：
1-1 autocollimators, 2- plane mirrors, 3- primary optic axis (reference axis), 4-2 autocollimators, 5-
Two optical axises.
Embodiment
Embodiment one
As shown in figure 1, the reverse double-plain shaft parallelism adjusting process of the high accuracy, comprises the following steps：
Step 1：No. 2 autocollimators are aimed at No. 1 autocollimator, adjustment 1, No. 2 autocollimators are coaxial；
Step 2：Examining system is moved between No. 1, No. 2 autocollimators, adjustment examining system makes No. 1 autocollimator
It is coaxial with primary optic axis (reference axis)；
Step 3：One plane mirror is placed on No. 2 between autocollimator and primary optic axis, reflecting surface direction 2 is certainly
Collimating light pipe, speculum is adjusted, makes reflection image and No. 2 autocollimator center superpositions.
Step 4：Before No. 1 autocollimator is moved into plane mirror, No. 1 autocollimator is adjusted, makes No. 1 autocollimatic direct light
Tube hub overlaps with the reflection image of level crossing；
Step 5：To the second optical axis direction plane of motion speculum and No. 2 autocollimators, speculum is adjusted, makes No. 1 certainly
The picture and reflection image that collimating light pipe is sent overlap；
Step 6：No. 2 autocollimators are adjusted, make picture and reflection image coincidence that No. 2 autocollimators are sent；
Step 7：Plane mirror is removed, the second optical axis is adjusted, makes it coaxial with No. 2 autocollimator centers, now, the
One optical axis is parallel with the second optical axis.
If apart from each other between two optical axises, need to repeat the 5th, the 6th step, until before autocollimator moves to the second optical axis
Side.
Embodiment two
Collimation adjustment for more optical axises, first adjustment primary optic axis make it horizontal, as reference axis；Then adjust successively
It is whole parallel with each optical axis that primary optic axis is in the same direction；Finally it is sequentially adjusted in parallel with each optical axis that primary optic axis is reverse.Wherein：
A, the parallel method of optical axis in the same direction is adjusted, as shown in Figure 2：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between autocollimator and primary optic axis, reflecting surface towards autocollimator,
Speculum is adjusted, makes reflection image and autocollimator center superposition, i.e. calibration plane mirror reflection surface and autocollimator light
Axle is vertical；
Step 4)：Autocollimator is moved to the region corresponded in plane mirror effective range in front of the i-th optical axis, adjusted
Whole autocollimator, autocollimator center is set to be overlapped with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with autocollimator center, now
Primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, during beyond plane mirror effective range, then moved successively to the i-th optical axis direction
Plane mirror and autocollimator, each step are only moved one of them and adjustment are carried out on the basis of another, until auto-collimation
Light pipe is moved in plane mirror effective range corresponding to the region in front of the i-th optical axis；
For remaining equidirectional optical axis：With reference to above step 2) redefine successively to step 5) and nearby respectively modulated
It is parallel to adjust equidirectional each optical axis as reference axis for a certain optical axis that school is completed；Or base is used as using primary optic axis all the time
Fiducial axis, with reference to above step 2) to adjust remaining each equidirectional optical axis respectively to step 5) parallel with the reference axis；
B, adjusting the parallel method of reverse optical axis is：
According to the opposite direction optical axis for treating adjustment, a certain optical axis in link A adjustment completion is redefined nearby as base
Fiducial axis,
With reference to the reverse double-plain shaft parallelism adjusting process of foregoing high accuracy, corresponding an opposite direction optical axis and benchmark are adjusted
Axle is parallel；This opposite direction optical axis is equidirectional for remaining opposite direction optical axis, is designated as kth optical axis；
Therefore, for remaining opposite direction optical axis：Using kth optical axis as initial baseline axle, with reference to above step 2) extremely walk
It is rapid 5) and redefine nearby successively respectively adjustment completion a certain optical axis be used as reference axis, adjust it is equidirectional with kth optical axis
Each optical axis it is parallel；Or all the time using kth optical axis as reference axis, with reference to above step 2) it is adjusted respectively to step 5)
Remaining is parallel with kth optical axis with the equidirectional optical axis of kth optical axis.
Above scheme is that first to adjust wherein all optical axises in the same direction parallel, then to adjust all optical axises reverse therewith parallel.
All optical axises that can also first adjust with primary optic axis reversely are parallel, then all optical axises adjusted with primary optic axis in the same direction are parallel,
Such scheme belongs to the equivalent of above scheme, it should also is considered as the protection domain of present patent application.
Embodiment three
Collimation adjustment for more optical axises, first adjustment primary optic axis make it horizontal, as reference axis；Then successively
It is parallel to adjust optical axis adjacent thereto as reference axis closely to redefine a certain optical axis；Wherein：
A, the parallel method of optical axis in the same direction is adjusted, as shown in Figure 2：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at the first autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between the first autocollimator and primary optic axis, reflecting surface direction first is certainly
Collimating light pipe, plane mirror is adjusted, make reflection image and the first autocollimator center superposition, be i.e. calibration plane speculum reflects
Face is vertical with the first autocollimator optical axis；
Step 4)：Second autocollimator and the first autocollimator is placed side by side, it is in the second autocollimator
Corresponding to the region in front of the i-th optical axis in plane mirror effective range, the second autocollimator is adjusted, makes the second autocollimatic direct light
Tube hub overlaps with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with the second autocollimator center,
Now primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, plane mirror effective range can not meet once to put a certain autocollimator
During region in front of corresponding i-th optical axis, then plane of motion speculum and another autocollimator, until a certain autocollimator
The region corresponded in plane mirror effective range in front of the i-th optical axis；
B, the parallel method of reverse optical axis is adjusted, with reference to the reverse double-plain shaft parallelism adjusting process of foregoing high accuracy.
Example IV
Collimation adjustment for more optical axises, first adjustment primary optic axis make it horizontal, as reference axis；Then adjust successively
It is whole parallel with each optical axis that primary optic axis is in the same direction；Finally it is sequentially adjusted in parallel with each optical axis that primary optic axis is reverse.Wherein：
A, the parallel method of optical axis in the same direction is adjusted, as shown in Figure 3：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at the first autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between the first autocollimator and primary optic axis, reflecting surface direction first is certainly
Collimating light pipe, plane mirror is adjusted, make reflection image and the first autocollimator center superposition, be i.e. calibration plane speculum reflects
Face is vertical with the first autocollimator optical axis；
Step 4)：Second autocollimator and the first autocollimator is placed side by side, it is in the second autocollimator
Corresponding to the region in front of the i-th optical axis in plane mirror effective range, the second autocollimator is adjusted, makes the second autocollimatic direct light
Tube hub overlaps with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with the second autocollimator center,
Now primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, plane mirror effective range can not meet once to put a certain autocollimator
During region in front of corresponding i-th optical axis, then plane of motion speculum and another autocollimator, until a certain autocollimator
The region corresponded in plane mirror effective range in front of the i-th optical axis；
For remaining equidirectional optical axis：With reference to above step 2) redefine successively to step 5) and nearby respectively modulated
It is parallel to adjust equidirectional each optical axis as reference axis for a certain optical axis that school is completed；Or base is used as using primary optic axis all the time
Fiducial axis, with reference to above step 2) to adjust remaining each equidirectional optical axis respectively to step 5) parallel with the reference axis；
B, adjusting the parallel method of reverse optical axis is：
According to the opposite direction optical axis for treating adjustment, a certain optical axis in link A adjustment completion is redefined nearby as base
Fiducial axis,
With reference to the reverse double-plain shaft parallelism adjusting process of foregoing high accuracy, corresponding an opposite direction optical axis and benchmark are adjusted
Axle is parallel；This opposite direction optical axis is equidirectional for remaining opposite direction optical axis, is designated as kth optical axis；
Therefore, for remaining opposite direction optical axis：Using kth optical axis as initial baseline axle, with reference to above step 2) extremely walk
It is rapid 5) and redefine nearby successively respectively adjustment completion a certain optical axis be used as reference axis, adjust it is equidirectional with kth optical axis
Each optical axis it is parallel；Or all the time using kth optical axis as reference axis, with reference to above step 2) it is adjusted respectively to step 5)
Remaining is parallel with kth optical axis with the equidirectional optical axis of kth optical axis.
Embodiment five
Collimation adjustment for more optical axises, first adjustment primary optic axis make it horizontal, as reference axis；Then successively
It is parallel to adjust optical axis adjacent thereto as reference axis closely to redefine a certain optical axis；Wherein：
A, the parallel method of optical axis in the same direction is adjusted, as shown in Figure 3：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at the first autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between the first autocollimator and primary optic axis, reflecting surface direction first is certainly
Collimating light pipe, plane mirror is adjusted, make reflection image and the first autocollimator center superposition, be i.e. calibration plane speculum reflects
Face is vertical with the first autocollimator optical axis；
Step 4)：Second autocollimator and the first autocollimator is placed side by side, it is in the second autocollimator
Corresponding to the region in front of the i-th optical axis in plane mirror effective range, the second autocollimator is adjusted, makes the second autocollimatic direct light
Tube hub overlaps with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with the second autocollimator center,
Now primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, plane mirror effective range can not meet once to put a certain autocollimator
During region in front of corresponding i-th optical axis, then plane of motion speculum and another autocollimator, until a certain autocollimator
The region corresponded in plane mirror effective range in front of the i-th optical axis；
B, the parallel method of reverse optical axis is adjusted, with reference to the reverse double-plain shaft parallelism adjusting process of foregoing high accuracy.
Claims (6)
1. a kind of reverse double-plain shaft parallelism adjusting process of high accuracy, the exit direction phase of primary optic axis therein and the second optical axis
Instead, it is characterised in that comprise the following steps：
Step 1)：It is coaxial that both the second autocollimators, adjustment are aimed at the first autocollimator；
Step 2)：Between the double optical axises for treating adjustment are moved into two autocollimators, adjustment primary optic axis makes itself and the first autocollimatic
Straight collimator is coaxial；
Step 3)：Plane mirror is placed between the second autocollimator and primary optic axis, reflecting surface the second auto-collimation of direction
Light pipe, adjust plane mirror, make reflection image and the second autocollimator center superposition, i.e., calibration plane mirror reflection surface and
Second autocollimator optical axis is vertical；
Step 4)：Before first autocollimator is moved into plane mirror, the first autocollimator is adjusted, makes the first autocollimatic direct light
Tube hub overlaps with the reflection image of plane mirror；
Step 5)：To the second optical axis direction plane of motion speculum and the second autocollimator, it is in the second autocollimator
Corresponding to the region in front of the second optical axis in plane mirror effective range；Plane mirror is adjusted, makes the first autocollimator
The picture and reflection image sent overlaps, i.e., calibration plane mirror reflection surface is vertical with the first autocollimator optical axis；
Step 6)：The second autocollimator is adjusted, makes picture and reflection image coincidence that the second autocollimator is sent；
Step 7)：Plane mirror is removed, the second optical axis is adjusted, makes it coaxial with the second autocollimator center, now, first
Optical axis is parallel with the second optical axis.
2. the reverse double-plain shaft parallelism adjusting process of high accuracy according to claim 1, it is characterised in that：When two optical axises it
Between it is apart from each other, plane mirror effective range can not meet once a certain autocollimator is placed in front of corresponding second optical axis
Region when, then：
With reference to step 5), step 6), plane of motion speculum and another autocollimator, until a certain autocollimator is in flat
Corresponding to the region in front of the second optical axis in the speculum effective range of face；
Or the second autocollimator position is no longer adjusted, only it is repeated in adjusting plane mirror and the first autocollimator
Position, i.e.,：To the second optical axis direction successively plane of motion speculum and the first autocollimator, the only movement wherein one of each step
It is individual that adjustment is carried out on the basis of another, until the first autocollimator, which moves to, corresponds to second in plane mirror effective range
Region in front of optical axis.
A kind of 3. reverse more plain shaft parallelism adjusting process of high accuracy, it is characterised in that：Adjustment primary optic axis makes it horizontal first,
As reference axis；Then it is sequentially adjusted in parallel with each optical axis that primary optic axis is in the same direction；Finally it is sequentially adjusted in anti-with primary optic axis
To each optical axis it is parallel；Wherein：
A, adjusting the parallel method of optical axis in the same direction is：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between autocollimator and primary optic axis, reflecting surface adjusts towards autocollimator
Speculum, makes reflection image and autocollimator center superposition, i.e. calibration plane mirror reflection surface is hung down with autocollimator optical axis
Directly；
Step 4)：Autocollimator is moved to the region corresponded in plane mirror effective range in front of the i-th optical axis, adjustment is certainly
Collimating light pipe, autocollimator center is set to be overlapped with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with autocollimator center, now first
Optical axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, during beyond plane mirror effective range, then to the i-th optical axis direction successively plane of motion
Speculum and autocollimator, each step are only moved one of them and adjustment are carried out on the basis of another, until autocollimator
Move in plane mirror effective range corresponding to the region in front of the i-th optical axis；
For remaining equidirectional optical axis：With reference to above step 2) to step 5) and to redefine adjustment nearby successively respectively complete
Into a certain optical axis as reference axis, it is parallel to adjust equidirectional each optical axis；Or benchmark is used as using primary optic axis all the time
Axle, with reference to above step 2) to adjust remaining each equidirectional optical axis respectively to step 5) parallel with the reference axis；
B, adjusting the parallel method of reverse optical axis is：
According to the opposite direction optical axis for treating adjustment, a certain optical axis completed in link A adjustment is redefined nearby as reference axis,
The reverse double-plain shaft parallelism adjusting process of high accuracy with reference to described in claim 1, adjusts a corresponding opposite direction light
Axle is parallel with reference axis；This opposite direction optical axis is equidirectional for remaining opposite direction optical axis, is designated as kth optical axis；
Therefore, for remaining opposite direction optical axis：Using kth optical axis as initial baseline axle, with reference to above step 2) to step 5)
And a certain optical axis for redefining the completion of adjustment nearby successively respectively is equidirectional each with kth optical axis as reference axis, regulation
Individual optical axis is parallel；Or all the time using kth optical axis as reference axis, with reference to above step 2) remaining is adjusted respectively to step 5)
It is parallel with kth optical axis with the equidirectional optical axis of kth optical axis.
A kind of 4. reverse more plain shaft parallelism adjusting process of high accuracy, it is characterised in that：Adjustment primary optic axis makes it horizontal first,
As reference axis；Then it is parallel to adjust optical axis adjacent thereto as reference axis to redefine a certain optical axis nearby successively；Its
In：
A, adjusting the parallel method of optical axis in the same direction is：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between autocollimator and primary optic axis, reflecting surface adjusts towards autocollimator
Speculum, makes reflection image and autocollimator center superposition, i.e. calibration plane mirror reflection surface is hung down with autocollimator optical axis
Directly；
Step 4)：Autocollimator is moved to the region corresponded in plane mirror effective range in front of the i-th optical axis, adjustment is certainly
Collimating light pipe, autocollimator center is set to be overlapped with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with autocollimator center, now first
Optical axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, during beyond plane mirror effective range, then to the i-th optical axis direction successively plane of motion
Speculum and autocollimator, each step are only moved one of them and adjustment are carried out on the basis of another, until autocollimator
Move in plane mirror effective range corresponding to the region in front of the i-th optical axis；
B, the parallel method of reverse optical axis is adjusted, the reverse double-plain shaft parallelism adjustment side of the high accuracy with reference to described in claim 1
Method.
A kind of 5. reverse more plain shaft parallelism adjusting process of high accuracy, it is characterised in that：Adjustment primary optic axis makes it horizontal first,
As reference axis；Then it is sequentially adjusted in parallel with each optical axis that primary optic axis is in the same direction；Finally it is sequentially adjusted in anti-with primary optic axis
To each optical axis it is parallel；Wherein：
A, adjusting the parallel method of optical axis in the same direction is：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at the first autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between the first autocollimator and primary optic axis, reflecting surface the first auto-collimation of direction
Light pipe, adjust plane mirror, make reflection image and the first autocollimator center superposition, i.e., calibration plane mirror reflection surface and
First autocollimator optical axis is vertical；
Step 4)：Second autocollimator and the first autocollimator is placed side by side, the second autocollimator is in plane
Corresponding to the region in front of the i-th optical axis in speculum effective range, the second autocollimator is adjusted, is made in the second autocollimator
The heart overlaps with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with the second autocollimator center, now
Primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, plane mirror effective range can not meet once to be placed in a certain autocollimator pair
When answering the region in front of the i-th optical axis, then plane of motion speculum and another autocollimator, until a certain autocollimator is in
Corresponding to the region in front of the i-th optical axis in plane mirror effective range；
For remaining equidirectional optical axis：With reference to above step 2) to step 5) and to redefine adjustment nearby successively respectively complete
Into a certain optical axis as reference axis, it is parallel to adjust equidirectional each optical axis；Or benchmark is used as using primary optic axis all the time
Axle, with reference to above step 2) to adjust remaining each equidirectional optical axis respectively to step 5) parallel with the reference axis；
B, adjusting the parallel method of reverse optical axis is：
According to the opposite direction optical axis for treating adjustment, a certain optical axis completed in link A adjustment is redefined nearby as reference axis,
The reverse double-plain shaft parallelism adjusting process of high accuracy with reference to described in claim 1, adjusts a corresponding opposite direction light
Axle is parallel with reference axis；This opposite direction optical axis is equidirectional for remaining opposite direction optical axis, is designated as kth optical axis；
Therefore, for remaining opposite direction optical axis：Using kth optical axis as initial baseline axle, with reference to above step 2) to step 5)
And a certain optical axis for redefining the completion of adjustment nearby successively respectively is equidirectional each with kth optical axis as reference axis, regulation
Individual optical axis is parallel；Or all the time using kth optical axis as reference axis, with reference to above step 2) remaining is adjusted respectively to step 5)
It is parallel with kth optical axis with the equidirectional optical axis of kth optical axis.
A kind of 6. reverse more plain shaft parallelism adjusting process of high accuracy, it is characterised in that：Adjustment primary optic axis makes it horizontal first,
As reference axis；Then it is parallel to adjust optical axis adjacent thereto as reference axis to redefine a certain optical axis nearby successively；Its
In：
A, adjusting the parallel method of optical axis in the same direction is：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at the first autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between the first autocollimator and primary optic axis, reflecting surface the first auto-collimation of direction
Light pipe, adjust plane mirror, make reflection image and the first autocollimator center superposition, i.e., calibration plane mirror reflection surface and
First autocollimator optical axis is vertical；
Step 4)：Second autocollimator and the first autocollimator is placed side by side, the second autocollimator is in plane
Corresponding to the region in front of the i-th optical axis in speculum effective range, the second autocollimator is adjusted, is made in the second autocollimator
The heart overlaps with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with the second autocollimator center, now
Primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, plane mirror effective range can not meet once to be placed in a certain autocollimator pair
When answering the region in front of the i-th optical axis, then plane of motion speculum and another autocollimator, until a certain autocollimator is in
Corresponding to the region in front of the i-th optical axis in plane mirror effective range；
B, the parallel method of reverse optical axis is adjusted, the reverse double-plain shaft parallelism adjustment side of the high accuracy with reference to described in claim 1
Method.
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