CN107796337A - A kind of high accuracy reversely double optical axises and more plain shaft parallelism adjusting process - Google Patents
A kind of high accuracy reversely double optical axises and more plain shaft parallelism adjusting process Download PDFInfo
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- CN107796337A CN107796337A CN201710828390.5A CN201710828390A CN107796337A CN 107796337 A CN107796337 A CN 107796337A CN 201710828390 A CN201710828390 A CN 201710828390A CN 107796337 A CN107796337 A CN 107796337A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
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Abstract
The present invention provides a kind of high accuracy reversely double optical axises and more plain shaft parallelism adjusting process, can further simplify calibration procedures on the premise of adjusting accuracy is ensured, improves adjustment efficiency.Reversely double-plain shaft parallelism adjusting process includes the high accuracy：Adjustment primary optic axis makes it horizontal, as reference axis；It is coaxial with primary optic axis to adjust the first autocollimator；Plane mirror is put into, in plane mirror effective range, the displacement of the first autocollimator is made it away from into the region in front of primary optic axis and avoids the region at the second optical axis rear, then recalibrates the first autocollimator；Plane mirror is removed, the second autocollimator is directed at the first autocollimator；Plane mirror is put into, makes its reflection image and the second collimating light pipe center superposition；Second autocollimator is moved to the region corresponded in the effective reflected range of plane mirror in front of the second optical axis；Plane mirror is removed, the second optical axis is adjusted, makes it coaxial with the second autocollimator center.
Description
Technical field
The invention belongs to optics integration techno logy field, is related to a kind of double optical axises of high accuracy and more plain shaft parallelism adjustment sides
Method.
Background technology
Plain shaft parallelism is more optical axises, the important indicator of multi-sensor photoelectric measuring apparatus.At present, photoelectric measurement equipment is all
Multiple optical systems equipped with different-waveband simultaneously, round-the-clock measurement can be carried out to measured target simultaneously.To ensure light more
The measurement accuracy of axle optical system, the collimation in more optical axis optical systems between each optical axis preferably must be held in certain precision it
It is interior, it is therefore desirable to collimation adjustment periodically is carried out to more optical axises.It is presently used for the big multisystem of method of more plain shaft parallelism adjustment
Complex, measuring accuracy is relatively low, or has certain limitation.
Patent document (CN201410665912.0) proposes " a kind of plain shaft parallelism calibration apparatus of double optical axis systems and side
Method ", the program is using two panels size is identical, orthogonal speculum and the supporting construction that can be rotated, according to geometric optics
Principle, light beam can be reflected abreast, double optical axises correspond to incident and anti-respectively by the orthogonal speculum reflection of two panels
Irradiating light beam.But this method is only applicable to the collimation adjustment between double optical axises, and need the distance between double optical axises of adjustment by
Calibration apparatus bore is limited, and use range is restricted.
The content of the invention
The present invention provides a kind of high accuracy, and reversely double optical axises and more plain shaft parallelism adjusting process, main purpose are to protect
It can further simplify calibration procedures on the premise of card adjusting accuracy, improve adjustment efficiency.
To reach above-mentioned purpose, the technical proposal of the invention is realized in this way：
The reverse double-plain shaft parallelism adjusting process of the high accuracy, the exit direction phase of primary optic axis therein and the second optical axis
Instead, it is characterised in that comprise the following steps：
Step 1)：Adjustment primary optic axis makes it horizontal, as reference axis；
Step 2)：Primary optic axis is aimed at the first autocollimator, the first autocollimator of adjustment makes itself and primary optic axis
It is coaxial；
Step 3)：Plane mirror is placed between the first autocollimator and primary optic axis, reflecting surface direction first is certainly
Collimating light pipe, plane mirror is adjusted, make reflection image and the first autocollimator center superposition, be i.e. calibration plane speculum reflects
Face is vertical with the first autocollimator optical axis；
Step 4)：In plane mirror effective range, before the displacement of the first autocollimator is made it away from into primary optic axis
The region at the second optical axis rear is simultaneously avoided in the region of side, then recalibrates the first autocollimator, makes in the first autocollimator
The heart overlaps with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the second autocollimator is directed at the first autocollimator, makes what both sent
As coincidence, i.e. optical axis coincidence；
Step 6)：Plane mirror, reflecting surface direction are put between the first autocollimator and the second autocollimator
Second autocollimator, plane mirror is adjusted, makes reflection image and the second collimating light pipe center superposition；
Step 7)：Second autocollimator is moved in the effective reflected range of plane mirror and corresponded in front of the second optical axis
Region, adjust the second autocollimator, the second autocollimator center is overlapped with the reflection image of plane mirror；
Step 8)：Plane mirror is removed, the second optical axis is adjusted, makes it coaxial with the second autocollimator center, now,
Primary optic axis is parallel with the second optical axis.
In step 1), primary optic axis level can be calibrated using theodolite, can also use other modes to calibrate the first light
Axle is horizontal.
Reversely double-plain shaft parallelism adjusting process, the present invention also propose following several more plain shaft parallelism adjustment based on more than
Method.
The first：
Adjustment primary optic axis makes it horizontal first, as reference axis；Then it is sequentially adjusted in and in the same direction each of primary optic axis
Optical axis is parallel；Finally it is sequentially adjusted in parallel with each optical axis that primary optic axis is reverse；Wherein：
A, adjusting the parallel method of optical axis in the same direction is：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between autocollimator and primary optic axis, reflecting surface towards autocollimator,
Speculum is adjusted, makes reflection image and autocollimator center superposition, i.e. calibration plane mirror reflection surface and autocollimator light
Axle is vertical；
Step 4)：Autocollimator is moved to the region corresponded in plane mirror effective range in front of the i-th optical axis, adjusted
Whole autocollimator, autocollimator center is set to be overlapped with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with autocollimator center, now
Primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, during beyond plane mirror effective range, then moved successively to the i-th optical axis direction
Plane mirror and autocollimator, each step are only moved one of them and adjustment are carried out on the basis of another, until auto-collimation
Light pipe is moved in plane mirror effective range corresponding to the region in front of the i-th optical axis；
For remaining equidirectional optical axis：With reference to above step 2) redefine successively to step 5) and nearby respectively modulated
It is parallel to adjust equidirectional each optical axis as reference axis for a certain optical axis that school is completed；Or base is used as using primary optic axis all the time
Fiducial axis, with reference to above step 2) to adjust remaining each equidirectional optical axis respectively to step 5) parallel with the reference axis；
B, adjusting the parallel method of reverse optical axis is：
According to the opposite direction optical axis for treating adjustment, a certain optical axis in link A adjustment completion is redefined nearby as base
Fiducial axis,
With reference to the reverse double-plain shaft parallelism adjusting process of above-mentioned high accuracy, corresponding an opposite direction optical axis and benchmark are adjusted
Axle is parallel；This opposite direction optical axis is equidirectional for remaining opposite direction optical axis, is designated as kth optical axis；
Therefore, for remaining opposite direction optical axis：Using kth optical axis as initial baseline axle, with reference to above step 2) extremely walk
It is rapid 5) and redefine nearby successively respectively adjustment completion a certain optical axis be used as reference axis, adjust it is equidirectional with kth optical axis
Each optical axis it is parallel；Or all the time using kth optical axis as reference axis, with reference to above step 2) it is adjusted respectively to step 5)
Remaining is parallel with kth optical axis with the equidirectional optical axis of kth optical axis.
Above scheme is that first to adjust wherein all optical axises in the same direction parallel, then to adjust all optical axises reverse therewith parallel.
All optical axises that can also first adjust with primary optic axis reversely are parallel, then all optical axises adjusted with primary optic axis in the same direction are parallel,
Such scheme belongs to the equivalent of above scheme, it should also is considered as the protection domain of present patent application.
Second：
Adjustment primary optic axis makes it horizontal first, as reference axis；Then a certain optical axis conduct is redefined nearby successively
Reference axis is parallel to adjust optical axis adjacent thereto；Wherein：
A, adjusting the parallel method of optical axis in the same direction is：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between autocollimator and primary optic axis, reflecting surface towards autocollimator,
Speculum is adjusted, makes reflection image and autocollimator center superposition, i.e. calibration plane mirror reflection surface and autocollimator light
Axle is vertical；
Step 4)：Autocollimator is moved to the region corresponded in plane mirror effective range in front of the i-th optical axis, adjusted
Whole autocollimator, autocollimator center is set to be overlapped with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with autocollimator center, now
Primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, during beyond plane mirror effective range, then moved successively to the i-th optical axis direction
Plane mirror and autocollimator, each step are only moved one of them and adjustment are carried out on the basis of another, until auto-collimation
Light pipe is moved in plane mirror effective range corresponding to the region in front of the i-th optical axis；
B, the parallel method of reverse optical axis is adjusted, with reference to the reverse double-plain shaft parallelism adjusting process of above-mentioned high accuracy.
The third：
Adjustment primary optic axis makes it horizontal first, as reference axis；Then it is sequentially adjusted in and in the same direction each of primary optic axis
Optical axis is parallel；Finally it is sequentially adjusted in parallel with each optical axis that primary optic axis is reverse；Wherein：
A, adjusting the parallel method of optical axis in the same direction is：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at the first autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between the first autocollimator and primary optic axis, reflecting surface direction first is certainly
Collimating light pipe, plane mirror is adjusted, make reflection image and the first autocollimator center superposition, be i.e. calibration plane speculum reflects
Face is vertical with the first autocollimator optical axis；
Step 4)：Second autocollimator and the first autocollimator is placed side by side, it is in the second autocollimator
Corresponding to the region in front of the i-th optical axis in plane mirror effective range, the second autocollimator is adjusted, makes the second autocollimatic direct light
Tube hub overlaps with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with the second autocollimator center,
Now primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, plane mirror effective range can not meet once to put a certain autocollimator
During region in front of corresponding i-th optical axis, then plane of motion speculum and another autocollimator, until a certain autocollimator
The region corresponded in plane mirror effective range in front of the i-th optical axis；
For remaining equidirectional optical axis：With reference to above step 2) redefine successively to step 5) and nearby respectively modulated
It is parallel to adjust equidirectional each optical axis as reference axis for a certain optical axis that school is completed；Or base is used as using primary optic axis all the time
Fiducial axis, with reference to above step 2) to adjust remaining each equidirectional optical axis respectively to step 5) parallel with the reference axis；
B, adjusting the parallel method of reverse optical axis is：
According to the opposite direction optical axis for treating adjustment, a certain optical axis in link A adjustment completion is redefined nearby as base
Fiducial axis,
With reference to the reverse double-plain shaft parallelism adjusting process of above-mentioned high accuracy, corresponding an opposite direction optical axis and benchmark are adjusted
Axle is parallel；This opposite direction optical axis is equidirectional for remaining opposite direction optical axis, is designated as kth optical axis；
Therefore, for remaining opposite direction optical axis：Using kth optical axis as initial baseline axle, with reference to above step 2) extremely walk
It is rapid 5) and redefine nearby successively respectively adjustment completion a certain optical axis be used as reference axis, adjust it is equidirectional with kth optical axis
Each optical axis it is parallel；Or all the time using kth optical axis as reference axis, with reference to above step 2) it is adjusted respectively to step 5)
Remaining is parallel with kth optical axis with the equidirectional optical axis of kth optical axis.
4th kind：
Adjustment primary optic axis makes it horizontal first, as reference axis；Then a certain optical axis conduct is redefined nearby successively
Reference axis is parallel to adjust optical axis adjacent thereto；Wherein：
A, adjusting the parallel method of optical axis in the same direction is：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at the first autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between the first autocollimator and primary optic axis, reflecting surface direction first is certainly
Collimating light pipe, plane mirror is adjusted, make reflection image and the first autocollimator center superposition, be i.e. calibration plane speculum reflects
Face is vertical with the first autocollimator optical axis；
Step 4)：Second autocollimator and the first autocollimator is placed side by side, it is in the second autocollimator
Corresponding to the region in front of the i-th optical axis in plane mirror effective range, the second autocollimator is adjusted, makes the second autocollimatic direct light
Tube hub overlaps with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with the second autocollimator center,
Now primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, plane mirror effective range can not meet once to put a certain autocollimator
During region in front of corresponding i-th optical axis, then plane of motion speculum and another autocollimator, until a certain autocollimator
The region corresponded in plane mirror effective range in front of the i-th optical axis；
B, the parallel method of reverse optical axis is adjusted, with reference to the reverse double-plain shaft parallelism adjusting process of above-mentioned high accuracy.
Compared with prior art, beneficial effects of the present invention are as follows：
1st, this method is simple and easy, need to only utilize conventional detection device to complete, adjusting accuracy is high.
2nd, this method can be realized parallel between more optical axises of a wide range of, more bores, each optical axis of multiband optical system
Property adjustment.
Brief description of the drawings
Fig. 1 is the schematic diagram of plain shaft parallelism adjustment when double optical axis beam exits of the present invention are in opposite direction.
Fig. 2 is a kind of schematic diagram of equidirectional plain shaft parallelism adjustment in more plain shaft parallelism calibration procedures.
Fig. 3 is the schematic diagram of another equidirectional plain shaft parallelism adjustment in more plain shaft parallelism calibration procedures.
Drawing reference numeral explanation：
1-1 autocollimators, 2- plane mirrors, 3- primary optic axis (reference axis), the optical axises of 4- second, 5- plane reflections
Mirror, 6-2 autocollimators.
Embodiment
Embodiment one
As shown in figure 1, the reverse double-plain shaft parallelism adjusting process of the high accuracy, comprises the following steps：
Step 1：Make it horizontal with theodolite adjustment primary optic axis (reference axis)；
Step 2：Primary optic axis is aimed at No. 1 autocollimator, No. 1 autocollimator of adjustment makes it be total to primary optic axis
Axle；
Step 3：One plane mirror is placed on No. 1 between autocollimator and primary optic axis, reflecting surface direction 1 is certainly
Collimating light pipe, speculum is adjusted, makes reflection image and No. 1 autocollimator center superposition.It is anti-that this step is used for adjustment plane mirror
It is vertical with No. 1 autocollimator optical axis to penetrate face；
Step 4：The rightmost side that No. 1 autocollimator is moved in the effective reflected range of plane mirror, adjust No. 1 autocollimatic
Straight collimator, No. 1 autocollimator center is set to be overlapped with the reflection image of level crossing；
Step 5：Plane mirror is removed, No. 2 autocollimators are directed at No. 1 autocollimator, the picture for sending both
Overlap, i.e. optical axis coincidence；
Step 6：Plane mirror is put between No. 1 autocollimator and No. 2 autocollimators, reflecting surface is towards No. 2
Autocollimator, speculum is adjusted, makes reflection image and No. 2 collimating light pipe center superpositions；
Step 7：The rightmost side that No. 2 autocollimators are moved in the effective reflected range of plane mirror is (before the second optical axis
Side), No. 2 autocollimators are adjusted, No. 2 autocollimator centers is overlapped with the reflection image of level crossing；
Step 8：Plane mirror is removed, the second optical axis is adjusted, makes it coaxial with No. 2 autocollimator centers, now, the
One optical axis is parallel with the second optical axis.
Embodiment two
Collimation adjustment for more optical axises, first adjustment primary optic axis make it horizontal, as reference axis；Then adjust successively
It is whole parallel with each optical axis that primary optic axis is in the same direction；Finally it is sequentially adjusted in parallel with each optical axis that primary optic axis is reverse.Wherein：
A, the parallel method of optical axis in the same direction is adjusted, as shown in Figure 2：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between autocollimator and primary optic axis, reflecting surface towards autocollimator,
Speculum is adjusted, makes reflection image and autocollimator center superposition, i.e. calibration plane mirror reflection surface and autocollimator light
Axle is vertical；
Step 4)：Autocollimator is moved to the region corresponded in plane mirror effective range in front of the i-th optical axis, adjusted
Whole autocollimator, autocollimator center is set to be overlapped with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with autocollimator center, now
Primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, during beyond plane mirror effective range, then moved successively to the i-th optical axis direction
Plane mirror and autocollimator, each step are only moved one of them and adjustment are carried out on the basis of another, until auto-collimation
Light pipe is moved in plane mirror effective range corresponding to the region in front of the i-th optical axis；
For remaining equidirectional optical axis：With reference to above step 2) redefine successively to step 5) and nearby respectively modulated
It is parallel to adjust equidirectional each optical axis as reference axis for a certain optical axis that school is completed；Or base is used as using primary optic axis all the time
Fiducial axis, with reference to above step 2) to adjust remaining each equidirectional optical axis respectively to step 5) parallel with the reference axis；
B, adjusting the parallel method of reverse optical axis is：
According to the opposite direction optical axis for treating adjustment, a certain optical axis in link A adjustment completion is redefined nearby as base
Fiducial axis,
With reference to the reverse double-plain shaft parallelism adjusting process of foregoing high accuracy, corresponding an opposite direction optical axis and benchmark are adjusted
Axle is parallel；This opposite direction optical axis is equidirectional for remaining opposite direction optical axis, is designated as kth optical axis；
Therefore, for remaining opposite direction optical axis：Using kth optical axis as initial baseline axle, with reference to above step 2) extremely walk
It is rapid 5) and redefine nearby successively respectively adjustment completion a certain optical axis be used as reference axis, adjust it is equidirectional with kth optical axis
Each optical axis it is parallel；Or all the time using kth optical axis as reference axis, with reference to above step 2) it is adjusted respectively to step 5)
Remaining is parallel with kth optical axis with the equidirectional optical axis of kth optical axis.
Above scheme is that first to adjust wherein all optical axises in the same direction parallel, then to adjust all optical axises reverse therewith parallel.
All optical axises that can also first adjust with primary optic axis reversely are parallel, then all optical axises adjusted with primary optic axis in the same direction are parallel,
Such scheme belongs to the equivalent of above scheme, it should also is considered as the protection domain of present patent application.
Embodiment three
Collimation adjustment for more optical axises, first adjustment primary optic axis make it horizontal, as reference axis；Then successively
It is parallel to adjust optical axis adjacent thereto as reference axis closely to redefine a certain optical axis；Wherein：
A, the parallel method of optical axis in the same direction is adjusted, as shown in Figure 2：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at the first autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between the first autocollimator and primary optic axis, reflecting surface direction first is certainly
Collimating light pipe, plane mirror is adjusted, make reflection image and the first autocollimator center superposition, be i.e. calibration plane speculum reflects
Face is vertical with the first autocollimator optical axis；
Step 4)：Second autocollimator and the first autocollimator is placed side by side, it is in the second autocollimator
Corresponding to the region in front of the i-th optical axis in plane mirror effective range, the second autocollimator is adjusted, makes the second autocollimatic direct light
Tube hub overlaps with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with the second autocollimator center,
Now primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, plane mirror effective range can not meet once to put a certain autocollimator
During region in front of corresponding i-th optical axis, then plane of motion speculum and another autocollimator, until a certain autocollimator
The region corresponded in plane mirror effective range in front of the i-th optical axis；
B, the parallel method of reverse optical axis is adjusted, with reference to the reverse double-plain shaft parallelism adjusting process of foregoing high accuracy.
Example IV
Collimation adjustment for more optical axises, first adjustment primary optic axis make it horizontal, as reference axis；Then adjust successively
It is whole parallel with each optical axis that primary optic axis is in the same direction；Finally it is sequentially adjusted in parallel with each optical axis that primary optic axis is reverse.Wherein：
A, the parallel method of optical axis in the same direction is adjusted, as shown in Figure 3：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at the first autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between the first autocollimator and primary optic axis, reflecting surface direction first is certainly
Collimating light pipe, plane mirror is adjusted, make reflection image and the first autocollimator center superposition, be i.e. calibration plane speculum reflects
Face is vertical with the first autocollimator optical axis；
Step 4)：Second autocollimator and the first autocollimator is placed side by side, it is in the second autocollimator
Corresponding to the region in front of the i-th optical axis in plane mirror effective range, the second autocollimator is adjusted, makes the second autocollimatic direct light
Tube hub overlaps with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with the second autocollimator center,
Now primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, plane mirror effective range can not meet once to put a certain autocollimator
During region in front of corresponding i-th optical axis, then plane of motion speculum and another autocollimator, until a certain autocollimator
The region corresponded in plane mirror effective range in front of the i-th optical axis；
For remaining equidirectional optical axis：With reference to above step 2) redefine successively to step 5) and nearby respectively modulated
It is parallel to adjust equidirectional each optical axis as reference axis for a certain optical axis that school is completed；Or base is used as using primary optic axis all the time
Fiducial axis, with reference to above step 2) to adjust remaining each equidirectional optical axis respectively to step 5) parallel with the reference axis；
B, adjusting the parallel method of reverse optical axis is：
According to the opposite direction optical axis for treating adjustment, a certain optical axis in link A adjustment completion is redefined nearby as base
Fiducial axis,
With reference to the reverse double-plain shaft parallelism adjusting process of foregoing high accuracy, corresponding an opposite direction optical axis and benchmark are adjusted
Axle is parallel；This opposite direction optical axis is equidirectional for remaining opposite direction optical axis, is designated as kth optical axis；
Therefore, for remaining opposite direction optical axis：Using kth optical axis as initial baseline axle, with reference to above step 2) extremely walk
It is rapid 5) and redefine nearby successively respectively adjustment completion a certain optical axis be used as reference axis, adjust it is equidirectional with kth optical axis
Each optical axis it is parallel；Or all the time using kth optical axis as reference axis, with reference to above step 2) it is adjusted respectively to step 5)
Remaining is parallel with kth optical axis with the equidirectional optical axis of kth optical axis.
Embodiment five
Collimation adjustment for more optical axises, first adjustment primary optic axis make it horizontal, as reference axis；Then successively
It is parallel to adjust optical axis adjacent thereto as reference axis closely to redefine a certain optical axis；Wherein：
A, the parallel method of optical axis in the same direction is adjusted, as shown in Figure 3：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at the first autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between the first autocollimator and primary optic axis, reflecting surface direction first is certainly
Collimating light pipe, plane mirror is adjusted, make reflection image and the first autocollimator center superposition, be i.e. calibration plane speculum reflects
Face is vertical with the first autocollimator optical axis；
Step 4)：Second autocollimator and the first autocollimator is placed side by side, it is in the second autocollimator
Corresponding to the region in front of the i-th optical axis in plane mirror effective range, the second autocollimator is adjusted, makes the second autocollimatic direct light
Tube hub overlaps with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with the second autocollimator center,
Now primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, plane mirror effective range can not meet once to put a certain autocollimator
During region in front of corresponding i-th optical axis, then plane of motion speculum and another autocollimator, until a certain autocollimator
The region corresponded in plane mirror effective range in front of the i-th optical axis；
B, the parallel method of reverse optical axis is adjusted, with reference to the reverse double-plain shaft parallelism adjusting process of foregoing high accuracy.
Claims (6)
1. a kind of reverse double-plain shaft parallelism adjusting process of high accuracy, the exit direction phase of primary optic axis therein and the second optical axis
Instead, it is characterised in that comprise the following steps：
Step 1)：Adjustment primary optic axis makes it horizontal, as reference axis；
Step 2)：Primary optic axis is aimed at the first autocollimator, the first autocollimator of adjustment makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between the first autocollimator and primary optic axis, reflecting surface the first auto-collimation of direction
Light pipe, adjust plane mirror, make reflection image and the first autocollimator center superposition, i.e., calibration plane mirror reflection surface and
First autocollimator optical axis is vertical；
Step 4)：In plane mirror effective range, the displacement of the first autocollimator is made it away from front of primary optic axis
Region and the region for avoiding the second optical axis rear, then recalibrate the first autocollimator, make the first autocollimator center with
The reflection image of plane mirror overlaps；
Step 5)：Plane mirror is removed, the second autocollimator is directed at the first autocollimator, the picture weight for sending both
Close, i.e. optical axis coincidence；
Step 6)：Plane mirror, reflecting surface direction second are put between the first autocollimator and the second autocollimator
Autocollimator, plane mirror is adjusted, makes reflection image and the second collimating light pipe center superposition；
Step 7)：Second autocollimator is moved to the area corresponded in the effective reflected range of plane mirror in front of the second optical axis
Domain, the second autocollimator is adjusted, the second autocollimator center is overlapped with the reflection image of plane mirror；
Step 8)：Plane mirror is removed, the second optical axis is adjusted, makes it coaxial with the second autocollimator center, now, first
Optical axis is parallel with the second optical axis.
2. the reverse double-plain shaft parallelism adjusting process of high accuracy according to claim 1, it is characterised in that：In step 1),
Primary optic axis level is calibrated using theodolite.
A kind of 3. reverse more plain shaft parallelism adjusting process of high accuracy, it is characterised in that：Adjustment primary optic axis makes it horizontal first,
As reference axis；Then it is sequentially adjusted in parallel with each optical axis that primary optic axis is in the same direction；Finally it is sequentially adjusted in anti-with primary optic axis
To each optical axis it is parallel；Wherein：
A, adjusting the parallel method of optical axis in the same direction is：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between autocollimator and primary optic axis, reflecting surface adjusts towards autocollimator
Speculum, makes reflection image and autocollimator center superposition, i.e. calibration plane mirror reflection surface is hung down with autocollimator optical axis
Directly；
Step 4)：Autocollimator is moved to the region corresponded in plane mirror effective range in front of the i-th optical axis, adjustment is certainly
Collimating light pipe, autocollimator center is set to be overlapped with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with autocollimator center, now first
Optical axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, during beyond plane mirror effective range, then to the i-th optical axis direction successively plane of motion
Speculum and autocollimator, each step are only moved one of them and adjustment are carried out on the basis of another, until autocollimator
Move in plane mirror effective range corresponding to the region in front of the i-th optical axis；
For remaining equidirectional optical axis：With reference to above step 2) to step 5) and to redefine adjustment nearby successively respectively complete
Into a certain optical axis as reference axis, it is parallel to adjust equidirectional each optical axis；Or benchmark is used as using primary optic axis all the time
Axle, with reference to above step 2) to adjust remaining each equidirectional optical axis respectively to step 5) parallel with the reference axis；
B, adjusting the parallel method of reverse optical axis is：
According to the opposite direction optical axis for treating adjustment, a certain optical axis completed in link A adjustment is redefined nearby as reference axis,
The reverse double-plain shaft parallelism adjusting process of high accuracy with reference to described in claim 1, adjusts a corresponding opposite direction light
Axle is parallel with reference axis；This opposite direction optical axis is equidirectional for remaining opposite direction optical axis, is designated as kth optical axis；
Therefore, for remaining opposite direction optical axis：Using kth optical axis as initial baseline axle, with reference to above step 2) to step 5)
And a certain optical axis for redefining the completion of adjustment nearby successively respectively is equidirectional each with kth optical axis as reference axis, regulation
Individual optical axis is parallel；Or all the time using kth optical axis as reference axis, with reference to above step 2) remaining is adjusted respectively to step 5)
It is parallel with kth optical axis with the equidirectional optical axis of kth optical axis.
A kind of 4. reverse more plain shaft parallelism adjusting process of high accuracy, it is characterised in that：Adjustment primary optic axis makes it horizontal first,
As reference axis；Then it is parallel to adjust optical axis adjacent thereto as reference axis to redefine a certain optical axis nearby successively；Its
In：
A, adjusting the parallel method of optical axis in the same direction is：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between autocollimator and primary optic axis, reflecting surface adjusts towards autocollimator
Speculum, makes reflection image and autocollimator center superposition, i.e. calibration plane mirror reflection surface is hung down with autocollimator optical axis
Directly；
Step 4)：Autocollimator is moved to the region corresponded in plane mirror effective range in front of the i-th optical axis, adjustment is certainly
Collimating light pipe, autocollimator center is set to be overlapped with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with autocollimator center, now first
Optical axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, during beyond plane mirror effective range, then to the i-th optical axis direction successively plane of motion
Speculum and autocollimator, each step are only moved one of them and adjustment are carried out on the basis of another, until autocollimator
Move in plane mirror effective range corresponding to the region in front of the i-th optical axis；
B, the parallel method of reverse optical axis is adjusted, the reverse double-plain shaft parallelism adjustment side of the high accuracy with reference to described in claim 1
Method.
A kind of 5. reverse more plain shaft parallelism adjusting process of high accuracy, it is characterised in that：Adjustment primary optic axis makes it horizontal first,
As reference axis；Then it is sequentially adjusted in parallel with each optical axis that primary optic axis is in the same direction；Finally it is sequentially adjusted in anti-with primary optic axis
To each optical axis it is parallel；Wherein：
A, adjusting the parallel method of optical axis in the same direction is：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at the first autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between the first autocollimator and primary optic axis, reflecting surface the first auto-collimation of direction
Light pipe, adjust plane mirror, make reflection image and the first autocollimator center superposition, i.e., calibration plane mirror reflection surface and
First autocollimator optical axis is vertical；
Step 4)：Second autocollimator and the first autocollimator is placed side by side, the second autocollimator is in plane
Corresponding to the region in front of the i-th optical axis in speculum effective range, the second autocollimator is adjusted, is made in the second autocollimator
The heart overlaps with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with the second autocollimator center, now
Primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, plane mirror effective range can not meet once to be placed in a certain autocollimator pair
When answering the region in front of the i-th optical axis, then plane of motion speculum and another autocollimator, until a certain autocollimator is in
Corresponding to the region in front of the i-th optical axis in plane mirror effective range；
For remaining equidirectional optical axis：With reference to above step 2) to step 5) and to redefine adjustment nearby successively respectively complete
Into a certain optical axis as reference axis, it is parallel to adjust equidirectional each optical axis；Or benchmark is used as using primary optic axis all the time
Axle, with reference to above step 2) to adjust remaining each equidirectional optical axis respectively to step 5) parallel with the reference axis；
B, adjusting the parallel method of reverse optical axis is：
According to the opposite direction optical axis for treating adjustment, a certain optical axis completed in link A adjustment is redefined nearby as reference axis,
The reverse double-plain shaft parallelism adjusting process of high accuracy with reference to described in claim 1, adjusts a corresponding opposite direction light
Axle is parallel with reference axis；This opposite direction optical axis is equidirectional for remaining opposite direction optical axis, is designated as kth optical axis；
Therefore, for remaining opposite direction optical axis：Using kth optical axis as initial baseline axle, with reference to above step 2) to step 5)
And a certain optical axis for redefining the completion of adjustment nearby successively respectively is equidirectional each with kth optical axis as reference axis, regulation
Individual optical axis is parallel；Or all the time using kth optical axis as reference axis, with reference to above step 2) remaining is adjusted respectively to step 5)
It is parallel with kth optical axis with the equidirectional optical axis of kth optical axis.
A kind of 6. reverse more plain shaft parallelism adjusting process of high accuracy, it is characterised in that：Adjustment primary optic axis makes it horizontal first,
As reference axis；Then it is parallel to adjust optical axis adjacent thereto as reference axis to redefine a certain optical axis nearby successively；Its
In：
A, adjusting the parallel method of optical axis in the same direction is：
Step 1)：According to the position of primary optic axis, an equidirectional optical axis for treating adjustment is selected nearby, is designated as the i-th optical axis；
Step 2)：Primary optic axis is aimed at the first autocollimator, adjustment autocollimator makes it coaxial with primary optic axis；
Step 3)：Plane mirror is placed between the first autocollimator and primary optic axis, reflecting surface the first auto-collimation of direction
Light pipe, adjust plane mirror, make reflection image and the first autocollimator center superposition, i.e., calibration plane mirror reflection surface and
First autocollimator optical axis is vertical；
Step 4)：Second autocollimator and the first autocollimator is placed side by side, the second autocollimator is in plane
Corresponding to the region in front of the i-th optical axis in speculum effective range, the second autocollimator is adjusted, is made in the second autocollimator
The heart overlaps with the reflection image of plane mirror；
Step 5)：Plane mirror is removed, the i-th optical axis is adjusted, makes the i-th optical axis coaxial with the second autocollimator center, now
Primary optic axis is parallel with the i-th optical axis；
When apart from each other between two optical axises, plane mirror effective range can not meet once to be placed in a certain autocollimator pair
When answering the region in front of the i-th optical axis, then plane of motion speculum and another autocollimator, until a certain autocollimator is in
Corresponding to the region in front of the i-th optical axis in plane mirror effective range；
B, the parallel method of reverse optical axis is adjusted, the reverse double-plain shaft parallelism adjustment side of the high accuracy with reference to described in claim 1
Method.
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