JP2540604Y2 - Optical element mounting device - Google Patents

Optical element mounting device

Info

Publication number
JP2540604Y2
JP2540604Y2 JP1990044525U JP4452590U JP2540604Y2 JP 2540604 Y2 JP2540604 Y2 JP 2540604Y2 JP 1990044525 U JP1990044525 U JP 1990044525U JP 4452590 U JP4452590 U JP 4452590U JP 2540604 Y2 JP2540604 Y2 JP 2540604Y2
Authority
JP
Japan
Prior art keywords
base
optical element
movable
movable part
mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1990044525U
Other languages
Japanese (ja)
Other versions
JPH046007U (en
Inventor
毅 吉岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Graphtec Corp
Original Assignee
Graphtec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Graphtec Corp filed Critical Graphtec Corp
Priority to JP1990044525U priority Critical patent/JP2540604Y2/en
Publication of JPH046007U publication Critical patent/JPH046007U/ja
Application granted granted Critical
Publication of JP2540604Y2 publication Critical patent/JP2540604Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【考案の詳細な説明】 [産業上の利用分野] 本考案はレーザ光を利用して計測を行なう機器などに
おいて、レーザ光を所定の位置で屈折もしくは反射させ
るための光学素子を取付ける装置に関し、特に、光学素
子の姿勢を微調整可能にした光学素子取付装置に関す
る。
DETAILED DESCRIPTION OF THE INVENTION [Industrial application field] The present invention relates to a device for mounting an optical element for refracting or reflecting a laser beam at a predetermined position in a device or the like that performs measurement using a laser beam. In particular, the present invention relates to an optical element mounting device capable of finely adjusting the attitude of an optical element.

[従来の技術] 従来、レーザ光を用いた計測機器は、一般に第5図及
び第6図に示すような光学素子取付装置を含んでいる。
この光学素子取付装置は、取付ベース部1と、この取付
ベース部1に取付けられている基部3とを有している。
基部3の上面には可動部5が設けられている。可動部5
は互いに間隔をもって平行な二つの可動板5a,5bと、こ
れらの可動板5a,5bを相互に支持している二つの支柱5c
とを有している。上方の可動板5aの中央部分には上下動
が可能な押え部材7が取付られている。押え部材7は上
方の可動板5aを貫通して上下にのびている。押え部材7
の下端と下方の可動板5bとの間には、レーザ光を屈曲さ
せるための光学素子(図示せず)が挟まれ機械的に固定
されるものである。押え部材7の上部にはツマミ7aが設
けられている。
[Prior Art] Conventionally, a measuring instrument using a laser beam generally includes an optical element mounting device as shown in FIGS.
The optical element mounting device has a mounting base 1 and a base 3 mounted on the mounting base 1.
The movable part 5 is provided on the upper surface of the base 3. Movable part 5
Denotes two movable plates 5a and 5b parallel to each other at an interval, and two columns 5c supporting these movable plates 5a and 5b to each other.
And A pressing member 7 that can move up and down is attached to a central portion of the upper movable plate 5a. The holding member 7 extends vertically through the upper movable plate 5a. Holding member 7
An optical element (not shown) for bending the laser beam is sandwiched and mechanically fixed between the lower end of the movable plate 5b and the lower movable plate 5b. A knob 7a is provided on the upper part of the holding member 7.

また、この光学素子取付装置は、さらに、二つの傾斜
調整部材9,11と、一つの回転調整部材13とを含んでい
る。押え部材7を軸方向とすると、傾斜調整部材9,11は
基部3の円筒状側面から半径方向外向きに突出してい
る。一方、回転調整部材13は基部3の円筒状側面から接
線と平行な向きに突出している。
Further, the optical element mounting device further includes two inclination adjusting members 9 and 11 and one rotation adjusting member 13. Assuming that the holding member 7 is in the axial direction, the tilt adjusting members 9 and 11 project radially outward from the cylindrical side surface of the base 3. On the other hand, the rotation adjusting member 13 protrudes from the cylindrical side surface of the base 3 in a direction parallel to a tangent line.

傾斜調整部材9,11と回転調整部材13の先端部にはそれ
ぞれツマミ9a,11a,13aが設けられている。これらのツマ
ミ9a,11a,13aを回転すると、傾斜調整部材9,11及び回転
調整部材13が回転し、可動部5を傾斜や回転させること
ができる。この結果、光学素子の姿勢や向きを微調整し
て、屈曲後のレーザ光を所定の位置に向けることが可能
である。
Knobs 9a, 11a, and 13a are provided at tip portions of the inclination adjusting members 9, 11 and the rotation adjusting member 13, respectively. When these knobs 9a, 11a, 13a are rotated, the tilt adjusting members 9, 11 and the rotation adjusting member 13 are rotated, and the movable portion 5 can be tilted and rotated. As a result, the laser beam after bending can be directed to a predetermined position by finely adjusting the attitude and the direction of the optical element.

さらに、この光学素子取付装置は取付ベース部1に形
成されている四つのねじ孔15にねじ(図示せず)を貫通
して設置台などに固定設置される。
Further, this optical element mounting device is fixedly installed on an installation table or the like by penetrating screws (not shown) into four screw holes 15 formed in the mounting base portion 1.

[考案が解決しようとする課題] しかしながら、二つの光学素子取付装置を相隣接して
設置すると、各ツマミ7a,9a,11a,13aの操作によりレー
ザ光を所定位置に合わせる際に、隣接する光学素子取付
装置が邪魔をして微調整が困難になるという問題があ
る。
[Problem to be Solved by the Invention] However, if two optical element mounting devices are installed adjacent to each other, when the laser light is adjusted to a predetermined position by operating each of the knobs 7a, 9a, 11a, and 13a, the adjacent optical devices are mounted. There is a problem that the fine adjustment is difficult because the element mounting device is in the way.

さらに、傾斜調整部材9,11や回転調整部材13が基部3
の円筒状側面から外方に突出しているため、光学素子取
付装置の外観寸法が大きくなり、その分、設置スペース
を広く確保しなければならない。
Furthermore, the inclination adjusting members 9 and 11 and the rotation adjusting member 13
Projecting outward from the cylindrical side surface of the optical element mounting device, the external dimensions of the optical element mounting device become large, and a correspondingly large installation space must be secured.

したがって、このような光学素子取付装置はコンパク
トに設計・製作することができないという問題がある。
Therefore, there is a problem that such an optical element mounting device cannot be designed and manufactured compactly.

それ故に、本考案の課題はレーザ光の微調整を容易に
でき、しかもコンパクトに設計・製作ができ、安価な光
学素子取付装置を提供することにある。
Therefore, an object of the present invention is to provide an inexpensive optical element mounting device that can easily fine-tune a laser beam, and can be designed and manufactured in a compact manner.

[課題を解決するための手段] 本考案によれば、光学素子を取付けるための可動部
と、該可動部を姿勢調整可能に取付けた基部とを含む光
学素子取付装置において、 上記可動部と上記基部との間に隙間が形成されるよう
挟み込まれかつ所定直線に沿って配した2つの球体と、
上記可動部と上記基部との間の相対距離を上記隙間の範
囲内で変化させて上記可動部にシーソー運動を行わせ上
記光学素子が取り付けられた上記可動部の姿勢を調整す
るよう上記球体のそれぞれを通る上記所定直線を挟む上
記可動部の両側のそれぞれに設けられかつ上記シーソー
運動の方向で上記可動部と上記基部とを上記隙間の範囲
内で相対移動可能に連結した調整手段とを有しているこ
とを特徴とする光学素子取付装置が得られる。
[Means for Solving the Problems] According to the present invention, there is provided an optical element mounting apparatus including a movable part for mounting an optical element and a base on which the movable part is mounted so that the posture can be adjusted. Two spheres that are sandwiched between the base and the base so as to form a gap and are arranged along a predetermined straight line;
The relative distance between the movable portion and the base portion is changed within the range of the gap to perform a seesaw motion on the movable portion to adjust the posture of the movable portion to which the optical element is attached, so that the spherical body is adjusted. Adjusting means provided on each of both sides of the movable section sandwiching the predetermined straight line passing therethrough, and connecting the movable section and the base in the direction of the seesaw movement so as to be relatively movable within the range of the gap. Thus, an optical element mounting device is obtained.

[実施例] 第1図及び第2図は、本考案の一実施例による光学素
子取付装置を示す。
Embodiment FIG. 1 and FIG. 2 show an optical element mounting apparatus according to an embodiment of the present invention.

第1図及び第2図を参照して、この光学素子取付装置
は取付ベース部21と、この取付ベース部21の主面に取付
けられている基部23とを含んでいる。基部23の上面には
プリズムもしくは反射ミラーのような光学素子26(図面
ではプリズムを示す)を所定位置に取付けるための可動
部27が取付けられている。基部23の下部には一対のフラ
ンジ部23a,23bが互いに反対方向に突出するようにのび
ている。これらのフランジ部23a,23bには、それぞれ取
付孔25a,25bが形成されている。
Referring to FIGS. 1 and 2, the optical element mounting apparatus includes a mounting base 21 and a base 23 mounted on a main surface of the mounting base 21. On the upper surface of the base 23, a movable portion 27 for mounting an optical element 26 (a prism is shown in the drawing) such as a prism or a reflection mirror at a predetermined position is mounted. A pair of flanges 23a and 23b extend below the base 23 so as to project in opposite directions. Mounting holes 25a and 25b are formed in these flange portions 23a and 23b, respectively.

一方のフランジ部23aには、その一端から基部23の一
側壁に向けてのびている調整溝部25cが形成されてい
る。
An adjustment groove 25c extending from one end of the flange 23a toward one side wall of the base 23 is formed on one flange 23a.

取付ベース部21と基部23とは固定手段によ互いに取付
けられている。固定手段としては、基部23の取付孔25a,
25bにそれぞれ挿通した2本のねじ31(図面では一つの
みを示す)を取付ベース部21のねじ孔29a,29bにねじ込
み、スプリングワッシャー29を介して締付けているもの
である。取付孔25a,25bは、ねじ31の径寸法よりも大き
い径寸法を有している。
The attachment base 21 and the base 23 are attached to each other by fixing means. As fixing means, the mounting holes 25a of the base 23,
Two screws 31 (only one is shown in the drawing) respectively inserted through 25b are screwed into screw holes 29a, 29b of the mounting base 21 and fastened via spring washers 29. The mounting holes 25a and 25b have a diameter larger than the diameter of the screw 31.

さらに、調整溝部25cは公知の偏心ドライバー(図示
せず)によって基部23を回動方向に微調整を行なうため
のものである。偏心ドライバーの使用を可能にするため
に、取付ベース部21には調整溝部25cに対向するように
基準孔33が形成されている。基準孔33は基部23の回動の
微調整の基準となるものである。
Further, the adjusting groove 25c is for finely adjusting the base 23 in the turning direction by a known eccentric driver (not shown). In order to enable use of the eccentric screwdriver, a reference hole 33 is formed in the mounting base 21 so as to face the adjustment groove 25c. The reference hole 33 serves as a reference for fine adjustment of the rotation of the base 23.

基部23の底面には、その中央部分に軸穴34が形成され
ている。一方、取付ベース部21にも基板23の軸穴34に対
向して軸穴37が形成されている。これらの軸穴34,37に
は取付軸35が嵌合されている。こうして、取付ベース部
21と基部23とは取付軸35によって相互に回動可能に連結
されている。即ち、基部23は取付ベース部21の主面に垂
直な軸心である取付軸35の回りで回動可能としている。
A shaft hole 34 is formed in the center of the bottom surface of the base 23. On the other hand, a shaft hole 37 is also formed in the mounting base portion 21 so as to face the shaft hole 34 of the substrate 23. A mounting shaft 35 is fitted into these shaft holes 34, 37. Thus, the mounting base
The base 21 and the base 23 are rotatably connected to each other by a mounting shaft 35. That is, the base 23 is rotatable around a mounting shaft 35 which is an axis perpendicular to the main surface of the mounting base 21.

基部23及び可動部27は基部23に対して可動部27を位置
決めするための位置決め手段を有している。位置決め手
段として、第3図にも示すように、基部23の上面には、
球体(支点部材)38を介在するための四つの球受穴39a,
39b,39c,39dが基板23の上面に沿った仮想正方形の四角
に相当する位置にそれぞれ形成されている。二つの球受
穴39a,39bは基部23の上面の第1の対角線上に形成され
ており、他の二つの球受穴39c,39dは第2の対角線上に
形成されている。可動部27には、第4図にも示すよう
に、基部23の球受穴39a,39b,39c,39dに一対一に対向す
るように位置決め手段としての四つの球受穴40a,40b,40
c,40dが形成されている。基部23の上面の第1の対角線
上にある一対の球受穴39a.39bと、これらに対向してい
る可動部27の一対の球受穴40a,40bとの間にはそれぞれ
球体38が介在されている。また、基部23の上面の第2の
対角線上にある一対の球受穴39c,39dと、これらに対向
している可動部27の一対の球受穴40c,40dとの間にはそ
れぞれ球体38が介在できるようになっている。即ち、位
置決め手段は可動部27及び基部23の互いに対向した対向
面に相対向するように球受穴39a〜39d,40a〜40dを複数
組所定直線に沿って互いに異なる位置に有している。球
体38は可動部27と基部23との間に隙間Sを形成するよう
挟み込まれており、基部23と可動部27との間に少しの隙
間S(第3図参照)を残すように寸法を定められてい
る。
The base 23 and the movable part 27 have positioning means for positioning the movable part 27 with respect to the base 23. As a positioning means, as shown in FIG. 3, on the upper surface of the base 23,
Four ball receiving holes 39a for interposing a sphere (fulcrum member) 38,
39b, 39c, and 39d are formed at positions corresponding to the squares of the virtual square along the upper surface of the substrate 23, respectively. The two ball receiving holes 39a and 39b are formed on a first diagonal line on the upper surface of the base 23, and the other two ball receiving holes 39c and 39d are formed on a second diagonal line. As shown in FIG. 4, the movable portion 27 has four ball receiving holes 40a, 40b, 40 as positioning means so as to face the ball receiving holes 39a, 39b, 39c, 39d of the base portion 23 one by one.
c, 40d are formed. A sphere 38 is interposed between the pair of ball receiving holes 39a and 39b on the first diagonal line on the upper surface of the base 23 and the pair of ball receiving holes 40a and 40b of the movable portion 27 facing these. Have been. Also, a sphere 38 is provided between a pair of ball receiving holes 39c and 39d on the second diagonal line on the upper surface of the base 23 and a pair of ball receiving holes 40c and 40d of the movable portion 27 opposed thereto. Can be interposed. That is, the positioning means has a plurality of sets of ball receiving holes 39a to 39d and 40a to 40d at different positions along a predetermined straight line so as to oppose the opposing surfaces of the movable portion 27 and the base 23. The sphere 38 is sandwiched between the movable part 27 and the base 23 so as to form a gap S, and is dimensioned so as to leave a small gap S between the base 23 and the movable part 27 (see FIG. 3). Stipulated.

したがって、可動部27と基部23とは、これらの間の相
対距離を隙間Sの範囲で変化させるものであって、可動
部27は球体38を支点として基部23に対しシーソー運動
(首振り)可動である。
Therefore, the movable portion 27 and the base portion 23 change the relative distance between them within the range of the gap S. The movable portion 27 is movable in a seesaw motion (swinging) with respect to the base portion 23 with the sphere 38 as a fulcrum. It is.

可動部27の上面には光学素子26を位置決めするための
平面L字状の位置決め板41が設けられている。位置決め
板41の両端部近傍に形成されている二つの取付孔43,44
にそれぞれねじ込まれたねじ47,48と、他部の穴に挿通
したピン51,53とによって、位置決め板41は可動部27に
固定されている。なお、ピン51,53は、位置決め板41を
所定の位置に取り付けるために用いている。即ち、可動
部27は、外形部分に切削加工を施すことによりその形状
が作られる。しかし、可動部27を量産するにあたり、そ
のロット数が多くなると、個々の可動部27の外形寸法に
多少の誤差を生じることがある。また、誤差のある可動
部27に取付孔43,44を形成して、ねじ47,48のみによっ
て、位置決め板41を可動部27に取り付けるとズレが生じ
る。即ち、可動部27の外形寸法の誤差分だけ球受穴40a
〜40dの仮想正方形の四角に相当する位置の中心からズ
レが生じる。その分、位置決め板41に張付け固定される
光学素子26の中心もズレてしまう。
An L-shaped positioning plate 41 for positioning the optical element 26 is provided on the upper surface of the movable portion 27. Two mounting holes 43 and 44 formed near both ends of the positioning plate 41
The positioning plate 41 is fixed to the movable part 27 by screws 47 and 48 screwed into the movable member 27, respectively, and pins 51 and 53 inserted into holes in other portions. The pins 51 and 53 are used for attaching the positioning plate 41 to a predetermined position. That is, the shape of the movable portion 27 is formed by performing cutting on the outer shape portion. However, when mass-producing the movable parts 27, if the number of lots increases, there may be a slight error in the outer dimensions of each movable part 27. Further, when the mounting holes 43 and 44 are formed in the movable portion 27 having an error, and the positioning plate 41 is mounted on the movable portion 27 with only the screws 47 and 48, a displacement occurs. That is, the ball receiving hole 40a has an error of the outer dimension of the movable portion 27.
Deviation occurs from the center of the position corresponding to the square of the virtual square of ~ 40d. As a result, the center of the optical element 26 fixed to the positioning plate 41 is also shifted.

このような、寸法の誤差を補正するためには、球受穴
40a〜40dの仮想正方形の四角に相当する位置の中心から
X軸ーY軸方向に所定寸法を決める。さらに、これらの
所定寸法の位置にピン51,53を挿通するためのピン穴
(図示せず)を可動部27に形成すると、位置決め板41は
常に、同じ位置に取り付けることができる。
To correct such dimensional errors, the ball receiving hole
A predetermined dimension is determined in the X-axis-Y-axis direction from the center of the position corresponding to the square of the virtual square of 40a to 40d. Further, when pin holes (not shown) for inserting the pins 51 and 53 into the positions of these predetermined dimensions are formed in the movable portion 27, the positioning plate 41 can always be mounted at the same position.

また、基部23及び可動部27には、基部23に対する可動
部27の姿勢をシーソー運動の方向で調整する調整手段を
設けている。調整手段は、可動部27と基部23との間の相
対距離を隙間の範囲内で変化させて可動部27にシーソー
運動を行わせ光学素子26が取り付けられた可動部27の姿
勢を調整するよう一対の球体38のそれぞれを通る所定直
線を挟む可動部27の両側のそれぞれに位置している。こ
のような調整手段は、シーソー運動の方向で可動部27と
基部23とを隙間Sの範囲内で相対移動可能に連結してい
る。可動部27は次に詳述するように、調整手段として、
二つの調整ねじ61,62によって基部23に取付けられてい
る。一方の調整ねじ61は二つの平ワッシャー57a,57b
と、これらの間に設けた圧縮コイルバネのようなばね部
材59とを貫通し、可動部27及び位置決め板41を貫通して
いる取付孔64に挿通されている。さらに、他方の調整ね
じ62は、一方の取付孔64の対角線上の反対側で可動部27
を貫通している取付孔65に挿通されている。この取付孔
65に対向して基部23に形成されている調整ねじ孔68には
調整ねじ62がねじ込まれている。即ち、この調整手段は
球体38を支点として可動部27を基部23に対し一方向に付
勢したばね部材59と、球体38を支点として可動部27を基
部23に対し反対方向に動かすための調整ねじ61,62を有
している。
The base 23 and the movable unit 27 are provided with adjusting means for adjusting the posture of the movable unit 27 with respect to the base 23 in the direction of the seesaw movement. The adjusting means changes the relative distance between the movable part 27 and the base part 23 within the range of the gap to cause the movable part 27 to perform a seesaw motion and adjust the posture of the movable part 27 to which the optical element 26 is attached. It is located on each side of the movable part 27 across a predetermined straight line passing through each of the pair of spheres 38. Such adjusting means connects the movable portion 27 and the base portion 23 so as to be relatively movable within the range of the gap S in the direction of the seesaw motion. As described in detail below, the movable portion 27 serves as an adjusting unit.
It is attached to the base 23 by two adjusting screws 61,62. One adjusting screw 61 has two flat washers 57a and 57b.
And a spring member 59 such as a compression coil spring provided therebetween, and is inserted into a mounting hole 64 passing through the movable portion 27 and the positioning plate 41. Further, the other adjusting screw 62 is connected to the movable portion 27 on the diagonally opposite side of the one mounting hole 64.
Is inserted through a mounting hole 65 penetrating through. This mounting hole
An adjusting screw 62 is screwed into an adjusting screw hole 68 formed in the base 23 so as to face the 65. That is, the adjusting means includes a spring member 59 which urges the movable portion 27 in one direction with respect to the base 38 with the sphere 38 as a fulcrum, and an adjustment for moving the movable portion 27 in the opposite direction with respect to the base 23 with the sphere 38 as a fulcrum. It has screws 61 and 62.

また、基部23の上面には、、調整ねじ孔67,68の他
に、これらに対して90°の角度をなす位置に付加調整ね
じ孔71,72が形成されている。これらの付加調整ねじ孔7
1,72の役割は後文にて明らかになる。
Further, on the upper surface of the base 23, in addition to the adjustment screw holes 67 and 68, additional adjustment screw holes 71 and 72 are formed at positions at an angle of 90 ° with respect to the adjustment screw holes 67 and 68. These additional adjustment screw holes 7
The role of 1,72 will be clarified later.

このようにして、可動部27は第1の対角線上の二つの
球体38を支点として基部23の上面に対してわずかな角度
内でシーソー運動可能にされている。可動部27につれて
光学素子26も向きを変える。この結果、光学素子26を貫
通した後のレーザ光の向きは微調整可能となる。なお、
光学素子26は位置決め板41に合わせて可動部27の上面に
張付けられる。
In this manner, the movable portion 27 is capable of seesaw movement within a small angle with respect to the upper surface of the base portion 23 with the two spheres 38 on the first diagonal line serving as fulcrums. The optical element 26 changes its direction along with the movable section 27. As a result, the direction of the laser beam after penetrating the optical element 26 can be finely adjusted. In addition,
The optical element 26 is attached to the upper surface of the movable section 27 in accordance with the positioning plate 41.

次に、光学素子取付装置を用いて、光学素子26の微調
整を行なう作業について説明する。
Next, the operation of finely adjusting the optical element 26 using the optical element mounting device will be described.

回動方向で微調整するには、取付ベース部21にねじ込
まれている二つのねじ31を少しゆるめて偏心ドライバー
により取付軸35を中心に基部23を回動させる。この作業
は偏心ドライバーを調整溝部23cに、上方から挿入して
その偏心ドライバーを回動させることによって行なわれ
る。その際、偏心ドライバーの先端を基準孔33に挿入さ
せることは言うまでもない。
For fine adjustment in the rotation direction, the two screws 31 screwed into the mounting base 21 are slightly loosened, and the base 23 is rotated about the mounting shaft 35 by an eccentric driver. This operation is performed by inserting the eccentric driver into the adjustment groove 23c from above and rotating the eccentric driver. At this time, it goes without saying that the tip of the eccentric driver is inserted into the reference hole 33.

また、可動部27の向きを水平な軸心の回りで微調整す
るには、調整ねじ62を締付けるか、または弛める。する
と、可動部27は球体38を支点として、調整ねじ62の回転
量とピッチ量だけシーソー運動を行なう。ここで、ばね
部材59の反発力によって可動部27を附勢し、これにより
可動部27の姿勢を安定させている。このように、可動部
27の微調整は調整ねじ61,62をゆるめたり、締めたりす
ることにより基部23と可動部27の間の隙間Sだけシーソ
ー運動をすることができる。
Further, to finely adjust the direction of the movable portion 27 around the horizontal axis, the adjusting screw 62 is tightened or loosened. Then, the movable portion 27 performs the seesaw motion by the rotation amount and the pitch amount of the adjusting screw 62 with the sphere 38 as a fulcrum. Here, the resilient force of the spring member 59 urges the movable portion 27, thereby stabilizing the posture of the movable portion 27. Thus, the moving part
For fine adjustment of 27, the seesaw movement can be performed only in the gap S between the base portion 23 and the movable portion 27 by loosening or tightening the adjustment screws 61 and 62.

なお、可動部27及び球体38を基部23の上面で90°位置
を変えて球受穴39c,39d,40a,40bに球体38を並べ変える
と、基部23の上面に対して可動部27のシーソー運動も90
°に角度を変化させることができる。この際、調整ねじ
61、62は、基部23の上面に形成されている付加調整ねじ
孔71,72にねじ込まれる。
When the movable part 27 and the sphere 38 are changed by 90 ° on the upper surface of the base 23 and the spheres 38 are arranged in the ball receiving holes 39c, 39d, 40a, 40b, the seesaw of the movable part 27 with respect to the upper surface of the base 23 is obtained. Exercise 90
The angle can be changed to °. At this time,
61 and 62 are screwed into additional adjustment screw holes 71 and 72 formed on the upper surface of the base 23.

また、この光学素子取付装置においては、調整手段を
用いて可動部27に光学素子26を設けて使用することがあ
る。
In addition, in this optical element mounting device, there is a case where the optical element 26 is provided on the movable portion 27 using the adjusting means.

この調整手段は基部23及び可動部27の対向面のうち、
所定直線に対し交差した直線に沿って互いに異なる位置
に形成された複数組の相対向した球受穴39a〜39d,40a〜
40dと、これらの球受穴39a〜39d,40a〜40dの間にそれぞ
れ配された球体38とを有している。
This adjusting means is provided on the opposing surfaces of the base 23 and the movable part 27.
A plurality of sets of opposing ball receiving holes 39a to 39d, 40a to formed at different positions along a straight line intersecting a predetermined straight line
40d and spheres 38 arranged between these ball receiving holes 39a to 39d and 40a to 40d, respectively.

このような調整手段を用いて、調整ねじ61,62によっ
て基部23と可動部27とを固定すると、光学素子26を基部
23の上面に対して平行に設けることができる。
When the base 23 and the movable part 27 are fixed by the adjusting screws 61 and 62 using such an adjusting means, the optical element 26 is
23 can be provided in parallel with the upper surface.

このようにすると、隣接する複数の光学素子取付装置
を基部23の上面に対して平行にして使用できる。この
際、ばね部材59を用いなくとも、調整ねじ61,62の微調
整によって平行に保持することも可能である。
In this way, a plurality of adjacent optical element mounting devices can be used in parallel with the upper surface of the base 23. At this time, even if the spring member 59 is not used, it is possible to keep the adjustment screws 61 and 62 in parallel by fine adjustment.

さらに、位置決め板41に変えて、第5図及び第6図に
示した可動板5a,支柱5c及び押え部材7を用いて可動部2
7の上面に光学素子26を機械的に取り付けるようにして
位置決めすることができる。この場合、ねじ穴43,44に
は、ねじ47,48に変えて支柱5cの下部を嵌め込むように
する。このようにすると、光学素子26は可動部27と押え
部材7の下端との間で位置決め固定することができる。
Further, instead of the positioning plate 41, the movable portion 2 is formed by using the movable plate 5a, the support 5c, and the holding member 7 shown in FIGS.
The optical element 26 can be positioned so as to be mechanically attached to the upper surface of 7. In this case, the lower portions of the columns 5c are fitted into the screw holes 43, 44 instead of the screws 47, 48. In this way, the optical element 26 can be positioned and fixed between the movable part 27 and the lower end of the holding member 7.

[考案の効果] 以上、実施例により説明したように、本考案の光学素
子取付装置によれば、取付ベース部に対して基部を回転
方向に簡単に調整できるとともに、可動部の微調整を調
整ねじを締めたり弛めたりすることによってレーザ光を
所定の位置に簡単に変更できる。
[Effects of the Invention] As described above with the embodiments, according to the optical element mounting device of the present invention, the base can be easily adjusted in the rotational direction with respect to the mounting base, and the fine adjustment of the movable portion is adjusted. The laser light can be easily changed to a predetermined position by tightening or loosening the screw.

また、可動部は各機種によっては方向転換をしなけれ
ばならないが、球体の位置を変更することによって簡単
に変更ができる。
The movable part must change direction depending on the model, but can be easily changed by changing the position of the sphere.

さらに、光学素子取付装置は外方への突出部分がな
く、微調整をすべて上方から行なうことができるため少
ないスペースに数個の光学素子取付装置を相隣接して設
置することができ、コンパクトに設計・制作でき、しか
も安価な光学素子取付装置を提供できる。
Furthermore, since the optical element mounting device does not have an outwardly protruding portion and all fine adjustments can be performed from above, several optical element mounting devices can be installed adjacent to each other in a small space, and the device is compact. An inexpensive optical element mounting device that can be designed and manufactured can be provided.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本考案の一実施例による光学素子取付装置を示
す分解斜視図、第2図は第1図の光学素子取付装置の組
立状態を示すII-II断面図、第3図は球体の嵌入状態を
示す断面図、第4図は可動部を示す斜視図、第5図は従
来の光学素子取付装置の側面図、第6図は第5図の光学
素子取付装置の平面図である。 1;取付ベース部、3;基部、5;可動部、7;押え部材、9,1
1;傾斜調整部材、13;回転調整部材、21;取付ベース部、
23;基部、25;光学素子、25c;調整溝部、27;可動部、29
a,29b;ねじ孔、31;、33;基準孔、35;取付軸、38;球体、
39a,39b,39c,39d;球受穴、40a,40b,40c,40d;球受穴、4
1;位置決め板、43,44;取付孔、51,53;ピン、59;ばね部
材、61,62;調整ねじ、64,65;取付孔、67,68;調整ねじ
孔、71,72;付加調整ねじ孔。
FIG. 1 is an exploded perspective view showing an optical element mounting apparatus according to an embodiment of the present invention, FIG. 2 is a sectional view taken along the line II-II showing an assembled state of the optical element mounting apparatus shown in FIG. 1, and FIG. FIG. 4 is a cross-sectional view showing a fitted state, FIG. 4 is a perspective view showing a movable portion, FIG. 5 is a side view of a conventional optical element mounting device, and FIG. 6 is a plan view of the optical element mounting device of FIG. 1; mounting base, 3; base, 5; movable part, 7; holding member, 9.1
1; tilt adjustment member, 13; rotation adjustment member, 21; mounting base,
23; base, 25; optical element, 25c; adjustment groove, 27; movable part, 29
a, 29b; screw hole, 31 ;, 33; reference hole, 35; mounting shaft, 38; sphere,
39a, 39b, 39c, 39d; Ball receiving hole, 40a, 40b, 40c, 40d; Ball receiving hole, 4
1; Positioning plate, 43, 44; Mounting hole, 51, 53; Pin, 59; Spring member, 61, 62; Adjusting screw, 64, 65; Mounting hole, 67, 68; Adjusting screw hole, 71, 72; Additional Adjustment screw hole.

Claims (1)

(57)【実用新案登録請求の範囲】(57) [Scope of request for utility model registration] 【請求項1】光学素子を取付けるための可動部と、該可
動部を姿勢調整可能に取付けた基部とを含む光学素子取
付装置において、 上記可動部と上記基部との間に隙間が形成されるよう挟
み込まれかつ所定直線に沿って配した2つの球体と、上
記可動部と上記基部との間の相対距離を上記隙間の範囲
内で変化させて上記可動部にシーソー運動を行わせ上記
光学素子が取り付けられた上記可動部の姿勢を調整する
よう上記球体のそれぞれを通る上記所定直線を挟む上記
可動部の両側のそれぞれに設けられかつ上記シーソー運
動の方向で上記可動部と上記基部とを上記隙間の範囲内
で相対移動可能に連結した調整手段とを有していること
を特徴とする光学素子取付装置。
1. An optical element mounting apparatus comprising: a movable portion for mounting an optical element; and a base on which the movable portion is mounted so that the posture can be adjusted, wherein a gap is formed between the movable portion and the base. The optical element is configured to perform a seesaw motion on the movable part by changing a relative distance between the two spheres sandwiched and arranged along a predetermined straight line and the movable part and the base within the range of the gap. The movable part and the base are provided on both sides of the movable part sandwiching the predetermined straight line passing through each of the spheres so as to adjust the posture of the movable part with the movable part and the base in the direction of the seesaw movement. An optical element mounting device comprising: an adjusting means connected to be relatively movable within a range of the gap.
JP1990044525U 1990-04-27 1990-04-27 Optical element mounting device Expired - Fee Related JP2540604Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990044525U JP2540604Y2 (en) 1990-04-27 1990-04-27 Optical element mounting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990044525U JP2540604Y2 (en) 1990-04-27 1990-04-27 Optical element mounting device

Publications (2)

Publication Number Publication Date
JPH046007U JPH046007U (en) 1992-01-21
JP2540604Y2 true JP2540604Y2 (en) 1997-07-09

Family

ID=31557909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990044525U Expired - Fee Related JP2540604Y2 (en) 1990-04-27 1990-04-27 Optical element mounting device

Country Status (1)

Country Link
JP (1) JP2540604Y2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51105178A (en) * 1975-03-12 1976-09-17 Takeo Akyama KEITAIYOKYUKYUGU
JP2908151B2 (en) * 1992-12-01 1999-06-21 サンユー電子株式会社 Micro manipulator
DE60137446D1 (en) 2000-11-28 2009-03-05 Honda Motor Co Ltd METHOD AND DEVICE FOR ADJUSTING AN OPTICAL COMPONENT AND OPTICAL UNIT
JP5816440B2 (en) * 2011-02-23 2015-11-18 ギガフォトン株式会社 Optical device, laser device, and extreme ultraviolet light generator
US10605340B2 (en) * 2018-07-13 2020-03-31 Northrop Grumman Systems Corporation Angular motion transfer driven by ball bearings

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62907A (en) * 1985-06-27 1987-01-06 Ricoh Co Ltd Angle adjusting device for optical parts mounting plate
JPH0171712U (en) * 1987-10-29 1989-05-15

Also Published As

Publication number Publication date
JPH046007U (en) 1992-01-21

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