JP2002244018A - Mechanism for adjusting distance and angle of mirror - Google Patents
Mechanism for adjusting distance and angle of mirrorInfo
- Publication number
- JP2002244018A JP2002244018A JP2001039441A JP2001039441A JP2002244018A JP 2002244018 A JP2002244018 A JP 2002244018A JP 2001039441 A JP2001039441 A JP 2001039441A JP 2001039441 A JP2001039441 A JP 2001039441A JP 2002244018 A JP2002244018 A JP 2002244018A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- movable plate
- angle
- distance
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、ミラーの距離、
角度調整機構に関し、詳しくは、振動等によるミラーの
調整位置ずれを防止することができるようなミラーの距
離、角度調整機構に関する。[0001] The present invention relates to a mirror distance,
More specifically, the present invention relates to a mirror distance and angle adjustment mechanism that can prevent a displacement of a mirror adjustment position due to vibration or the like.
【０００２】[0002]
【従来の技術】光学的な測定装置では、測定光を特定の
方向に反射するミラーが随所に使用されている。光ヘテ
ロダイン干渉測定装置等の高精度の測定では、ミラーの
位置調整や角度調整が必要になる。例えば、そのビーム
スプリッタを経た参照光は、光検出器側へと反射され
る。特に、この種のミラーは、測定装置を組み立てた後
に、距離と角度との調整が必要なことから、ミラーは、
コイルばね等により支持された可動板に取り付けられて
いる。装置フレームに支持された固定板を基準として進
退する３個のマイクロメータねじによりこの可動板の位
置を３点で調整することで、ミラーの距離と角度が調整
される。調整後の位置の精度を確保するために、３個の
マイクロメータねじの先端側には、この先端が当接され
る位置に、通常は、Ｖ溝が刻まれていて、これに円筒の
マイクロメータねじ先端が嵌入して調節後の位置ずれを
防止している。2. Description of the Related Art In an optical measuring device, a mirror for reflecting a measuring light in a specific direction is used everywhere. In high-precision measurement using an optical heterodyne interferometer or the like, mirror position adjustment and angle adjustment are required. For example, the reference light having passed through the beam splitter is reflected toward the photodetector. In particular, this type of mirror requires adjustment of the distance and angle after assembling the measuring device.
It is attached to a movable plate supported by a coil spring or the like. The distance and angle of the mirror are adjusted by adjusting the position of the movable plate at three points using three micrometer screws that move forward and backward with respect to the fixed plate supported by the device frame. In order to ensure the accuracy of the position after the adjustment, a V-groove is usually formed at the tip of the three micrometer screws at the position where the tips contact, and a cylindrical micro-screw is formed on the V-groove. The tip of the meter screw is fitted to prevent displacement after adjustment.
【０００３】[0003]
【発明が解決しようとする課題】しかし、可動板がコイ
ルばねによる弾性体で支持されるので微小な振動でミラ
ーの位置がずれ易く、測定装置、検査装置等の検査光学
系では、ミラーの調整をたびたび行わなければ精度の高
い測定ができない問題がある。この発明の目的は、この
ような従来技術の問題点を解決するものであって、振動
等によるミラーの調整位置ずれを防止することができる
ミラーの距離、角度調整機構を提供することにある。However, since the movable plate is supported by the elastic body of the coil spring, the position of the mirror is likely to shift due to minute vibrations. In the inspection optical system such as a measuring device and an inspection device, the mirror is adjusted. If the measurement is not performed frequently, there is a problem that accurate measurement cannot be performed. SUMMARY OF THE INVENTION An object of the present invention is to solve such a problem of the prior art, and to provide a mirror distance and angle adjustment mechanism capable of preventing a mirror adjustment position shift due to vibration or the like.
【０００４】[0004]
【課題を解決するための手段】このような目的を達成す
るためのこの発明のミラーの距離、角度調整機構の特徴
は、固定板に対して弾性体を介して左右上下前後に移動
可能に支承された可動板の少なくとも３点を、固定板を
基準として進退する少なくとも３個のマイクロメータね
じにより突当てて可動板の支持状態を設定して可動板に
取り付けられたミラーの距離と角度とを調整するミラー
の距離、角度調整機構において、可動板に設けられ３つ
のうちの１つのマイクロメータねじの先端が嵌入する円
錐溝と、可動板に設けられ３つのうちの他の１つのマイ
クロメータねじの先端が嵌入するＶ字溝とを有するもの
である。A feature of the distance and angle adjusting mechanism of the mirror according to the present invention for achieving the above object is that the mirror is supported to be movable left, right, up, down, front and back with respect to a fixed plate via an elastic body. At least three points of the movable plate are abutted by at least three micrometer screws which advance and retreat with respect to the fixed plate to set the support state of the movable plate, and determine the distance and angle of the mirror attached to the movable plate. In the mechanism for adjusting the distance and angle of the mirror to be adjusted, a conical groove provided in the movable plate into which the tip of one of the three micrometer screws is fitted, and the other one of the three micrometer screws provided in the movable plate And a V-shaped groove into which the tip of the fits.
【０００５】[0005]
【発明の実施の形態】このように、円錐溝に突当てマイ
クロメータねじの円筒の頭が嵌入することで、位置、角
度調整後の上下左右方向のずれを防止することができ
る。さらに、調整後の回転方向のずれを円錐溝より所定
距離離れた位置のＶ字溝に嵌入するマイクロメータねじ
で防止することができる。ここで、特に、円錐溝を基準
位置とし、Ｖ字溝を他の突当てマイクロメータねじ側に
することにより、角度調整の際に円錐溝の突当て位置ず
れ量を小さくでき、Ｖ字溝の突当て位置ずれ量を大きく
確保できる。なお、このときの円錐溝は、半円球状の溝
あるいは半楕円形状の溝であってもよい。この円錐溝と
Ｖ字溝との組み合わせにより振動に強い構造にでき、特
に、円錐溝を基準調整のマイクロメータねじ側に配置す
れば、ミラーの調整位置ずれを強固に防止することがで
きる。As described above, since the head of the cylinder of the micrometer screw is fitted into the conical groove and fitted, the displacement in the vertical and horizontal directions after the position and angle adjustment can be prevented. Further, the displacement in the rotational direction after the adjustment can be prevented by the micrometer screw fitted into the V-shaped groove located at a predetermined distance from the conical groove. Here, in particular, by setting the conical groove as the reference position and setting the V-shaped groove on the other abutting micrometer screw side, it is possible to reduce the amount of displacement of the conical groove when the angle is adjusted. A large displacement amount of the butting position can be secured. The conical groove at this time may be a semi-spherical groove or a semi-elliptical groove. By combining the conical groove and the V-shaped groove, a structure resistant to vibration can be obtained. In particular, if the conical groove is arranged on the micrometer screw side of the reference adjustment, it is possible to firmly prevent the displacement of the mirror adjustment position.
【０００６】[0006]
【実施例】図１は、この発明のミラーの距離、角度調整
機構の一実施例の斜視図、図２は、可動板に形成されて
いる円錐溝とＶ字溝の説明図である。図１において、１
は、ミラーの距離、角度調整機構であって、２は、その
装置フレーム等に固定される固定板、３は、可動板であ
り、その中心部には、円板状のミラー１１が取り付けら
れている。固定板２と可動板３とは、ほぼ同じ大きさの
矩形形状をしていて、所定の距離、例えば、数ミリ〜十
数ミリの間隔を置いて、４本のコイルばね４ａ、４ｂ、
４ｃ、４ｄのそれぞれの先端部が固定板の取付孔２ａ、
２ｂ、２ｃ、２ｄに固定され、他方の先端部が可動板３
の取付孔３ａ、３ｂ、３ｃ、３ｄ（図３（ａ）参照）に
固定されている。これにより、可動板３は、固定板２に
対して左右、上下、前後に自由度をもって移動可能に結
合され、支持されている。４本のコイルばね４ａ、４
ｂ、４ｃ、４ｄは、それぞれ隣接する２辺に２個づつ所
定間隔を置いて配置されいて、固定板２の中央部には、
光を通す孔２ｅが開けられている。FIG. 1 is a perspective view of an embodiment of a mirror distance and angle adjusting mechanism according to the present invention, and FIG. 2 is an explanatory view of a conical groove and a V-shaped groove formed in a movable plate. In FIG. 1, 1
Is a mirror distance and angle adjustment mechanism, 2 is a fixed plate fixed to the device frame or the like, 3 is a movable plate, and a disk-shaped mirror 11 is attached at the center thereof. ing. The fixed plate 2 and the movable plate 3 have a rectangular shape of substantially the same size, and are separated from each other by a predetermined distance, for example, a distance of several millimeters to several tens of millimeters, and the four coil springs 4a, 4b,
4c and 4d are each provided with a fixing plate mounting hole 2a,
2b, 2c, and 2d, and the other end is movable plate 3
3a, 3b, 3c, and 3d (see FIG. 3A). As a result, the movable plate 3 is movably coupled to the fixed plate 2 in the left and right, up and down, and back and forth directions and is supported. Four coil springs 4a, 4
b, 4c, 4d are arranged at predetermined intervals by two on each of two adjacent sides, and at the center of the fixing plate 2,
A hole 2e through which light passes is formed.
【０００７】コイルばね４ａ、４ｂを挟んで、３点の突
当てマイクロメータねじのうち２つマイクロメータねじ
５ａ、５ｂが固定板２に固定され、この固定板２の位置
を基準として一辺の２隅にそれぞれ設けられていて、こ
の辺と直交する他方の辺の隅に３番目のマイクロメータ
ねじ５ｃが設けられている。これらマイクロメータねじ
は、固定板２とともにマイクロメータを構成する関係に
あって、微小なピッチでマイクロメータねじ切りがされ
ている。これにより、マイクロメータねじ５ａ、５ｂ、
５ｃの各ねじは、それぞれ独立に可動板３の方向に微小
な進退する。その頭部は円筒であって、それぞれの後部
には、進退調整用のつまみ部６ａ，６ｂ，６ｃが設けら
れ、これを回転することにより、マイクロメータねじ部
が進退する。なお、マイクロメータねじ５ａ、５ｂ、５
ｃには位置調整後にねじの状態を固定する固定ねじ７
ａ、７ｂ、７ｃが設けられている。ここで、マイクロメ
ータねじ５ａは、前記２辺の角に配置されていて、基準
位置となっている。Two micrometer screws 5a and 5b of the three butting micrometer screws are fixed to the fixed plate 2 with the coil springs 4a and 4b interposed therebetween. A third micrometer screw 5c is provided at each corner, and is provided at a corner of the other side orthogonal to this side. These micrometer screws have a relationship of constituting a micrometer together with the fixing plate 2 and are micrometer-threaded at a minute pitch. Thereby, the micrometer screws 5a, 5b,
Each of the screws 5 c independently moves slightly in the direction of the movable plate 3. The head is a cylinder, and knobs 6a, 6b, 6c for adjusting the forward and backward are provided at the rear portions thereof, and by rotating these, the micrometer screw portion advances and retracts. The micrometer screws 5a, 5b, 5
c is a fixing screw 7 for fixing the state of the screw after position adjustment.
a, 7b and 7c are provided. Here, the micrometer screw 5a is arranged at a corner of the two sides and is a reference position.
【０００８】図２（ａ）は、可動板３の平面図であり、
図（ｂ）は、その左側面図である。可動板３には、図２
（ａ）に示すように、マイクロメータねじ５ａの頭部が
当接される位置に円錐溝８が形成され、マイクロメータ
ねじ５ｃの頭部が当接される位置に断面Ｖ字溝９（以下
Ｖ字溝９）が形成されている。いずれも、先端側開口部
は、マイクロメータねじの頭部より大きい。そこで、そ
れぞれのマイクロメータねじの頭は、これら溝に嵌入す
る。なお、マイクロメータねじ５ｂの頭部が当接される
位置には、平坦な溝１０が形成されている。その結果、
３本のマイクロメータねじ５ａ、５ｂ、５ｃが等距離
（溝への嵌入量は含まないものとする。）進退したとき
には、可動板３は、ミラー１１の反射光の光軸に直交し
て平行進退し、ミラーの位置を光軸に沿って調整するこ
とができる。なお、ミラー１１は、台座１２を介して可
動板３の中心部に固定されている。FIG. 2A is a plan view of the movable plate 3.
FIG. 2B is a left side view thereof. As shown in FIG.
As shown in (a), a conical groove 8 is formed at a position where the head of the micrometer screw 5a contacts, and a V-shaped groove 9 (hereinafter referred to as a cross section) at a position where the head of the micrometer screw 5c contacts. A V-shaped groove 9) is formed. In each case, the distal opening is larger than the head of the micrometer screw. Then, the head of each micrometer screw fits into these grooves. Note that a flat groove 10 is formed at a position where the head of the micrometer screw 5b contacts. as a result,
When the three micrometer screws 5a, 5b, and 5c advance and retreat by the same distance (the amount of insertion into the groove is not included), the movable plate 3 is parallel to the optical axis of the light reflected by the mirror 11 at right angles. The mirror can be moved back and forth along the optical axis. The mirror 11 is fixed to the center of the movable plate 3 via the pedestal 12.
【０００９】ミラー１１の角度調整は、光軸に直交する
面をＸＹ座標に採ると、Ｘ方向の傾斜は、マイクロメー
タねじ５ｂ、５ｃのいずれか一方で、Ｙ方向の傾斜は、
マイクロメータねじ５ｂ、５ｃのいずれか他方で行うこ
とができる。これによりマイクロメータねじ５ａを基準
としてマイクロメータねじ５ｂ、５ｃの進退量を調整す
ることで任意の方向にミラー１１を傾斜させることがで
きる。このようにしてミラーの位置と角度を調整した後
には、円錐溝８に突当てマイクロメータねじ５ａの円筒
の頭が嵌入していることで、位置、角度調整後の上下左
右方向のずれを防止することができる。さらに、調整後
の回転方向のずれを円錐溝８より所定距離離れた位置の
Ｖ字溝９に嵌入するマイクロメータねじで防止すること
ができる。When adjusting the angle of the mirror 11 by taking a plane orthogonal to the optical axis as XY coordinates, the inclination in the X direction is one of the micrometer screws 5b and 5c, and the inclination in the Y direction is
It can be performed with one of the micrometer screws 5b and 5c. Thereby, the mirror 11 can be tilted in an arbitrary direction by adjusting the amount of advance / retreat of the micrometer screws 5b and 5c with reference to the micrometer screw 5a. After adjusting the position and angle of the mirror in this manner, the cylindrical head of the micrometer screw 5a is fitted into the conical groove 8 to prevent displacement in the vertical and horizontal directions after the position and angle adjustment. can do. Furthermore, the deviation in the rotational direction after the adjustment can be prevented by the micrometer screw fitted into the V-shaped groove 9 at a position separated from the conical groove 8 by a predetermined distance.
【００１０】ところで、このように円錐溝８を基準位置
とし、Ｖ字溝９を他の突当てマイクロメータねじ側にす
ることにより、角度調整の際に円錐溝８の突当て位置ず
れ量を小さくでき、Ｖ字溝９の突当て位置ずれ量を大き
く確保することができる。しかし、円錐溝８は、必ずし
も基準位置である必要はない。By setting the conical groove 8 as the reference position and setting the V-shaped groove 9 on the other abutting micrometer screw side as described above, the amount of deviation of the abutting position of the conical groove 8 during angle adjustment can be reduced. As a result, it is possible to secure a large displacement amount of the abutting position of the V-shaped groove 9. However, the conical groove 8 does not necessarily need to be at the reference position.
【００１１】以上、説明してきたが、実施例では、複数
のコイルばねにより、可動板３を固定板に支持している
が、この支持は、弾性体であればよい。また、固定板、
可動板の形状は問うものではない。さらに、実施例では
ミラーは、可動板の固定板側中心部に取り付けられてい
るが、固定板とは反対側の面に取り付けられていてもよ
い。As described above, in the embodiment, the movable plate 3 is supported on the fixed plate by a plurality of coil springs, but this support may be an elastic body. Also, fixed plate,
The shape of the movable plate does not matter. Further, in the embodiment, the mirror is attached to the center of the movable plate on the fixed plate side, but may be attached to the surface on the side opposite to the fixed plate.
【００１２】[0012]
【発明の効果】以上の説明のとおり、この発明にあって
は、円錐溝に突当てマイクロメータねじの円筒の頭が嵌
入することで、位置、角度調整後の上下左右方向のずれ
を防止することができる。さらに、調整後の回転方向の
ずれを円錐溝より所定距離離れた位置のＶ字溝に嵌入す
るマイクロメータねじで防止することができる。この円
錐溝とＶ字溝との組み合わせにより振動に強い構造にで
き、特に、円錐溝を基準調整のマイクロメータねじ側に
配置すれば、ミラーの調整位置ずれを強固に防止するこ
とができる。As described above, according to the present invention, the vertical and horizontal displacement after the position and angle adjustment is prevented by fitting the head of the cylinder of the micrometer screw into the conical groove. be able to. Further, the displacement in the rotational direction after the adjustment can be prevented by the micrometer screw fitted into the V-shaped groove located at a predetermined distance from the conical groove. By combining the conical groove and the V-shaped groove, a structure resistant to vibration can be obtained. In particular, if the conical groove is arranged on the micrometer screw side of the reference adjustment, it is possible to firmly prevent the displacement of the mirror adjustment position.
【図１】図１は、この発明のミラーの距離、角度調整機
構の一実施例の斜視図である。FIG. 1 is a perspective view of an embodiment of a mirror distance and angle adjusting mechanism according to the present invention.
【図２】図２は、可動板に形成されている円錐溝とＶ字
溝の説明図である。FIG. 2 is an explanatory diagram of a conical groove and a V-shaped groove formed on a movable plate.
１…ミラーの距離、角度調整機構、２…固定板、３…可
動板、１１…ミラー、４ａ、４ｂ、４ｃ、４ｄ…コイル
ばね、５ａ、５ｂ、５ｃ…調整マイクロメータねじ、６
ａ，６ｂ，６ｃ…つまみ部、８…円錐溝、９…断面Ｖ字
溝。DESCRIPTION OF SYMBOLS 1 ... Mirror distance and angle adjustment mechanism 2 ... Fixed plate, 3 ... Movable plate, 11 ... Mirror, 4a, 4b, 4c, 4d ... Coil spring, 5a, 5b, 5c ... Adjustment micrometer screw, 6
a, 6b, 6c: knob, 8: conical groove, 9: V-shaped cross section.
Claims (3)
後に移動可能に支承された可動板の少なくとも３点を、
前記固定板を基準として進退する少なくとも３個のねじ
により突当てて前記可動板の支持状態を設定して前記可
動板に取り付けられたミラーの距離と角度とを調整する
ミラーの距離、角度調整機構において、 前記可動板に設けられ前記３つのうちの１つのねじの先
端が嵌入する円錐溝と、前記可動板に設けられ前記３つ
のうちの他の１つのねじの先端が嵌入するＶ字溝とを有
することを特徴とするミラーの距離、角度調整機構。At least three points of a movable plate supported movably left, right, up, and back and forth with respect to a fixed plate via an elastic body,
A mirror distance and angle adjustment mechanism for setting the support state of the movable plate by abutting with at least three screws moving forward and backward with respect to the fixed plate to adjust the distance and angle of the mirror attached to the movable plate In the above, a conical groove provided in the movable plate and into which the tip of one of the three screws is fitted, and a V-shaped groove provided in the movable plate and into which the tip of the other one of the three screws is fitted A mirror distance and angle adjustment mechanism, comprising:
記弾性体は複数のコイルばねであり、前記円錐溝に嵌入
する前記ねじは、基準位置に配置される請求項１記載の
ミラーの距離、角度調整機構。2. The mirror according to claim 1, wherein said screw is a micrometer screw, said elastic body is a plurality of coil springs, and said screw fitted into said conical groove is arranged at a reference position. Angle adjustment mechanism.
円形状の溝である請求項２記載のミラーの距離、角度調
整機構。3. The mirror distance and angle adjusting mechanism according to claim 2, wherein said conical groove is a semi-spherical groove or a semi-elliptical groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001039441A JP2002244018A (en) | 2001-02-16 | 2001-02-16 | Mechanism for adjusting distance and angle of mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001039441A JP2002244018A (en) | 2001-02-16 | 2001-02-16 | Mechanism for adjusting distance and angle of mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002244018A true JP2002244018A (en) | 2002-08-28 |
| JP2002244018A5 JP2002244018A5 (en) | 2007-03-08 |
Family
ID=18902228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001039441A Pending JP2002244018A (en) | 2001-02-16 | 2001-02-16 | Mechanism for adjusting distance and angle of mirror |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002244018A (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004088356A1 (en) * | 2003-03-31 | 2004-10-14 | Robert Bosch Gmbh | Device for adjusting an optical mirror |
| JP2007025374A (en) * | 2005-07-19 | 2007-02-01 | Mitsubishi Electric Corp | Reflection mirror support adjusting mechanism |
| US7433106B2 (en) | 2004-12-18 | 2008-10-07 | Samsung Electronics Co., Ltd. | Mirror support device and optical scanning apparatus adopting the same |
| CN105044873A (en) * | 2015-08-27 | 2015-11-11 | 海信集团有限公司 | Apparatus for adjusting laser beam splitter and laser beam splitter apparatus |
| CN108838512A (en) * | 2018-06-11 | 2018-11-20 | 东旭（昆山）显示材料有限公司 | Adjuster for laser optical path adjustment |
| CN109188637A (en) * | 2018-10-31 | 2019-01-11 | 启东科赛尔纳米科技有限公司 | A kind of adjustment fixed mechanism of optical element |
| WO2020187214A1 (en) * | 2019-03-19 | 2020-09-24 | 深圳光峰科技股份有限公司 | Mirror adjustment device and light source system |
| KR20220049108A (en) * | 2020-10-14 | 2022-04-21 | 주식회사 한화 | Optical parts mount structure for optical axis alignment |
| KR20220050412A (en) * | 2020-10-16 | 2022-04-25 | 주식회사 한화 | Optical axis moving apparatus for reflector |
| JP2022537869A (en) * | 2019-03-08 | 2022-08-31 | ライト ステアリング テクノロジーズ，インコーポレイテッド | Magnetic joint and optical mount using it |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0219268U (en) * | 1988-07-21 | 1990-02-08 | ||
| JPH0582867A (en) * | 1991-09-24 | 1993-04-02 | Mitsubishi Electric Corp | Laser oscillator |
| JPH07333483A (en) * | 1994-06-02 | 1995-12-22 | Bio Rad Lab Inc | Kinematic mount |
| JPH0996748A (en) * | 1995-09-29 | 1997-04-08 | Hoya Corp | Supporting device for optical parts |
| JP2000193864A (en) * | 1998-12-28 | 2000-07-14 | Horiba Ltd | Alignment mechanism of member fitting table |
| JP2001021790A (en) * | 1999-07-02 | 2001-01-26 | Ishikawajima Harima Heavy Ind Co Ltd | Device for adjusting optical element angle for optical instrument |
-
2001
- 2001-02-16 JP JP2001039441A patent/JP2002244018A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0219268U (en) * | 1988-07-21 | 1990-02-08 | ||
| JPH0582867A (en) * | 1991-09-24 | 1993-04-02 | Mitsubishi Electric Corp | Laser oscillator |
| JPH07333483A (en) * | 1994-06-02 | 1995-12-22 | Bio Rad Lab Inc | Kinematic mount |
| JPH0996748A (en) * | 1995-09-29 | 1997-04-08 | Hoya Corp | Supporting device for optical parts |
| JP2000193864A (en) * | 1998-12-28 | 2000-07-14 | Horiba Ltd | Alignment mechanism of member fitting table |
| JP2001021790A (en) * | 1999-07-02 | 2001-01-26 | Ishikawajima Harima Heavy Ind Co Ltd | Device for adjusting optical element angle for optical instrument |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100406909C (en) * | 2003-03-31 | 2008-07-30 | 罗伯特·博世有限公司 | Device for adjusting an optical mirror |
| WO2004088356A1 (en) * | 2003-03-31 | 2004-10-14 | Robert Bosch Gmbh | Device for adjusting an optical mirror |
| US7433106B2 (en) | 2004-12-18 | 2008-10-07 | Samsung Electronics Co., Ltd. | Mirror support device and optical scanning apparatus adopting the same |
| JP2007025374A (en) * | 2005-07-19 | 2007-02-01 | Mitsubishi Electric Corp | Reflection mirror support adjusting mechanism |
| CN105044873A (en) * | 2015-08-27 | 2015-11-11 | 海信集团有限公司 | Apparatus for adjusting laser beam splitter and laser beam splitter apparatus |
| CN105044873B (en) * | 2015-08-27 | 2017-08-18 | 海信集团有限公司 | A kind of closing light mirror adjusting means and closing light lens device |
| CN108838512A (en) * | 2018-06-11 | 2018-11-20 | 东旭（昆山）显示材料有限公司 | Adjuster for laser optical path adjustment |
| CN109188637A (en) * | 2018-10-31 | 2019-01-11 | 启东科赛尔纳米科技有限公司 | A kind of adjustment fixed mechanism of optical element |
| CN109188637B (en) * | 2018-10-31 | 2021-11-23 | 启东科赛尔纳米科技有限公司 | Adjusting and fixing mechanism for optical element |
| JP2022537869A (en) * | 2019-03-08 | 2022-08-31 | ライト ステアリング テクノロジーズ，インコーポレイテッド | Magnetic joint and optical mount using it |
| JP7383040B2 (en) | 2019-03-08 | 2023-11-17 | ライト ステアリング テクノロジーズ，インコーポレイテッド | Magnetic joint and optical mount using it |
| WO2020187214A1 (en) * | 2019-03-19 | 2020-09-24 | 深圳光峰科技股份有限公司 | Mirror adjustment device and light source system |
| KR102415536B1 (en) * | 2020-10-14 | 2022-06-30 | 주식회사 한화 | Optical parts mount structure for optical axis alignment |
| KR20220049108A (en) * | 2020-10-14 | 2022-04-21 | 주식회사 한화 | Optical parts mount structure for optical axis alignment |
| KR20220050412A (en) * | 2020-10-16 | 2022-04-25 | 주식회사 한화 | Optical axis moving apparatus for reflector |
| KR102472503B1 (en) * | 2020-10-16 | 2022-11-29 | 주식회사 한화 | Optical axis moving apparatus for reflector |
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