JP2000193864A - Alignment mechanism of member fitting table - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an alignment mechanism which is capable of adjusting the fitting angle of a member fitting table to be large and precise, convenient in use, simple in constitution, and inexpensive. SOLUTION: A table holding member 34 is connected to a member fitting table 7 through a universal means as an alignment mechanism A of the member fitting table 7 relative to a fixed base 8, the table holding member 34 is pierced in the fixed base 8 so that the member fitting table 7 is movable relative to the fixed base in the approaching/retractable direction, an energizing means 35 to energize the member fitting table 7 toward the fixed base 8 side is provided, three abutting members 37-39 abutted on a face part on the energizing side of the member fitting table 7 are continuously provided on the fixed base 8 in a dispersive manner around the table holding member 34, and the alignment function to move the member fitting table 7 in the approaching/retracting direction is given to at least two of the abutting members 37-39.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position adjusting mechanism for mounting a member mounting base for mounting various members on a fixed base so as to be adjustable.

[0002]

2. Description of the Related Art When installing various members such as mirrors for optical systems and precision instruments, it is needless to say that the horizontal and vertical degrees of these installation surfaces are required to be strict, and the fixing base of the member mounting table for that purpose is required. 7 and 8 have been proposed as a position adjustment mechanism for.

A position adjusting mechanism B shown in FIG. 7 is intended for a mounting table 52 of a type that holds various members (for example, mirrors of an optical system) 51 in a vertical posture, and moves the member mounting table 52 to a fixed base 53. A horizontal through hole 54 and a counterbore recess 55 are formed in the fixed base 53, and the screw member 56 is compressed by using a screw member 56 as a base holding member. Spring 5
7 is held, and the screw member 56 is
The screw member 56 is screwed to the member mounting base 52 by passing through the through hole 54 from the hole 5.

That is, the member mounting base 52 is configured to be movable in the distance direction with respect to the fixed base 53, and the member mounting base 52 is urged toward the fixed base 53 by urging means 57 using a compression spring. It is.

[0005] Contact members 58 to 6 comprising three screw members abutting on the urging surface of the member mounting table 52.
0 are dispersed around the screw member (table holding member) 56 and connected to the fixed base 53, and one of the contact members 59 is used as a fulcrum, and the remaining two screw members 58 are used. , 60 are provided with a rotating operation part h of a hexagonal concave part,
A first axis connecting the tip of one contact member 58 and the fulcrum contact member 59 of the book, and a second axis connecting the other contact member 60 and the tip of the fulcrum contact member 59 The mounting angle of the member mounting base 52 is changed around the two-dimensional axis by adjusting the screwing positions of the contact members 58 and 60 on the basis of the reference.

[0006]

By the way, in the position adjusting mechanism B having the above structure, when the through hole 54 for inserting the screw member is enlarged, the member mounting table 52 is urged toward the fixed base 53 by the urging means 57. Various members 51
Since the position of the member mounting table 52 is shifted due to the weight or vibration of the mounting table 52 on which is mounted, the above-described through hole 54 is designed to be slightly larger than the diameter of the screw member. In such a design, the screw member 56 can be inserted into the through hole 5 by slightly changing the mounting angle of the member mounting table 52.
4 and comes into contact with the corners,
Not only is the angle change range limited to a small value, but also it is difficult to adjust the verticality of the member mounting table 52 severely.

In this regard, in the position adjusting mechanism B shown in FIG. 8, a tension spring (not shown) for urging the member mounting table 52 toward the fixed base 53 instead of the table holding member 56 using the screw member is used. Since the urging means 61 is provided over the member mounting table 52 and the fixed base 53,
Not only can the angle of the member mounting table 52 be largely changed, but also the verticality of the member mounting table 52 can be adjusted strictly.

However, in the position adjusting mechanism B, when the spring 61 is mounted, the stopper pin 62 is set on one end of the spring 61, and the spring 61 is strongly pulled, and the other end of the spring 61 is pulled. The fixing pin 63 must be set, and this work is troublesome. In addition, as described above, the position of the member mounting table 52 is shifted due to the weight and vibration of the member mounting table 52. It was.

It is an object of the present invention to provide a position adjusting mechanism for a member mounting table in which the above-mentioned disadvantages have been eliminated at once.

[0010]

The technical means adopted by the present invention to achieve the above object are as follows. That is, as a mechanism for adjusting the position of the member mounting table with respect to the fixed base, a table holding member is connected to the member mounting table via universal means, and the table holding member is penetrated through the fixed base to fix the member mounting table. The urging means is configured to be movable in the near and far directions with respect to the base, and is provided with urging means for urging the member mounting table toward the fixed base. The contact member is dispersed around the pedestal holding member and connected to the fixed base, and at least two of the contact members have a position adjusting function of moving the member mounting table in the near-far direction. There are features.

According to the above-mentioned characteristic configuration, since the member mounting base is held on the fixed base by the base holding member via the universal means, the weight and vibration of the various members mounted on the member mounting base cause the member mounting base to be held. There is no displacement of the member mounting table, and there is no twist at the penetrating portion of the table holding member with respect to the fixed base due to the change in the angle of the member mounting table. Therefore, the mounting angle of the member mounting base can be greatly changed, and the mounting posture of the member mounting base can be adjusted severely.

In the position adjusting mechanism shown in FIG.
In contrast to the connection structure in which the table holding member is screwed onto the member mounting table, the present invention merely replaces the connection structure with a connection structure using universal means. The setting of the means can be easily performed in the same manner, and according to the present invention, a position adjusting mechanism with extremely excellent usability is provided with a simple configuration and at low cost.

[0013]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 schematically shows a configuration of a particle size distribution measuring apparatus provided with a position adjusting mechanism A according to an embodiment of the present invention. This is a flow cell composed of a transparent container for accommodating the dispersed sample 2 and is held upright on the upper surface of the optical bench base 3.

Reference numeral 4 denotes a laser light source that emits laser light in a horizontal direction, 5 denotes a condensing lens that converges divergent laser light emitted from the laser light source 4, and 6 denotes a converged laser light that has passed through the condensing lens 5 The mirror is a mirror that irradiates the flow cell 1 by bending the laser beam by 90 degrees to the flow cell 1. The position adjusting mechanism A is for mounting the mounting base 7 of the mirror 6 to the fixed base 8 so as to be adjustable in position. The specific structure will be described later.

Numeral 9 denotes a light detector (ring detector) which is provided at a position where the condensed laser light passing through the flow cell 1 is focused, and as shown in FIG. Around the axis center, a transmitted light detector for adjusting the optical axis (for example, a check pattern by four light receiving elements) 10
Is arranged.

The photodetector 9 is formed by concentrically arranging a plurality of photosensors having ring-shaped or semi-ring-shaped light receiving surfaces having different radii from each other about the optical axis of the condensed laser light. Of the condensed laser light diffracted or scattered by the particles in the flow cell 1, which receives light scattered / diffracted at a relatively small angle for each scattering angle and measures the light intensity thereof. It is. 11
Is a preamplifier for amplifying the output of the photosensor constituting the photodetector 9.

In the vicinity of the flow cell 1, a wide-angle scattering device for individually detecting, at each scattering angle, light scattered / diffracted at a relatively large angle among the condensed laser light diffracted or scattered by the particles in the flow cell 1. An optical light detection group 12 is provided.

The wide-angle scattered light detection group 12 includes a plurality of photosensors 13 provided at different angles from the photodetector 9.
18 and scattered light having a predetermined angle exceeding a predetermined angle due to particles in the flow cell 1 is detected in accordance with the respective arrangement angles. That is, the photo sensors 13 to 16 detect forward scattered light, the photo sensor 17 detects side scattered light, and the photo sensor 18 detects back scattered light.

Reference numeral 19 denotes a preamplifier for amplifying the output of each of the photosensors 13 to 18. Reference numerals 20 and 21 denote two light shielding plates erected in parallel with each other. The sensors are arranged on the front side of the sensors 13 to 18, more specifically, on the light incident side.

The light shielding plates 20 and 21 have a plurality of openings, such as slits 22 and 23, for allowing only scattered light of a specific scattering angle to pass through the photosensors 13 to 18 by etching or the like. The slits 22 and 23 corresponding to one photosensor 13 for detecting forward scattered light, for example.
Are not necessarily the same in shape and size, and their mutual positions are set so that only the scattered light having a predetermined scattering angle out of the forward scattered light from the flow cell 1 is incident on the photosensor 13. The same applies to the slits 22 and 23 corresponding to the other photo sensors 14 to 18.

Reference numeral 24 denotes a multiplexer for sequentially taking in the outputs from the preamplifiers 11 and 19 and sequentially sending them to the AD converter 25. Reference numeral 26 denotes a computer as an arithmetic processing unit to which the output of the AD converter 25 is input.

The computer 26 processes the outputs (digital data relating to the light intensity) of the photodetector 9 and the photosensors 13 to 18 converted into digital signals based on the Fraunhofer diffraction theory or the Mie scattering theory to obtain a particle group. The program for obtaining the particle size distribution in is stored. Reference numeral 27 denotes a color display for displaying calculation results and the like.

In the particle diameter distribution measuring apparatus configured as described above, the focused laser light applied to the sample 2 in the flow cell 1 is diffracted or scattered by the particles in the flow cell 1, and the diffracted or scattered light is emitted. Among them, the light having a relatively small scattering angle is imaged on the photodetector 9.

At this time, in the photodetector 9, the photosensor on the outer peripheral side receives light with a large scattering angle, and the photosensor on the inner peripheral side receives light with a small scattering angle. Therefore, the light intensity detected by the photosensor on the outer peripheral side reflects the amount of particles having smaller particle diameters, and the light intensity detected by the photosensor on the inner peripheral side reflects the amount of sample particles having larger particle diameters. You are doing. The light intensity detected by each of these photosensors is converted into an analog electric signal, and further input to the multiplexer 24 via the preamplifier 11.

On the other hand, of the condensed laser light diffracted or scattered by the particles, light having a relatively large scattering angle is
Slits 2 formed in light shielding plates 20 and 21, respectively
Only the scattered light having a specific scattering angle, which is limited by the light scattering angles 2 and 23, enters the photosensors 13 to 18, respectively, and the light intensity distribution thereof is measured.

At this time, the forward scattered light photosensors 13 to
16, scattered light from particles having a large particle diameter is detected in the order of the photosensor for side scattered light 17 and the photosensor for back scattered light 18. Then, each of these photo sensors 13-1
The light intensity detected by 8 is converted into an analog electric signal, and further input to a multiplexer 24 via a preamplifier 19.

In the multiplexer 24,
Measurement data from the photodetector 9 and the photosensors 13 to 18, that is, analog electric signals are sequentially taken in a predetermined order, converted into serial signals, sequentially converted into digital signals by the AD converter 25, and further processed by a computer. 26, the light intensity data for each scattering angle obtained by the photodetector 9 and the photosensors 13 to 18 are processed based on the Fraunhofer diffraction theory or the Mie scattering theory, and the processing result is displayed on a color display. 27 is displayed.

As described above, in the particle size distribution measuring apparatus, the light intensity distribution of the scattered light in the particle size range with a large particle size is measured by the photodetector 9 and the light intensity distribution in the particle size range with a small particle size is measured. The light intensity distribution of the wide-angle scattered light is measured by the photosensors 13 to 18, and the photodetector 9 and the photosensors 13 to 18 are measured.
Is processed in the computer 26,
The particle size distribution in the particle group can be determined all at once from a relatively large particle size to a fine particle size.

Next, with reference to FIGS. 3 and 4, a description will be given of a position adjusting mechanism A for attaching the mirror mounting table 7 to the fixed base 8 so as to be adjustable.

In these figures, reference numeral 29 in the figures denotes a stand holding means for holding a substantially central portion of the mirror mount 7, and a counterbore recess 30 opened on the mirror holding surface side in the mirror mount 7. While the hole 31 is formed, the fixed base 8 has
A through hole 31 and a concentric through hole 32 of the mirror mounting table 7 and a counterbore recess 33 are formed. a is inserted into both the through holes 31 and 32 so as to be immersed in the counterbore recess 30, and a compression spring 35 is provided as an urging means at the insertion end of the table holding member 34.
The mirror mounting base 7 is configured to be movable in the perspective direction with respect to the fixed base 8 in a state where the mirror mounting base 7 is biased toward the fixed base 8 by screwing the mirror mounting base 6.

Reference numerals b to d denote pin receiving recesses formed on the surface of the mirror mounting table 7 opposite to the mirror holding surface, which are distributed around the counterbore recess 30 and have the pin receiving portions therein. The recess b is formed in a long groove in the left-right direction.

Reference numerals 37 to 39 denote abutting members whose tips are engaged with the pin receiving recesses b to d. The contact members are provided with lock nuts 40 and screwed to the fixed base 8 so that the positions of the tips can be adjusted and fixed. The pin receiving recess c
The contact member 38 is provided with a hexagonal rotary operation part e for a wrench or the like, and the remaining two contact members 37 and 39 are provided.
Is provided at its end with a rotary operation part f for a hexagon wrench or the like.

Thus, for example, the contact member 38 engaged in the pin receiving recess c is used as a fulcrum, and the remaining two contact members 3 are used.
By adjusting the screwing positions of the mirrors 7 and 39, the mounting angle of the mirror mounting table 7 and the mirror 6 can be changed, that is, one of the two remaining members and the fulcrum for the fulcrum. A first axis connecting the tip with the contact member 38,
With reference to the other contact member 39 and the second axis connecting the distal ends of the fulcrum contact members 38, the screwing positions of the remaining two contact members 37, 39 around this two-dimensional axis. Is adjusted, the angle of the mirror 6 and thus the mirror surface M can be changed.

Therefore, by adjusting the mirror surface M and thus the mounting angle of the mirror 6 so that the transmitted light detectors 10 disposed around the light detector 9 have substantially the same received light intensity, the mirror surface M is reflected. The optical axis of the condensed laser light can be made coincident with the center of the photodetector 9. In this optical axis adjustment, the mirror mounting base 7 is slightly adjusted to adjust the mirror 6 and consequently the condensed laser light. The angle of the optical axis can be largely changed, and the mirror 6 is arranged at a position close to the laser light source 4, so that the mirror 6 can be small.

As the position adjusting mechanism A, the dish-shaped head a is locked around the through hole 31 of the mirror mounting table 7, and the mirror mounting table 7 is moved to The mirror mounting base 7 is held on the fixed base 8 via the universal connecting means, so that the mirror mounting base 7 is further urged toward the fixed base 8 side. Since the mirror mounting table 7 is configured to be movable in the distance direction with respect to the fixed base 8, when the angle of the mirror surface M is changed by the contact members 37 and 39, the mirror mounting table 7 is twisted. Therefore, the posture can be changed smoothly and largely around the universal connection structure, and the mounting posture of the mirror mounting base 7 can be adjusted severely.

It is easily understood that the fulcrum contact member 38 can also be used for position adjustment, but the contact member 38 may be fixedly provided. is there.

As described above, it is preferable that the mirror 6 is disposed close to the laser light source 4 so that the condensed laser light can be reflected by the small mirror 6 correspondingly, but this is essential. For example, the mirror 6 may be arranged between the flow cell 1 and the photodetector 9 in consideration of the arrangement configuration of the entire measurement apparatus instead of the requirement.

Further, as the table holding means 29, the head a of the table holding member 34 of the table holding means 29 is dish-shaped, and the mirror mounting table 7 is held by a so-called universal connection structure. As shown in the figure, the spherical head a may be connected by universal means. In this case, without forming the counterbore recess 30 and the through hole 31 in the mirror mounting base 7, as shown in FIG. Receiving member 41 of head a
Alternatively, the universal member may be formed by providing the mirror mounting table 7 with the pressing member 42.

Although the particle size distribution measuring device is intended to be provided with the position adjusting mechanism A, the present invention is not limited to this. For example, various kinds of members such as precision instruments are targeted and mounted on the mounting table 7 of the position adjusting mechanism A. Needless to say, it can be attached.

[0040]

As described above, according to the present invention, the mounting angle of the member mounting base can be largely changed without any positional displacement due to vibration or the like, and the angle of the member mounting base can be changed. Therefore, a convenient position adjustment mechanism that can adjust the mounting posture of the member mounting base severely is provided with a simple configuration and at low cost.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a particle size distribution measuring device.

FIG. 2 is an explanatory diagram of an arrangement of a photodetector and a transmitted light detector for adjusting an optical axis.

FIG. 3 is a perspective view of a position adjustment mechanism seen through a mirror mounting base.

FIG. 4 is a developed cross-sectional view showing an arrangement state of the table holding means and two contact members.

FIG. 5 is a sectional view showing another embodiment of the universal means.

FIG. 6 is a sectional view showing still another embodiment of the universal means.

FIG. 7 is a sectional view showing a position adjusting mechanism having a conventional structure.

FIG. 8 is a sectional view showing a position adjusting mechanism having a conventional structure according to another embodiment.

[Explanation of symbols]

7: member (mirror) mounting table, 8: fixed base, 34: table holding member, 35: urging means, 37 to 39: contact member.

Claims (1)

[Claims] 1. A position adjusting mechanism for a member mounting table with respect to a fixed base, wherein a table holding member is connected to the member mounting table via universal means, and the table holding member is provided through the fixed base. The member mounting table is configured to be movable in the perspective direction with respect to the fixed base, and biasing means for biasing the member mounting table toward the fixed base is provided. The three contact members that come into contact with each other are dispersed around the base holding member and connected to the fixed base, and at least two of the contact members have a position adjustment function of moving the member mounting base in the perspective direction. A position adjusting mechanism for a member mounting table, which is formed at least.