JP3471641B2 - Particle size distribution measuring device using position adjustment mechanism of member mounting table and mirror mounting table - Google Patents

Description

Detailed Description of the Invention

[0001]

The present invention relates to the member mounting stand for mounting the various members, the position adjusting mechanism of the member mounting stand for mounting adjustable in position relative to the fixed base and
The present invention relates to a particle size distribution measuring device using a mirror mount .

[0002]

2. Description of the Related Art Needless to say, when mounting various members such as optical system mirrors and precision measuring instruments, the level and verticality of these mounting surfaces are required to be severe. As a position adjusting mechanism for the above, a structure having a structure shown in FIGS. 7 and 8 has been proposed.

The position adjusting mechanism B shown in FIG. 7 is intended for a mounting base 52 of a type that holds various members (for example, optical system mirrors) 51 in a vertical posture, and this member mounting base 52 is mounted on a fixed base 53. The fixed base 53 is formed with a horizontal through hole 54 and a counterbore recess 55, and a screw member 56 is used as a base holding member to compress the screw member 56. Spring 5
7 is held, and this screw member 56 is countersunk into the recess 5
The screw member 56 is screwed to the member mounting base 52 by inserting the screw member 56 through the through hole 54.

That is, the member mounting base 52 is configured to be movable in the perspective direction with respect to the fixed base 53, and the member mounting base 52 is biased toward the fixed base 53 by the biasing means 57 by a compression spring. Of.

Then, abutting members 58 to 6 composed of three screw members that come into contact with the urging side surface of the member mounting base 52.
0 is dispersed around the screw member (base holding member) 56 and continuously provided on the fixed base 53, and one of the contact members 59 is used as a fulcrum, and the remaining two screw members 58 are provided. , 60 is provided with a hexagonal concave rotation operation part h,
A first axis connecting the tips of one of the contact members 58 and the fulcrum contact member 59 of the book, and a second axis connecting the tips of the other contact member 60 and the fulcrum contact member 59 With reference to the reference, by adjusting the screwing positions of the contact members 58 and 60, the mounting angle of the member mounting base 52 is changed around the axis of the two-dimensional direction.

[0006]

In the position adjusting mechanism B having the above structure, when the through hole 54 for inserting the screw member is enlarged, the member mounting base 52 is urged by the urging means 57 toward the fixed base 53 side. However, various members 51
The member mounting base 52 is displaced due to the weight and vibration of the mounting base 52 on which the through hole 54 is mounted. Therefore, the through hole 54 is designed to be slightly larger than the diameter of the screw member. In such a design, the screw member 56 can be inserted into the through hole 5 by only slightly changing the mounting angle of the member mounting base 52.
The member mounting base 52 is contacted with the corners of No. 4 and is twisted.
Not only is the angle changing range limited to a small value, but it is difficult to strictly adjust the verticality of the member mounting base 52.

In view of this point, in the position adjusting mechanism B shown in FIG. 8, a tension spring (for urging the member mounting base 52 toward the fixed base 53 side) instead of the base holding member 56 formed of the screw member ( Since the urging means 61 is provided over the member mounting base 52 and the fixed base 53,
Not only can the angle of the member mounting table 52 be largely changed, but also the verticality of the member mounting table 52 can be strictly adjusted.

However, in the above position adjusting mechanism B, when the spring 61 is mounted, the stopper pin 62 is set on one end side of the spring 61, and the spring 61 is strongly pulled, and then is attached to the other end side of the spring 61. The stop pin 63 must be set, and in addition to the labor required for this work, the member mounting base 52 is displaced due to the weight and vibration of the member mounting base 52 as described above. It was.

The present invention uses a member mounting table position adjusting mechanism and a mirror mounting table, in which the above inconveniences are solved all at once.
An object of the present invention is to provide a particle size distribution measuring device .

[0010]

[Means for Solving the Problems] The technical means taken by the present invention to achieve the above object are as follows. That is, a position adjusting mechanism of the member mounting base with respect to the fixed base, the connecting base holding member via a universal means to said member mounting stand, and penetrated the base holding member in a fixed base, said member mounting the platform was movable in the direction toward or away from the fixed base, and, while providing a biasing means for biasing said member mounting stand on the fixed base side, respectively face of said member mounting platform urging the side of the move three abutment member abuts, and continuously to the fixed base are dispersed in said base holding member around and in two of the three contact members, said member mounting table in the direction of access In addition to having a position adjustment function that makes it possible to use the remaining one as a fulcrum,
The member mounting base has a long groove formed in the surface portion on the biasing side.
Then, two abutments with the position adjustment function are placed in this long groove.
With the tip of one of the abutting members engaged,
The tips of the one contact member and the fulcrum contact member are
The first axis to connect and the two abutments that have the position adjustment function
Of the other contact member of the members and the contact member for the fulcrum
Based on the second axis connecting the tips,
The two contact members about an axis that having a said position adjustment function
Angle adjustment of the component mounting table by adjusting the
It is characterized in that it is configured to further .

According to the above-mentioned characteristic structure, the member mounting base is held by the base holding member via the universal means on the fixed base. Therefore, due to the weight and vibration of various members mounted on the member mounting base, The member mounting base never shifts in position, and the penetrating portion of the base holding member with respect to the fixed base does not twist at all due to a change in the angle of the member mounting base. Therefore, the mounting angle of the member mounting table can be largely changed, and the mounting posture of the member mounting table can be adjusted severely.

Then, in the position adjusting mechanism shown in FIG.
In contrast to the connecting structure in which the base holding member is screwed to the member mounting base, in the present invention, this is merely replaced with the connecting structure by the universal means. The means can be easily set in the same manner, and according to the present invention, a position adjusting mechanism having excellent usability is provided with a simple structure and at a low cost. The present invention also irradiates the inside of the cell with light to
The diffracted or scattered light diffracted or scattered by the particles
Particle size distribution measuring device for detecting particle size distribution by receiving light with a detector
At the position of the fixed base
Attach the mirror mounting table between the light source and the cell, and
Between the cell and the detector.
Attach the base to the fixed base in a positionally adjustable manner
To the mirror mounting table via universal means
And connect the base holding member and fix the base holding member.
The mirror mount is installed on the fixed base by penetrating the base.
It is configured to be movable in the perspective direction with respect to the
-Providing an urging means for urging the mounting base toward the fixed base.
Contact the surface of the mirror mounting table on the biasing side.
The three contact members are dispersed around the table holding member.
Of the three abutting members, which are connected to the fixed base continuously.
Position the book on the book to move the mirror mount in the perspective direction.
It has a trim function and the remaining one is used as a fulcrum.
Furthermore, the mirror mount is formed on the surface of the biasing side.
It has a long groove made, and the position adjustment function is provided in this long groove.
The tip of one of the two abutting members has
In the inserted state, the one contact member and the contact for the fulcrum are contacted.
The first axis connecting the tip of the contact member and the position adjustment function
The other abutting member of the two abutting members and the fulcrum
A second axis connecting the tip of the contact member for
It has the position adjustment function around the axis of this two-dimensional direction.
By adjusting the two abutting members in the perspective direction.
The angle of the mirror surface of the mirror mounted on the
To have a position adjustment mechanism configured to
A particle size distribution measuring device using a characteristic mirror mounting table
provide.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 schematically shows the configuration of a particle size distribution measuring apparatus equipped with a position adjusting mechanism A according to an embodiment of the present invention. In this figure, 1 in the figure indicates a particle group to be measured in a dispersion medium. A flow cell composed of a transparent container that contains the dispersed sample 2 is erected and held on the upper surface of the optical bench base 3.

Reference numeral 4 denotes a laser light source that horizontally emits laser light, 5 denotes a condenser lens that converges the divergent laser light emitted from the laser light source 4, and 6 denotes converged laser light that has passed through the condenser lens 5 (hereinafter referred to as "convergent laser light"). , A focused laser beam) is applied to the flow cell 1 after bending it by 90 degrees, and the position adjusting mechanism A is for attaching the mounting base 7 of the mirror 6 to the fixed base 8 in a positionally adjustable manner. The specific structure will be described later.

Reference numeral 9 denotes a photodetector (ring detector), which is provided at a position where the condensed laser light that has passed through the flow cell 1 forms a focal point, and as shown in FIG. Around the axis center, a transmitted light detector for adjusting the optical axis (for example, a check pattern with four light receiving elements) 10
Are arranged.

In the photodetector 9, a plurality of photosensors having ring-shaped or semi-ring-shaped light-receiving surfaces having different radii around the optical axis of the condensed laser light are arranged concentrically. Of the condensed laser light diffracted or scattered by the particles in the flow cell 1, the light scattered / diffracted at a relatively small angle is received for each scattering angle, and the light intensity thereof is measured. Is. 11
Is a preamplifier that amplifies the output of each photosensor that constitutes the photodetector 9.

In the vicinity of the flow cell 1, wide-angle scattering for individually detecting, for each scattering angle, the light scattered / diffracted at a relatively large angle of the condensed laser light diffracted or scattered by the particles in the flow cell 1 A light detection group 12 for light is provided.

The wide angle scattered light photodetection group 12 includes a plurality of photosensors 13 provided at different angles from the photodetector 9.
-18, the scattered light of a predetermined angle exceeding the predetermined angle by the particles in the flow cell 1 is detected according to the respective arrangement angles. That is, the photosensors 13 to 16 detect forward scattered light, the photosensor 17 detects side scattered light, and the photosensor 18 detects backward scattered light.

Reference numeral 19 is a preamplifier for amplifying the outputs of the photosensors 13 to 18, respectively, and 20 and 21 are two light shield plates which are erected in parallel with each other. The sensors 13 to 18 are arranged on the front side, more specifically, on the light incident side.

A plurality of openings, for example, slits 22 and 23, for passing only the scattered light having a specific scattering angle to the photosensors 13 to 18 are formed in the light shielding plates 20 and 21 by etching or the like. Each of the slits 22 and 23 corresponding to one photosensor 13 that detects forward scattered light
Are not necessarily the same in shape and size, and their mutual positions are set so that only the scattered light having a predetermined scattering angle of the forward scattered light from the flow cell 1 is incident on the photosensor 13. This also applies to the slits 22 and 23 corresponding to the other photosensors 14 to 18.

Reference numeral 24 is a multiplexer that sequentially takes in the outputs from the preamplifiers 11 and 19 and sequentially sends them to the AD converter 25, and 26 is a computer as an arithmetic processing unit to which the output of the AD converter 25 is input.

The computer 26 processes the outputs of the photodetector 9 and the photosensors 13 to 18 (digital data relating to the light intensity) converted into digital signals on the basis of the Fraunhofer diffraction theory and the Mie scattering theory, and particle groups. A program for determining the particle size distribution in is stored. Reference numeral 27 is a color display for displaying a calculation result and the like.

In the particle size distribution measuring apparatus configured as described above, the condensed laser light applied to the sample 2 in the flow cell 1 is diffracted or scattered by the particles in the flow cell 1, and the diffracted light or scattered light is obtained. Of these, light having a relatively small scattering angle is imaged on the photodetector 9.

At this time, in the photodetector 9, the photosensor on the outer peripheral side receives light having a large scattering angle, and the photosensor on the inner peripheral side receives light having a small scattering angle. Therefore, the light intensity detected by the outer photosensor reflects the amount of particles having a smaller particle size, and the light intensity detected by the inner photosensor reflects the amount of sample particles having a larger particle size. You are doing it. The light intensity detected by each of these photosensors is converted into an analog electric signal, and further inputted to the multiplexer 24 via the preamplifier 11.

On the other hand, of the condensed laser light diffracted or scattered by the particles, the light having a relatively large scattering angle is
Slits 2 formed in the light shielding plates 20 and 21, respectively
2 and 23, only the scattered light of a specific scattering angle is incident on each of the photosensors 13 to 18, and the light intensity distribution thereof is measured.

At this time, the forward scattered light photosensor 13 to
The scattered light from the particles having a large particle size is detected in the order of 16, the side scattered light photosensor 17, and the back scattered light photosensor 18. Then, each of these photosensors 13 to 1
The light intensity detected by 8 is converted into an analog electric signal, and further input into the multiplexer 24 via the preamplifier 19.

Then, in the multiplexer 24,
Measurement data from the photodetector 9 and the photosensors 13 to 18, that is, analog electric signals are sequentially captured in a predetermined order, converted into serial signals, and sequentially converted into digital signals by the AD converter 25, and further, a computer. 26, the light intensity data for each scattering angle obtained by the photodetector 9 and the photosensors 13 to 18 are processed based on the Fraunhofer diffraction theory and the Mie scattering theory, and the processing result is displayed on a color display. It is displayed on 27.

As described above, in the particle size distribution measuring device, the light intensity distribution of scattered light in the particle size range in which the particle size is large is measured by the photodetector 9 and in the particle size range in which the particle size is small. The light intensity distribution of the wide-angle scattered light is measured by the photosensors 13 to 18, and these photodetectors 9 and the photosensors 13 to 18 are measured.
Is processed by the computer 26,
The particle size distribution in a particle group can be obtained all at once over a wide range from a relatively large particle size to a minute particle size.

Next, a position adjusting mechanism A for mounting the mirror mounting base 7 on the fixed base 8 in a positionally adjustable manner will be described with reference to FIGS. 3 and 4.

In these drawings, reference numeral 29 in the drawings is a table holding means for holding the mirror mounting table 7 at approximately the center thereof, and the table is provided with a counterbore recess 30 which is opened on the mirror holding surface side of the mirror mounting table 7. While the holes 31 are formed, the fixed base 8 has
A table holding member 34 formed by a through hole 31 of the mirror mounting table 7, a through hole 32 having a concentric shape, and a counterbore recessed portion 33 and having a plate-shaped head a is attached to the plate-shaped head thereof. The nut 3 is inserted through both the through holes 31 and 32 so as to immerse a into the counterbore recess 30, and a compression spring 35 is provided as an urging means at the insertion end of the base holding member 34.
The mirror mounting base 7 is configured to be movable in the perspective direction with respect to the fixed base 8 in a state where the mirror mounting base 7 is biased toward the fixed base 8 by screwing the mirror mounting base 6.

Reference numerals b to d are pin receiving concave portions formed on the surface of the mirror mounting base 7 opposite to the mirror holding surface, which are distributed around the counterbore concave portion 30 and in which pin receiving portions are provided. The concave portion b is formed in a long groove in the left-right direction.

Numerals 37 to 39 are abutting members whose tips engage with the pin receiving recesses b to d, and are equipped with lock nuts 40 and screwed to the fixed base 8 so that the positions of the tips can be adjusted and fixed. The pin receiving recess c in this
The contact member 38 that engages with is provided with a hexagonal rotation operation portion e for a spanner or the like, and the remaining two contact members 37 and 39.
Is provided with a rotary operation part f for a hexagonal wrench or the like at its end.

Thus, for example, the contact member 38 engaged in the pin receiving recess c is used as a fulcrum, and the remaining two contact members 3 are used.
By adjusting the screwing positions of 7, 39, the mounting angle of the mirror mount 7 and thus the mirror 6 can be changed, that is, one of the remaining two contact members 37 and the fulcrum is used. A first axis connecting the tip of the contact member 38,
With the second axis connecting the tips of the other contact member 39 and the fulcrum contact member 38 as a reference, the screwing positions of the remaining two contact members 37, 39 around this two-dimensional axis. The angle of the mirror 6 and thus the mirror surface M can be changed by adjusting the angle.

Therefore, the mirror surface M is reflected by adjusting the mounting angle of the mirror surface M and hence the mirror 6 so that the received light intensities of the transmitted light detectors 10 arranged around the photodetector 9 are almost equal. The optical axis of the condensed laser light thus obtained can be aligned with the center of the photodetector 9, and when the optical axis is adjusted, the mirror mounting base 7 is slightly adjusted to adjust the mirror 6 and thus the condensed laser light. The angle of the optical axis can be largely changed and the mirror 6 is arranged at a position close to the laser light source 4, so that the mirror 6 can be small.

As the position adjusting mechanism A, the dish-shaped head a is locked around the through hole 31 of the mirror mounting table 7, and the mirror mounting table 7 is moved around the dish-shaped head a with respect to the table holding member 34. Since the mirror mounting base 7 is held by the fixed base 8 via the universal connecting means, the mirror mounting base 7 is further urged toward the fixed base 8 side. Since the mirror mounting base 7 is configured to be movable in the perspective direction with respect to the fixed base 8, the mirror mounting base 7 is twisted when the angle of the mirror surface M is changed by the contact members 37 and 39. It is possible to smoothly and largely change the posture around the universal coupling structure without accompanying the above, and it is possible to strictly adjust the mounting posture of the mirror mounting base 7.

It is easily understood that the contact member 38 for the fulcrum can also be used for position adjustment, but the contact member 38 may be fixedly provided. is there.

Further, as described above, it is preferable to dispose the mirror 6 close to the laser light source 4 so that the condensed laser light can be reflected by the small mirror 6 by that amount, but this is essential. The mirror 6 may be arranged, for example, between the flow cell 1 and the photodetector 9 in consideration of not the requirement but the arrangement configuration of the entire measuring apparatus.

Further, as the table holding means 29, the head a of the table holding member 34 is dished so that the mirror mounting table 7 is held by a so-called universal connecting structure. As shown, the spherical head a may be connected by a universal means. At this time, as shown in FIG. 6, without forming the counterbore recess 30 and the through hole 31 in the mirror mounting base 7, as shown in FIG. Receiving member 41 of head a
Alternatively, the pressing member 42 and the pressing member 42 may be provided on the mirror mounting base 7 to form a universal means.

[0039]

[0040]

As described above, according to the present invention, the mounting angle of the member mounting base can be largely changed without causing any displacement due to vibration and the like, and the angle of the member mounting base can be changed. Therefore, the position adjusting mechanism of the member mounting table, which can adjust the mounting posture of the member mounting table in a severe manner and is easy to use, is provided with a simple structure and at a low cost. Further, according to the present invention, vibration
The mounting angle can be adjusted without any positional deviation.
Particles with a mirror mount that can be changed significantly
A diameter distribution measuring device can be provided.

[Brief description of drawings]

FIG. 1 is a configuration diagram of a particle size distribution measuring device.

FIG. 2 is a layout explanatory diagram of a photodetector and a transmitted light detector for adjusting an optical axis.

FIG. 3 is a perspective view of a position adjusting mechanism as seen through a mirror mounting table.

FIG. 4 is a developed cross-sectional view showing an arrangement state of a table holding means and two abutting members.

FIG. 5 is a cross-sectional view showing another embodiment of the universal means.

FIG. 6 is a sectional view showing still another embodiment of the universal means.

FIG. 7 is a sectional view showing a position adjusting mechanism having a conventional structure.

FIG. 8 is a sectional view showing a position adjusting mechanism having a conventional structure according to another embodiment.

[Explanation of symbols]

7 ... Member (mirror) mounting base, 8 ... Fixed base, 34 ... Stand holding member, 35 ... Biasing means, 37-39 ... Abutting member , b
… Long groove .

─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) G02B 7/00 G02B 7/198

Claims (2)

(57) [Claims] 1. A mechanism for adjusting a position of a member mounting base with respect to a fixed base, wherein a base holding member is connected to the member mounting base via universal means, and the base holding member is provided through the fixed base. said member mounting base and movable in the direction toward or away from the fixed base, and, while providing a biasing means for biasing the portion <br/> material loading stand on the fixed base side, said member mounting base the three contact members which respectively abut on the surface portion of the urging side, is dispersed in the base holding member around continuously provided on the fixed base and, and, in two of the three contact members, the It has a position adjustment function to move the member mounting table in the perspective direction, and the remaining one is used as a fulcrum.
In addition, the member mounting base is formed on the surface of the biasing side.
It has a long groove, and the position adjustment function is provided in this long groove.
Of the two abutting members, the tip of one abutting member is inserted.
And the contact portion for the fulcrum with the one contact member
It has the first axis connecting the tip of the material and the position adjustment function.
Of the two contact members and the other contact member for the fulcrum
Based on the second axis connecting the tip of the abutting member,
2 having the position adjusting function around the axis of the two-dimensional direction
By adjusting the contact member of the book in the perspective direction,
A position adjusting mechanism for a member mounting table, which is configured to change an angle of the mounting table. 2. A cell is irradiated with light so that particles in the sample are scattered.
The detector receives the diffracted or scattered light that is diffracted or scattered.
In a particle size distribution measuring device that obtains particle size distribution by illuminating,
It is attached to the fixed base so that its position can be adjusted.
Mount the mirror mount between the light source and the cell, or
It has between the output device and this mirror mounting table
Before installing the position adjustable to the base,
A holder for the mirror mounting table via universal means
And connect this stand holding member to the fixed base.
The mirror mount to the fixed base.
Direction, and the mirror mount is fixed.
While providing a biasing means for biasing the fixed base side,
-Three abutting abutments on the urging side of the mounting table
Fixed base by dispersing the members around the table holding member
, And If two of the three contact members are
The position adjustment function to move the camera mount in the perspective direction.
While tightening, use the remaining one as a fulcrum,
The mirror mount is a long groove formed on the surface of the biasing side.
And the long groove has two
A state in which the tip of one of the contact members is engaged
At the tip of the one contact member and the fulcrum contact member.
The first axis connecting the ends and the two axes with the position adjustment function
The other contact member of the contact members and the contact member for the fulcrum
Based on the second axis connecting the tips of
Two abutments having the position adjusting function around the axis
By adjusting the member in the perspective direction, the mirror mounting table
It is designed so that the angle of the mirror surface of the mounted mirror can be changed.
Is equipped with a position adjustment mechanism
Particle size distribution measuring device using a roller mounting table.