JP2007156204A - Mirror holder - Google Patents

Mirror holder Download PDF

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Publication number
JP2007156204A
JP2007156204A JP2005352867A JP2005352867A JP2007156204A JP 2007156204 A JP2007156204 A JP 2007156204A JP 2005352867 A JP2005352867 A JP 2005352867A JP 2005352867 A JP2005352867 A JP 2005352867A JP 2007156204 A JP2007156204 A JP 2007156204A
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Japan
Prior art keywords
mirror
screw
holding member
base member
hole
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JP2005352867A
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Japanese (ja)
Inventor
Yasuhiro Noguchi
康博 野口
Kazuyuki Akagawa
和幸 赤川
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FIRST MECHANICAL DESIGN CORP
Nireco Corp
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FIRST MECHANICAL DESIGN CORP
Megaopto Co Ltd
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Priority to JP2005352867A priority Critical patent/JP2007156204A/en
Publication of JP2007156204A publication Critical patent/JP2007156204A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a mirror holder capable of securing comparatively strong holding force when adjusting an angle, flexibly adjusting the holding force in accordance with required adjusting width, hardly causing displacement when locking, and easily manufactured. <P>SOLUTION: The mirror holder 10 includes: a mirror holding member 14; a base member 12; a plurality of angle adjusting screws 22, 24 and 26; a coupling screw 30; a belleville spring group 34; a recess 32 for housing the belleville spring group 34; a through-hole 33 through which the edge of the coupling screw 30 is inserted; a stepped part 32a receiving the compressive stress of the belleville spring group 34; and a screw hole 44 formed in the mirror holding member 14. By inserting the coupling screw 30 through the belleville spring group 34 and screwing the edge of the coupling screw 30 in the screw hole 44 of the mirror holding member 14, the belleville spring group 34 is arranged between the head 30a of the coupling screw 30 and the stepped part 32a. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

この発明は、レーザ発振器のミラーを保持して発振器本体等に固定するためのミラーホルダに係り、特に、ミラーの角度を調整する機構を備えたミラーホルダに関する。   The present invention relates to a mirror holder for holding a mirror of a laser oscillator and fixing it to an oscillator body or the like, and more particularly to a mirror holder provided with a mechanism for adjusting the angle of the mirror.

レーザ発振器は、全反射ミラーと出力ミラーとの間に設置されたYAGロッド等のレーザ媒質に励起光を照射し、レーザ媒質から放出された光をミラー間で反射増幅させた後、その一部を出力ミラーから外部に取り出す仕組みを備えている。
そして、安定したレーザ出力を確保するには対向配置させた全反射ミラー及び出力ミラーの向き(平行度)が極めて重要となるため、各ミラーの角度を調整するための機構を備えたミラーホルダが、これまでも種々提案されている(下記の特許文献参照)。
特開2002−21835 特開2005−215507
A laser oscillator irradiates a laser medium such as a YAG rod installed between a total reflection mirror and an output mirror with excitation light, reflects and amplifies the light emitted from the laser medium between the mirrors, and then partially Is taken out from the output mirror.
And, in order to secure a stable laser output, the direction (parallelism) of the total reflection mirror and the output mirror arranged opposite to each other is extremely important. Therefore, a mirror holder having a mechanism for adjusting the angle of each mirror is provided. Various proposals have been made so far (see the following patent document).
JP2002-21835 JP-A-2005-215507

特許文献1に記載のミラーホルダは、ミラーを保持するための前板と、レーザ装置内に取り付けるための本体と、それぞれの対応位置に形成されたバネ収納用の複数の貫通孔と、この貫通孔内に挿通される引張りコイルバネと、本体部に形成された調整ネジ挿通用の複数の貫通孔と、複数本の調整ネジとを備えている。
前板と本体部とは、それぞれのバネ収納用貫通孔を合わせて形成された貫通孔内に引張りコイルバネを挿通させ、その両端をピンを用いて前板及び本体に引っ掛けることにより、バネの収縮力によって接合される。
そして、本体部に形成された調整ネジ挿入用の各貫通孔に調整ネジを螺合させることにより、その先端が前板の内面に当接される。この状態で任意の調整ネジをさらに回転させると、当該調整ネジの突出量が増大し、前板と本体間の距離が部分的に変化する結果、ミラーを保持する前板のあおり角度あるいは回転角度の調整が実現される。
このミラーホルダの場合、調整ネジによる角度調整が完了した後、調整ネジの軸方向と平行な力を調整ネジに加えるロック部材にロックビスを螺合させ、その先端を本体に押圧させることによって調整ネジの動きがロックされる仕組みを備えている。
A mirror holder described in Patent Document 1 includes a front plate for holding a mirror, a main body for mounting in a laser device, a plurality of through holes for storing springs formed at corresponding positions, and the through holes. A tension coil spring to be inserted into the hole, a plurality of through holes for inserting adjustment screws formed in the main body, and a plurality of adjustment screws are provided.
The front plate and the main body are contracted by inserting a tension coil spring into a through hole formed by combining the through holes for storing each spring, and hooking both ends of the front plate and the main body using pins. Bonded by force.
Then, by screwing the adjusting screw into each through hole for inserting the adjusting screw formed in the main body, the tip of the adjusting screw is brought into contact with the inner surface of the front plate. If the optional adjustment screw is further rotated in this state, the amount of protrusion of the adjustment screw increases and the distance between the front plate and the main body changes partially. As a result, the tilt angle or rotation angle of the front plate holding the mirror Adjustment is realized.
In the case of this mirror holder, after the angle adjustment by the adjustment screw is completed, a lock screw is screwed into a lock member that applies a force parallel to the axial direction of the adjustment screw to the adjustment screw, and the tip of the adjustment screw is pressed against the main body. It has a mechanism to lock the movement of

特許文献2に記載のミラーホルダも、ミラーを保持するためのプレートと、レーザ装置内に取り付けるためのブロックと、それぞれの対応位置に形成されたバネ収納用の複数の貫通孔と、この貫通孔内に挿通される引張りコイルバネと、本体部に形成された調整ネジ挿通用の複数の貫通孔と、複数本の調整ネジとを備えている。
プレートとブロックとは、それぞれのバネ収納用貫通孔を合わせて形成された貫通孔内に引張りコイルバネを挿通させ、その両端をピンを用いてプレート及びブロックに引っ掛けることにより、バネの収縮力によって接合される。
そして、ブロックに形成された調整ネジ挿入用の各貫通孔に調整ネジを螺合させることにより、その先端がプレートの内面に当接される。この状態で任意の調整ネジをさらに回転させると、当該調整ネジの突出量が増大し、プレートとブロック間の距離が部分的に変化する結果、ミラーを保持するプレートのあおり角度あるいは回転角度の調整が実現される。
このミラーホルダの場合、調整ネジによる角度調整が完了した後、1本の固定ネジをブロックの貫通孔に挿通させ、その先端をプレートに形成されたネジ孔に螺合させることにより、プレートをブロックに対して締結させる構造を備えている。
The mirror holder described in Patent Document 2 also includes a plate for holding the mirror, a block for mounting in the laser device, a plurality of through holes for storing springs formed at corresponding positions, and the through holes. A tension coil spring inserted into the inside, a plurality of through holes for insertion of adjustment screws formed in the main body, and a plurality of adjustment screws.
The plate and the block are joined by the contraction force of the spring by inserting a tension coil spring into the through-hole formed by combining the respective spring-accommodating through-holes and hooking both ends of the plate and the block using pins. Is done.
Then, by screwing the adjusting screw into each through hole for inserting the adjusting screw formed in the block, the tip thereof is brought into contact with the inner surface of the plate. If the optional adjustment screw is further rotated in this state, the protruding amount of the adjustment screw increases and the distance between the plate and the block partially changes. As a result, the tilt angle or rotation angle of the plate holding the mirror is adjusted. Is realized.
In the case of this mirror holder, after the angle adjustment by the adjustment screw is completed, the plate is blocked by inserting one fixing screw into the through hole of the block and screwing the tip into the screw hole formed in the plate. The structure to be fastened to is provided.

上記のように、特許文献1及び2のミラーホルダは、何れもミラー保持用の部材と設置用の部材を両部材の貫通孔内に配置したコイルバネの引張り応力によって接合・保持させる構造であるが、あまり強い力の引張りコイルバネを用いると両端のフックを各部材に係合することが大変となるし、フックに大きな負担がかかることにもなるため、その引張り応力にはどうしても制約があり、高い保持力を実現できないという問題があった。このため、調整ネジを回してミラーの角度を調整している間に、その回転力を受けて両部材間に位置ずれが生じ易いという欠点があった。
また、一旦コイルバネを取り付けた後は、その引張り応力を柔軟に加減することができないため、通常よりも強い保持力を確保した上で、両部材間の角度を狭い調整幅で微調整するということもできなかった。
また、両者とも角度調整完了後のロック手段(角度固定手段)を備えているが、何れも付勢手段であるコイルバネと離れた箇所にロックネジを螺合する方式であるため、ロック時に位置ずれが生じやすかった。
さらに、上記のようにコイルバネの両端のフックをピン等を用いて各部材に引っ掛ける必要があり、製造効率が良好とはいえなかった。
As described above, each of the mirror holders of Patent Documents 1 and 2 has a structure in which the mirror holding member and the installation member are joined and held by the tensile stress of the coil spring disposed in the through hole of both members. If a tension coil spring with a very strong force is used, it will be difficult to engage the hooks at both ends with each member, and it will be a heavy burden on the hook, so the tensile stress is inevitably limited and high. There was a problem that the holding force could not be realized. For this reason, while adjusting the angle of the mirror by turning the adjusting screw, there has been a drawback that a positional deviation is likely to occur between the two members due to the rotational force.
In addition, once the coil spring is attached, the tensile stress cannot be flexibly adjusted. Therefore, after securing a stronger holding force than usual, the angle between the two members can be finely adjusted with a narrow adjustment width. I couldn't.
In addition, both of them are provided with locking means (angle fixing means) after completion of angle adjustment, but since both of them are a system in which a lock screw is screwed into a place away from the coil spring as the biasing means, there is no positional deviation at the time of locking. It was easy to occur.
Further, as described above, the hooks at both ends of the coil spring need to be hooked on the respective members using pins or the like, and it cannot be said that the production efficiency is good.

この発明は、従来のミラーホルダが抱える上記の問題を解決するために案出されたものであり、角度調整時において比較的強い保持力を確保できると共に、必要な調整幅に応じて保持力を柔軟に加減でき、ロック時における位置ずれも生じにくく、製造も容易なミラーホルダを提供することを目的としている。   The present invention has been devised to solve the above-described problems of conventional mirror holders, and can ensure a relatively strong holding force during angle adjustment, and can also have a holding force according to a necessary adjustment width. An object of the present invention is to provide a mirror holder that can be flexibly adjusted, is less likely to be displaced when locked, and is easy to manufacture.

上記の目的を達成するため、この発明に係るミラーホルダは、ミラーを装着するミラー保持部材と、このミラー保持部材と対向配置されたベース部材と、このベース部材の貫通孔に螺合され、先端がミラー保持部材の対向面に当接する複数の角度調整ネジと、ミラー保持部材とベース部材を係合するための連結ネジと、ミラー保持部材とベース部材間を接合方向に付勢するための圧縮バネと、ベース部材に形成された上記圧縮バネを収納するための貫通孔と、この貫通孔内において圧縮バネの圧縮応力を受け止める係止部と、ミラー保持部材に形成された上記連結ネジの先端が螺合されるネジ穴とを備え、上記連結ネジを上記圧縮バネに挿通させ、その先端を上記ミラー保持部材のネジ穴に螺合させることにより、上記の圧縮バネが上記ベース部材の貫通孔内において連結ネジの頭部と上記係止部との間に配置されることを特徴としている。
上記の連結ネジ、圧縮バネ、ベース部材の貫通孔及び係止部、ミラー保持部材のネジ穴は、それぞれ複数設けられることが望ましい。
また、ベース部材の貫通孔を、圧縮バネを収納するための広径部と、連結ネジを挿通するための狭径部とを連通させた形状となし、その広径部と狭径部との間に形成される段部を上記の係止部として機能させることができる。
上記の圧縮バネは、多数の皿バネを積層させた皿バネ群より構成することが望ましいが、圧縮コイルバネを用いることもできる。
In order to achieve the above object, a mirror holder according to the present invention includes a mirror holding member for mounting a mirror, a base member arranged to face the mirror holding member, and a through-hole of the base member, and is screwed into the tip. A plurality of angle adjusting screws that come into contact with the opposing surface of the mirror holding member, a connecting screw for engaging the mirror holding member and the base member, and compression for biasing the mirror holding member and the base member in the joining direction. A spring, a through hole for accommodating the compression spring formed in the base member, a locking portion for receiving the compression stress of the compression spring in the through hole, and a tip of the connection screw formed in the mirror holding member A screw hole into which the compression spring is inserted, and the connecting screw is inserted into the compression spring, and the tip thereof is screwed into the screw hole of the mirror holding member. It is characterized by being disposed between the head and the locking portion of the connecting screw in the through hole of the member.
It is desirable that a plurality of the connecting screws, the compression springs, the through holes and locking portions of the base member, and the screw holes of the mirror holding member are provided.
Further, the through hole of the base member has a shape in which a wide diameter portion for accommodating the compression spring and a narrow diameter portion for inserting the connecting screw are communicated, and the wide diameter portion and the narrow diameter portion The step portion formed between them can function as the locking portion.
The compression spring is preferably composed of a group of disk springs in which a large number of disk springs are stacked, but a compression coil spring can also be used.

この発明に係るミラーホルダの場合、ベース部材の貫通孔内に圧縮バネが収納され、この圧縮バネは連結ネジの頭部とベース部材の係止部間に配置されており、連結ネジの先端はベース部材を貫通してミラー保持部材のネジ穴に螺合されている。
このため、連結ネジを緩めると圧縮バネの圧縮応力が係止部に加えられ、ベース部材をミラー保持部材側に押圧することができ、高い保持力の下で調整ネジによる角度調整が可能となる。
また、連結ネジを目一杯まで締め上げると、圧縮バネが完全に収縮して可動幅がほとんどなくなるため、ベース部材とミラー保持部材の角度を固定することが可能となる。
In the case of the mirror holder according to the present invention, the compression spring is accommodated in the through hole of the base member, and this compression spring is disposed between the head of the connection screw and the locking portion of the base member, and the tip of the connection screw is It penetrates the base member and is screwed into the screw hole of the mirror holding member.
For this reason, when the connecting screw is loosened, the compressive stress of the compression spring is applied to the locking portion, the base member can be pressed toward the mirror holding member, and the angle can be adjusted with the adjusting screw under a high holding force. .
Further, when the connecting screw is fully tightened, the compression spring is completely contracted and the movable width is almost eliminated, so that the angle between the base member and the mirror holding member can be fixed.

上記のように、この発明に係るミラーホルダにあっては、ミラー保持部材とベース部材間を接合方向に付勢する手段として圧縮バネを用いており、引張りバネによる場合のように取り付け用のフックを設け、これを各部材に引っ掛けて装着する必要がないため、その分高い圧縮応力を備えた圧縮バネを採用することが可能となり、両部材間をより強い力で接合方向に付勢することが可能となる。
また、連結ネジの緩め具合を調節することにより、圧縮バネの反発力(圧縮応力)を任意の強さに設定できるため、一旦角度調整を行った後に、通常よりも高い保持力の下で極微細な角度調整を行う場合に便利である。
また、ロック手段として機能する連結ネジと、付勢手段として機能する圧縮バネが同軸上に配置されているため、角度調整完了後に余計な外力が圧縮バネに加わることがなく、ロックに起因する位置ずれを抑えることが可能となる。
さらに、圧縮バネを挿通させた連結ネジをベース部材の貫通孔内に通し、その先端をミラー保持部材のネジ穴に螺合させることによって圧縮バネの配置が完了するため、ミラーホルダの製造効率を高めることが可能となる。
As described above, in the mirror holder according to the present invention, the compression spring is used as a means for urging the mirror holding member and the base member in the joining direction, and the hook for attachment as in the case of the tension spring is used. It is possible to use a compression spring with a higher compressive stress and bias the two members in the joining direction with a stronger force. Is possible.
In addition, the repulsion force (compression stress) of the compression spring can be set to an arbitrary strength by adjusting the looseness of the connecting screw. Therefore, after adjusting the angle once, the pole can be adjusted under a higher holding force than usual. This is convenient when performing fine angle adjustment.
In addition, since the connecting screw functioning as the locking means and the compression spring functioning as the urging means are arranged on the same axis, no extra external force is applied to the compression spring after the angle adjustment is completed, and the position caused by the lock The shift can be suppressed.
Further, the arrangement of the compression spring is completed by passing the connecting screw through which the compression spring is inserted into the through hole of the base member and screwing the tip of the connection screw into the screw hole of the mirror holding member. It becomes possible to raise.

図1はこの発明に係るミラーホルダ10の背面を示すものであり、図2は図1のA−A断面図である。
図示の通り、このミラーホルダ10は、アルミニウムよりなるベース部材12とミラー保持部材14とを備えている。
図3は、ベース部材12とミラー保持部材14とを分離させた状態を示す断面図である。
FIG. 1 shows the back surface of the mirror holder 10 according to the present invention, and FIG. 2 is a cross-sectional view taken along the line AA of FIG.
As illustrated, the mirror holder 10 includes a base member 12 and a mirror holding member 14 made of aluminum.
FIG. 3 is a cross-sectional view showing a state where the base member 12 and the mirror holding member 14 are separated.

図4はベース部材12の背面16を示す平面図であり、図5はベース部材12の正面(対向面)18を示す平面図である。
図示の通り、ベース部材12は略L字型の形状を備えている。
また、図2及び図3に示すように、ベース部材12には背面16から正面18に達する貫通孔20が3つ形成されており、各貫通孔20にはあおり角度調整用の第1の調整ネジ22と、支点形成用及び間隔調整用の第2の調整ネジ24と、回転角度調整用の第3の調整ネジ26がそれぞれ挿通され、貫通孔20の内面に形成された雌ネジに螺合されている(図2及び図3には2つの貫通孔20のみが描かれているが、実際には3つの貫通孔20が形成されている)。
各調整ネジの先端部には、ボール29が回転自在に装着されている。
FIG. 4 is a plan view showing the back surface 16 of the base member 12, and FIG. 5 is a plan view showing the front surface (opposing surface) 18 of the base member 12.
As illustrated, the base member 12 has a substantially L-shaped shape.
As shown in FIGS. 2 and 3, the base member 12 has three through holes 20 extending from the back surface 16 to the front surface 18. Each through hole 20 has a first adjustment for adjusting the tilt angle. A screw 22, a second adjustment screw 24 for fulcrum formation and spacing adjustment, and a third adjustment screw 26 for rotation angle adjustment are respectively inserted and screwed into a female screw formed on the inner surface of the through hole 20 (Only two through holes 20 are shown in FIGS. 2 and 3, but actually three through holes 20 are formed).
A ball 29 is rotatably mounted at the tip of each adjustment screw.

ベース部材12の背面16における第2の調整ネジ24の近傍には、凹部32が2つ形成されている。各凹部32は、連結ネジ30の頭部側に挿通された皿バネ群34を収納するのに十分な口径を備えている。
各凹部32の底面には、連結ネジ30の先端側を摺動自在に挿通するための貫通孔33が同心状に設けられており、両者が連通することによって一つの貫通孔が形成されている。
また、貫通孔33は凹部32よりも口径が小さいため、凹部32の底面と貫通孔33との間には段部32aが形成されている。
ベース部材12には、レーザ発振器本体(図示省略)に固定するための貫通孔35が複数形成されている。
Two recesses 32 are formed in the vicinity of the second adjustment screw 24 on the back surface 16 of the base member 12. Each recess 32 has a diameter sufficient to accommodate the disc spring group 34 inserted through the head side of the connecting screw 30.
A through hole 33 for slidably inserting the distal end side of the connection screw 30 is provided concentrically on the bottom surface of each recess 32, and one through hole is formed by communicating both. .
Further, since the through hole 33 has a smaller diameter than the recess 32, a step 32 a is formed between the bottom surface of the recess 32 and the through hole 33.
The base member 12 has a plurality of through holes 35 for fixing to a laser oscillator body (not shown).

図6はミラー保持部材14の背面(対向面)36を示す平面図であり、図7はミラー保持部材14の正面38を示す平面図である。
図示の通り、このミラー保持部材14の中央には、ミラー40を保持するための枠部42が形成されている。
FIG. 6 is a plan view showing the back surface (opposing surface) 36 of the mirror holding member 14, and FIG. 7 is a plan view showing the front surface 38 of the mirror holding member 14.
As illustrated, a frame portion 42 for holding the mirror 40 is formed at the center of the mirror holding member 14.

また、ミラー保持部材14の背面36には、連結ネジ30を挿通するための一対のネジ穴44と、第1の調整ネジ22のボール29が当接する第1の受部46と、第2の調整ネジ24のボール29が当接する第2の受部48と、第3の調整ネジ26のボール29が当接する第3の受部50とが設けられている。
第1の受部46は平坦な円形をなしており、SK鋼等の焼き入れ部材によって形成されている。また、第2の受部48は中心に凹部52を備えた円形をなしており、これも焼き入れ部材より形成されている。図2及び図3に示すように、第1の受部46及び第2の受部48の本体は、共にミラー保持部材14に形成された貫通孔に嵌合され、正面38にまで達している。
これに対し第3の受部50は、焼き入れ部材よりなる一対のシャフト54を背面36に埋設してなり、平行に配置されたシャフト54,54間の溝に沿って第3の調整ネジ26のボール29が往復滑動する仕組みとなっている。
Further, on the back surface 36 of the mirror holding member 14, a pair of screw holes 44 for inserting the connection screw 30, a first receiving portion 46 with which the ball 29 of the first adjustment screw 22 abuts, and a second A second receiving portion 48 with which the ball 29 of the adjusting screw 24 abuts and a third receiving portion 50 with which the ball 29 of the third adjusting screw 26 abuts are provided.
The first receiving portion 46 has a flat circular shape and is formed by a quenching member such as SK steel. The second receiving portion 48 has a circular shape with a concave portion 52 at the center, and is also formed of a quenching member. As shown in FIGS. 2 and 3, the main bodies of the first receiving portion 46 and the second receiving portion 48 are both fitted in a through hole formed in the mirror holding member 14 and reach the front surface 38. .
On the other hand, the third receiving portion 50 has a pair of shafts 54 made of a quenching member embedded in the back surface 36, and a third adjusting screw 26 along a groove between the shafts 54, 54 arranged in parallel. The ball 29 slides back and forth.

以下において、このミラーホルダ10の組み立て方法について説明する。
まず図3に示すように、ベース部材12の正面18とミラー保持部材14の背面36とを対向させた状態で、ベース部材12の背面16側から連結ネジ30を凹部32及び貫通孔33に挿通させる。
この際、連結ネジ30の頭部30a側には皿バネ群34(複数の皿バネ34a+ワッシャ34b)が挿通されている。
Hereinafter, a method for assembling the mirror holder 10 will be described.
First, as shown in FIG. 3, with the front surface 18 of the base member 12 and the rear surface 36 of the mirror holding member 14 facing each other, the connecting screw 30 is inserted from the back surface 16 side of the base member 12 into the recess 32 and the through hole 33. Let
At this time, a disc spring group 34 (a plurality of disc springs 34a + washers 34b) is inserted into the head 30a side of the connecting screw 30.

つぎに、連結ネジ30の先端を、ミラー保持部材14のネジ穴44に螺合させる。
そして、皿バネ群34の反発力に抗して連結ネジ30を締め上げることにより、図8に示すように、ベース部材12とミラー保持部材14とが連結ネジ30を介して固定化される。
Next, the tip of the connecting screw 30 is screwed into the screw hole 44 of the mirror holding member 14.
Then, by tightening the connecting screw 30 against the repulsive force of the disc spring group 34, the base member 12 and the mirror holding member 14 are fixed via the connecting screw 30 as shown in FIG.

図示の通り、皿バネ群34は連結ネジ30の頭部30aと凹部32の底面(段部32a)との間に伸縮可能に配置されている。
このため、連結ネジ30を適度に緩めて頭部30aと段部32a間の距離を広げると、皿バネ群34の反発力によってベース部材12がミラー保持部材14側に強く付勢されることとなる。
As shown in the figure, the disc spring group 34 is disposed between the head 30a of the connecting screw 30 and the bottom surface (step 32a) of the recess 32 so as to be extendable and contractable.
Therefore, if the connecting screw 30 is loosened moderately and the distance between the head 30a and the stepped portion 32a is increased, the base member 12 is strongly biased toward the mirror holding member 14 by the repulsive force of the disc spring group 34. Become.

ミラー40のあおり角度や回転角度を調整するには、まず両方の連結ネジ30を緩め、ロック状態を解除する。
この場合でも、上記のように皿バネ群34の反発力が効いているため、ミラー保持部材14とベース部材12間は十分強固にホールドされ、位置ずれが生じることはない。
つぎに第1の調整ネジ22を左右に必要量回動させると、その先端の突出量が増減し、第2の調整ネジ24のボール29及び第2の受部48の凹部52を支点にしてベース部材12とミラー保持部材14間のあおり角度が加減される。
また、第3の調整ネジ26を左右に必要量回動させると、同じくその先端の突出量が増減し、第2の調整ネジ24のボール29及び第2の受部48の凹部52を支点にしてベース部材12とミラー保持部材14間の回転角度が加減される。
ベース部材12とミラー保持部材14間の距離を調整したい場合には、第2の調整ネジ24を左右に必要量回動させる。
以上の調整が終了した後は、皿バネ群34が収縮しきるまで両方の連結ネジ30を締め上げ、ベース部材12とミラー保持部材14間の角度を固定化させる。
In order to adjust the tilt angle and the rotation angle of the mirror 40, first, both the connecting screws 30 are loosened to release the locked state.
Even in this case, since the repulsive force of the disc spring group 34 is effective as described above, the mirror holding member 14 and the base member 12 are held sufficiently firmly, and no displacement occurs.
Next, when the first adjusting screw 22 is rotated to the right and left by the required amount, the protruding amount at the tip thereof increases and decreases, and the ball 29 of the second adjusting screw 24 and the concave portion 52 of the second receiving portion 48 are used as fulcrums. The tilt angle between the base member 12 and the mirror holding member 14 is adjusted.
When the third adjustment screw 26 is rotated to the right and left by the required amount, the amount of protrusion at the tip of the third adjustment screw 26 increases and decreases, and the ball 29 of the second adjustment screw 24 and the recess 52 of the second receiving portion 48 are used as fulcrums. Thus, the rotation angle between the base member 12 and the mirror holding member 14 is adjusted.
When the distance between the base member 12 and the mirror holding member 14 is to be adjusted, the second adjusting screw 24 is rotated to the right and left by a necessary amount.
After the above adjustment is completed, both connecting screws 30 are tightened until the disc spring group 34 is fully contracted, and the angle between the base member 12 and the mirror holding member 14 is fixed.

このミラーホルダ10にあっては、ベース部材12とミラー保持部材14間を接合方向に付勢する手段として皿バネ群34よりなる圧縮バネを用いているため、コイルバネよりなる引張りバネのように取り付け用のフックを両端に設ける必要がない。
このため、フックを収納するためのスペースを節約でき、その分多くの皿バネ34aをベース部材12の凹部32内に収納できるため、ベース部材12の肉厚を比較的薄く設定しても強い保持力を確保することが可能となる。
In this mirror holder 10, since a compression spring comprising a disc spring group 34 is used as a means for biasing the base member 12 and the mirror holding member 14 in the joining direction, it is attached like a tension spring comprising a coil spring. There is no need to provide hooks at both ends.
For this reason, a space for storing the hook can be saved, and a larger amount of the disc spring 34a can be stored in the recess 32 of the base member 12, so that the base member 12 can be kept strong even if the thickness of the base member 12 is set relatively thin. It is possible to secure power.

また、連結ネジ30の緩め具合を調整することによって皿バネ群34の反発力を加減することができるため、より精妙な角度調節が可能となる。
すなわち、連結ネジ30を僅かに緩めた状態では、調整幅が狭くなる代わりに高い付勢力がベース部材12の段部32aに付加されることとなる。このため、ベース部材12とミラー保持部材14間の角度調整が一旦完了した後に、強い保持力を保ちながらごく僅かな幅での角度調節を高精度で行うことが可能となる。
Further, since the repulsive force of the disc spring group 34 can be adjusted by adjusting the looseness of the connecting screw 30, more precise angle adjustment is possible.
That is, when the connecting screw 30 is slightly loosened, a high biasing force is applied to the step portion 32a of the base member 12 instead of narrowing the adjustment width. For this reason, after the angle adjustment between the base member 12 and the mirror holding member 14 is once completed, the angle adjustment with a very small width can be performed with high accuracy while maintaining a strong holding force.

また、ロック用の連結ネジ30が付勢手段としての皿バネ群34に挿通され、両者が同軸上に配置されているため、連結ネジ30の回転によって付勢手段に余計な外力が加えられることがなく、したがってロック時に位置ずれが発生することを有効に防止することができる。   Further, since the locking connecting screw 30 is inserted into the disc spring group 34 as the biasing means and both are arranged coaxially, an extra external force is applied to the biasing means by the rotation of the connecting screw 30. Therefore, it is possible to effectively prevent the occurrence of displacement when locked.

さらに、皿バネ群34を挿通させたまま連結ネジ30をベース部材12の凹部32及び貫通孔33に通し、ミラー保持部材14のネジ穴に螺合させることによって付勢手段の配置が完了するため、引張りバネをを用いた場合に比べてミラーホルダの製造を容易化できる利点がある。   Furthermore, the arrangement of the biasing means is completed by passing the connecting screw 30 through the recess 32 and the through hole 33 of the base member 12 while the disc spring group 34 is inserted, and screwing it into the screw hole of the mirror holding member 14. There is an advantage that the manufacture of the mirror holder can be facilitated as compared with the case where a tension spring is used.

上記にあっては、ベース部材12の凹部32の底面(段部32a)が、皿バネ群34の圧縮応力を受け止める係止手段として機能する例を示したが、この発明はこれに限定されるものではない。
要は、皿バネ群34の圧縮応力を受け止めてベース部材12をミラー保持部材14側に付勢できればよいのであり、例えば皿バネ群34を収納するのに十分な径を備えた貫通孔をベース部材12に形成しておき、この貫通孔内に皿バネ群34と当接する突起部を形成することもできる。
In the above, an example has been shown in which the bottom surface (step 32a) of the recess 32 of the base member 12 functions as a locking means that receives the compressive stress of the disc spring group 34, but the present invention is limited to this. It is not a thing.
In short, it is only necessary to receive the compressive stress of the disc spring group 34 and urge the base member 12 toward the mirror holding member 14. For example, a through hole having a diameter sufficient to accommodate the disc spring group 34 is used as a base. It is also possible to form a protrusion that contacts the disc spring group 34 in the through-hole in the member 12.

皿バネは撓み量の比較的小さな弾性体を多数連結させた構造を備えているため、バネ全体の収縮量と圧縮応力との関係が安定している利点がある。
このため、上記にあっては連結ネジ30に皿バネ群34を挿通させる例を示したが、皿バネ群34の代わりに圧縮コイルバネを連結ネジ30に挿通させるように構成してもよい。
Since the disc spring has a structure in which a large number of elastic bodies having a relatively small amount of bending are connected, there is an advantage that the relationship between the contraction amount of the whole spring and the compressive stress is stable.
For this reason, the example in which the disc spring group 34 is inserted through the connection screw 30 has been described above. However, instead of the disc spring group 34, a compression coil spring may be inserted through the connection screw 30.

この発明に係るミラーホルダの背面を示す平面図である。It is a top view which shows the back surface of the mirror holder which concerns on this invention. 図1のA−A断面図である。It is AA sectional drawing of FIG. ベース部材とミラー保持部材とを分離させた状態を示す断面図である。It is sectional drawing which shows the state which isolate | separated the base member and the mirror holding member. ベース部材の背面を示す平面図である。It is a top view which shows the back surface of a base member. ベース部材の正面(対向面)を示す平面図である。It is a top view which shows the front (opposite surface) of a base member. ミラー保持部材の背面(対向面)を示す平面図である。It is a top view which shows the back surface (opposite surface) of a mirror holding member. ミラー保持部材の正面を示す平面図である。It is a top view which shows the front of a mirror holding member. この発明に係るミラーホルダの連結ネジを締め上げた状態を示す断面図である。It is sectional drawing which shows the state which tightened the connection screw of the mirror holder which concerns on this invention.

符号の説明Explanation of symbols

10 ミラーホルダ
12 ベース部材
14 ミラー保持部材
16 ベース部材の背面
18 ベース部材の正面
20 調整ネジ用の貫通孔
22 第1の調整ネジ
24 第2の調整ネジ
26 第3の調整ネジ
29 ボール
30 連結ネジ
30a 連結ネジの頭部
32 凹部
32a 段部
33 貫通孔
34 皿バネ群
34a 皿バネ
34b ワッシャ
35 固定用の貫通孔
36 ミラー保持部材の背面
38 ミラー保持部材の正面
40 ミラー
42 枠部
44 ミラー保持部材のネジ穴
46 第1の受部
48 第2の受部
50 第3の受部
52 凹部
54 シャフト
10 Mirror holder
12 Base material
14 Mirror holding member
16 Back of base member
18 Front of base member
20 Through hole for adjusting screw
22 First adjustment screw
24 Second adjustment screw
26 Third adjustment screw
29 balls
30 Connection screw
30a Connecting screw head
32 recess
32a Step
33 Through hole
34 Disc spring group
34a Belleville spring
34b washer
35 Fixing through hole
36 Rear side of mirror holding member
38 Front of mirror holding member
40 mirror
42 Frame
44 Screw holes on mirror holding member
46 First receiving part
48 Second receiving part
50 Third receiving part
52 recess
54 shaft

Claims (5)

ミラーを装着するミラー保持部材と、
このミラー保持部材と対向配置されたベース部材と、
このベース部材の貫通孔に螺合され、先端がミラー保持部材の対向面に当接する複数の角度調整ネジと、
ミラー保持部材とベース部材を係合するための連結ネジと、
ベース部材をミラー保持部材側に付勢するための圧縮バネと、
ベース部材に形成された上記圧縮バネを収納するための貫通孔と、
この貫通孔内において圧縮バネの圧縮応力を受け止める係止部と、
ミラー保持部材に形成された上記連結ネジの先端が螺合されるネジ穴とを備え、
上記連結ネジを上記圧縮バネに挿通させ、その先端を上記ミラー保持部材のネジ穴に螺合させることにより、上記の圧縮バネが上記ベース部材の貫通孔内において連結ネジの頭部と上記係止部との間に配置されることを特徴とするミラーホルダ。
A mirror holding member for mounting the mirror;
A base member disposed opposite to the mirror holding member;
A plurality of angle adjusting screws that are screwed into the through holes of the base member and whose tips abut against the opposing surface of the mirror holding member;
A connecting screw for engaging the mirror holding member and the base member;
A compression spring for biasing the base member toward the mirror holding member;
A through hole for accommodating the compression spring formed in the base member;
A locking portion that receives the compression stress of the compression spring in the through hole,
A screw hole into which the tip of the connecting screw formed on the mirror holding member is screwed,
The coupling screw is inserted into the compression spring and the tip of the coupling screw is screwed into the screw hole of the mirror holding member, so that the compression spring is engaged with the head of the coupling screw in the through hole of the base member. A mirror holder, which is disposed between the two parts.
上記の連結ネジ、圧縮バネ、ベース部材の貫通孔及び係止部、ミラー保持部材のネジ穴をそれぞれ複数備えたことを特徴とする請求項1に記載のミラーホルダ。   2. The mirror holder according to claim 1, further comprising a plurality of the connection screw, the compression spring, the through hole and the locking portion of the base member, and the screw hole of the mirror holding member. ベース部材に形成された貫通孔が、圧縮バネを収納するための広径部と、連結ネジを挿通するための狭径部を備えており、広径部と狭径部との間に形成される段部が上記の係止部として機能することを特徴とする請求項1または2に記載のミラーホルダ。   A through hole formed in the base member has a wide diameter portion for accommodating the compression spring and a narrow diameter portion for inserting the connecting screw, and is formed between the wide diameter portion and the narrow diameter portion. The mirror holder according to claim 1, wherein the stepped portion functions as the locking portion. 上記の圧縮バネが、多数の皿バネを積層させた皿バネ群よりなることを特徴とする請求項1〜3の何れかに記載のミラーホルダ。   The mirror holder according to any one of claims 1 to 3, wherein the compression spring comprises a disc spring group in which a large number of disc springs are stacked. 上記の圧縮バネが、圧縮コイルバネよりなることを特徴とする請求項1〜3の何れかに記載のミラーホルダ。   The mirror holder according to claim 1, wherein the compression spring is a compression coil spring.
JP2005352867A 2005-12-07 2005-12-07 Mirror holder Pending JP2007156204A (en)

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Publication number Priority date Publication date Assignee Title
GB2463757A (en) * 2008-09-26 2010-03-31 Itt Mfg Enterprises Inc Device for reducing backlash in an objective lens assembly
WO2016067697A1 (en) * 2014-10-29 2016-05-06 株式会社オーディオテクニカ Tilt adjustment device
JP2021099424A (en) * 2019-12-23 2021-07-01 株式会社ディスコ Optical element unit
JP7474631B2 (en) 2020-04-10 2024-04-25 株式会社キーエンス Optical axis adjustment device for optical sensors

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JP2000193864A (en) * 1998-12-28 2000-07-14 Horiba Ltd Alignment mechanism of member fitting table
JP2005215507A (en) * 2004-01-30 2005-08-11 Sony Corp Mirror holder

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JPS63156036A (en) * 1986-12-18 1988-06-29 Kobe Steel Ltd Pottery material composition to be glazed on titanium or titanium alloy and its preparation
JP2000193864A (en) * 1998-12-28 2000-07-14 Horiba Ltd Alignment mechanism of member fitting table
JP2005215507A (en) * 2004-01-30 2005-08-11 Sony Corp Mirror holder

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2463757A (en) * 2008-09-26 2010-03-31 Itt Mfg Enterprises Inc Device for reducing backlash in an objective lens assembly
GB2463757B (en) * 2008-09-26 2011-11-09 Itt Mfg Enterprises Inc Objective lens assembly having biasing device for reducing backlash
US8102611B2 (en) 2008-09-26 2012-01-24 Itt Manufacturing Enterprises, Inc. Backlash reducing device for an objective lens assembly
WO2016067697A1 (en) * 2014-10-29 2016-05-06 株式会社オーディオテクニカ Tilt adjustment device
JP2016091568A (en) * 2014-10-29 2016-05-23 株式会社オーディオテクニカ Inclination adjusting device
JP2021099424A (en) * 2019-12-23 2021-07-01 株式会社ディスコ Optical element unit
JP7474631B2 (en) 2020-04-10 2024-04-25 株式会社キーエンス Optical axis adjustment device for optical sensors

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