JPH046007U - - Google Patents
Info
- Publication number
- JPH046007U JPH046007U JP4452590U JP4452590U JPH046007U JP H046007 U JPH046007 U JP H046007U JP 4452590 U JP4452590 U JP 4452590U JP 4452590 U JP4452590 U JP 4452590U JP H046007 U JPH046007 U JP H046007U
- Authority
- JP
- Japan
- Prior art keywords
- base
- movable part
- optical element
- ball receiving
- mounting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 15
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Mounting And Adjusting Of Optical Elements (AREA)
Description
第１図は本考案の一実施例による光学素子取付
装置を示す分解斜視図、第２図は第１図の光学素
子取付装置の組立状態を示す−断面図、第３
図は球体の嵌入状態を示す断面図、第４図は可動
部を示す斜視図、第５図は従来の光学素子取付装
置の側面図、第６図は第５図の光学素子取付装置
の平面図である。
１……取付ベース部、３……基部、５……可動
部、７……押え部材、９，１１……傾斜調整部材
、１３……回転調整部材、２１……取付ベース部
、２３……基部、２５……光学素子、２５ｃ……
調整溝部、２７……可動部、２９ａ，２９ｂ……
ねじ孔、３１，３３……基準孔、３５……取付軸
、３８……球体、３９ａ，３９ｂ，３９ｃ，３９
ｄ……球受穴、４０ａ，４０ｂ，４０ｃ，４０ｄ
……球受穴、４１……位置決め板、４３，４４…
…取付孔、５１，５３……ピン、５９……ばね部
材、６１，６２……調整ねじ、６４，６５……取
付孔、６７，６８……調整ねじ孔、７１，７２…
…付加調整ねじ孔。
FIG. 1 is an exploded perspective view showing an optical element mounting device according to an embodiment of the present invention, FIG. 2 is a sectional view showing an assembled state of the optical device mounting device of FIG. 1, and FIG.
The figure is a sectional view showing the fitted state of the sphere, Figure 4 is a perspective view showing the movable part, Figure 5 is a side view of a conventional optical element mounting device, and Figure 6 is a plan view of the optical element mounting device of Figure 5. It is a diagram. DESCRIPTION OF SYMBOLS 1...Mounting base part, 3...Base, 5...Movable part, 7...Press member, 9, 11...Inclination adjustment member, 13...Rotation adjustment member, 21...Mounting base part, 23... Base, 25... Optical element, 25c...
Adjustment groove portion, 27...Movable part, 29a, 29b...
Screw hole, 31, 33... Reference hole, 35... Mounting shaft, 38... Sphere, 39a, 39b, 39c, 39
d...Ball receiving hole, 40a, 40b, 40c, 40d
...Ball receiving hole, 41...Positioning plate, 43, 44...
...Mounting hole, 51,53...Pin, 59...Spring member, 61,62...Adjustment screw, 64,65...Mounting hole, 67,68...Adjustment screw hole, 71,72...
...Additional adjustment screw hole.
Claims (1)
部を姿勢調整可能に取付けた基部とを含む光学素
子取付装置において、上記可動部と上記基部との
間に介在して上記可動部を上記基部に対しシーソ
ー運動を可能になした支点部材と、上記基部に対
する上記可動部の姿勢を上記シーソー運動の方向
で調整する調整手段とを設けたことを特徴とする
光学素子取付装置。 ２ 上記支点部材は、上記可動部及び上記基部と
は別体の部品よりなり、上記可動部及び上記基部
は上記支点部材を位置決めする位置決め手段を有
している請求項１記載の光学素子取付装置。 ３ 上記位置決め手段は、上記可動部及び上記基
部の互いに対向した対向面に相対向するよう形成
した球受穴を有し、上記支点部材は上記球受穴間
に介在した球体であり、上記球受穴と上記球体は
、上記対向面間に隙間を残すように寸法を定めら
れている請求項２記載の光学素子取付装置。 ４ 上記位置決め手段は、上記可動部及び上記基
部の互いに対向した対向面に相対向するよう形成
した球受穴を複数組所定直線に沿つて互いに異な
る位置に有し、上記支点部材は上記複数組の相対
向した上記球受穴間にそれぞれ介在した球体であ
り、上記球受穴と上記球体とは、上記対向面間に
隙間を残すように寸法を定められている請求項２
記載の光学素子取付装置。 ５ 上記調整手段は、上記対向面のうち、上記所
定直線に対し交差した直線に沿つて互いに異なる
位置に形成された複数組の対向した付加球受穴と
、該複数組の相対向した該付加球受穴間にそれぞ
れ配された付加球対とを有する請求項４記載の光
学素子取付装置。 ６ 上記調整手段は、上記支点部材を支点として
上記可動部を上記基部に対し一方向に付勢したば
ね部材と、上記支点部材を支点として上記可動部
を上記基部に対し反対方向に動かすための調整ね
じとを含んでいる請求項１記載の光学素子取付装
置。 ７ 上記基部を載置する主面を有した取付ベース
部と、該取付ベース部に対し上記基部を、上記主
面に垂直な軸心の回りで回動可能になした取付軸
と、上記取付ベース部に対する上記基部の回動を
固定する固定手段とを含み、上記基部は、上記取
付ベース部に対向している部分に形成した調整溝
部を有し、上記取付ベース部は、上記調整溝部に
対向する上記取付ベース部に上記基部の回動の微
調整の基準となる基準孔を有している請求項１記
載の光学素子取付装置。[Claims for Utility Model Registration] 1. In an optical element mounting device including a movable part for mounting an optical element and a base to which the movable part is attached so as to be able to adjust its posture, an optical element that is interposed between the movable part and the base. An optical system comprising: a fulcrum member that allows the movable part to perform seesaw motion with respect to the base; and an adjustment means that adjusts the attitude of the movable part with respect to the base in the direction of the seesaw motion. Element mounting device. 2. The optical element mounting device according to claim 1, wherein the fulcrum member is a separate component from the movable part and the base, and the movable part and the base have positioning means for positioning the fulcrum member. . 3 The positioning means has a ball receiving hole formed to face each other in opposing surfaces of the movable part and the base, and the fulcrum member is a spherical body interposed between the ball receiving holes, and the fulcrum member is a spherical body interposed between the ball receiving holes. 3. The optical element mounting device according to claim 2, wherein the receiving hole and said sphere are dimensioned to leave a gap between said opposing surfaces. 4. The positioning means has a plurality of sets of ball receiving holes formed to face each other in opposing surfaces of the movable part and the base at different positions along a predetermined straight line, and the fulcrum member 2. A sphere interposed between the opposing ball receiving holes, wherein the ball receiving hole and the sphere are dimensioned so as to leave a gap between the opposing surfaces.
The optical element mounting device described. 5 The adjusting means includes a plurality of sets of opposing additional ball receiving holes formed at different positions on the opposing surface along a straight line intersecting the predetermined straight line, and a plurality of sets of opposing additional ball receiving holes. 5. The optical element mounting device according to claim 4, further comprising a pair of additional balls respectively arranged between the ball receiving holes. 6 The adjustment means includes a spring member that biases the movable part in one direction with respect to the base using the fulcrum member as a fulcrum, and a spring member that biases the movable part in the opposite direction with respect to the base using the fulcrum member as a fulcrum. The optical element mounting device according to claim 1, further comprising an adjustment screw. 7 A mounting base having a main surface on which the base is placed, a mounting shaft that allows the base to rotate about an axis perpendicular to the main surface, and the mounting a fixing means for fixing the rotation of the base relative to the base, the base having an adjustment groove formed in a portion facing the mounting base, and the mounting base having an adjustment groove formed in the adjustment groove. 2. The optical element mounting device according to claim 1, wherein said mounting base portions facing each other have a reference hole serving as a reference for fine adjustment of rotation of said base portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990044525U JP2540604Y2 (en) | 1990-04-27 | 1990-04-27 | Optical element mounting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990044525U JP2540604Y2 (en) | 1990-04-27 | 1990-04-27 | Optical element mounting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH046007U true JPH046007U (en) | 1992-01-21 |
| JP2540604Y2 JP2540604Y2 (en) | 1997-07-09 |
Family
ID=31557909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990044525U Expired - Fee Related JP2540604Y2 (en) | 1990-04-27 | 1990-04-27 | Optical element mounting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2540604Y2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51105178A (en) * | 1975-03-12 | 1976-09-17 | Takeo Akyama | KEITAIYOKYUKYUGU |
| JPH06167657A (en) * | 1992-12-01 | 1994-06-14 | Sanyuu Denshi Kk | Micro-manipulator |
| US7119895B2 (en) | 2000-11-28 | 2006-10-10 | Honda Giken Kogyo Kabushiki Kaisha | Method of and apparatus for adjusting optical component, and optical unit |
| JP2012175006A (en) * | 2011-02-23 | 2012-09-10 | Komatsu Ltd | Optical device, laser device and extreme ultraviolet light generation device |
| JP2021530650A (en) * | 2018-07-13 | 2021-11-11 | ノースロップ グラマン システムズ コーポレーション | Angular motion transmission driven by ball bearings |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62907A (en) * | 1985-06-27 | 1987-01-06 | Ricoh Co Ltd | Angle adjusting device for optical parts mounting plate |
| JPH0171712U (en) * | 1987-10-29 | 1989-05-15 |
-
1990
- 1990-04-27 JP JP1990044525U patent/JP2540604Y2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62907A (en) * | 1985-06-27 | 1987-01-06 | Ricoh Co Ltd | Angle adjusting device for optical parts mounting plate |
| JPH0171712U (en) * | 1987-10-29 | 1989-05-15 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51105178A (en) * | 1975-03-12 | 1976-09-17 | Takeo Akyama | KEITAIYOKYUKYUGU |
| JPH06167657A (en) * | 1992-12-01 | 1994-06-14 | Sanyuu Denshi Kk | Micro-manipulator |
| US7119895B2 (en) | 2000-11-28 | 2006-10-10 | Honda Giken Kogyo Kabushiki Kaisha | Method of and apparatus for adjusting optical component, and optical unit |
| JP2012175006A (en) * | 2011-02-23 | 2012-09-10 | Komatsu Ltd | Optical device, laser device and extreme ultraviolet light generation device |
| US9362703B2 (en) | 2011-02-23 | 2016-06-07 | Gigaphoton Inc. | Optical device, laser apparatus, and extreme ultraviolet light generation system |
| JP2021530650A (en) * | 2018-07-13 | 2021-11-11 | ノースロップ グラマン システムズ コーポレーション | Angular motion transmission driven by ball bearings |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2540604Y2 (en) | 1997-07-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |