JPS61121109A - Fine movement table device - Google Patents

Abstract

PURPOSE:To support a fine movement table with no hysteresis by supporting the fine displacement of the table with the elastic deformation of posts. CONSTITUTION:A mobile part 11 of a tilting table are supported on a support base 13 by four tilted elastic posts 12a-12d (posts 12c and 12d seem overlapped to each other in the figure) so that they are kept horizontal in the neutral state. These posts are tilted so that the extended lines of the axial lines of these posts cross the vertical center axial line of the part 11 at a point of an upper part. At the same time, posts 12a and 12b are set on an axis X together with posts 12c and 12d set on an axis Y respectively within a horizontal plane. When the driving power acts on the part 11 in the direction of the axis X, the part 11 has a minute tilting movement around the axis Y and then a minute tilting movement around the axis X with the driving power applied on the axis Y respectively. A drive unit 14 contains a plunger 16 which is driven forward and backward by a feed screw 15 and an operating knob 17 for plunger 16. The revolving angle displacement of the knob 17 is converted into a linear replacement with reduction by the screw 15 and transmitted to the tilting table 11 via a plunger 16.

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a fine movement table device, and more specifically, the present invention relates to a fine movement table device, and more specifically, a fine movement table device for finely adjusting the sagging angle of a workpiece or a measured object held on a table, for example, in a 360° direction. The present invention relates to a fine movement table device that is driven to slightly displace a table in order to adjust or finely adjust the position of these holding objects on the table within an XY orthogonal coordinate plane.

[Prior Art] As an example of a conventional fine-movement table device, FIG. 6 shows a typical configuration of a tilting table device that performs minute tilting in a 360° direction.

As shown in FIG. 6, the tilting table movable part 6
1 is slidably supported on a support base 63 by a spherical seat 62 on the bottom surface thereof, and the movable part 61 is provided with a downward protruding part 64 on its vertical central axis.

The movable part 61 is also attracted to the support base 63 by a stud bolt 65 at a position off the central axis by the spring force of a disc spring 66, and this attraction causes the movable part 61 to move vertically downward in the drawing. Force is always generated. A driving plunger 67 that is screwed into the base 63 is in contact with the downward protrusion 64 of the movable part 61, and by moving the plunger 1 forward and backward by rotating the operation knob 68, the tilting table movable part 61 can be moved in a minute direction. It is driven by tilting. In FIG. 6, reference numeral 69 indicates a point at which the driving force from the plunger 67 is applied to the movable portion 61.

A similar drive mechanism is provided in the direction perpendicular to the plunger 67, that is, in the direction of the front and back of the paper in the drawing, and these two sets of drive mechanisms perpendicular to each other can tilt the movable part 61 in the 360° direction. be done.

However, in such conventional fine-movement table devices, stick-slip occurs due to the sliding friction caused by the spherical seat 62, making it impossible to make smooth fine movements and making it impossible to perform precise positioning when indexing minute angular positions. It had its drawbacks.

On the other hand, it is possible to directly support the table with leaf springs, but if the table is simply supported with leaf springs, not only will sufficient rigidity not be obtained, but the center of rotation for tilting will not be determined, and, for example, the lens When used for light export, it is impossible to predict the amount of lateral deviation due to tilting, and there is a risk that measurement will be a process of repeated trial and error with difficulty in convergence. Furthermore, with simple leaf spring support, the tilting direction is limited to only one directional component, and 36
In order to create a tilting table in the 0° direction, it is necessary to use a two-tiered table support structure with leaf springs orthogonal to each other, which inevitably increases the size of the device.

[Objective and Summary of the Invention] The present invention solves the problems of the prior art described above, and provides a movement that does not cause stick-slip and resulting hysteresis, and also allows the center of rotation to be determined at one point for tilting. The present invention aims to provide a fine movement table device that can smoothly achieve high resolution.

To achieve this object, according to the fine movement table device of the present invention, a support column that is elastically deformed in response to the fine movement of the table is used as a support member for supporting the table with respect to a fixed support. It is designed so that no am occurs between the structure and the table. Therefore, all the displacement of the table micro-movement is absorbed by the elastic deformation of the support column, and not only stick-slip but also deformation of the support column occurs only within the elastic deformation region, so there is no hysteresis, and the table is
In addition to being able to elastically displace freely in the 0° direction, by appropriately designing the inclination of the support column, arbitrary tilting motion in 360° directions within the table surface with a point above the table as the rotation center can be obtained. This is also possible.

[Embodiment] FIG. 1 is a sectional view showing a main part of an embodiment of the present invention, and shows an example of a fine movement table device for tilting.

In FIG. 1, the tilting table movable section 11 includes four tilted elastic support columns 12a.

12b, 12c, and 12d (12c and 126 appear overlapping in the figure) are supported on the support base 13 so as to be horizontal in a neutral state. The inclinations of the four support columns are such that the extensions of their axes intersect the vertical central axis of the movable part at one point on the top, and the support columns 12a and 121) On the axis, the support columns 12c and 12d are arranged on the Y axis perpendicular to XlN1, and when a driving force in the X axis direction acts on the movable part 11, the movable part 11 makes a minute tilt around the Y axis, When the driving force is applied in the axial direction, a minute tilt is performed around the X axis.

In FIG. 1, only the drive unit 14 having a driving force acting axis in the X-axis direction is shown, and the driving unit 14 in the Y-axis direction is of a similar configuration having a driving force acting axis in the front and back directions of the drawing. Assume that something is hidden behind the table 11.

The drive unit 14 includes a plunger 16 that is moved forward and backward by a feed screw 15 screwed into a fixed support base 13 and an operating knob 11 thereof, and the rotation angular displacement of the knob 11 is reduced and converted into a linear displacement by the feed screw 15. plunger 16
The information is transmitted to the table 11 via.

The support columns 12a to 12CI, which support the displacement of the table 11 by elastic deformation according to the present invention, are arranged in four directions aligned with the operating axis of the drive unit.

FIG. 2 shows a support column 12a tilted in the X-axis direction with the center of the table 11 in a horizontal state as the origin 01.

12b is an explanatory diagram showing the mechanism of the tilting operation by the device 12b. FIG. In this figure, point P+ (χ1゜V+
) is the support point of the table 11 by the support column 12a, R
2(χ2, V2) is the point after tilting,
Q+ (χ3.V3) is the support point by the support column 12b, Q2 (yJ, VJ) is the point after tilting, and 02 (χs, Vs) is the center point of the daple 11 after tilting.

When the table 11 is displaced by the drive unit from the horizontal position J'3 in FIG. One point 03 (
0,yJ). In this case, if the rotation radius 0203 is R1, the distance between support point P+ and 01 is D, and each mounting angle of support struts 12a and 12b is θ, then the coordinates of each point with respect to the coordinates (0, O) of origin 01 The values are as follows.

χ+ =-D/2. V+ =0 χ2=-D/2+j・Δθ+ CO3θV2=-J・j
θ, sinθ (However, J is the length of the support column, Δθ1 is the length of the support column 12a
angular displacement) χ3=D/2. VJ −0 χ4 =D/2+J ・Δθ2 cos θVJ
=j, ・Δθ2 sin θ (However, Δθ
2 is the angular displacement of the support column 12b) χ5 = (χ2 + χ4)/
2 =J-CO3(Δθ1+Δθ2)/2 V5=1-sinθ(Δθ2-ΔθI)/2Vs=y
s+χ5 (χ4-χ2)/ (yJ -12> =D/ (2tanθ)+l(Δθ
2−Δθ+ ) / (2sinθ) Therefore, since 02032=R2=χs 2+(Vs −V2 )2, R'=J'/A cos 2θ(Δθ1+Δθ2
)2+ (1/2tan θ) 2 [D+j
−cos θ(Δθ2−Δθri12...
・(1) By the way, since D2=(χ4-χ2)2+(VJ-V2)2, D'=D'+2DJ-cos θ(Δ
θz−iθ1)+42 ・cos' θ (Δθ2
-Δθ1)2+42・sin' θ (Δθ1 +Δ
θ2)2... (2) Therefore, since the sum of the second term and subsequent terms on the right side of equation (2) is zero, 2D-J-cosθ(Δθ2-Δθ1)+J' [c
os” θ(Δθ2−4θ1)2+ 5in2 θ(
Δθ1−Δθ2 ) 2] = C1...(3) From equations (1) and (3), R=CO3θ/ 2sinθ・D = D/ <2ta
nθ) ...... (4) That is, as is clear from equation (4), the rotation radius R of the tilting of the table 11 in this case is equal to the mounting interval between the elastic support columns 12a and 12b. and angle θ, and if the amount of displacement is small, the rotation center 03 becomes a fixed point.

In FIG. 1, when the drive unit 14 operates, the supporting columns 12a and 12b move as described above to perform tilting, but at this time, the other supporting columns 12c, 12c, which are arranged orthogonally to the west, 12d merely acts like a parallel spring and does not affect the tilting operation; on the other hand, when a driving force in the Y-axis direction is applied, this relationship is simply reversed and the same is true.

In this way, the tilting functions of the support columns are independent in the X and Y directions, and as a matter of course, the table is tilted in the 360° direction as a composite operation of these direction components, and the desired orientation is achieved. The tilting posture position can be finely adjusted.

A specific example of a support column suitable for the present invention is shown in FIG. The support column 12 can be made of various metal materials, and can have various elasticity and rigidity by combining materials and shapes. The one shown in Fig. 3(a) consists of the simplest columnar rod, and its cross-sectional shape may be circular, square, regular polygon, or other rectangular, and it has the highest rigidity against deformation forces from the lateral direction. Obtainable. The ones shown in FIGS. 3(b) and 3(c) have the same cross-sectional shape, but have transverse grooves 31 and 32 cut out in the upper and lower sides in directions perpendicular to each other, and the ones shown in FIG. 3(a) The rigidity is lower, and the shape change as shown in Figure 2 can be obtained using the groove part as a fulcrum, but the XY
Due to the difference in direction, the distance between the rotation supports will differ, and the rotation radius R will also differ slightly. The one shown in Fig. 3 (d>) has a similar cross-sectional shape with a circumferential groove 33 formed in the upper and lower parts, and the rigidity in all directions is reduced by the depth of the groove, and the rigidity in all directions is reduced in the 360° direction. 2, and it is possible to achieve tilting with no difference in rotation radius R between the X and Y directions.

FIG. 4 shows another embodiment of the present invention, and Table 4
1 is supported on a base 43 by a support column 42 so as to have a fixed rotation center in a horizontal plane (or vertical plane) without having a rotation pivot.

In this example, the drive units 44 and 45 are arranged facing each other, and by applying a drive force between both units to restrain the table 41 in a desired tilt position, the rigidity of the structure can be reduced only by the support columns. In addition, it is possible to obtain it by the drive unit as well. This configuration is based on the support column 4
It is advantageous that 2 is designed exclusively as an elastic support and rigidity can be separately provided.

FIG. 5 shows four supporting columns 5 parallel to the table 51.
2 is arranged with each inclination θ=O, and shows a case in which a fine movement table device for parallel movement with no sliding contact portion on the support portion is configured in combination with a drive unit in the X and Y directions.

Effects of the Invention 1 As described above, according to the present invention, the small displacement of the table is supported by the elastic deformation of the support column, so that the sliding effect is not affected by either the small parallel movement or the small rotational tilt. The table can be supported without contact friction and without hysteresis, and since stick-slip does not occur, it is possible to precisely determine the position, and when configuring a tailing table, the center of rotation can be set at one point. This also makes it possible to minimize XY shift correction during tilting indexing.

In addition, since the center of rotation in the case of a tilting table can be determined by the mounting position and mounting angle of the support column, there is also the advantage that the rotation mechanism can be designed independently of the rigidity required for the support structure.

In addition, since the present invention can simplify the structure, it is also possible to configure a composite fine movement table device by arranging an XY parallel movement table on a tailing table, for example.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing the main part of an embodiment of the present invention, FIG. 2 is an explanatory view showing the mechanism of tilting operation, and FIG.
Figures (a) to (d) are side views showing various specific examples of the support column, and Figure 4 is a sectional view showing the main parts of another embodiment of the present invention.
FIG. 5 is a perspective view showing a main part of still another embodiment of the present invention, and FIG. 6 is a sectional view showing a conventional example. 11: Tilting table movable part, 12a, 12
b, 12c, 12d: Support column, 13: Support base, 14: Drive unit, 15: Feed screw, 16: Plunger, 17: Operation no. 1゜Figure 6 B1 Figure 1 Figure 2

Claims (1)

[Claims] 1. In a fine-movement table device that moves the table slightly in order to finely adjust the tilt angle or position of a held object such as a workpiece or a measured object on the table, the table is supported on a support. A fine movement table device comprising, as a support member, a support column that elastically deforms in response to fine movement of the table. 2. The fine movement table device according to claim 1, in which a horizontal table is supported by a vertical support column. 3. The fine movement table device according to claim 1, in which a horizontal table is supported by an inclined support column. 4. The fine movement table device according to claim 2 or 3, wherein the table is supported by a plurality of support columns. 5. The fine movement table device according to claim 1, wherein the table is supported by a plurality of support columns parallel to each other, and the table moves minutely in parallel. 6. The table is supported from below by a plurality of support pillars that are inclined to face each other so as to intersect above the table with respect to the axial direction of the driving force, and this table is caused to move upwardly by the action of the driving force. The fine-movement table device according to claim 1, which performs minute rotational tilting around one point.