JP2009164245A - Tilt stage - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tilt stage making it possible to adjust the angle of tilt of an object in three dimensions with a simple structure. <P>SOLUTION: A first operating piece 8 is moved by a first linear actuator 4 in a perpendicular direction and a tilt table 2 tilts on a Y axis through an air film between a slide surface 2b and a support surface 3b. Further, a second operating piece 9 is moved by a second linear actuator 6 in a perpendicular direction and the tilt table 2 tilts on an X axis through an air film between the slide surface 2b and support surface 3b. Then an up and down movement of the first operating piece 8 and an up and down movement of the second operating piece 9 are combined to allow the tilt table 2 to tilt at various angles of tilt to a horizontal plane. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention particularly relates to a tilt stage used for tilt angle adjustment for bonding a semiconductor wafer.

As a conventional technique in such a field, there is JP-A-9-64094. In the tilt stage described in this publication, a substantially hemispherical stage (tilt table) fixed to the center of the lower surface of a flat plate (tilt table) and a recess for slidably locking the substantially hemispherical surface. A cradle (support table) having a (support surface) and a rectangular base plate for fixing the cradle are provided. A motor mounting bracket is provided on each side of the base plate, and a motor and a spring post forming a rotary actuator are mounted on each bracket. Cams for adjusting the tilt of the stage are provided on the rotation shafts of the respective motors, and these cams are brought into contact with the respective edge portions on the lower surface of the plate via balls. In addition, a spring post is attached to each side of the plate, and the spring is stretched between the spring post and the spring post provided on the bracket so that the cam is pressed against the ball. It comes to touch. With such a configuration, when each motor rotates independently, each side of the plate is inclined independently in the vertical direction in accordance with the rotation of the cam. Thereby, the tilt stage freely tilts the mounting stage provided on the upper surface of the plate and the mounted semiconductor chip (target object), and adjusts the tilt angle.
JP-A-9-64094

  Here, in the stage where the tilt angle is adjusted using a motor that forms a rotary actuator, the rotary motion must be converted into a vertical linear motion using a cam mechanism. There is a problem that the tilt angle of the target object (semiconductor chip) cannot be adjusted three-dimensionally unless it is complicated.

  An object of the present invention is to provide a tilt stage that can adjust a three-dimensional tilt angle of an object with a simple structure.

  The tilt stage according to the present invention is a tilt stage that adjusts the tilt angle of a mounted object, and has a mounting surface on which the object is mounted on the upper surface side, and a spherical sliding surface on the lower surface side. A tilt table, a support table having a spherical support surface that supports the sliding surface, a first operating piece having one end fixed to the tilt table, and one end fixed to the tilt table and extending in the vertical direction The second working piece and the first and second working pieces are vertically arranged around the central axis of the sliding surface at an angle other than 0 ° and 180 ° with respect to the first working piece. And first and second actuators that move in the direction.

  In this tilt stage, the first actuating piece and the second actuating piece are arranged on the tilt table at positions that make angles other than 0 ° and 180 ° around the central axis, respectively, and are independent by corresponding actuators. And can be moved in the vertical direction. Therefore, the tilt table drives each operating piece linearly by the linear operation of the actuator, so it tilts at various inclination angles with respect to the horizontal plane, and a simple structure is achieved by combining the operating piece and the actuator. Thus, the three-dimensional tilt angle adjustment of the object is realized.

  The position where the second working piece is disposed is preferably a position perpendicular to the first working piece around the central axis.

  And a third actuating piece having one end fixed to a support table rotatably supported around the central axis, and a third actuator for moving the third actuating piece in the horizontal direction. preferable. When the third operating piece is moved in the horizontal direction by the third actuator, the support table that supports the tilt table rotates about the central axis, and accordingly, the tilt table also rotates about the central axis. . Thereby, the tilt table is combined with the tilt angle adjustment by the movement of the first and second working pieces and the rotation angle adjustment by the movement of the third working piece, and further complicated adjustment is possible.

  Moreover, it is preferable that the 1st-3rd actuator is a bellows driven by supply and discharge | emission of gas. A semiconductor wafer as an example of an object is affected by heat and magnetism. However, by using a bellows that is driven by gas supply and discharge as an actuator, the tilt angle can be adjusted without affecting the semiconductor wafer by heat or magnetism compared to the case of using a motor that forms an electric actuator. Is possible.

  Moreover, it is preferable that the tilt table and the support table are connected by a rotation restricting leaf spring having elasticity in the vertical direction. The rotation regulating plate spring can prevent the tilt table from rotating around the central axis with respect to the support table as the first and second actuators are driven. Thereby, the accuracy of the tilt angle adjustment of the object can be improved.

  Moreover, it is preferable to further provide a moving mechanism for moving the support table in the vertical direction. Accordingly, the tilt table can be moved in the vertical direction together with the support table, and the height position of the tilt table can be adjusted in combination with the three-dimensional tilt angle adjustment of the object.

  An example of the moving mechanism is an air cylinder.

  With the tilt stage according to the present invention, it is possible to adjust the three-dimensional tilt angle of an object with a simple structure.

  Hereinafter, preferred embodiments of a tilt stage according to the present invention will be described in detail with reference to the drawings.

[First Embodiment]
As shown in FIGS. 1 to 4, the tilt stage 1 has a tilt table 2 having a mounting surface 2 a for mounting an object (not shown) such as a semiconductor wafer, and the tilt table 2 is slidable. And a support table 3 to support. In the tilt stage 1, the tilt table 2 is moved by first and second linear actuators (first and second actuators) 4 and 6, and the support table 3 is moved by a third linear actuator (third actuator) 7. The inclination angle adjustment and the rotation angle adjustment of the mounting surface 2a are performed by moving the position. As shown in FIG. 1, X and Y are 90 degrees on the horizontal plane, the vertical direction is defined as the Z direction, and X, Y, and Z are used when necessary.

  The tilt table 2 is a disk-shaped table, and has a flat placement surface 2a for placing an object on the upper surface side, and a convex spherical sliding surface 2b on the lower surface side. The central axis L in the vertical direction of the sliding surface 2 b coincides with the central axis of the tilt table 2.

  On the side surface 2c of the tilt table 2, a first operating piece 8 that protrudes from the central axis L in the X-axis direction and a second operating piece 9 that protrudes from the central axis L in the Y-axis direction are formed. The first and second operating pieces 8 and 9 are rectangular plates extending on the XY plane.

  The support table 3 is a disk-like table that is rotatably supported around the central axis L with respect to the upper surface 11a of the rectangular base plate 11. As shown in FIG. 2, a support surface 3 b having a concave spherical surface for supporting the sliding surface 2 b of the tilt table 2 is formed at a substantially central portion of the upper surface 3 a of the support table 3.

  Further, the support table 3 is embedded with a porous portion 3c so as to form a support surface 3b, and a large number of minute holes are formed in the support surface 3b. A pipe P1 is led out from the porous portion 3c and connected to an external air pressure source (not shown). The air pressure source supplies compressed air to the porous portion 3c, and the compressed air is blown against the sliding surface 2b from a number of holes in the support surface 3b. As a result, an air film is formed between the sliding surface 2b and the support surface 3b, and the sliding surface 2b is supported in a non-contact state without receiving resistance from the support surface 3b.

  As shown in FIG. 1, a third operating piece 12 that protrudes from the central axis L in the negative direction of the Y axis is formed on the side surface 3 d of the support table 3. The third operating piece 12 is a rectangular plate extending on the YZ plane.

  The first linear actuator 4 includes a support member 13 having a U-shaped cross section having a support piece 13a disposed above the first operating piece 8 and a support piece 13b disposed below, the support piece 13a and the first support piece 13a. A bellows actuator 14 extending between the first operating piece 8 and a bellows actuator 16 extending between the supporting piece 13 b and the first operating piece 8. The first operating piece 8 is sandwiched between the tip of the bellows actuator 14 and the tip of the bellows actuator 16. Further, the lower surface of the support piece 13 b is fixed to the upper surface 3 a of the support table 3.

  As shown in FIG. 3, the bellows actuator 14 includes a bellows 14 a that can be expanded and contracted in the vertical direction, and a disk-shaped operation plate 14 b that seals the opening on the lower end side of the bellows 14 a. The opening on the upper end side of the bellows 14a is sealed by being fixed to the support piece 13a. Thereby, the internal space 14c of the bellows actuator 14 is sealed by the bellows 14a, the support piece 13a, and the operation plate 14b, and the airtightness thereof is maintained.

  A shaft 14d extending upward is formed in the central portion of the operation plate 14b. The shaft 14d is movable in the vertical direction by being inserted into a guide hole 13d of a boss 13c provided in the support piece 13a. Yes. In addition, a hemispherical pressing portion 14e protruding toward the first operating piece 8 is formed in the central portion of the operating plate 14b, and this pressing portion 14e contacts the upper surface 8a of the first operating piece 8. By contacting, the force generated when the bellows actuator 14 is driven in the vertical direction can be transmitted to the first operating piece 8.

  A pipe P2 is led out from the internal space 14c of the bellows actuator 14, and is connected to a servo valve 14f provided outside. By controlling the servo valve 14f, the air in the internal space 14c can be supplied and discharged, and the amount of movement of the operating plate 14b in the vertical direction can be arbitrarily controlled in accordance with the change in the atmospheric pressure in the internal space 14c. can do.

  The bellows actuator 16 has the same configuration as the bellows actuator 14 described above, and the amount of movement of the operating plate 16b in the vertical direction can be arbitrarily controlled by controlling the servo valve 16f. Further, the pressing portion 16 e can transmit the force generated by the vertical driving of the bellows actuator 16 to the first operating piece 8 by contacting the lower surface 8 b of the first operating piece 8. The bellows actuator 16 includes a bellows 16a, an internal space 16c, and a shaft 16d, and the internal space 16c and the servo valve 16f are connected by a pipe P3.

  As shown in FIG. 3, the second linear actuator 6 includes a support member 18 having a U-shaped cross section having a support piece 18 a disposed above the second operating piece 9 and a support piece 18 b disposed below. The bellows actuator 19 extends between the support piece 18a and the second operation piece 9, and the bellows actuator 21 extends between the support piece 18b and the second operation piece 9. The second operating piece 9 is sandwiched between the tip of the bellows actuator 19 and the tip of the bellows actuator 21. Further, the lower surface of the support piece 18 b is fixed to the upper surface 3 a of the support table 3. The bellows actuators 19 and 21 have the same configuration as the bellows actuator 14.

  The third linear actuator 7 includes a support member 22 having a U-shaped cross section having a support piece 22a arranged in the X-axis direction of the third operating piece 12 and a support piece 22b arranged in the negative direction of the X-axis. The bellows actuator 23 extends between the support piece 22a and the third operation piece 12, and the bellows actuator 24 extends between the support piece 22b and the third operation piece 12. The third operating piece 12 is sandwiched between the tip of the bellows actuator 23 and the tip of the bellows actuator 24. The support member 22 includes a connecting portion 22 c that connects the support piece 22 a and the support piece 22 b, and the lower surface of the connecting portion 22 c is fixed to the upper surface 3 a of the support table 3. The bellows actuators 23 and 24 have the same configuration as the bellows actuator 14.

  As shown in FIG. 4, the support table 3 and the tilt table 2 are connected by an L-shaped rotation restricting plate spring 26 having elasticity in the vertical direction. The rotation restricting leaf springs 26 are arranged at four positions around the central axis L at right angles, and one end of the leaf spring 26 is screwed to the side surface 2c of the tilt table 2 so that the rotation restricting leaf spring 26 is The other end is screwed to the upper surface 3 a of the support table 3. The rotation restricting plate spring 26 can prevent the tilt table 2 from rotating around the central axis L with respect to the support table 3 when the first and second linear actuators 4 and 6 are driven. . Thereby, the precision of the inclination angle adjustment of the mounting surface 2a can be improved.

  Next, the operation of the tilt stage 1 will be described.

  First, the servo valve 14 f and the servo valve 16 f are simultaneously controlled to discharge air from the internal space 14 c of the bellows actuator 14 and supply air to the internal space 16 c of the bellows actuator 16.

  By supplying air, the atmospheric pressure in the internal space 16c increases, and the working plate 16b moves upward. Further, since the pressing portion 16e and the lower surface 8b of the first working piece 8 are in contact with each other, the first working piece 8 also moves upward with the movement of the working plate 16b.

  On the other hand, the air pressure in the internal space 14c decreases as the air is discharged. Further, since the pressing portion 14 e and the upper surface 8 a of the first operating piece 8 are in contact with each other, an upward force is also received from the bellows actuator 16 via the first operating piece 8. As described above, the operation plate 14b moves upward in accordance with the movement of the first operation piece 8 while supporting the first operation piece 8.

  As shown by a two-dot chain line in FIG. 2, the first operating piece 8 moves upward, and the tilt table 2 tilts around the Y axis via an air film between the sliding surface 2b and the support surface 3b. Will be. In the second linear actuator 6, similarly to the first linear actuator 4, the second operating piece 9 can be moved by tilting the tilt table 2 around the X axis by controlling the servo valve.

  As described above, the tilt table 2 is tilted at various tilt angles with respect to the horizontal plane by combining the vertical movement of the first working piece 8 and the vertical movement of the second working piece 9. Therefore, the combination of the first and second actuating pieces 8 and 9 and the first and second linear actuators 4 and 6 allows the three-dimensional object to be placed on the placement surface 2a with a simple structure. Tilt angle adjustment is possible.

  Further, by controlling the third linear actuator 7, the third operating piece 12 moves and the tilt table 2 rotates around the central axis L. As a result, the tilt table 2 is adjusted more complicatedly by combining tilt angle adjustment by movement of the first and second working pieces 8 and 9 and rotation angle adjustment by movement of the third working piece 12. Is possible.

  Further, for example, when a semiconductor wafer or the like is used as an object, by using a bellows actuator that is driven by air supply and discharge as a linear actuator, compared with a case where a motor or the like that forms an electric actuator is used, The tilt angle can be adjusted without the influence of magnetism.

[Second Embodiment]
As shown in FIGS. 5 to 8, the tilt stage 31 includes a tilt table 32 having a mounting surface 32 a for mounting an object (not shown) such as a semiconductor wafer, and the tilt table 32 is slidable. A support table 33 to be supported and an air cylinder 61 for moving the support table 33 in the vertical direction are provided. In the tilt stage 31, the tilt table 32 is moved by first and second linear actuators (first and second actuators) 34 and 36, and the support table 33 is moved by a third linear actuator (third actuator) 37. The inclination angle adjustment and the rotation angle adjustment of the placement surface 32a are performed by moving the position. The height position is also adjusted by the air cylinder (movement mechanism) 61. As shown in FIG. 5, X and Y are 90 degrees on the horizontal plane, the vertical direction is defined as the Z direction, and X, Y, and Z are used when necessary.

  The tilt table 32 is a disk-shaped table, and has a flat placement surface 32a for placing an object on the upper surface side and a convex spherical sliding surface 32b on the lower surface side. The central axis L in the vertical direction of the sliding surface 32 b coincides with the central axis of the tilt table 32.

  On the side surface 32c of the tilt table 32, an operation portion 38 having an L-shaped cross section is provided at a position in the X-axis direction when viewed from the central axis L. The actuating portion 38 is connected to the side surface 32c by a first actuating piece 38c protruding in the X-axis direction from the central axis L at a position lower than the support table 33, and an end of the first actuating piece 38c on the central axis L side. A connecting portion 38d that protrudes downward. Further, as shown in FIG. 6, the side surface 32 c is provided with an L-shaped actuating portion 39 at a position in the Y-axis direction when viewed from the central axis L. The actuating part 39 connects the second actuating piece 39c protruding in the Y-axis direction from the central axis L at a position lower than the support table 33, and the end part on the central axis L side of the second actuating piece 39c connected to the side face 32c. And a connecting portion 39d protruding downward. The first and second operating pieces 38c and 39c are both rectangular plates extending on the XY plane.

  The rectangular support table 33 is formed at the upper end of a rod 62 provided in the air cylinder 61. As shown in FIG. 7, a support surface 33 b having a concave spherical surface for supporting the sliding surface 32 b of the tilt table 32 is formed at a substantially central portion of the upper surface 33 a of the support table 33.

  The support table 33 is embedded with a porous portion 33c so as to form a support surface 33b, and a large number of minute holes are formed in the support surface 33b. A pipe P31 is led out from the porous portion 33c and connected to an external air pressure source (not shown). The air pressure source supplies compressed air to the porous portion 33c, and the compressed air is blown against the sliding surface 32b from a number of holes in the support surface 33b. As a result, an air film is formed between the sliding surface 32b and the support surface 33b, and the sliding surface 32b is supported in a non-contact state without receiving resistance from the support surface 33b.

  As shown in FIG. 5, an operating portion 42 having an L-shaped cross section is provided on the side surface 33 d of the support table 33 at a position opposite to the Y axis when viewed from the central axis L. The operating portion 42 includes a connecting portion 42d that protrudes from the central axis L in the negative direction of the Y axis, and a third operating piece 42c that protrudes downward from the free end of the connecting portion 42d. The third operating piece 42c is a rectangular plate extending on the YZ plane.

  The first linear actuator 34 includes a support member 43 having a support piece 43a disposed above and a support piece 43b disposed below the first operation piece 38c, a support piece 43a, and a first operation piece 38c. And a bellows actuator 46 extending between the support piece 43b and the first actuating piece 38c. The first operating piece 38 c is sandwiched between the tip of the bellows actuator 44 and the tip of the bellows actuator 46. The support member 43 has a rectangular plate-shaped connecting portion 43 c that connects the support pieces 43 a and 43 b, and the side surface of the connecting portion 43 c on the support table 33 side is fixed to the support table 33.

  As shown in FIG. 8, the bellows actuator 44 includes a bellows 44 a that can be expanded and contracted in the vertical direction, and a disk-shaped operation plate 44 b that seals an opening on the lower end side of the bellows 44 a. The opening on the upper end side of the bellows 44a is sealed by being fixed to the support piece 43a. Thus, the internal space 44c of the bellows actuator 44 is sealed by the bellows 44a, the support piece 43a, and the operation plate 44b, and the airtightness thereof is maintained.

  A shaft 44d extending upward is formed in the central portion of the operation plate 44b. The shaft 44d is movable in the vertical direction by being inserted into a guide hole 43d of a boss 43c provided in the support piece 43a. Yes. A hemispherical pressing portion 44e that protrudes toward the first operating piece 38c is formed at the center of the operating plate 44b, and this pressing portion 44e contacts the upper surface 38a of the first operating piece 38c. By contacting, the force generated when the bellows actuator 44 is driven in the vertical direction can be transmitted to the first operating piece 38c.

  A pipe P32 is led out from the internal space 44c of the bellows actuator 44 and is connected to a servo valve 44f provided outside. By controlling the servo valve 44f, the air in the internal space 44c can be supplied and discharged, and the amount of movement of the operating plate 44b in the vertical direction can be arbitrarily controlled in accordance with the change in the atmospheric pressure in the internal space 44c. can do.

  The bellows actuator 46 also has the same configuration as the bellows actuator 44 described above, and the amount of movement of the operating plate 46b in the vertical direction can be arbitrarily controlled by controlling the servo valve 46f. Further, the pressing portion 46e can transmit the force generated by the vertical drive of the bellows actuator 46 to the first operating piece 38c by contacting the lower surface 38b of the first operating piece 38c. The bellows actuator 46 includes a bellows 46a, an internal space 46c, and a shaft 46d, and the internal space 46c and the servo valve 46f are connected by a pipe P33.

  As shown in FIG. 6, the second linear actuator 36 includes a support member 48 having a U-shaped cross section having a support piece 48 a disposed above the second operation piece 39 c and a support piece 48 b disposed below. The bellows actuator 49 extends between the support piece 48a and the second operation piece 39c, and the bellows actuator 51 extends between the support piece 48b and the second operation piece 39c. The second operating piece 39 c is sandwiched between the tip of the bellows actuator 49 and the tip of the bellows actuator 51. The support member 48 has a rectangular plate-shaped connecting portion 48 c that connects the support piece 48 a and the support piece 48 b, and the side surface of the connecting portion 48 c on the support table 33 side is fixed to the support table 33. The bellows actuators 49 and 51 have the same configuration as the bellows actuator 44.

  As shown in FIG. 5, the third linear actuator 37 has a cross section having a support piece 52a arranged in the X-axis direction of the third operating piece 42c and a support piece 52b arranged in the negative direction with respect to the X-axis. A U-shaped support member 52, a bellows actuator 53 extending between the support piece 52a and the third operation piece 42c, and a bellows actuator extending between the support piece 52b and the third operation piece 42c. 54. The third operating piece 42 c is sandwiched between the tip of the bellows actuator 53 and the tip of the bellows actuator 54. The support member 52 has a rectangular plate-like connecting portion 52 c that connects the supporting piece 52 a and the supporting piece 52 b, and the connecting portion 52 c is fixed to the upper surface 11 a of the base plate 11. The bellows actuators 53 and 54 have the same configuration as the bellows actuator 44.

  As shown in FIG. 7, the rod 62 of the air cylinder 61 has a disk-like piston 62a having a diameter substantially the same as the inner circumference of the cylindrical body 61a at the lower end. In the internal space of the cylindrical body 61a, pipes P35 and P34 are led out from the internal space 61b above the piston 62a and the internal space 61c below.

  Next, the operation of the tilt stage 31 will be described.

  First, the servo valve 44 f and the servo valve 46 f are simultaneously controlled to discharge air from the internal space 44 c of the bellows actuator 44 and supply air to the internal space 46 c of the bellows actuator 46.

  By supplying air, the atmospheric pressure in the internal space 46c increases, and the working plate 46b moves upward. Further, since the pressing portion 46e and the lower surface 38b of the first operating piece 38c are in contact with each other, the first operating piece 38c also moves upward with the movement of the operating plate 46b.

  On the other hand, the air pressure in the internal space 44c decreases as the air is discharged. Furthermore, since the pressing portion 44e and the upper surface 38a of the first operating piece 38c are in contact with each other, an upward force is also received from the bellows actuator 46 via the first operating piece 38c. As described above, the operation plate 44b moves upward in accordance with the movement while supporting the first operation piece 38c.

  As shown by a two-dot chain line in FIG. 7, the first working piece 38c moves upward, and the tilt table 32 tilts around the Y axis via an air film between the sliding surface 32b and the support surface 33b. Will be. Also in the second linear actuator 36, similarly to the first linear actuator 34, the second operating piece 39c can be moved by controlling the servo valve, and the tilt table 32 can be tilted around the X axis.

  Further, the rod 62 moves upward by opening the internal space 61b of the air cylinder 61 via the pipe P35 and supplying air from the pipe P34 to the internal space 61c. Further, air is supplied from the pipe P35 to the internal space 61b of the air cylinder 61, and the internal space 61c is opened via the pipe P34, whereby the rod 62 moves downward. As a result, the tilt table 32 moves in the vertical direction via the support table 33.

  As described above, the tilt table 32 is tilted at various tilt angles with respect to the horizontal plane by combining the vertical movement of the first working piece 38c and the vertical movement of the second working piece 39c. Accordingly, the combination of the first and second actuating pieces 38c and 39c and the first and second linear actuators 34 and 36 allows the three-dimensional object to be placed on the placement surface 32a with a simple structure. Tilt angle adjustment is possible.

  Further, by controlling the third linear actuator 37, the third operating piece 42c moves, and the tilt table 32 rotates around the central axis L. As a result, the tilt table 32 is further complicatedly adjusted by combining the tilt angle adjustment by the movement of the first and second working pieces 38 and 39 and the rotation angle adjustment by the movement of the third working piece 42c. Is possible.

  Further, for example, when a semiconductor wafer or the like is used as an object, by using a bellows actuator that is driven by air supply and discharge as a linear actuator, compared with a case where a motor or the like that forms an electric actuator is used, The tilt angle can be adjusted without the influence of magnetism.

  Further, the tilt table 32 can be moved in the vertical direction together with the support table 33 by the air cylinder 61, and the height position of the tilt table 32 can be adjusted in combination with the three-dimensional tilt angle adjustment of the object. Also make it possible.

It is a perspective view of the tilt stage which concerns on 1st Embodiment. It is sectional drawing which follows the II-II line | wire of FIG. FIG. 3 is a partially enlarged view of the linear actuator of FIG. 2. It is a top view of FIG. It is a perspective view of the tilt stage which concerns on 2nd Embodiment. It is the perspective view which looked at the tilt stage of FIG. 5 from another angle. It is sectional drawing which follows the VII-VII line of FIG. It is the elements on larger scale of the linear actuator of FIG.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1,31 ... Tilt stage, 2, 32 ... Tilt table, 2a, 32a ... Mounting surface, 2b, 32 ... Sliding surface, 3,33 ... Support table, 3b, 33b ... Support surface, 4,44 ... 1st Linear actuator (first actuator) 6, 36 ... second linear actuator (second actuator), 7, 37 ... third linear actuator (third actuator), 8, 38c ... first operating piece , 9, 39c... Second working piece, 12, 42c... Third working piece, 26... Rotation regulating leaf spring, 61.

Claims (7)

In the tilt stage that adjusts the tilt angle of the mounted object,
A tilt table having a placement surface on which the object is placed on the upper surface side, and a spherical sliding surface on the lower surface side;
A support table having a spherical support surface for supporting the sliding surface;
A first working piece having one end fixed to the tilt table;
One end is fixed to the tilt table, and is arranged at a position that makes an angle other than 0 ° and 180 ° with respect to the first working piece around the central axis of the sliding surface extending in the vertical direction. A second working piece;
First and second actuators for moving the first and second actuating pieces in the vertical direction, respectively;
A tilt stage comprising:   2. The tilt stage according to claim 1, wherein the second operating piece is arranged at a position perpendicular to the first operating piece around the central axis. A third operating piece having one end fixed to the support table rotatably supported around the central axis;
A third actuator for moving the third operating piece in a horizontal direction;
The tilt stage according to claim 1, further comprising:   The tilt stage according to any one of claims 1 to 3, wherein the first to third actuators are bellows that are driven by supply and discharge of gas.   The tilt stage according to any one of claims 1 to 4, wherein the tilt table and the support table are connected by a rotation restricting leaf spring having elasticity in a vertical direction.   The tilt stage according to any one of claims 1 to 5, further comprising a moving mechanism for moving the support table in a vertical direction.   The tilt stage according to claim 6, wherein the moving mechanism is an air cylinder.

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