JP4740605B2 - Gas control rotary movement device and gas control actuator - Google Patents

Description

The present invention relates to a gas-controlled rotary movement device and a gas control actuator, and more particularly to a gas-controlled rotary movement device that moves a table in a plane or rotates around an axis and a gas control actuator that can be used therefor.

  In order to hold and move an object for positioning, a table moving / rotating mechanism is widely used. For example, in semiconductor manufacturing, a wafer or the like is held on a table by an exposure apparatus or a bonding apparatus, and work is performed under precise positioning. Here, precise movement in the X-axis and Y-axis directions and around the Z-axis are performed. Θ rotation is performed.

  Among these table movement and rotation mechanisms, a so-called XY table movement mechanism is used for precise movement in the X-axis and Y-axis directions. For example, an X table movable in the X-axis direction and a movement in the Y-axis direction. It is well known that two possible Y tables are stacked and moved by a precision motor.

In addition to this, the gas system control actuator there is no noise or vibration of the problem by the motor is used. The air system control actuator, in which a so-called cylinder-piston mechanism, that the gas chamber is formed around the cylinder interior of the piston by the cylinder cooperating with the piston to control the gas pressure supplied to each gas chamber The piston is moved precisely. For example, Patent Document 1 discloses a fluid pressure actuator that uses a fluid pressure servo mechanism and controls a fluid pressure to drive a moving body. By connecting the table to the piston of the air system control actuator, can be obtained table feed mechanism driven by the gas pressure.

  In many cases, the table rotating mechanism uses a circular rotating table and its rotary shaft is driven by a precise rotating motor. In order to improve accuracy, a motor may be directly connected to the rotating shaft, or a precise reduction mechanism may be used.

JP-A-57-5102

  Thus, the XYθ moving and rotating mechanism using a precision motor is widely used. It has also been proposed to use a gas control actuator to suppress vibrations and achieve high accuracy. However, since the gas control actuator is basically a linear mechanism, as represented by a so-called cylinder / piston mechanism, the θ rotation of the table cannot be realized as it is.

  Therefore, there is a demand for a precise XYθ moving and rotating mechanism using a gas control actuator that generates less electromagnetic noise, vibration, and noise in addition to low contamination.

  An object of the present invention is to provide a gas-controlled rotational movement device and a gas-controlled actuator that enable θ rotation of a table. Another object is to provide a gas control rotary movement device and a gas control actuator that enable XYθ positioning of a table.

In addition, the gas-controlled rotational movement device according to the present invention has a main body portion that is a base and a polygonal shaft, and is a table that is movable with respect to the main body portion in a plane perpendicular to the axial direction of the polygonal axis. When, a plurality of driving portions provided corresponding to the respective sides of the polygon axis of the table, each of the drive unit, as a movable body that moves in conjunction toward the polygonal shaft, the bottom surface the has a first movable member having a spherical seat on the tip confronts to the body portion, confronts the side distal end surface corresponding to the polygonal shaft, the curved bottom surface corresponding to the spherical seat of the first movable body and a second movable member, wherein the corresponding said side of the polygon shaft as a gas receiving surface, wherein the polygonal through gas supplied between the distal end surface and the gas receiving surface of the second movable member a plurality of gas control driver you drive the shaft without contact, the respective gas systems Controls the driving of the driving unit cooperatively, or the plane movement of the table and a control unit including at least one first control rotation of any angle around the axis of the polygonal shaft, each gas control driving unit, the gap between the bottom surface of the first movable member and the body portion, the gap between the spherical seat and the bottom surface of the second movable member of the first movable body, and the and the front end surface of the second movable member comprises a gas supply passage for supplying the respective gas into the gap between the gas receiving surface, wherein the control unit, the gas pressure and gap amount adjustment gas supplied to the gas supply channel controls as pressure, while balanced with the pressing force received from the other of the gas control driver, amount of clearance between the bottom surface of the first movable member and the body portion, the said spherical seat of said first movable member amount of clearance between the bottom surface of the second movable member, and the distal end surface of the second movable member and Adjust the amount of clearance between the serial gas receiving surface, characterized in that to the table is a small rotation around the minute movement or the axis of the plane.

In addition, the gas-controlled rotational movement device according to the present invention has a main body portion that is a base and a polygonal shaft, and is a table that is movable with respect to the main body portion in a plane perpendicular to the axial direction of the polygonal axis. And a plurality of driving units respectively provided corresponding to each side of the polygonal axis of the table, each driving unit including a guide unit provided in the main body unit and an axial direction of the guide unit As a plurality of movable bodies that are guided and moved in association with the polygonal axis, a first movable body having a bottom surface that receives a control gas pressure for coarse driving from the bottom side of the guide portion and a spherical seat at the tip end. When the sides of the polygonal shaft as a gas receiving surface is disposed between the said gas receiving surface first movable member, the tip is at the front end surface, the spherical seat of the bottom is the first movable member and a second movable member having a corresponding curved surface, between the gas-receiving surface and the tip surface A plurality of gas control driving units that drive the polygon shaft in a non-contact manner through the supplied gas, and driving of the gas control driving units are cooperatively controlled, and the in-plane movement of the table or the A control unit including control of at least any one of rotations of an arbitrary angle around the axis of a polygonal axis, and each gas control driving unit is configured as a gas for coarsely driving the first movable body, a control gas pressure supply port for supplying a gas having a controlled gas pressure toward the bottom surface of the first movable member, the second movable member against the first movable member as the gas for driving minute movement, said control gas pressure the tip clearance, and the second movable member between the gas having a gap amount adjustment pneumatic independent gas pressure, and the spherical seat and the bottom surface of the second movable member of the first movable body and linking gap Niso respectively supplied between the surface and said gas receiving surface Includes a body supply path, wherein the control unit is independent of the coarse drive of the first movable member, wherein by controlling the gap amount adjustment gas pressure supplied to the interconnected porosity material feeding passage, the other of said while balance the pressing force received from the gas control driver, the said spherical seat of said first movable member and the amount of clearance between the bottom surface of the second movable member, and said distal end surface of the second movable member gases characterized in that for the adjusting the gap amount small rotation around the minute movement or the axis of the plane of the table between the receiving surface.

  Moreover, the gas-controlled rotational movement apparatus according to the present invention preferably includes a sensor that detects the rotational movement of the table and outputs it to the control unit.

The gas control actuator according to the present invention is a main body that is a base for a moving object, and a movable part that is provided to face the moving object, and moves in conjunction with the moving object. a plurality of movable bodies, a first movable body bottom has a spherical seat on the tip confronts to the body portion, confronts the distal end face on the moving object, a bottom surface corresponding to the spherical seat of the first movable body curved And a second movable body having a gas receiving surface as a surface of the moving object, and the moving object via a gas supplied between the tip surface of the second movable body and the gas receiving surface. A movable part that drives an object in a non-contact manner, a gap between the main body part and the bottom surface of the first movable body, and a gap between the spherical seat of the first movable body and the bottom surface of the second movable body , and the gas receiving the said front end surface of the second movable member And a gas supply channel for supplying gas, respectively, the gas said moving object and said movable portion while compressing the gas in the respective gap towards the receiving surface and pressing force generating unit for pressing into the gap between the the gas pressure supplied to the gas supply passage to control a gap amount adjustment pneumatic, while balanced with the pressing force, amount of clearance between the bottom surface of the first movable body and the main body portion, said first movable member amount of clearance between the spherical seat and the bottom surface of the second movable body, and the moving object by adjusting the amount of clearance between the tip surface and the gas receiving surface of the second movable member And a control unit that performs micro movement.

The gas control actuator according to the present invention includes a main body that is a base for a moving object, a guide provided in the main body, and an axial direction of the guide that is guided toward the moving object. a movable unit that moves in conjunction Te, a first movable member having a spherical seat on the bottom and the tip receiving control gas pressure for coarse drive, the surface of the moving object as a gas receiving surface, the gas disposed between the and the receiving surface first movable member, the tip end surface confronts the gas receiving surface, and a second movable member which bottom has a curved surface corresponding to the spherical seat of the first movable body, A movable portion that drives the moving object in a non-contact manner via a gas supplied between the tip surface and the gas receiving surface, and a bottom surface of the guide portion, the coarse movement of the first movable body A gas having the control gas pressure as the gas to be driven is the first movable And supplying control gas pressure supply port toward the bottom of the first against the movable member and the second movable member as a gas to drive fine movement, the gap amount adjustment gas in the control gas pressure independently of the gas pressure a gas having a pressure, the gap between the spherical seat and the bottom surface of the second movable member of the first movable body, and the gap between the front end surface of the second movable member and said gas receiving surface the interconnected porosity-supplying path for supplying each said toward said gas receiving surface with the gas the moving object while compressing the respective gap and the movable portion and the pressing force generating unit for pressing the said of said first movable member independently of the coarse drive, the controls interconnected porosity body the gap amount adjusting gas pressure supplied to the supply passage, wherein while balanced with the pressing force, the second movable member and the spherical seat of the first movable body air gap amount between the bottom of, and with the front end surface of the second movable member wherein Characterized in that it comprises a control unit for fine movement of the moving object by adjusting the amount of clearance between the receiving surface.

  With the above configuration, the table has a polygonal axis, and a driving force by gas pressure is given to each side of the table, and the table moves and rotates around the axis by cooperation of the driving force given to each side of the polygonal axis Rotate at any angle. Therefore, the table can be moved in the plane or rotated by the gas control actuator.

  Further, a spherical movable body having a curved surface corresponding to the spherical seat of the guide is used, and the gas supplied to the gap between the spherical seat and the spherical movable body and the gap between the tip surface of the spherical movable body and the gas receiving surface, respectively. The pressure is controlled and the table is rotated slightly by adjusting the gap amount between the tip surface of the spherical movable body and the gas receiving surface while balancing with the pressing force received from the other gas control driving unit. Precise rotation of the table is possible. Further, the fine movement or fine rotation is smoothly performed by the effect of the spherical seat.

  In addition, a spherical seat is provided at the tip of the first movable body, and the bottom surface portion of the second movable body has a curved surface corresponding thereto, and the first movable body is independent of the gas pressure supplied to the first movable body. What is the driving of the first movable body by supplying another gas pressure to the gap between the body and the second movable body and the gap between the gas receiving surface of the polygonal axis and the tip surface of the second movable body? Independently, the other gas pressure is controlled, and the table is made minute by adjusting the gap between the gas receiving surface and the distal end surface of the second movable body while balancing with the pressing force received from the other gas control drive unit. Rotate. Therefore, the first movable body with a large amount of movement and the second movable body with a small amount of movement can be combined to widen the amount of movement from coarse movement to fine movement, and the rectilinear driving force can be smoothly moved or rotated by the spherical seat. Can be converted.

  Moreover, since the sensor which detects the rotational movement of a table and outputs it to a control part is provided, a table can be rotated with sufficient precision.

  Further, since the control unit performs control to move the table to an arbitrary position in the plane, XYθ positioning by the gas control actuator is possible.

  As described above, according to the gas-controlled rotary moving device and the gas-controlled actuator according to the present invention, the table can be rotated by θ. Further, according to the gas control rotary movement device and the gas control actuator according to the present invention, the XYθ positioning of the table is possible.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a configuration diagram of the gas-controlled rotary moving device 10, FIG. 1 (a) is a plan view, and a cross-sectional view along the line BB is shown in FIG. 1 (b). The gas-controlled rotational movement device 10 moves relative to the main body 12 and the main body 12 in the XY plane shown in FIG. 1 and can rotate around the Z axis, and a plurality of gases provided in the main body 12. The control drive unit 100 is attached to the table 30 and includes a sensor 40 and a measurement unit 42 for detecting the rotation angle and movement position of the table 30, and a control unit 50 for controlling the overall operation of these elements. The In FIG. 1, four gas control drive units 100 are provided corresponding to each side of the rectangular shaft 32 of the table 30, and the drive axis directions of the gas control drive units 100 facing each other are arranged so as to have an offset. The

The main body 12 is a base having a function of supporting the table 30 with a control gas so as to be movable in the XY plane and rotatable about the Z axis. The main body 12 has a substantially cubic shape, and has a substantially rectangular support hole 14 that supports the rectangular shaft 32 of the table 30 at the center. In the main body 12, four gas control driving units 100 are provided toward the support hole 14. Since the inner surface of the support hole 14 and the upper and lower surfaces of the main body 12 have a function of supporting the table 30 with gas pressure, the surfaces thereof are processed to be flat. The main body 12 can be obtained by processing a metal or ceramic block in consideration of vibration resistance. It can also be obtained by assembling a plurality of members.

Table 30 has a shape with a rectangular shaft 32 is larger than the rectangular stage 34 above and below the rectangular shaft 32, between the supporting hole 14 of the rectangular shaft 32 and the main body portion 12, the back surface and the body portion of the upper and lower stage 34 12 is a member supported by the gas pressure between the upper and lower surfaces of 12. The table 30 has a function of receiving the driving force by the gas pressure from the corresponding gas control driving unit 100 with each side of the rectangular shaft 32 as a gas receiving surface, and is generated by the cooperation of the plurality of driving forces. It has a function of rotating within the range of the support hole 14 of the main body 12 by the rotational torque with respect to the rectangular shaft 32. Further, the back surface of the stage 34 faces the upper and lower surfaces of the main body portion 12 and is supported by a gas bearing mechanism, as will be described later, though not shown in FIG. Thus, the table 30 is rotatably supported by the main body portion 12 without contact. Such a table 30 can be obtained by combining a rectangular plate made of metal or ceramic having a flattened surface and a rectangular shaft.

  An appropriate reaction force mechanism (not shown) is provided between the main body 12 and the table 30 as necessary. The reaction force mechanism enables the rotation of the table 30 to be controlled when each gas control driving unit 100 of the main body 12 drives the table 30. For example, as shown in FIG. 1, if all the four gas control driving units 100 give the same amount of driving force to the table 30, the table 30 will be bent until it hits the wall surface of the support hole 14 unless there is an appropriate restoring force. Continue to rotate clockwise. By providing the reaction force mechanism, predetermined rotation control can be performed in balance with the driving force. As will be described later, depending on the arrangement of the plurality of gas control driving units 100, a reaction force can be generated by the interaction of the gas control driving units 100 facing each other. In that case, a special reaction force mechanism is omitted. You can also

  The sensor 40 and the measurement unit 42 have a function of detecting a rotation angle, a movement position, and the like of the table 30 and outputting the detected value to the control unit 50. Since the control unit 50 itself has the function of positioning the table 30 with high accuracy, the sensor 40 and the measurement unit 42 are required to have more accuracy than when the control unit 50 performs open loop control. It is efficient to use for this. As the sensor 40 and the measurement unit 42, a non-contact measurement system is preferable. For example, a system in which a mirror is attached to the stage 34 and position displacement and angle change are measured by a laser length measuring device can be used.

  The control unit 50 has a function of controlling the operations of the four gas control driving units 100 and applying the rotation torque to the rectangular shaft 32 of the table 30 to rotate the table 30 by a desired angle. Along with the rotational torque, a propulsive force for moving in the XY plane can be superimposed on the rectangular shaft 32 and the table 30 can be moved to a desired position in the XY plane and rotated. Specifically, it has a function of executing the following procedure. That is, the amount of displacement and the amount of rotation instructed from the outside are acquired, and the amount of movement and the driving force required for each of the four gas control drive units 100 are obtained according to the amount of displacement and the amount of rotation acquired next. And the control gas pressure which should be supplied to the gas control drive part 100 in order to obtain the drive force is each calculated | required by the predetermined method. Next, a gas supplied from a gas source (not shown) is adjusted using a precision gas pressure valve or the like to generate each control gas pressure. Each generated control gas pressure is supplied to a corresponding gas control drive unit 100.

The function of the control unit 50 will be described with an example. In FIG. 1, the rectangular axis 32 of the table 30 is a square axis, and the drive axis directions of the four gas control drive units 100 are perpendicular to the surfaces of the sides of the square axis, and the drive axes of the gas control drive unit 100 facing each other. The directions shall have an offset of 10 cm from each other. Now, if it is desired to rotate the table 30 by Δθ = tan ⁻¹ (1/100), each gas control driving unit 100 may push the surface of each side of the rectangular shaft 32 by 1 mm. Therefore, the control unit 50 obtains a propulsive force required for each gas control driving unit 100 to push the rectangular shaft 32 of the table 30 by 1 mm from the moment of inertia of the table 30 and supplies a gas pressure corresponding to the propulsive force. To control.

In addition to this, when it is desired to move the table 30 by 10 μm in the + X direction, the two gas control drive units 100 whose drive shaft directions are the Y axes are left as they are, and each of the two gases whose drive shaft directions are the X axes are left as they are. One propulsive force is increased for the control drive unit 100. That is, the thrust necessary for pushing the rectangular shaft 32 of the table 30 by +10 μm is obtained from the moment of inertia of the table 30, and the gas pressure corresponding to the thrust is added to the gas pressure necessary for the rotation. , To the gas control drive unit 100 having the drive axis direction in the + X direction. In this way, the table 30 can be moved by 10 μm in the + X direction and rotated by Δθ = tan ⁻¹ (1/100).

Thus, the control unit 50 in accordance with the method to a predetermined, desired amount of displacement is calculated each control gas pressure corresponding to the rotation amount, because it produces this, each gas control driver by so-called open loop control 100 To control the operation. When it is desired to perform positioning including rotation with better accuracy, the actual displacement and rotation information of the table 30 is supplied to the control unit 50 using the sensor 40 and the measurement unit 42 as described above, and the closed loop is used. It can be a control.

  The gas control drive unit 100 drives the movable unit guided by the guide unit by gas pressure, and the front end surface of the movable unit faces the corresponding side of the rectangular shaft 32 of the table 30 so that the driving force is applied to the rectangular shaft 32. This is a gas control actuator having a function of giving. Here, the distal end surface of the movable portion does not directly contact the rectangular shaft 32, and the driving force is transmitted by gas during that time. That is, gas is ejected from the front end surface of the gas control drive unit 100, and the corresponding side of the rectangular shaft 32 is a gas receiving surface that receives the gas. Various configurations of the gas control drive unit are possible depending on the gas pressure for driving the movable unit, the gas ejected from the tip of the movable unit, the structure of the movable unit, etc., but the configuration suitable for rotationally driving the table below Some details of the gas control drive unit will be described. Any of these various gas control drive units can be used depending on the performance required for the gas controlled rotary movement device, for example, the accuracy of rotational movement and positioning, the possible range of rotational movement, and the like. Hereinafter, only the configuration of the peripheral portion of the gas control drive unit in the gas control rotary movement device will be described. The other elements described in FIG. 1 can be used. In the following, the same elements as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted.

Example 1 is not an embodiment of the present invention, but is one of reference examples for reference of the present invention. FIG. 2 is a diagram showing a configuration of a ram type gas control drive unit 110 using what is called a ram type actuator in which there is no piston rod or the like in a cylinder / piston mechanism and there is only a movable part in a guide. It is. The ram type gas control drive unit 110 includes a guide 112 provided in the main body 12 and a movable body 114 that is guided by the guide 112 and is movable in the axial direction thereof. The guide 112 has a cylindrical inner wall, and the movable body 114 has a cylindrical shape. The guide 112 is provided in the main body 12. Specifically, the bottom plate portion of the guide 112 can be a part of the casing of the main body 12, a cylindrical member can be attached thereto, and the portion can be used as the guide 112. .

In addition, the relationship between the shape of the guide 112 and the shape of the movable body 114 may be any shape corresponding to each other that can be smoothly moved, and in addition to a cylindrical shape, a combination having a cross-sectional shape such as a rectangle or a polygon It may be. The same applies to the configuration of the gas control drive unit in other forms described below.

  At the bottom of the guide 112, a gas chamber 116 is provided through which a control gas pressure from the control unit 50 is introduced from a control gas pressure supply port indicated by CP1. Also, what is indicated by SB on the inner wall of the guide 112 is a gas supply port for the gas bearing for jetting gas toward the outer peripheral wall of the movable body 114 and causing the movable body 114 to float from the inner wall of the guide by the gas bearing action. , EX is the exhaust port. In the following, similar symbols are used.

  One end of the gas supply path 118 provided through the center of the movable body 114 opens to the gas chamber 116, and the other end opens to the distal end portion 122 of the movable body 114 via the throttle portion 120. The restrictor 120 is for smoothing the flow of gas ejected toward the gas receiving surface 124 with the corresponding side of the rectangular shaft 32 of the table 30 as the gas receiving surface 124. In the ram type gas control drive unit 110 having such a configuration, the control gas pressure supplied under the control of the control unit 50 is introduced into the gas chamber 116, and the movable body 114 is axially moved in accordance with the gas pressure. The driving force to move is given. At the same time, the gas introduced into the gas chamber 116 passes through the gas supply path 118 and is ejected from the distal end portion 122 of the movable body 114 toward the gas receiving surface 124 of the rectangular shaft 32 via the throttle portion 120. Therefore, the movable body 114 can transmit the driving force to the rectangular shaft 32 without contacting the rectangular shaft 32.

FIGS. 3A and 3B are diagrams showing two examples that are preferable as the aperture portion. In FIGS. 3 and 4 for explaining an example of the aperture section, the same elements as those in FIGS. 1 and 2 will be described using different reference numerals. FIG. 3A shows a parallel gap stop 70 provided in the pocket opening 64 of the movable body 60. During the parallel gap aperture 70 includes an annular plate 72 having a central hole in a donut shape, an annular plate 72 and the outer shape same disk 74 is arranged in a narrow parallel gaps, flowing between the parallel gap gas The flow is rectified and the flow is formed without disturbance. The parallel gap is, for example, a case where the gas pressure supplied to the gas supply path 62 is 0.5 Mpa, the flow rate is 30 m / sec, and this is a laminar flow having a flow rate of 300 m / sec by restriction, and 50 μm is preferable. The length of the parallel gap between the annular plate 72 and the circular plate 74 at that time is desirably sufficiently long with respect to 50 μm. For example, it can be about 5-10 mm.

  In this way, by forming the gas flowing through the throttle portion without turbulence by the rectifying action of the parallel gap throttle, it is possible to suppress turbulent flow, vortex flow, etc. that occur when the gas is throttled by, for example, an orifice throttle generally used as a throttle. . In particular, it is possible to suppress a shock wave generated from the edge of the orifice or the like when handling a high-pressure and high-speed gas. Therefore, in the gas pressure control, the influence of such noise can be reduced, and the controllability of the gas control rotary movement device 10 can be improved.

  FIG. 3B is a diagram showing another example of the throttle portion in which the porous material 76 is disposed in the pocket opening 64. Also in this case, the gas flowing in the throttle portion can be formed without disturbance by the rectifying action of the porous micropores.

Figure 4 is a diagram showing an example of other throttle portion which can be used, (a) represents a self-formed aperture 78 to provide a simple narrow opening towards the object 66 you eject gas. (B) is the surface stop 80 which provides a very shallow groove | channel on the surface radially from an opening toward an outer peripheral side. (C) is a pocket restrictor 82 that narrows the gas supply path 62 and provides shallow grooves radially on the gas receiving wall 69 facing the gas receiving surface 68 of the object 66 from the opening toward the outer peripheral side. The depth of the very shallow groove is preferably smaller than the gap between the gas receiving wall 69 and the gas receiving surface 68, and can be, for example, 7 to 20 μm.

  Each of these throttle parts is characterized by ease of manufacture, rectification, diaphragm characteristics, and the like. Therefore, it is preferable to select the most suitable configuration in consideration of cost and performance in consideration of responsiveness, noise resistance, gas conditions, and the like required for the gas-controlled rotary moving device 10.

Example 2 is not an embodiment of the present invention, but is one of reference examples for reference of the present invention. FIG. 5 controls the gas pressure supplied to the gap between the movable body and the rectangular shaft, and adjusts the gap amount between the movable body and the rectangular shaft while balancing with the pressing force received from the other gas control drive unit. By doing so, a configuration of the gap amount adjusting type gas control driving unit 130 that can finely move the rectangular axis with respect to the movable body is shown. Since the gap amount is important in the gap amount adjustment type gas control drive unit 130, it is not preferable that the gap amount with the movable body becomes non-uniform in the facing region when the rectangular shaft rotates. Therefore, as shown in FIG. 5, the main body 12 is provided with a spherical seat 132 at the tip, and a spherical movable body 134 corresponding to this spherical seat is used. In FIG. 5, the spherical seat 132 is a concave spherical surface, but it may be a convex spherical surface. Further, the shape between the main body 12 and the movable body may be provided with a spherical shape in part as long as it can smoothly follow the rotation of the rectangular shaft 32, and the flatness of the movement of the table 30 Depending on the case, an arc-shaped curved surface may be used, and other curved surface shapes may be used. The spherical seat 132 and the spherical movable body 134 can be obtained by molding and precision spherical surface processing of an appropriate metal material or ceramic material.

  Note that the gas supply path 136 at the tip of the spherical movable body 134 is provided with the throttle unit 120 similar to that described in FIG. In addition, it is preferable to provide an appropriate throttle mechanism in a portion where the gas supply path 136 opens in the gap between the spherical seat 132 and the spherical movable body 134. In this case, since the gas from CP2 is used and it is desired to flow from the front end portion 122 of the spherical movable body 134, either the self-formed aperture 78 or the surface aperture 80 described with reference to FIG. 4 is preferably used.

  The control gas pressure supplied under the control of the control unit 50 passes through the gas supply path 136 from the gap amount adjusting gas supply port denoted by reference numeral CP2, and preferably through a throttle mechanism (not shown) to the spherical seat 132. Is partially supplied to the gap between the spherical movable body 134, passes through the spherical movable body 134, and flows out from the distal end portion 122 of the spherical movable body 134 toward the gas receiving surface 124 of the rectangular shaft 32. At this time, the amount of clearance between the spherical movable body 134 and the rectangular shaft 32 is determined at a balance with the pressing force F received from the other gas control drive unit. Therefore, the control unit 50 sets the gas pressure for adjusting the gap amount so that the pressing force F received from the other gas control driving unit is calculated and the gap amount corresponding to the required displacement amount of the rectangular shaft 32 is obtained. become. In this way, by using the configuration of the gap amount adjustment type gas control driving unit 130, the table 30 can be made extremely without contacting the rectangular shaft 32 and the spherical movable body 134, and the spherical movable body 134 and the main body portion 12. It can be rotated at a minute angle.

Example 3 is not an embodiment of the present invention, but is one of reference examples for reference of the present invention. FIG. 6 is a diagram illustrating a configuration of an interlocking ram type gas control driving unit 140 that uses two interlocking movable bodies in the ram type gas control driving unit to increase the movement amount. The basic configuration is the same as that of the ram type gas control driving unit 110 of FIG. 2, and the movable body is divided into the first movable body 144 and the second movable body 146. Therefore, the gas supply path is also a communication vent supply path 148 that communicates the first movable body 144 and the second movable body 146. Elements similar to those in FIG. 2 are denoted by the same reference numerals, and detailed description thereof is omitted.

The gas supply path 148 at the tip of the second movable body 146 is provided with the throttle unit 120 similar to that described in FIG. Although not shown, when the throttle mechanism is provided in a portion where the gas supply path 148 opens in the gap between the first movable body 144 and the second movable body 146, the gas from the CP1 is used. Since it is desired to flow from the front end portion 122 of the second movable body 146, either the self-formed aperture 78 or the surface aperture 80 described with reference to FIG.

In the interlocking ram type gas control driving unit 140 having such a configuration, the control gas pressure is supplied from the control gas pressure supply port CP1 to the gas chamber 116 under the control of the control unit 50, and the first gas is supplied according to the gas pressure. A driving force for moving the movable body 144 in the axial direction is applied. At the same time, the gas introduced into the gas chamber 116 passes through the continuous vent supply passage 148 and is preferably a plane between the first movable body 144 and the second movable body 146 via a throttle mechanism (not shown). The second movable body 146 is given a driving force corresponding to the gas pressure. And further ejected from the tip portion 122 of the second movable member 146 through the communicating vent member supply passage 148 or et diaphragm Ri unit 120 through the inside of the second movable member 146 toward the gas receiving surface 124 of the rectangular shaft 32. Therefore, the distal end portion 122 of the second movable body 146 moves corresponding to the sum of the movement amount of the first movable body 144 and the movement amount of the second movable body 146 and is driven without contacting the rectangular shaft 32. Force can be transmitted to the rectangular shaft 32.

Example 4 is not an embodiment of the present invention, but is one of reference examples for reference of the present invention. FIG. 7 is a diagram illustrating a configuration of a spherical movable body-linked ram type gas control driving unit 150 in which the second movable body is a spherical movable body in the linked ram type gas control driving unit. The basic configuration is the same as that of the interlocking ram type gas control driving unit 140 shown in FIG. 6, and a spherical seat 154 is provided at the tip of the first movable body 152, and the second movable body 156 has a curved surface corresponding to the spherical seat. Have The spherical seat 154 and the curved surface corresponding thereto are the same as those described in FIG. The gas supply path also becomes a communication vent supply path 158 that communicates the first movable body 152 and the second movable body 156. Elements similar to those in FIG. 2 are denoted by the same reference numerals, and detailed description thereof is omitted.

  Note that the gas supply path 158 at the tip of the second movable body 156 is provided with the throttle unit 120 similar to that described in FIG. Although not shown, when the throttle mechanism is provided in a portion where the gas supply path 158 opens in the gap between the spherical seat 154 and the second movable body 156 of the first movable body 152, the gas from CP1 is supplied. In addition, since it is desired to flow from the front end portion 122 of the second movable body 156, either the self-formed aperture 78 or the surface aperture 80 described in FIG.

Also in the spherical movable body interlocking ram type gas control driving unit 150 having such a configuration, the control gas pressure is supplied from the control gas pressure supply port CP1 to the gas chamber 116 under the control of the control unit 50, and the gas pressure is determined according to the gas pressure. Thus, a driving force for moving the first movable body 152 in the axial direction is applied. Along with that, the gas introduced into the gas chamber 116 passes through the continuous vent supply passage 158, and preferably a spherical surface between the first movable body 152 and the second movable body 156 via a throttle mechanism (not shown). The second movable body 156 is given a driving force according to the gas pressure. And further ejected from the tip portion 122 of the second movable member 156 through the communicating vent member supply passage 158 or et diaphragm Ri unit 120 through the inside of the second movable member 156 toward the gas receiving surface 124 of the rectangular shaft 32. Therefore, the tip 122 of the second movable body 156 smoothly follows the inclination of the rectangular shaft 32 by the action of the spherical seat 154, and the sum of the movement amount of the first movable body 152 and the movement amount of the second movable body 156. The driving force can be transmitted to the rectangular shaft 32 without making contact with the rectangular shaft 32.

Example 5 is one embodiment of the present invention. FIG. 8 shows the configuration of the coarse / fine movement interlocking gas control drive unit 160 that combines the fine movement of the gap amount adjustment type gas control drive unit and the coarse movement of the ram type gas control drive unit that can take a larger amount of movement. FIG. The basic configuration is that, in the spherical movable body-linked ram-type gas control driving unit 150 of FIG. 7, the gas that drives the second movable body is supplied to the gap amount adjusting gas supply port independently of the gas that drives the first movable body. It is supplied from CP2. Therefore, the driving gas pressure is supplied to the first movable body 162 from the control gas supply port CP1 through the gas chamber 116, and the first movable body 166, which is a spherical movable body, has a tip 122 and a gas receiving surface 124. The gap amount adjusting gas pressure is supplied to the gap between the gap amount adjusting gas supply ports CP2 using the continuous ventilator supply path 168 independently of the gap. The spherical seat 164 and the curved surface corresponding thereto are the same as those described with reference to FIGS. Elements similar to those in FIG. 7 are denoted by the same reference numerals, and detailed description thereof is omitted.

  Note that the gas supply path 168 at the tip of the second movable body 166 is provided with the throttle unit 120 similar to that described in FIG. Although not shown, when the throttle mechanism is provided in a portion where the gas supply path 168 opens in the gap between the spherical seat 164 and the second movable body 166 of the first movable body 162, the gas from the CP2 is supplied. In addition, since it is desired to flow from the front end portion 122 of the second movable body 166, either the self-formed aperture 78 or the surface aperture 80 described with reference to FIG.

In the coarse / fine motion interlocking gas control driving unit 160 having such a configuration, the control gas pressure is supplied from the control gas pressure supply port CP1 to the gas chamber 116 under the control of the control unit 50, and the first control is performed according to the gas pressure. A driving force for moving the movable body 162 in the axial direction is applied. Independently of this, the gas introduced from the gap amount adjusting gas supply port CP2 into the continuous ventilation body supply path 168 is preferably supplied to the first movable body 162 and the second movable body 166 via a throttle mechanism (not shown). spherical gap flow in, also, the gas receiving the rectangular shaft 32 a continuous vent body supply path 168 from the tip 122 of the second movable member 166 through the passage Rishibo Ri unit 120 in the second movable member 166 between the It flows out toward the surface 124.

At this time, as described with reference to FIG. 5 , the spherical clearance between the first movable body 162 and the second movable body 166 and the spherical movable body are balanced with the pressing force F received from the other gas control drive unit. The amount of a gap between a certain second movable body 166 and the rectangular shaft 32 is determined. Therefore, the control unit 50 sets the gas pressure for adjusting the gap amount so that the pressing force F received from the other gas control driving unit is calculated and the gap amount corresponding to the required displacement amount of the rectangular shaft 32 is obtained. become.

Therefore, the distal end portion 122 of the second movable member 166 has a relatively large coarse movement amount by the control gas pressure of the first movable member 162 is precisely controlled by the gap amount adjustment gas pressure of the second movable member 166 The movement corresponding to the sum of the minute movement amounts can be performed. The driving force can be transmitted to the rectangular shaft 32 without touching the rectangular shaft 32 while smoothly following the inclination of the rectangular shaft 32 by the action of the spherical seat 164.

Example 6 is one embodiment of the present invention. FIG. 9 is a diagram illustrating a configuration of an interlocking gap amount adjusting type gas control driving unit 170 that uses two interlocking movable bodies in the gap amount adjusting type gas control driving unit to increase the range of the minute movement amount. The basic configuration is the same as that of the gap amount adjustment type gas control driving unit 130 in FIG. 5, and the movable body is divided into a first movable body 172 and a second movable body 176. The spherical seat 174 is provided at the tip of the first movable body 172, and the second movable body 176 is provided with a curved surface corresponding thereto. These are the same as those described in FIG. The gas supply path from the gap amount adjusting gas supply port CP <b> 2 also serves as a communicating-air supply body 178 that connects the first movable body 172 and the second movable body 176. Elements similar to those in FIG. 5 are denoted by the same reference numerals, and detailed description thereof is omitted.

  Note that the gas supply path 178 at the tip of the second movable body 176 is provided with the throttle unit 120 similar to that described in FIG. Although not shown, a portion where the gas supply path 178 opens in the gap between the main body portion 12 and the first movable body 172, and the spherical seat 174 and the second movable body 176 of the first movable body 172. When providing a diaphragm mechanism in each of the openings opened in the gaps between them, the gas from CP2 is used, and further, it is desired to flow from the tip 122 of the second movable body 176. Either 78 or surface stop 80 may be used.

In the interlocking gap amount adjusting type gas control driving unit 170 having such a configuration, the gap amount adjusting gas pressure is supplied from the gap amount adjusting gas pressure supply port CP2 under the control of the control unit 50, and the gas is From the continuous ventilator supply path 178 that passes through the continuous ventilator supply path 178 and preferably flows through a narrowing mechanism (not shown) between the main body 12 and the first movable body 172 and passes through the first movable body 172. preferably flows in a spherical shape gap between the first movable member 172 through a diaphragm mechanism (not shown) and the second movable member 176, the diaphragm further interconnected porosity material feeding path 178 or et passing through the second movable member 176 It flows out from the front end portion 122 of the second movable body 176 toward the gas receiving surface 124 of the rectangular shaft 32 via the groove portion 120 .

At this time, as described with reference to FIG. 5 , when the pressing force F received from another gas control drive unit is balanced, the gap between the main body 12 and the first movable body 172, the first movable body 172 and the second movable body 172. The spherical gap between the movable body 176 and the gap amount between the second movable body 176, which is a spherical movable body, and the rectangular shaft 32 are determined. Therefore, the control unit 50 sets the gas pressure for adjusting the gap amount so that the pressing force F received from the other gas control driving unit is calculated and the gap amount corresponding to the required displacement amount of the rectangular shaft 32 is obtained. become.

Therefore, the distal end portion 122 of the second movable body 176 can perform a minute movement in an enlarged range corresponding to the sum of the minute movement amount of the first movable body 172 and the minute movement amount of the second movable body 176. . The driving force can be transmitted to the rectangular shaft 32 without touching the rectangular shaft 32 while smoothly following the inclination of the rectangular shaft 32 by the action of the spherical seat 174.

Next, the arrangement of the plurality of gas control driving units 100 will be described. Example 7 is one embodiment of the present invention. As the gas control drive unit 100, any of the gas control units described in the first to sixth embodiments can be used. The relative arrangement of the plurality of gas control driving units 100 and the rectangular shaft 32 can take various forms according to the rotation direction, the range of the rotation angle, the range of the movement amount, etc. of the gas control rotary movement device 10. It is. FIG. 10 shows some examples. In these drawings, a plurality of gas control drive units are indicated by diagonal lines in order to show the positional relationship between the main body 12 and the rectangular shaft 32 of the table 30. The arrangement relationship shown in FIG. 10A is the same as that described in FIG. One of these four gas control drive units is provided corresponding to each side of the rectangular shaft 32, and the drive axis directions of the gas control drive units facing each other are offset from each other. This offset is a position where the position of the drive shaft of each gas control drive unit with respect to each side of the rectangular shaft 32 is shifted counterclockwise from the center of each side of the rectangular shaft 32 on the paper surface of FIG. It has become. Therefore, by using the arrangement of FIG. 10A, when each gas control drive unit is driven and each side of the rectangular shaft 32 is pressed, the rectangular shaft 32 is rotated counterclockwise (CCW: Counter ClockWise). be able to. In that sense, the CCW code is attached to the gas control drive unit. In this case, as described with reference to FIG. 1, by using an appropriate reaction force mechanism (not shown), the arrangement of FIG. −θ movement can be performed. Further, as described in the explanation of FIG. 1, in addition to the rotation, it is possible to move the rectangular axis 32 in the XY plane with this configuration.

FIG. 10B is a diagram illustrating an example in which a plurality of gas control driving units are arranged so that the rectangular shaft 32 can be rotated clockwise (CW: ClockWise) on the paper surface. The rectangular shaft 32 can be rotated in the counterclockwise direction by driving the gas control drive unit labeled CCW, and the rectangular shaft 32 can be rotated in the clockwise direction by driving the gas control drive unit labeled CW. Can rotate. In addition to the rotation, it is also possible to move the rectangular axis 32 in the XY plane with these combinations.

  In this case, as described above, only the CW or CCW may be driven, and the standard gas pressure is always supplied to each gas control drive unit to maintain the position of the rectangular shaft 32 in a neutral position, so that it moves or rotates. At this time, a positive differential pressure or a negative differential pressure from the standard gas pressure may be further applied to each gas control drive unit. For example, in FIG. 10B, (standard gas pressure + ΔP) is supplied to each gas control drive unit corresponding to CCW, and (standard gas pressure−ΔP) is supplied to each gas control drive unit corresponding to CW. Thus, the rectangular shaft 32 can be rotated counterclockwise. At this time, since each gas control drive unit facing each other exerts a reaction force on the basis of the standard gas pressure, the reaction force mechanism required in FIG. 10A is not particularly required. The fact that the reaction force mechanism is not particularly required is the same in the following FIGS. 10C, 10D, and 10E.

FIG. 10 (c), shows an example of placing a gas control driver having a drive shaft direction in the center of the sides of the rectangular shaft 32, N in terms of the neutral to the gas control driver of this type (Nutral) The code | symbol is attached | subjected. The gas control drive unit labeled N is used as an effective fulcrum for driving clockwise and counterclockwise on the paper surface with respect to the gas control drive units labeled CW and CCW facing each other. it can. It is also convenient when moving the rectangular axis 32 in the XY plane.

  FIGS. 10D and 10E are diagrams showing another example in which gas control drive units of CW, CCW, and N are combined and arranged. As described above, various modes can be adopted for the plurality of gas control drive units in accordance with the specifications of the gas control rotary movement device 10.

Example 8 is one embodiment of the present invention. FIG. 11 is a cross-sectional view of a gas control rotary movement device 180 using the coarse / fine movement interlocking gas control drive unit 160. Since the internal configuration of the coarse / fine movement interlocking type gas control driving unit 160 has the contents described in relation to FIG. 8, the reference numerals of the respective elements are omitted. Moreover, the same code | symbol is attached | subjected about the element similar to FIG. 1, and detailed description is abbreviate | omitted.

  In FIG. 11, gas for gas bearings is formed on the upper and lower surfaces of the main body portion 12 to eject gas toward the back surface of the stage 34 of the table 30 and to float the stage 34 from the upper and lower surfaces of the main body portion 12 by the gas bearing action. A supply port SB and its exhaust port EX are provided. Since the driving force is transmitted by the gas also between the coarse / fine movement interlocking gas control driving unit 160 and the rectangular shaft 32, the table 30 does not contact the main body 12 as a whole.

In the gas control rotary movement device 180, a predetermined gas pressure is supplied from the control unit 50 to each of the control gas supply port CP1 and the gap control gas supply port CP2 of each coarse / fine movement interlocking type gas control drive unit 160. Gas is supplied. The gas pressure supplied to the control gas supply port CP1 is a gas pressure for coarse movement driving, and is set based on a value obtained by grading the required driving force by the gas receiving area of the first movable body. The gas pressure supplied to the gap control gas supply port CP2 is a gas pressure for minute driving, and the pressing force F1 or F2 received from the other gas control driving unit is taken into account to obtain the necessary minute displacement amount of the rectangular shaft 32. It is set to have a corresponding gap amount.

  For example, if it is required to move the rectangular axis by 1 mm + 2 μm from the original position at the tip of the coarse / fine movement interlocking gas control driving unit 160, 1 mm movement driving is performed by the gas pressure from the control gas supply port CP1. Therefore, the 2 μm movement drive can be performed by the gas pressure from the gap control gas supply port CP2. In the above example, the movement of 1 mm of coarse movement may be difficult to control at the μm level, and in order to precisely control the angle change corresponding to the movement of 1 mm + 2 μm, the data of the sensor 40 + measurement unit 42 is used. It is preferable to feed back to the control unit 50. Further, in addition to rotation, the table can be moved roughly in the XY plane.

Example 9 is not an embodiment of the present invention, but is one of reference examples for reference of the present invention. FIG. 12 is a cross-sectional view of the gas control rotary movement device 190 using the gap amount adjustment type gas control drive unit 130. Since the gap amount adjusting type gas control driving unit 130 has the contents described in relation to FIG. 5, the reference numerals of the respective elements are omitted. The same elements as those in FIG. 11 are denoted by the same reference numerals, and detailed description thereof is omitted.

In the gas control rotary movement device 190 , the gap amount adjusting gas pressure for minute driving is supplied from the control unit 50 to the gap control gas supply port CP2 of each gap amount adjusting type gas control driving unit 130. This gap amount adjusting gas pressure is set so that the pressing force F1 or F2 received from the other gas control driving unit is taken into account and the gap amount corresponds to the required minute displacement amount of the rectangular shaft 32.

For example, if it is required to move the rectangular axis by 2 μm from the original position at the tip of the gap amount adjustment type gas control drive unit 130, the tip of the gap amount adjustment type gas control drive unit 130, and A gas having a gas pressure necessary to increase the gap between the corresponding sides of the rectangular shafts 32 by 2 μm against the pressing force F1 or F2 is generated and controlled by the control unit 50, and the gap control gas supply port Supplied to CP2. In this way, the table 30 can be rotated by a minute angle corresponding to 2 μm movement. Also it is in addition to rotating, also a table to infinitesimal movement in the XY plane. If the gap amount control is not particularly necessary, the open loop control is sufficient, and therefore the data of the sensor 40 + measurement unit 42 need not be fed back to the control unit 50.

  11 and 12 have described the gas control rotary movement device having a typical configuration, but the type of the gas control drive unit may be replaced with a different type from those used for these. In the above description, the table has a rectangular axis. However, the number of sides is not limited to four, and may be a polygonal axis. A plurality of gases may be arranged at appropriate intervals along the circumference of the cylindrical axis. A receiving surface may be provided.

It is the top view and side sectional view of a gas control rotation movement device in an embodiment concerning the present invention. It is a figure which shows the structure of the ram type gas control drive part as a reference example . In embodiment which concerns on this invention, it is a figure which shows two examples preferable as an aperture_diaphragm | restriction part. It is a figure which shows the example of the other aperture_diaphragm | restriction part which can be used in embodiment which concerns on this invention. It is a figure which shows the structure of the gap | interval amount adjustment type gas control drive part as a reference example . It is a figure which shows the structure of the interlocking ram type gas control drive part as a reference example . It is a figure which shows the spherical surface movable body interlock | cooperated ram type gas control drive part as a reference example . In embodiment which concerns on this invention, it is a figure which shows the structure of a coarse / fine movement interlocking type | mold gas control drive part. In embodiment which concerns on this invention, it is a figure which shows the structure of the interlocking gap amount adjustment type | mold gas control drive part. It is a figure explaining arrangement | positioning of the several gas control drive part in embodiment which concerns on this invention. In embodiment which concerns on this invention, it is sectional drawing of the gas control rotation moving apparatus using the coarse / fine movement interlocking type | mold gas control drive part. It is sectional drawing of the gas control rotation moving apparatus using the gap | interval amount adjustment type gas control drive part as a reference example .

Explanation of symbols

  10, 180, 190 Gas control rotary movement device, 12 body part, 14 support hole, 30 table, 32 rectangular shaft, 34 stage, 40 sensor, 42 measurement part, 50 control part, 60, 114 movable body, 62 gas supply path , 64 pocket opening, 66 object, 68,124 gas receiving surface, 69 gas receiving wall, 72 circular plate, 74 disc, 76 porous material, 78 self-contained diaphragm, 80 surface diaphragm, 82 pocket diaphragm, 100 gas Control drive unit, 110 Ram type gas control drive unit, 112 Guide, 116 Gas chamber, 118, 136 Gas supply path, 120 Throttle unit, 122 Tip, 130 Gap amount adjustment type gas control drive unit, 132, 154, 164 174 spherical seat, 134 spherical movable body, 140 interlocking ram type gas control drive unit, 144, 152, 162, 172 first movable body, 46, 156, 166, 176 Second movable body, 148, 158, 168, 178 Continuous ventilation body supply path, 150 Spherical movable body interlocking ram type gas control driving part, 160 Coarse / fine motion interlocking type gas control driving part, 170 Interlocking gap amount Adjustable gas control drive.

Claims (5)

A main body that is a base;
A table having a polygonal axis and movable in a plane perpendicular to the axial direction of the polygonal axis with respect to the main body ;
A plurality of driving portions provided corresponding to the respective sides of the polygon axis of the table, each of the drive unit,
Examples movable body that moves in conjunction toward the polygonal shaft, confronts the side and first movable body, the distal end surface corresponding the polygonal shaft with a spherical seat on the tip face each bottom to the main body portion, bottom and a second movable member having a curved surface corresponding to the spherical seat of the first movable body, as said corresponding side of the gas receiving surface of the polygonal shaft, and the distal end surface of the second movable member a plurality of gas control driver you drive the polygonal shaft in a non-contact manner via a gas supplied between said gas receiving surface,
The controls to drive the cooperative of each gas control driver, the or plane movement of the table and a control unit including at least one first control rotation of any angle around the axis of the polygonal shaft ,
With
Each gas control driving unit,
Clearance between the bottom surface of the first movable member and the body portion, the distal end surface of the gap, and the second movable member between said spherical seat and the bottom surface of the second movable member of the first movable body and includes a gas supply passage for supplying the respective gas into the gap between the gas-receiving surface,
Wherein the control unit, the gas pressure supplied to the gas supply passage to control a gap amount adjustment pneumatic, while balanced with the pressing force received from the other of the gas control driver, the first movable member and the body portion the amount of clearance between the bottom surface, the amount of clearance between the spherical seat and the bottom surface of the second movable member of the first movable member, and the distal end surface of the second movable member and with said gas receiving surface gas control rotational movement apparatus to said table by adjusting the gap amount or small movement of the plane, characterized in that for the fine rotation about said axis between. A main body that is a base;
A table having a polygonal axis and movable in a plane perpendicular to the axial direction of the polygonal axis with respect to the main body;
A plurality of driving units respectively provided corresponding to each side of the polygon axis of the table, each driving unit,
A guide part provided in the main body part;
As a plurality of movable bodies that are guided along the axial direction of the guide portion and move in conjunction with the polygonal axis, a bottom surface and a front end that receive a control gas pressure for coarse driving from the bottom side of the guide portion. a first movable member having a spherical seat, as a gas receiving surface of each side of the polygonal shaft, the disposed between the gas receiving face and the first movable member, the tip is at the front end surface, the bottom surface first and a second movable member having a curved surface corresponding to the spherical seat of the first movable body, for driving said polygonal shaft via a gas supplied between the gas receiving surface and said tip surface in a non-contact A plurality of gas control drive units;
A control unit that cooperatively controls driving of each of the gas control driving units, and includes at least one control of the in-plane movement of the table or rotation of the polygonal axis around the axis;
With
Each gas control drive unit is
A control gas pressure supply port for supplying a gas having the control gas pressure toward the bottom surface of the first movable body as a gas for coarsely driving the first movable body;
Said second movable member against the first movable member as a gas to drive fine movement, the gas having a gap amount adjustment pneumatic independent gas pressure from said control gas pressure, the spherical surface of the first movable body clearance between the bottom of the the seat second movable member, and includes a communicating vent member supply passage gap Niso respectively supplied between the distal end surface and the gas receiving surface of the second movable member ,
Wherein, independently of the coarse drive of the first movable member, the communicating vent body the controls gap amount adjustment gas pressure supplied to the supply passage, the pressing force received from the other of the gas control driver while mated with the gap amount between the gap amount, and the said front end surface of the second movable member and said gas receiving surface between said spherical seat and the bottom surface of the second movable member of the first movable body preparative gas control rotational movement and wherein the said table and adjust it to a small rotation around the minute movement or the axis of the plane of. In the gas control rotation movement device according to claim 1 or 2 ,
Gas control rotational movement device, characterized in that it comprises a sensor for outputting to the control unit detects the rotation movement of the table. A main body that is a base for a moving object;
A movable part provided to face the moving object, wherein the first movable body has a bottom surface facing the body part and a spherical seat at the tip as a plurality of movable bodies that move in conjunction with the moving object. And a second movable body having a tip surface facing the moving object and a bottom surface having a curved surface corresponding to the spherical seat of the first movable body, the surface of the moving object as a gas receiving surface, A movable part that drives the moving object in a non-contact manner through a gas supplied between the tip surface of the second movable body and the gas receiving surface ;
Clearance between the bottom surface of the first movable member and the body portion, the distal end surface of the gap, and the second movable member between said spherical seat and the bottom surface of the second movable member of the first movable body a gas supply channel for supplying gas respectively in the gap between said gas receiving surface,
A pressing force generating unit for pressing said toward said gas receiving surface with the gas the moving object while compressing the each gap between the movable portion,
The gas pressure supplied to the gas supply passage to control the gap size adjusting gas pressure, while balanced with the pressing force, amount of clearance between the bottom surface of the first movable body and the main body portion, said first movable amount of clearance between the spherical seat and the bottom surface of the second movable member body, and the gap amount and the moving object to adjust the between the front end surface and the gas receiving surface of the second movable member A control unit for minute movement,
A gas control actuator comprising: A main body that is a base for a moving object;
A guide part provided in the main body part;
A movable portion that is guided along the axial direction of the guide portion and moves in conjunction with the moving object, the first movable portion having a bottom surface that receives a control gas pressure for coarse driving and a spherical seat at the tip. and body, as a gas receiving surface to a surface of the moving object, wherein disposed between the gas receiving surface and said first movable member, the tip end surface confronts the gas receiving surface, bottom surface of the first movable body A second movable body having a curved surface corresponding to the spherical seat, and a movable portion that drives the moving object in a non-contact manner through a gas supplied between the tip surface and the gas receiving surface;
A control gas pressure supply port that is provided on the bottom surface of the guide portion and supplies gas having the control gas pressure toward the bottom surface of the first movable body as a gas for coarsely driving the first movable body;
Said second movable member against the first movable member as a gas to drive fine movement, the gas having a gap amount adjustment pneumatic independent gas pressure from said control gas pressure, the spherical surface of the first movable body clearance between the bottom of the the seat second movable member, and the gap between the front end surface and the gas receiving surface of the second movable member, the communicating vent body supply path for supplying respectively,
A pressing force generating unit for pressing said toward said gas receiving surface with the gas the moving object while compressing the each gap between the movable portion,
Independently of the coarse drive of the first movable member, said controlling the communication vent body the gap amount adjusting gas pressure supplied to the supply path, while balanced with the pressing force, the spherical surface of the first movable body amount of clearance between the bottom of the the seat second movable body, and is slightly moved to the moving object by adjusting the amount of clearance between the tip surface and the gas receiving surface of the second movable member A control unit;
A gas control actuator comprising:

Images