JPS5687318A - Finely movable table - Google Patents

Finely movable table

Info

Publication number
JPS5687318A
JPS5687318A JP16349279A JP16349279A JPS5687318A JP S5687318 A JPS5687318 A JP S5687318A JP 16349279 A JP16349279 A JP 16349279A JP 16349279 A JP16349279 A JP 16349279A JP S5687318 A JPS5687318 A JP S5687318A
Authority
JP
Japan
Prior art keywords
fluid
fillets
stage
nozzles
horizontal direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16349279A
Other languages
Japanese (ja)
Other versions
JPS6344493B2 (en
Inventor
Ryohei Yokoyama
Yoshihiko Yamamoto
Tadao Hirakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP16349279A priority Critical patent/JPS5687318A/en
Publication of JPS5687318A publication Critical patent/JPS5687318A/en
Publication of JPS6344493B2 publication Critical patent/JPS6344493B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Machine Tool Units (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)

Abstract

PURPOSE:To make fine adjustments in rotation and horizontal direction by ejecting fluid from the second fluid ejecting mechanism to fillets by a method wherein a stage provided with the fillets on the outer side face is fitted in a concave formed in a base having the fluid injecting mechanism which effects floatation of the state with a fluid pressure. CONSTITUTION:The stage 1 having the fillets 3a-3d is inserted in the concave 5 of the base 4 provided with the floating mechanism by the fluid pressure, the fillets respectively are insterted in narrow between L-shaped blocks 9a-9h made a pair by two having fluid nozzles 10a-10h, and the fluids are ejected from the nozzles 10a-10h, to rotate and move the stage in a horizontal direction. Whereby since the stage is moved leaving floated off by the fluid actions, no stick-slip takes place nor heat is of course generated, so that the minute movements in the submicron order can be carried out correctly.
JP16349279A 1979-12-18 1979-12-18 Finely movable table Granted JPS5687318A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16349279A JPS5687318A (en) 1979-12-18 1979-12-18 Finely movable table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16349279A JPS5687318A (en) 1979-12-18 1979-12-18 Finely movable table

Publications (2)

Publication Number Publication Date
JPS5687318A true JPS5687318A (en) 1981-07-15
JPS6344493B2 JPS6344493B2 (en) 1988-09-05

Family

ID=15774885

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16349279A Granted JPS5687318A (en) 1979-12-18 1979-12-18 Finely movable table

Country Status (1)

Country Link
JP (1) JPS5687318A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5937026A (en) * 1982-08-26 1984-02-29 Matsushita Electric Ind Co Ltd Slide table
JPS5963727A (en) * 1982-10-05 1984-04-11 Toshiba Corp Table device for holding sample
JPS6160107A (en) * 1984-08-31 1986-03-27 Fujitsu Ltd X-y stage
JPH04272485A (en) * 1990-01-10 1992-09-29 Dennis Pinkerton Valveless positive motion displacement metering pump and actuating method thereof
JP2006210659A (en) * 2005-01-28 2006-08-10 Psc Kk Gas control rotary moving device and a gas control actuator
JP2006309654A (en) * 2005-05-02 2006-11-09 Psc Kk Gas-controlled rotating and moving apparatus and gas-controlled actuator
JP2010147470A (en) * 2008-12-19 2010-07-01 Asml Netherlands Bv Lithographic apparatus with gas pressure means for controlling planar position of patterning device contactless
US7776423B2 (en) 2003-09-29 2010-08-17 Dai Nippon Printing Co., Ltd. Decorating sheet, decorated molded product, and in-injection-mold decorating method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0590931U (en) * 1992-05-07 1993-12-10 ニチコン株式会社 Capacitor device for DIN rail

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5114886U (en) * 1974-07-17 1976-02-03
JPS53121569U (en) * 1977-03-04 1978-09-27

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5114886U (en) * 1974-07-17 1976-02-03
JPS53121569U (en) * 1977-03-04 1978-09-27

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5937026A (en) * 1982-08-26 1984-02-29 Matsushita Electric Ind Co Ltd Slide table
JPS5963727A (en) * 1982-10-05 1984-04-11 Toshiba Corp Table device for holding sample
JPH0473294B2 (en) * 1982-10-05 1992-11-20 Tokyo Shibaura Electric Co
JPS6160107A (en) * 1984-08-31 1986-03-27 Fujitsu Ltd X-y stage
JPH04272485A (en) * 1990-01-10 1992-09-29 Dennis Pinkerton Valveless positive motion displacement metering pump and actuating method thereof
US7776423B2 (en) 2003-09-29 2010-08-17 Dai Nippon Printing Co., Ltd. Decorating sheet, decorated molded product, and in-injection-mold decorating method
JP2006210659A (en) * 2005-01-28 2006-08-10 Psc Kk Gas control rotary moving device and a gas control actuator
JP2006309654A (en) * 2005-05-02 2006-11-09 Psc Kk Gas-controlled rotating and moving apparatus and gas-controlled actuator
JP2010147470A (en) * 2008-12-19 2010-07-01 Asml Netherlands Bv Lithographic apparatus with gas pressure means for controlling planar position of patterning device contactless

Also Published As

Publication number Publication date
JPS6344493B2 (en) 1988-09-05

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