AU2001281019A1 - Micromirror elements, package for the micromirror elements, and protection system therefor - Google Patents

Micromirror elements, package for the micromirror elements, and protection system therefor

Info

Publication number
AU2001281019A1
AU2001281019A1 AU2001281019A AU8101901A AU2001281019A1 AU 2001281019 A1 AU2001281019 A1 AU 2001281019A1 AU 2001281019 A AU2001281019 A AU 2001281019A AU 8101901 A AU8101901 A AU 8101901A AU 2001281019 A1 AU2001281019 A1 AU 2001281019A1
Authority
AU
Australia
Prior art keywords
micro
mirror
micromirror elements
mirrors
package
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001281019A
Inventor
Andrew G. Huibers
Fedor Ilkov
Satyadev Patel
Peter W. Richards
John Stockton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Reflectivity Inc
Original Assignee
Reflectivity Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/631,536 external-priority patent/US6529310B1/en
Priority claimed from US09/732,445 external-priority patent/US6523961B2/en
Application filed by Reflectivity Inc filed Critical Reflectivity Inc
Publication of AU2001281019A1 publication Critical patent/AU2001281019A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0067—Packages or encapsulation for controlling the passage of optical signals through the package
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/28—Reflectors in projection beam
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
    • H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0369—Static structures characterized by their profile
    • B81B2203/0384—Static structures characterized by their profile sloped profile

Abstract

A micro-mirror (24) is connected to a substrate (10) via a post (21), a hinge (18c), a post (16c) and metal areas (12a) and an array of the micro-mirrors is disposed in a rectangular shape with a capability of rotation around a switching axis between on and off states corresponding to pixels in a viewed image. Light is directed from a source to the mirrors non-perpendicularly to at least two sides of each mirror, while reflected light is received from collection optics. Independent claims are included for an array of movable micro-mirrors, for a method of positioning an image on a target, for a method of spatially modulating light beams, for an optical micro-mirror element, for a packaged micro-electromechanical device and for a method of making a micro-mirror.
AU2001281019A 2000-08-03 2001-08-03 Micromirror elements, package for the micromirror elements, and protection system therefor Abandoned AU2001281019A1 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US09/631,536 2000-08-03
US09/631,536 US6529310B1 (en) 1998-09-24 2000-08-03 Deflectable spatial light modulator having superimposed hinge and deflectable element
US22924600P 2000-08-30 2000-08-30
US60/229,246 2000-08-30
US09/732,445 2000-12-07
US09/732,445 US6523961B2 (en) 2000-08-30 2000-12-07 Projection system and mirror elements for improved contrast ratio in spatial light modulators
PCT/US2001/024332 WO2002012925A2 (en) 2000-08-03 2001-08-03 Micromirror elements, package for the micromirror elements, and protection system therefor

Publications (1)

Publication Number Publication Date
AU2001281019A1 true AU2001281019A1 (en) 2002-02-18

Family

ID=27397927

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001281019A Abandoned AU2001281019A1 (en) 2000-08-03 2001-08-03 Micromirror elements, package for the micromirror elements, and protection system therefor

Country Status (8)

Country Link
EP (1) EP1315993A4 (en)
JP (5) JP3889705B2 (en)
KR (1) KR100724081B1 (en)
CN (5) CN100412602C (en)
AT (1) ATE354814T1 (en)
AU (1) AU2001281019A1 (en)
DE (10) DE20122617U1 (en)
WO (1) WO2002012925A2 (en)

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US6871958B2 (en) 2003-08-18 2005-03-29 Evans & Sutherland Computer Corporation Wide angle scanner for panoramic display
US7012669B2 (en) 2003-08-18 2006-03-14 Evans & Sutherland Computer Corporation Reflection barrier for panoramic display
US6861277B1 (en) 2003-10-02 2005-03-01 Hewlett-Packard Development Company, L.P. Method of forming MEMS device
US6995830B2 (en) * 2003-12-22 2006-02-07 Asml Netherlands B.V. Lithographic projection apparatus and device manufacturing method
US7057794B2 (en) * 2004-05-19 2006-06-06 Taiwan Semiconductor Manufacturing Company, Ltd. Micromirror for MEMS device
US7273693B2 (en) * 2004-07-30 2007-09-25 Hewlett-Packard Development Company, L.P. Method for forming a planar mirror using a sacrificial oxide
US7038831B2 (en) * 2004-09-30 2006-05-02 Lucent Technologies, Inc. Micromirror apparatus with improved in-plane rotation tolerance
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US7372617B2 (en) * 2005-07-06 2008-05-13 Peter Enoksson Hidden hinge MEMS device
GB2453104B (en) 2007-09-19 2012-04-25 Wolfson Microelectronics Plc Mems device and process
US11157977B1 (en) 2007-10-26 2021-10-26 Zazzle Inc. Sales system using apparel modeling system and method
TWI418850B (en) 2007-11-09 2013-12-11 尼康股份有限公司 Micro-actuator, optical device, display device, exposure device and device production method
JP2009233836A (en) * 2008-03-28 2009-10-15 Yamaha Corp Mems and method for manufacturing mems
DE102008001038B4 (en) 2008-04-08 2016-08-11 Robert Bosch Gmbh Micromechanical component with a slanted structure and corresponding manufacturing method
EP2266199A4 (en) * 2008-04-08 2017-01-11 Cornell University Multi-axis, large tilt angle, wafer level micromirror array for large scale beam steering applications
US8096182B2 (en) * 2008-05-29 2012-01-17 Freescale Semiconductor, Inc. Capacitive sensor with stress relief that compensates for package stress
JP5151756B2 (en) * 2008-07-16 2013-02-27 株式会社豊田中央研究所 Optical device
US10719862B2 (en) 2008-07-29 2020-07-21 Zazzle Inc. System and method for intake of manufacturing patterns and applying them to the automated production of interactive, customizable product
JP5337304B2 (en) * 2009-07-17 2013-11-06 カール・ツァイス・エスエムティー・ゲーエムベーハー Microlithography projection exposure apparatus and method for measuring parameters associated with optical surfaces contained therein
KR101912092B1 (en) 2010-10-05 2018-10-26 삼성전자 주식회사 Fluidic lens
KR101912093B1 (en) 2010-10-29 2018-10-26 삼성전자 주식회사 Optical apparatus
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CN102683474B (en) * 2011-03-18 2014-11-05 浙江大立科技股份有限公司 Infrared detector manufacturing method based on compound sacrificial layers
US9641826B1 (en) 2011-10-06 2017-05-02 Evans & Sutherland Computer Corporation System and method for displaying distant 3-D stereo on a dome surface
US10969743B2 (en) 2011-12-29 2021-04-06 Zazzle Inc. System and method for the efficient recording of large aperture wave fronts of visible and near visible light
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US9110354B2 (en) * 2012-09-20 2015-08-18 Palo Alto Research Center Incorporated Steerable illumination source for a compact camera
CN105229511B (en) 2012-10-23 2018-07-20 苹果公司 The preparation of micro mechanical device
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Also Published As

Publication number Publication date
DE60126849T2 (en) 2007-11-08
DE60126849D1 (en) 2007-04-05
DE20122372U1 (en) 2005-05-19
DE20122370U1 (en) 2005-05-19
JP3768514B2 (en) 2006-04-19
DE20122615U1 (en) 2006-09-14
KR100724081B1 (en) 2007-06-04
CN100371763C (en) 2008-02-27
DE20122618U1 (en) 2006-11-23
CN1567020A (en) 2005-01-19
CN100412602C (en) 2008-08-20
WO2002012925A2 (en) 2002-02-14
CN1567018A (en) 2005-01-19
EP1315993A2 (en) 2003-06-04
WO2002012925A3 (en) 2002-09-06
CN100412603C (en) 2008-08-20
CN1444738A (en) 2003-09-24
EP1315993A4 (en) 2005-07-13
DE20122616U1 (en) 2006-09-14
DE20122371U1 (en) 2005-05-19
CN100412604C (en) 2008-08-20
KR20030036665A (en) 2003-05-09
JP2006178447A (en) 2006-07-06
CN100392467C (en) 2008-06-04
ATE354814T1 (en) 2007-03-15
JP3889705B2 (en) 2007-03-07
CN1567021A (en) 2005-01-19
CN1567019A (en) 2005-01-19
JP3889759B2 (en) 2007-03-07
DE20122614U1 (en) 2006-09-14
JP3889757B2 (en) 2007-03-07
JP2005122146A (en) 2005-05-12
JP2005122145A (en) 2005-05-12
JP2004506230A (en) 2004-02-26
DE20122617U1 (en) 2006-09-14
JP2005099793A (en) 2005-04-14
DE20122373U1 (en) 2005-05-19

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