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Priority claimed from EP96113545Aexternal-prioritypatent/EP0825467A1/en
Priority claimed from IDP962445Aexternal-prioritypatent/ID16003A/en
Application filed by Daewoo Electronics Co LtdfiledCriticalDaewoo Electronics Co Ltd
Application grantedgrantedCritical
Publication of TW339411BpublicationCriticalpatent/TW339411B/en
Mechanical Light Control Or Optical Switches
(AREA)
Abstract
A sort of MxN thin-film actuated mirror array where te MxN is an integer and the thin-film actuated mirror array used in optical project systems, having the array: the active base having the formed base top MxN switch array; the MxN actuated array where each actuator having an adjacent end and a tip end, having the first thin-film electrode, thin-film actuator element and the second thin-film polarity being the bottom of the adjacent end of the first actuator attached to the top of the active base and each of the actuators and the corresponding switches located in different areas on top of the base; and the MxN mirror array for the reflection of the incoming light beam, being each of the mirrors located on each of the actuator.
TW085110509A1996-08-231996-08-29Thin film actuated mirror array for use in an optical projection system
TW339411B
(en)
Arrangement of M X N mobile thin film mirrors for use in an optical projection system Optical projection system Method for manufacturing an arrangement of M X N mobile thin film mirrors for use in an optical projection system