JP4068883B2 - 導電膜配線の形成方法、膜構造体の製造方法、電気光学装置の製造方法、及び電子機器の製造方法 - Google Patents

導電膜配線の形成方法、膜構造体の製造方法、電気光学装置の製造方法、及び電子機器の製造方法 Download PDF

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Publication number
JP4068883B2
JP4068883B2 JP2002119448A JP2002119448A JP4068883B2 JP 4068883 B2 JP4068883 B2 JP 4068883B2 JP 2002119448 A JP2002119448 A JP 2002119448A JP 2002119448 A JP2002119448 A JP 2002119448A JP 4068883 B2 JP4068883 B2 JP 4068883B2
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JP
Japan
Prior art keywords
substrate
conductive film
liquid material
film wiring
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2002119448A
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English (en)
Japanese (ja)
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JP2003315813A (ja
JP2003315813A5 (enExample
Inventor
昌宏 古沢
利充 平井
正明 小田
央 岩重
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Ulvac Inc
Original Assignee
Seiko Epson Corp
Ulvac Inc
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Publication date
Application filed by Seiko Epson Corp, Ulvac Inc filed Critical Seiko Epson Corp
Priority to JP2002119448A priority Critical patent/JP4068883B2/ja
Priority to KR10-2003-0023891A priority patent/KR100484323B1/ko
Priority to US10/417,805 priority patent/US20030232128A1/en
Priority to TW092108953A priority patent/TW583903B/zh
Priority to EP03252478.7A priority patent/EP1357772B1/en
Priority to CNB031225268A priority patent/CN1284997C/zh
Publication of JP2003315813A publication Critical patent/JP2003315813A/ja
Publication of JP2003315813A5 publication Critical patent/JP2003315813A5/ja
Application granted granted Critical
Publication of JP4068883B2 publication Critical patent/JP4068883B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1241—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing
    • H05K3/125—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing by ink-jet printing
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136286—Wiring, e.g. gate line, drain line
    • G02F1/136295—Materials; Compositions; Manufacture processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2217/00—Gas-filled discharge tubes
    • H01J2217/38—Cold-cathode tubes
    • H01J2217/49—Display panels, e.g. not making use of alternating current
    • H01J2217/492—Details
    • H01J2217/49207—Electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Liquid Crystal (AREA)
  • Electroluminescent Light Sources (AREA)
JP2002119448A 2002-04-22 2002-04-22 導電膜配線の形成方法、膜構造体の製造方法、電気光学装置の製造方法、及び電子機器の製造方法 Expired - Lifetime JP4068883B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2002119448A JP4068883B2 (ja) 2002-04-22 2002-04-22 導電膜配線の形成方法、膜構造体の製造方法、電気光学装置の製造方法、及び電子機器の製造方法
KR10-2003-0023891A KR100484323B1 (ko) 2002-04-22 2003-04-16 도전막 배선의 형성 방법, 막구조체, 전기 광학 장치, 및전자 기기
TW092108953A TW583903B (en) 2002-04-22 2003-04-17 Manufacturing method for conductive layer wiring, layered structure member, electro-optic device, and electronic apparatus
EP03252478.7A EP1357772B1 (en) 2002-04-22 2003-04-17 Manufacturing method for conductive layer wiring, electro-optic device, and electronic apparatus
US10/417,805 US20030232128A1 (en) 2002-04-22 2003-04-17 Manufacturing method for conductive layer wiring, layered structure member, electro-optic device, and electronic apparat
CNB031225268A CN1284997C (zh) 2002-04-22 2003-04-18 导电膜配线的形成方法、膜结构体、电光学装置以及电子仪器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002119448A JP4068883B2 (ja) 2002-04-22 2002-04-22 導電膜配線の形成方法、膜構造体の製造方法、電気光学装置の製造方法、及び電子機器の製造方法

Publications (3)

Publication Number Publication Date
JP2003315813A JP2003315813A (ja) 2003-11-06
JP2003315813A5 JP2003315813A5 (enExample) 2005-09-29
JP4068883B2 true JP4068883B2 (ja) 2008-03-26

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JP2002119448A Expired - Lifetime JP4068883B2 (ja) 2002-04-22 2002-04-22 導電膜配線の形成方法、膜構造体の製造方法、電気光学装置の製造方法、及び電子機器の製造方法

Country Status (6)

Country Link
US (1) US20030232128A1 (enExample)
EP (1) EP1357772B1 (enExample)
JP (1) JP4068883B2 (enExample)
KR (1) KR100484323B1 (enExample)
CN (1) CN1284997C (enExample)
TW (1) TW583903B (enExample)

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Also Published As

Publication number Publication date
EP1357772A2 (en) 2003-10-29
KR20030084608A (ko) 2003-11-01
JP2003315813A (ja) 2003-11-06
TW583903B (en) 2004-04-11
CN1453608A (zh) 2003-11-05
EP1357772A3 (en) 2005-01-19
CN1284997C (zh) 2006-11-15
KR100484323B1 (ko) 2005-04-20
EP1357772B1 (en) 2013-06-19
US20030232128A1 (en) 2003-12-18
TW200401594A (en) 2004-01-16

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