JP3832402B2 - カーボンナノチューブを有する電子源とそれを用いた電子顕微鏡および電子線描画装置 - Google Patents

カーボンナノチューブを有する電子源とそれを用いた電子顕微鏡および電子線描画装置 Download PDF

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Publication number
JP3832402B2
JP3832402B2 JP2002234297A JP2002234297A JP3832402B2 JP 3832402 B2 JP3832402 B2 JP 3832402B2 JP 2002234297 A JP2002234297 A JP 2002234297A JP 2002234297 A JP2002234297 A JP 2002234297A JP 3832402 B2 JP3832402 B2 JP 3832402B2
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Japan
Prior art keywords
electron source
electron
conductive
bonding material
carbon nanotube
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Expired - Fee Related
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JP2002234297A
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English (en)
Japanese (ja)
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JP2004079223A (ja
JP2004079223A5 (enExample
Inventor
正 藤枝
貴志夫 日高
光男 林原
修一 鈴木
義道 沼田
寿晃 堀内
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Hitachi Ltd
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Hitachi Ltd
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Priority to JP2002234297A priority Critical patent/JP3832402B2/ja
Priority to TW092119556A priority patent/TWI275565B/zh
Priority to US10/636,701 priority patent/US6930313B2/en
Priority to KR1020030055263A priority patent/KR100686294B1/ko
Publication of JP2004079223A publication Critical patent/JP2004079223A/ja
Publication of JP2004079223A5 publication Critical patent/JP2004079223A5/ja
Application granted granted Critical
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/05—Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30469—Carbon nanotubes (CNTs)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06325—Cold-cathode sources
    • H01J2237/06341—Field emission
    • H01J2237/0635—Multiple source, e.g. comb or array
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/875—Scanning probe structure with tip detail
    • Y10S977/876—Nanotube tip
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/939—Electron emitter, e.g. spindt emitter tip coated with nanoparticles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Composite Materials (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP2002234297A 2002-08-12 2002-08-12 カーボンナノチューブを有する電子源とそれを用いた電子顕微鏡および電子線描画装置 Expired - Fee Related JP3832402B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2002234297A JP3832402B2 (ja) 2002-08-12 2002-08-12 カーボンナノチューブを有する電子源とそれを用いた電子顕微鏡および電子線描画装置
TW092119556A TWI275565B (en) 2002-08-12 2003-07-17 Emission source having carbon nanotube, electron microscope using this emission source, and electron beam drawing device
US10/636,701 US6930313B2 (en) 2002-08-12 2003-08-08 Emission source having carbon nanotube, electron microscope using this emission source, and electron beam drawing device
KR1020030055263A KR100686294B1 (ko) 2002-08-12 2003-08-11 카본 나노튜브를 갖는 전자원과 그것을 이용한 전자현미경 및 전자선 묘화 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002234297A JP3832402B2 (ja) 2002-08-12 2002-08-12 カーボンナノチューブを有する電子源とそれを用いた電子顕微鏡および電子線描画装置

Related Child Applications (1)

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JP2006155551A Division JP3982558B2 (ja) 2006-06-05 2006-06-05 カーボンナノチューブを有する電子源とそれを用いた電子顕微鏡および電子線描画装置

Publications (3)

Publication Number Publication Date
JP2004079223A JP2004079223A (ja) 2004-03-11
JP2004079223A5 JP2004079223A5 (enExample) 2005-02-17
JP3832402B2 true JP3832402B2 (ja) 2006-10-11

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Country Status (4)

Country Link
US (1) US6930313B2 (enExample)
JP (1) JP3832402B2 (enExample)
KR (1) KR100686294B1 (enExample)
TW (1) TWI275565B (enExample)

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Also Published As

Publication number Publication date
KR100686294B1 (ko) 2007-02-23
US20040026629A1 (en) 2004-02-12
JP2004079223A (ja) 2004-03-11
KR20040014912A (ko) 2004-02-18
US6930313B2 (en) 2005-08-16
TW200413250A (en) 2004-08-01
TWI275565B (en) 2007-03-11

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