JP5063715B2 - 電子源,電子銃、それを用いた電子顕微鏡装置及び電子線描画装置 - Google Patents
電子源,電子銃、それを用いた電子顕微鏡装置及び電子線描画装置 Download PDFInfo
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- JP5063715B2 JP5063715B2 JP2010022655A JP2010022655A JP5063715B2 JP 5063715 B2 JP5063715 B2 JP 5063715B2 JP 2010022655 A JP2010022655 A JP 2010022655A JP 2010022655 A JP2010022655 A JP 2010022655A JP 5063715 B2 JP5063715 B2 JP 5063715B2
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- 238000010894 electron beam technology Methods 0.000 title claims description 19
- 239000002245 particle Substances 0.000 claims description 32
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 29
- 238000009792 diffusion process Methods 0.000 claims description 24
- 229910052799 carbon Inorganic materials 0.000 claims description 19
- 150000001553 barium compounds Chemical class 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 14
- 229910052760 oxygen Inorganic materials 0.000 claims description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 11
- 239000001301 oxygen Substances 0.000 claims description 11
- 238000000605 extraction Methods 0.000 claims description 8
- 229910002804 graphite Inorganic materials 0.000 claims description 7
- 239000010439 graphite Substances 0.000 claims description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 7
- 229910052721 tungsten Inorganic materials 0.000 claims description 7
- 239000010937 tungsten Substances 0.000 claims description 7
- 230000001133 acceleration Effects 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 4
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical class C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 claims description 3
- 239000006229 carbon black Substances 0.000 claims description 3
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 3
- 239000002041 carbon nanotube Substances 0.000 claims description 3
- 229910003472 fullerene Inorganic materials 0.000 claims description 3
- 239000003273 ketjen black Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 239000003638 chemical reducing agent Substances 0.000 description 5
- 229910052788 barium Inorganic materials 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000006722 reduction reaction Methods 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000011010 flushing procedure Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910015999 BaAl Inorganic materials 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 229910001111 Fine metal Inorganic materials 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 150000001341 alkaline earth metal compounds Chemical class 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- AYJRCSIUFZENHW-DEQYMQKBSA-L barium(2+);oxomethanediolate Chemical compound [Ba+2].[O-][14C]([O-])=O AYJRCSIUFZENHW-DEQYMQKBSA-L 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 description 1
- CNQCVBJFEGMYDW-UHFFFAOYSA-N lawrencium atom Chemical compound [Lr] CNQCVBJFEGMYDW-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 229910000018 strontium carbonate Inorganic materials 0.000 description 1
- 238000001132 ultrasonic dispersion Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K7/00—Gamma- or X-ray microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/14—Solid thermionic cathodes characterised by the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30453—Carbon types
- H01J2201/30469—Carbon nanotubes (CNTs)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06308—Thermionic sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06308—Thermionic sources
- H01J2237/06316—Schottky emission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06325—Cold-cathode sources
- H01J2237/06341—Field emission
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- Toxicology (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- General Engineering & Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Nanotechnology (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
- Cold Cathode And The Manufacture (AREA)
Description
した。その後、Wフィラメントの頂点に、直径0.127mmで、長さ方向の結晶方位が<100>であるW<100>単結晶をスポット溶接し、電解研磨によりその先端を曲率半径1μm程度に先鋭化して、針状電極104とした。また、針状電極先端以外からの熱電子放出を防ぐためのサプレッサ電極105を設置した。
電子銃301より放射される電子線は、コンデンサレンズ302および対物レンズ303を主とする電子光学部品類により、試料304上に焦点を結ぶ。なお、この電子軌道305も同時に示してある。この焦点位置を偏向器306によりスキャンし、試料から発生する二次電子を電子検出器307で検出し、電気信号に変換することによりSEM像が得られる。
102 導電端子
103 タングステンフィラメントからなる発熱体
104 針状電極
105,203 サプレッサ電極
106 拡散源
107 タングステン管
201 電子源
202 引出し電極
204 加速電極
205 引出し電極電源
206 バイアス電源
207 加速電極電源
208 加熱電源
301,401 電子銃
302,402 コンデンサレンズ
303,403 対物レンズ
304,404 試料
305,405 電子軌道
306,406 偏向器
307,407 電子検出器
308,408 試料ステージ
409 ブランカー
Claims (8)
- 先端を針状にした金属からなる針状電極と、前記針状電極を加熱する発熱体からなる電子源において、
前記電子源は、前記発熱体により加熱可能な拡散源を有し、前記拡散源は、酸素を含むバリウム化合物と炭素粒子の混合物であり、前記針状電極の先端側に開口部を備えたタングステン管で覆われることを特徴とする電子源。 - 請求項1において、前記炭素粒子が、フラーレン,カーボンナノチューブ,グラファイト,カーボンブラック及びケッチェンブラックから選ばれる少なくとも1種であり、前記炭素粒子の粒径は前記酸素を含むバリウム化合物の粒径よりも小さいことを特徴とする電子源。
- 請求項1または2において、前記拡散源における前記酸素を含むバリウム化合物に対する前記炭素の割合が、0.1〜2.0mol%であることを特徴とする電子源。
- 請求項1乃至3のいずれか1項に記載の電子源と、
前記電子源の前記針状電極の先端以外からの熱電子放出を抑制するためのサプレッサ電極と、
前記電子源から電子を放出させる引出し電極と、前記電子源から放出された電子を加速する加速電極と、
を具備することを特徴とする電子銃。 - 請求項4に記載の電子銃から放出される電子線を試料に照射し、前記試料の観察を行うことを特徴とする電子顕微鏡装置。
- 請求項4に記載の電子銃から放出される電子線を試料に照射し、前記試料に電子線による描画を行うことを特徴とする電子線描画装置。
- 請求項1乃至3のいずれか1項に記載の電子源の動作方法であって、前記電子源から電子放出させる前に、前記針状電極に正電位を印加して、前記針先端表面を清浄化させることを特徴とする電子源の動作方法。
- 請求項7において、前記電子源から電子放出させる際に、前記針状電極を1000Kから1200Kに加熱することを特徴とする電子源の動作方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
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JP2010022655A JP5063715B2 (ja) | 2010-02-04 | 2010-02-04 | 電子源,電子銃、それを用いた電子顕微鏡装置及び電子線描画装置 |
US13/020,098 US20110186735A1 (en) | 2010-02-04 | 2011-02-03 | Electron source, electron gun, and electron microscope device and electron beam lithography device using it |
Applications Claiming Priority (1)
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JP2010022655A JP5063715B2 (ja) | 2010-02-04 | 2010-02-04 | 電子源,電子銃、それを用いた電子顕微鏡装置及び電子線描画装置 |
Publications (2)
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JP2011159602A JP2011159602A (ja) | 2011-08-18 |
JP5063715B2 true JP5063715B2 (ja) | 2012-10-31 |
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JP2010022655A Active JP5063715B2 (ja) | 2010-02-04 | 2010-02-04 | 電子源,電子銃、それを用いた電子顕微鏡装置及び電子線描画装置 |
Country Status (2)
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US (1) | US20110186735A1 (ja) |
JP (1) | JP5063715B2 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010070837A1 (ja) * | 2008-12-16 | 2010-06-24 | 株式会社日立ハイテクノロジーズ | 電子線装置およびそれを用いた電子線応用装置 |
US20120223245A1 (en) * | 2011-03-01 | 2012-09-06 | John Bennett | Electron beam source system and method |
JP2012238624A (ja) * | 2011-05-09 | 2012-12-06 | Canon Inc | 電子ビーム描画装置およびデバイス製造方法 |
JP6529920B2 (ja) * | 2016-03-01 | 2019-06-12 | 株式会社日立ハイテクノロジーズ | 電界放出電子源、その製造方法および電子線装置 |
US9984846B2 (en) * | 2016-06-30 | 2018-05-29 | Kla-Tencor Corporation | High brightness boron-containing electron beam emitters for use in a vacuum environment |
US10096447B1 (en) * | 2017-08-02 | 2018-10-09 | Kla-Tencor Corporation | Electron beam apparatus with high resolutions |
WO2020213109A1 (ja) * | 2019-04-18 | 2020-10-22 | 株式会社日立ハイテク | 電子源、及び荷電粒子線装置 |
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JPH06302292A (ja) * | 1993-04-14 | 1994-10-28 | Hitachi Ltd | ゲルマニウム液体金属イオン源、その作製方法と作製装置、およびこれを用いた集束イオンビーム装置 |
JPH10154477A (ja) * | 1996-09-27 | 1998-06-09 | Hitachi Ltd | 拡散補給型電子源およびそれを用いた電子線応用装置 |
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JPH11224629A (ja) * | 1998-02-09 | 1999-08-17 | Hitachi Ltd | 拡散補給型電子源、その製造方法および電子線装置 |
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2010
- 2010-02-04 JP JP2010022655A patent/JP5063715B2/ja active Active
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2011
- 2011-02-03 US US13/020,098 patent/US20110186735A1/en not_active Abandoned
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JP2011159602A (ja) | 2011-08-18 |
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