JP2022548705A - 多結晶セラミック固体、該固体による誘電体電極、該電極を備える装置及び製造方法 - Google Patents
多結晶セラミック固体、該固体による誘電体電極、該電極を備える装置及び製造方法 Download PDFInfo
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Abstract
Description
(1-y)Pba(MgbNbc)O3-e+yPbaTidO3
さらに、一般式MnxREzのドーパントを含む多結晶セラミック固体に関し:
REは1つ以上の希土類元素を表し、
係数は、
m=0.95から1.05まで
n=0.8から0.9まで
p=0.1から0.2まで
x=0.0005から0.01まで
z=0.001から0.050まで
であり、
m<(n+p)
であり、したがって、ABO3格子のB成分が過剰になる。
測定結果でない限り、図は模式的なものであり、理解を深めるために縮尺通りでない場合がある。
Ba0.995(Ti0.850Zr0.150)O3+0.002at%Mn及び+0.01at%Y
Yリッチ相:-0.08%(Y2O3)
Tiリッチ相:-0.16%(BaTi2O5)
Yリッチ相:0.0023体積%(Y2O3)
Tiリッチ相:0.0659体積%(BaTi2O5)
の体積割合に相当する。
Claims (17)
- 多結晶セラミック固体であって、
ABO3ペロブスカイト構造及びBam(TinZrp)O3の一般式の組成を有する、焼結によって獲得可能な母相と、
MnxREzの組成のドーパントと、を含有し、
REは1つ以上の希土類元素を表し、
係数は、
m=0.95から1.05まで
n=0.8から0.9まで
p=0.1から0.2まで
x=0.0005から0.01まで
z=0.001から0.050まで
であり、
m<(n+p)
であり、
したがって、ABO3格子のB成分が過剰になる、
固体。 - REは、Pr、Dy、Ce、Y及びそれらの組合せのうちから選択される、
請求項1記載の固体。 - ドーパントのMnとREとの成分割合の比は、1:2から1:10までの範囲内で調節される、
請求項1又は2記載の固体。 - 前記母相は、粒子内部で均一な配向を有する粒子の形態であり、
前記粒子は、静止画像分析による数的中央値として測定された、10μmから30μmまでの平均粒サイズd50を有する、
請求項1乃至3いずれか1項記載の固体。 - 少なくとも成分REに富む第1副相とTiに富む第2副相が存在し、
これらは主に又は完全に前記母相の前記粒子間の粒子ボイド内に配置される、
請求項1乃至4いずれか1項記載の固体。 - 0.1体積%と1.1体積%との間の閉鎖孔を含む、
請求項1乃至5いずれか1項記載の固体。 - 前記固体を通る各断面において、前記固体を通る任意の断面積に関するすべての副相の面積割合は、1%以下、好ましくは0.3%未満である、
請求項1乃至6いずれか1項記載の固体。 - 35℃において、40000を超える誘電係数を有する、
請求項1乃至7いずれか1項記載の固体。 - 1400℃から1500℃までの温度における焼結を介して得られる、
請求項1乃至8いずれか1項記載の固体。 - 空気下での焼結によって得られる、
請求項1乃至9いずれか1項記載の固体。 - 請求項1乃至10いずれか1項記載の固体を含む誘電体電極であって、
コンタクトとして作用する金属コーティングを有するセラミックディスクとして形成されている、
誘電体電極。 - 人間又は動物の体に交流電界を印加するための装置であって、
少なくとも1つの請求項11記載の電極を備える、
装置。 - 請求項1乃至10いずれか1項記載のセラミック固体を製造するための方法であって、
成分Ba、Ti、Zr、Mn及びREを含む出発材料を前記母相の前記組成及びドーパントに対応する割合で使用し、
前記出発材料を粉砕して混合し、
前記出発材料からグリーンボディを製造し、
前記グリーンボディを前記セラミック固体に焼結する、
方法。 - 請求項11記載の電極を製造するための方法であって、
請求項13記載の多結晶セラミック固体を製造する方法と、
電気コンタクトを有する前記固体を提供するための後続のステップと、を含む、
方法。 - 前記電気コンタクトはペーストを適用し焼成することによって実施され、
前記焼成は、好ましくは680℃から760℃までの温度において行われる、
請求項14記載の方法。 - 前記電気コンタクトは薄膜プロセスを用いて適用される、
請求項14記載の方法。 - 前記グリーンボディは空気下で、1400℃と1500℃との間の焼結温度において前記固体に焼結される、
請求項13乃至16いずれか1項記載の方法。
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