JP7172510B2 - 誘電体組成物および電子部品 - Google Patents
誘電体組成物および電子部品 Download PDFInfo
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- JP7172510B2 JP7172510B2 JP2018224062A JP2018224062A JP7172510B2 JP 7172510 B2 JP7172510 B2 JP 7172510B2 JP 2018224062 A JP2018224062 A JP 2018224062A JP 2018224062 A JP2018224062 A JP 2018224062A JP 7172510 B2 JP7172510 B2 JP 7172510B2
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- 101100513612 Microdochium nivale MnCO gene Proteins 0.000 description 1
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- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
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- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
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Description
(1)Ba、Ca、Bi、TiおよびSrを含む誘電体組成物であって、
EPMAによりSr由来の特性X線強度を測定した際に、Sr特性X線強度の異なる2相を含み、
EPMAにより測定される第1相のSr由来の特性X線強度をSr1、
EPMAにより測定される第2相のSr由来の特性X線強度をSr2とした際に、
Sr1に対するSr2の強度比(Sr2/Sr1)が、2以上である誘電体組成物。
前記第2相が結晶粒径0.1μm以上10μm以下の誘電体粒子からなる、(1)に記載の誘電体組成物。
EPMAでの観察視野の全面積に対する第2相の面積割合をYとした際に、
Yに対するXの面積比(X/Y)が、0.1以上である(1)に記載の誘電体組成物。
EPMAによりSr由来の特性X線強度を測定した際に、Sr特性X線強度の異なる3相を含み、
EPMAにより測定される第1相のSr由来の特性X線強度をSr1と、
EPMAにより測定される第2相のSr由来の特性X線強度をSr2と、
EPMAにより測定される第3相のSr由来の特性X線強度をSr3とした際に、
Sr3に対するSr1の強度比(Sr1/Sr3)が0.6以下であり、
Sr3に対するSr2の強度比(Sr2/Sr3)が1.4以上である誘電体組成物。
前記第2相が結晶粒径0.1μm以上10μm以下の誘電体粒子からなり、
前記第3相が結晶粒径0.1μm以上10μm以下の誘電体粒子からなる、(5)に記載の誘電体組成物。
EPMAでの観察視野の全面積に対する第2相の面積割合をYとした際に、
EPMAでの観察視野の全面積に対する第3相の面積割合をZとした際に、
Yに対するXの面積比(X/Y)が、0.1以上であり、
Yに対するZの面積比(Z/Y)が0.17以上である(5)に記載の誘電体組成物。
本発明の第1の実施形態に係る誘電体組成物は、Ba、Ca、Bi、TiおよびSrを含む。該組成物に関してEPMAによりSr由来の特性X線強度を測定した際に、Sr特性X線強度の異なる2相を含む。これは誘電体組成物に、Sr濃度が異なる2相が含まれていることを示している。
第1相のSr由来の特性X線強度をSr1、第2相のSr由来の特性X線強度をSr2とした際に、
Sr1に対するSr2の強度比(Sr2/Sr1)は、2以上であり、好ましくは5以上であり、さらに好ましくは10~100の範囲にある。
Sr:0.03~12.5カチオン%
Ba:22~49.8カチオン%
Ca:0.05~5.9カチオン%
Bi:0.2~23.6カチオン%
Ti:47~50カチオン%
本発明の第2の実施形態に係る誘電体組成物は、Ba、Ca、Bi、TiおよびSrを含む。該組成物に関してEPMAによりSr由来の特性X線強度を測定した際に、Sr特性X線強度の異なる3相を含む。
第1相のSr由来の特性X線強度をSr1、第2相のSr由来の特性X線強度をSr2、第3相のSr由来の特性X線強度をSr3とした際に、
Sr3に対するSr1の強度比(Sr1/Sr3)が0.6以下であり、好ましくは0.25~0.6の範囲にあり、また
Sr3に対するSr2の強度比(Sr2/Sr3)が1.4以上であり、好ましくは1.4~5の範囲にある。
また、Yに対するZの面積比(Z/Y)が好ましくは0.17以上であり、さらに好ましくは0.2以上であり、特に好ましくは0.2~18である。Z/Y比を調整することで、直流破壊電圧、誘電損失をより良好にすることができる。
Sr:1.5~30カチオン%
Ba:11.7~37.4カチオン%
Ca:0.05~5.9カチオン%
Bi:0.2~23.6カチオン%
Ti:47~50カチオン%
以下、第1および第2実施形態に係る誘電体組成物の製造方法について例をあげて説明するが、誘電体組成物の製造方法は下記の方法に限定されない。
前記a、bおよびcが下記範囲内の値であることが好ましい。
点A:(a,b,c)=(40,40,20)
点B:(a,b,c)=(80,0.1,19.9)
点C:(a,b,c)=(98,1,1)
点D:(a,b,c)=(40,59.5,0.5)
好ましいa、bおよびcにより規定される範囲を、三元系相図上に示すと、下記点A´、点B´、点C´および点D´の4点に囲まれる範囲となる。
点A´:(a,b,c)=(40,40,20)
点B´:(a,b,c)=(75.5,4.5,20)
点C´:(a,b,c)=(75.5,24.4,0.1)
点D´:(a,b,c)=(40,59.9,0.1)
上記各点の位置を示す三元系相図を図5に示す。
一方、第1実施形態に係る2相構造の誘電体組成物を得る際は、各主成分の組成が点A、点B、点Cおよび点Dの4点に囲まれる範囲内(ABCDの四角形内)であり、かつ四角形A´B´C´D´の範囲を除く範囲にあることが好ましい。
原料粉末として、チタン酸バリウム粉末、チタン酸ストロンチウム粉末、チタン酸ビスマスカルシウム粉末、酸化ビスマス粉末、酸化チタン粉末および炭酸カルシウム粉末、および副成分粉末を準備し、最終的に表1に記載された実施例および比較例の組成物が得られるように秤量した。なお、表1のBTとはチタン酸バリウム(BaTiO3)を表し、STとはチタン酸ストロンチウム(SrTiO3)を表し、CBTとはチタン酸ビスマスカルシウム(CaBi4Ti4O15)を表す。
(SEM、EPMA)
各試料について焼結後の焼結体を切断した断面を鏡面研磨し、鏡面研磨を施した面に対して走査型電子顕微鏡像(Scanning Electron Microscope:SEM)を撮影した。さらに、前記SEM像と同一の視野でEPMA(Electron Probe Micro Analyzer)で観察し、各Srのマッピング分析を行った。
Sr特性X線強度が比較的小さい相(低Sr相)のSr特性X線強度の平均値をSr1、Sr特性X線強度が比較的大きな相(高Sr相)のSr特性X線強度の平均値をSr2、Sr特性X線強度が低Sr相と高Srとの間にある相(中Sr相)のSr特性X線強度の平均値をSr3とした。
これらの解析結果から、誘電体組成物が2相構造の場合にはSr2/Sr1を、3相構造の場合にはSr1/Sr3、Sr2/Sr3を算出した。
各試料についてSr特性X線強度の異なる各粒子の面積から円相当径を算出し、平均粒径を算出した。
各相の占める面積割合は、平均粒径測定時のSEM画像、EPMA元素マッピングより算出した。低Sr相の占める面積割合をX、高Sr相の占める面積割合をY、中Sr相の占める面積割合をZとした。
これらの解析結果から、誘電体組成物が2相構造の場合にはX/Yを、3相構造の場合にはX/Y、Z/Yを算出した。
比誘電率(εs)は、円板状のコンデンサ試料に対して、温度25℃、周波数1kHz、入力信号レベル(測定電圧)1.0Vrmsの条件下でLCRメータを用いて測定された静電容量から算出した。本実施例では、εs≧1250を良好とし、εs≧1400をさらに良好とした。
基準温度25℃における誘電損失(tanδ)は、コンデンサ試料に対し、LCRメータにて、周波数1kHz、入力信号レベル(測定電圧)1.0Vrmsの条件下で測定した。また、1MHz、測定電圧1.0Vrmsの条件下でも測定した。
本実施例では、周波数1kHzにおける誘電損失(tanδ)は、0.5%以下を良好とした。周波数1MHzにおける誘電損失(tanδ)は、10%以下を良好とした。
コンデンサ試料に対し、絶縁抵抗計(アドバンテスト社製R8340A)を用いて、20℃において500Vの直流電圧を、コンデンサ試料に10秒間印加し、印加後50秒放置した後の絶縁抵抗IRを測定した。本実施例では、5.0×105MΩ以上を良好とした。
Ag電極焼付後に1000pFとなるように素地の直径を変えた試料を作成し、素地にリード線を取り付けて絶縁樹脂で塗装後、AC90kHz250V(1mmあたり250V/mm)印加後素子の温度が安定する温度を測定した。素子温度と環境温度との差(ΔT)を求めた。ΔTが小さいほど、発熱性が低いことを意味する。本実施例ではΔT15℃以下を良好とした。
交流破壊電圧(AC-Eb、kV/mm)の測定は、下記の方法で行った。得られたコンデンサ試料の両端に対して、交流電場を与えた。交流電場の大きさを200V/sの速さで上昇させていき、交流耐圧測定機でリーク電流の変化を観察した。リーク電流が50mAとなったときの電場を、コンデンサ試料の厚さで除し、単位厚み当りの交流破壊電圧(AC-Eb)とした。AC-Ebが高いほど、交流破壊電圧が高く、交流電圧に対する耐圧性に優れているといえる。本実施例では、AC-Eb≧3.5kV/mmを良好とし、AC-Eb≧5.1kV/mmをさらに良好とした。
直流破壊電圧(DC-Eb、kV/mm)の測定は、下記の方法で行った。得られたコンデンサ試料の両端に対して、直流電場を与えた。直流電場の大きさを100V/sの速さで上昇させていき、リーク電流の変化を観察した。リーク電流が100mAとなったときの電場を、コンデンサ試料の厚さで除し、単位厚み当りの直流破壊電圧(DC-Eb)とした。DC-Ebが高いほど、直流破壊電圧が高く、直流電圧に対する耐圧性に優れているといえる。本実施例では、DC-Eb≧10kV/mmを良好とし、DC-Eb≧14kV/mmをさらに良好とした。
温度特性TC(%)の測定方法は以下の通りである。まず、-25℃~+125℃の範囲で温度を変化させて各温度の静電容量を測定した。静電容量はLCRメータを用い、周波数1KHz、入力信号レベル1Vrmsの条件下で測定した。そして、基準温度+25℃での静電容量をC25、T(℃)での静電容量をCTとした場合に、以下の式に従い各温度でのTCを測定した。
TC(%)={(CT-C25)/C25}×102
以上の測定結果を表2にまとめる。
10・・・誘電体組成物
12a,12b・・・端子
14a,14b・・・電極
16・・・合成樹脂
20・・・Sr特性X線強度が比較的小さい相(低Sr相)
21・・・Sr特性X線強度が比較的大きな相(高Sr相)
22・・・Sr特性X線強度が中程度の相(中Sr相)
Claims (9)
- Ba、Ca、Bi、TiおよびSrを含む誘電体組成物であって、
EPMAによりSr由来の特性X線強度を測定した際に、Sr特性X線強度の異なる2相を含み、
EPMAにより測定される第1相のSr由来の特性X線強度をSr1、
EPMAにより測定される第2相のSr由来の特性X線強度をSr2とした際に、
Sr1に対するSr2の強度比(Sr2/Sr1)が、2以上である誘電体組成物。 - 前記第1相が結晶粒径0.1μm以上10μm以下の誘電体粒子からなり、
前記第2相が結晶粒径0.1μm以上10μm以下の誘電体粒子からなる、請求項1に記載の誘電体組成物。 - EPMAでの観察視野の全面積に対する第1相の面積割合をX、
EPMAでの観察視野の全面積に対する第2相の面積割合をYとした際に、
Yに対するXの面積比(X/Y)が、0.1以上である請求項1または2に記載の誘電体組成物。 - EPMAでの観察視野の全面積に対する第1相と第2相との合計面積割合(X+Y)が95%以上である請求項3に記載の誘電体組成物。
- Ba、Ca、Bi、TiおよびSrを含む誘電体組成物であって、
EPMAによりSr由来の特性X線強度を測定した際に、Sr特性X線強度の異なる3相を含み、
EPMAにより測定される第1相のSr由来の特性X線強度をSr1と、
EPMAにより測定される第2相のSr由来の特性X線強度をSr2と、
EPMAにより測定される第3相のSr由来の特性X線強度をSr3とした際に、
Sr3に対するSr1の強度比(Sr1/Sr3)が0.6以下であり、
Sr3に対するSr2の強度比(Sr2/Sr3)が1.4以上である誘電体組成物。 - 前記第1相が結晶粒径0.1μm以上10μm以下の誘電体粒子からなり、
前記第2相が結晶粒径0.1μm以上10μm以下の誘電体粒子からなり、
前記第3相が結晶粒径0.1μm以上10μm以下の誘電体粒子からなる、請求項5に記載の誘電体組成物。 - EPMAでの観察視野の全面積に対する第1相の面積割合をX、
EPMAでの観察視野の全面積に対する第2相の面積割合をYとした際に、
EPMAでの観察視野の全面積に対する第3相の面積割合をZとした際に、
Yに対するXの面積比(X/Y)が、0.1以上であり、
Yに対するZの面積比(Z/Y)が0.17以上である請求項5または6に記載の誘電体組成物。 - EPMAでの観察視野の全面積に対する第1相と第2相と第3相との合計面積割合(X+Y+Z)が95%以上である請求項7に記載の誘電体組成物。
- 請求項1~8のいずれかに記載の誘電体組成物含む電子部品。
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103058651A (zh) | 2012-12-14 | 2013-04-24 | 广西新未来信息产业股份有限公司 | 一种改性的钛酸钡基无铅正温度系数电阻材料及其制备方法 |
CN103482975A (zh) | 2013-09-11 | 2014-01-01 | 福建火炬电子科技股份有限公司 | 一种高介电常数x8r型mlcc介质材料及其制备方法 |
JP2014034505A (ja) | 2012-08-10 | 2014-02-24 | Nichicon Corp | 半導体磁器組成物およびその製造方法 |
JP2017178658A (ja) | 2016-03-30 | 2017-10-05 | ニチコン株式会社 | 半導体磁器組成物およびその製造方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
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CN103058651A (zh) | 2012-12-14 | 2013-04-24 | 广西新未来信息产业股份有限公司 | 一种改性的钛酸钡基无铅正温度系数电阻材料及其制备方法 |
CN103482975A (zh) | 2013-09-11 | 2014-01-01 | 福建火炬电子科技股份有限公司 | 一种高介电常数x8r型mlcc介质材料及其制备方法 |
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