JP2022505473A5 - - Google Patents
Info
- Publication number
- JP2022505473A5 JP2022505473A5 JP2021521518A JP2021521518A JP2022505473A5 JP 2022505473 A5 JP2022505473 A5 JP 2022505473A5 JP 2021521518 A JP2021521518 A JP 2021521518A JP 2021521518 A JP2021521518 A JP 2021521518A JP 2022505473 A5 JP2022505473 A5 JP 2022505473A5
- Authority
- JP
- Japan
- Prior art keywords
- end module
- equipment front
- storage pod
- upper plenum
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862751514P | 2018-10-26 | 2018-10-26 | |
| US62/751,514 | 2018-10-26 | ||
| US16/660,057 | 2019-10-22 | ||
| US16/660,057 US11373891B2 (en) | 2018-10-26 | 2019-10-22 | Front-ducted equipment front end modules, side storage pods, and methods of operating the same |
| PCT/US2019/057650 WO2020086709A1 (en) | 2018-10-26 | 2019-10-23 | Front-ducted equipment front end modules, side storage pods, and methods of operating the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022505473A JP2022505473A (ja) | 2022-01-14 |
| JP2022505473A5 true JP2022505473A5 (enExample) | 2022-08-19 |
| JP7365408B2 JP7365408B2 (ja) | 2023-10-19 |
Family
ID=70325553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021521518A Active JP7365408B2 (ja) | 2018-10-26 | 2019-10-23 | 前面ダクト式機器フロントエンドモジュール、側面ストレージポッド、及びそれらの操作方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US11373891B2 (enExample) |
| JP (1) | JP7365408B2 (enExample) |
| KR (1) | KR102577683B1 (enExample) |
| CN (1) | CN112970099A (enExample) |
| TW (2) | TW202314930A (enExample) |
| WO (1) | WO2020086709A1 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11189511B2 (en) * | 2018-10-26 | 2021-11-30 | Applied Materials, Inc. | Side storage pods, equipment front end modules, and methods for operating EFEMs |
| US11373891B2 (en) | 2018-10-26 | 2022-06-28 | Applied Materials, Inc. | Front-ducted equipment front end modules, side storage pods, and methods of operating the same |
| US11244844B2 (en) * | 2018-10-26 | 2022-02-08 | Applied Materials, Inc. | High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods |
| US11610794B2 (en) * | 2018-10-26 | 2023-03-21 | Applied Materials, Inc. | Side storage pods, equipment front end modules, and methods for operating the same |
| KR102202463B1 (ko) * | 2019-03-13 | 2021-01-14 | 세메스 주식회사 | 기판 처리 장치 및 방법 |
| KR102208017B1 (ko) * | 2019-08-14 | 2021-01-27 | 로체 시스템즈(주) | 기판 반송 장치 |
| US12076854B2 (en) * | 2021-03-18 | 2024-09-03 | Applied Materials, Inc. | Increased number of load ports on factory interface with robot that moves on track |
| US12370573B2 (en) * | 2021-10-06 | 2025-07-29 | Applied Materials, Inc. | Equipment front end modules with induced gas mixing, and methods of use thereof |
| KR102780011B1 (ko) * | 2022-02-09 | 2025-03-12 | 주식회사 저스템 | Efem의 버퍼 챔버 장치 및 이를 구비한 반도체 공정장치 |
| KR102780012B1 (ko) * | 2022-02-09 | 2025-03-12 | 주식회사 저스템 | Efem의 버퍼 챔버 장치 및 이를 구비한 반도체 공정장치 |
| KR102729958B1 (ko) * | 2022-06-15 | 2024-11-13 | 세메스 주식회사 | 장비 전단부 모듈 및 이의 동작 방법, 이를 포함하는 기판 처리 장치 |
| US20260096386A1 (en) * | 2024-09-30 | 2026-04-02 | Applied Materials, Inc. | Load lock chamber improvement |
Family Cites Families (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004179519A (ja) * | 2002-11-28 | 2004-06-24 | Tokyo Ohka Kogyo Co Ltd | 基板処理装置 |
| JP4816545B2 (ja) * | 2007-03-30 | 2011-11-16 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及び記憶媒体 |
| US9105673B2 (en) | 2007-05-09 | 2015-08-11 | Brooks Automation, Inc. | Side opening unified pod |
| WO2009079636A2 (en) | 2007-12-18 | 2009-06-25 | Entegris, Inc. | Methods and apparatuses for controlling contamination of substrates |
| US10090179B2 (en) | 2011-06-28 | 2018-10-02 | Brooks Automation, Inc. | Semiconductor stocker systems and methods |
| JP5603314B2 (ja) * | 2011-12-01 | 2014-10-08 | 東京エレクトロン株式会社 | 搬送装置及び基板処理システム |
| KR101215962B1 (ko) | 2012-07-30 | 2012-12-27 | 이프로링크텍(주) | Ｅｆｅｍ의 버퍼 스토리지 박스 |
| TW201413780A (zh) * | 2012-09-24 | 2014-04-01 | 尤金科技有限公司 | 煙氣移除設備及基板處理設備 |
| CN117174611A (zh) * | 2013-08-12 | 2023-12-05 | 应用材料公司 | 具有工厂接口环境控制的基板处理系统、装置和方法 |
| US9272315B2 (en) | 2013-10-11 | 2016-03-01 | Taiwan Semiconductor Manufacturing Co., Ltd | Mechanisms for controlling gas flow in enclosure |
| KR101682473B1 (ko) | 2013-10-18 | 2016-12-05 | 삼성전자주식회사 | 사이드 스토리지 및 이를 구비하는 반도체 소자 제조 설비 |
| TWI678751B (zh) | 2013-12-13 | 2019-12-01 | 日商昕芙旎雅股份有限公司 | 設備前端模組（ｅｆｅｍ） |
| JP6349750B2 (ja) | 2014-01-31 | 2018-07-04 | シンフォニアテクノロジー株式会社 | Ｅｆｅｍ |
| KR102162366B1 (ko) | 2014-01-21 | 2020-10-06 | 우범제 | 퓸 제거 장치 |
| US9847240B2 (en) | 2014-02-12 | 2017-12-19 | Axcelis Technologies, Inc. | Constant mass flow multi-level coolant path electrostatic chuck |
| US9881826B2 (en) | 2014-10-24 | 2018-01-30 | Lam Research Corporation | Buffer station with single exit-flow direction |
| US10510570B2 (en) * | 2014-10-24 | 2019-12-17 | Applied Materials, Inc. | Systems, apparatus, and methods for purging a substrate carrier at a factory interface |
| JP6822953B2 (ja) | 2014-11-25 | 2021-01-27 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 基板キャリア及びパージチャンバの環境制御を伴う基板処理のシステム、装置、及び方法 |
| KR101637498B1 (ko) | 2015-03-24 | 2016-07-07 | 피코앤테라(주) | 웨이퍼 수납용기 |
| JP6450653B2 (ja) | 2015-06-24 | 2019-01-09 | 東京エレクトロン株式会社 | 格納ユニット、搬送装置、及び、基板処理システム |
| SG11201800143RA (en) * | 2015-08-04 | 2018-02-27 | Hitachi Int Electric Inc | Substrate processing device, semiconductor device manufacturing method, and recording medium |
| JP2018536984A (ja) | 2015-10-05 | 2018-12-13 | ブルックス シーシーエス ゲーエムベーハーＢｒｏｏｋｓ ＣＣＳ ＧｍｂＨ | 半導体システムにおける湿度制御 |
| US10515834B2 (en) * | 2015-10-12 | 2019-12-24 | Lam Research Corporation | Multi-station tool with wafer transfer microclimate systems |
| JP6555091B2 (ja) * | 2015-11-10 | 2019-08-07 | シンフォニアテクノロジー株式会社 | ロボット搬送装置 |
| JP6679906B2 (ja) | 2015-12-11 | 2020-04-15 | Tdk株式会社 | Ｅｆｅｍ |
| JP6613864B2 (ja) * | 2015-12-14 | 2019-12-04 | Ｔｄｋ株式会社 | ミニエンバイロメント装置 |
| JP6851075B2 (ja) * | 2016-09-15 | 2021-03-31 | ユニチカ株式会社 | 成型用メッシュ織物の製造方法 |
| KR20180045316A (ko) | 2016-10-25 | 2018-05-04 | 삼성전자주식회사 | 설비 전방 단부 모듈 및 이를 포함하는 반도체 제조 장치 |
| US10159169B2 (en) | 2016-10-27 | 2018-12-18 | Applied Materials, Inc. | Flexible equipment front end module interfaces, environmentally-controlled equipment front end modules, and assembly methods |
| KR102618491B1 (ko) | 2016-10-31 | 2023-12-28 | 삼성전자주식회사 | 기판 이송 장치 |
| US10453727B2 (en) * | 2016-11-10 | 2019-10-22 | Applied Materials, Inc. | Electronic device manufacturing load port apparatus, systems, and methods |
| KR102729711B1 (ko) | 2016-12-23 | 2024-11-13 | 피코앤테라(주) | 이에프이엠 |
| US10446428B2 (en) * | 2017-03-14 | 2019-10-15 | Applied Materials, Inc. | Load port operation in electronic device manufacturing apparatus, systems, and methods |
| JP7001910B2 (ja) * | 2017-03-31 | 2022-01-20 | シンフォニアテクノロジー株式会社 | ロボット搬送装置 |
| US10566216B2 (en) | 2017-06-09 | 2020-02-18 | Lam Research Corporation | Equipment front end module gas recirculation |
| US10388547B2 (en) | 2017-06-23 | 2019-08-20 | Applied Materials, Inc. | Side storage pods, equipment front end modules, and methods for processing substrates |
| TWI717034B (zh) | 2017-06-23 | 2021-01-21 | 美商應用材料股份有限公司 | 側儲存倉、電子裝置處理系統、和處理基板的方法 |
| CN111316417B (zh) | 2017-11-27 | 2023-12-22 | 阿斯莫Ip控股公司 | 与批式炉偕同使用的用于储存晶圆匣的储存装置 |
| US10763134B2 (en) | 2018-02-27 | 2020-09-01 | Applied Materials, Inc. | Substrate processing apparatus and methods with factory interface chamber filter purge |
| KR102100775B1 (ko) * | 2018-03-14 | 2020-04-14 | 우범제 | 이에프이엠 |
| JP7037049B2 (ja) * | 2018-03-15 | 2022-03-16 | シンフォニアテクノロジー株式会社 | Ｅｆｅｍ |
| JP7100243B2 (ja) * | 2018-04-19 | 2022-07-13 | シンフォニアテクノロジー株式会社 | 排気ノズルユニット、ロードポート、及びｅｆｅｍ |
| JP6583482B2 (ja) * | 2018-05-24 | 2019-10-02 | シンフォニアテクノロジー株式会社 | Ｅｆｅｍ |
| KR102592920B1 (ko) * | 2018-07-16 | 2023-10-23 | 삼성전자주식회사 | 로드락 모듈 및 이를 포함하는 반도체 제조 장치 |
| US11373891B2 (en) | 2018-10-26 | 2022-06-28 | Applied Materials, Inc. | Front-ducted equipment front end modules, side storage pods, and methods of operating the same |
| US11244844B2 (en) | 2018-10-26 | 2022-02-08 | Applied Materials, Inc. | High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods |
| US11508593B2 (en) * | 2018-10-26 | 2022-11-22 | Applied Materials, Inc. | Side storage pods, electronic device processing systems, and methods for operating the same |
| US11189511B2 (en) | 2018-10-26 | 2021-11-30 | Applied Materials, Inc. | Side storage pods, equipment front end modules, and methods for operating EFEMs |
| US11610794B2 (en) | 2018-10-26 | 2023-03-21 | Applied Materials, Inc. | Side storage pods, equipment front end modules, and methods for operating the same |
| US11749537B2 (en) | 2018-10-26 | 2023-09-05 | Applied Materials, Inc. | Side storage pods, equipment front end modules, and methods for operating equipment front end modules |
-
2019
- 2019-10-22 US US16/660,057 patent/US11373891B2/en active Active
- 2019-10-23 KR KR1020217015630A patent/KR102577683B1/ko active Active
- 2019-10-23 WO PCT/US2019/057650 patent/WO2020086709A1/en not_active Ceased
- 2019-10-23 CN CN201980070805.4A patent/CN112970099A/zh active Pending
- 2019-10-23 JP JP2021521518A patent/JP7365408B2/ja active Active
- 2019-10-25 TW TW111142503A patent/TW202314930A/zh unknown
- 2019-10-25 TW TW108138612A patent/TWI785279B/zh active
-
2022
- 2022-06-01 US US17/829,607 patent/US20220293444A1/en not_active Abandoned
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7365408B2 (ja) | 前面ダクト式機器フロントエンドモジュール、側面ストレージポッド、及びそれらの操作方法 | |
| JP6831046B2 (ja) | 補助エンクロージャを利用するガスエンクロージャシステムおよび方法 | |
| JP7445138B2 (ja) | ウェーハストッカ | |
| US11610794B2 (en) | Side storage pods, equipment front end modules, and methods for operating the same | |
| US9159600B2 (en) | Wafer transport apparatus | |
| KR20190122161A (ko) | 배기 노즐 유닛, 로드 포트 및 efem | |
| TWI787327B (zh) | 設備前端模組 | |
| JP7279158B2 (ja) | 側部収納ポッド、電子デバイス処理システムおよびその操作方法 | |
| WO2009079636A4 (en) | Methods and apparatuses for controlling contamination of substrates | |
| KR20140123479A (ko) | 기판 수용 용기의 퍼지 장치 및 퍼지 방법 | |
| JP2020524901A (ja) | 側方収納ポッド、機器フロントエンドモジュール、及び、基板を処理する方法 | |
| EP2922980A1 (en) | Substrate loading in an ald reactor | |
| US10964565B2 (en) | Substrate processing apparatus and method | |
| JP2014093489A (ja) | 基板処理装置 | |
| SG186713A1 (en) | Treatment device for transport and storage boxes | |
| US11527426B2 (en) | Substrate processing device | |
| JP2006135016A (ja) | ロードポート | |
| KR101364116B1 (ko) | 기판 처리를 위한 클러스터 설비 | |
| KR100515775B1 (ko) | 고온 공정용 반도체 제조장치 | |
| KR20080071682A (ko) | 로드락 챔버 및 이를 이용한 반도체 제조 장치 | |
| TWI692414B (zh) | 用於維護列印系統的方法 | |
| KR101590346B1 (ko) | 박막증착장치 | |
| KR20240086972A (ko) | 기판 처리 장치 및 로드락 챔버 | |
| KR20080058690A (ko) | 기판 처리 장치 | |
| KR20080071683A (ko) | 로드락 챔버 및 이를 구비한 반도체 제조 장치 |