JP6555091B2 - ロボット搬送装置 - Google Patents
ロボット搬送装置 Download PDFInfo
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- JP6555091B2 JP6555091B2 JP2015220290A JP2015220290A JP6555091B2 JP 6555091 B2 JP6555091 B2 JP 6555091B2 JP 2015220290 A JP2015220290 A JP 2015220290A JP 2015220290 A JP2015220290 A JP 2015220290A JP 6555091 B2 JP6555091 B2 JP 6555091B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J5/00—Manipulators mounted on wheels or on carriages
- B25J5/005—Manipulators mounted on wheels or on carriages mounted on endless tracks or belts
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/07—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Description
・搬送物は、ロボット搬送装置が適用される工程に応じて適宜変更可能である(例えば、液晶ディスプレイパネルを処理する工程にロボット搬送装置が適用される場合、液晶ディスプレイパネルが搬送物となる)。
・循環流路を介して搬送空間にクリーンエアやガス等を供給し、当該ガスを含む気体を搬送空間全体に循環させてもよい。
・循環流路は、鉛直方向に延在することに限定されず、例えば水平方向に延在してもよい。また、複数の循環流路の延在方向は、互いに平行であることに限定されず、互いに交差してもよい(例えば、鉛直方向に延在する循環流路と、水平方向に延在する循環流路とが設けられてもよい)。また、循環流路は、真っ直ぐな形状であることに限定されず、湾曲した形状であってもよい。
・ファンの位置や数は、搬送空間と複数の循環流路とを循環する気流を形成できる限り、特に限定されない。
・搬送空間と複数の循環流路とを循環する気体の通過領域に、温湿度制御装置(湿度を低下させるドライヤ、温度を低下させるクーラ、半導体ウェハの除電を行うイオナイザ等)を設けてもよい。これにより、搬送空間全体の温度を一定に保つことができる。
・複数の周辺空間は、搬送空間の周辺の任意の位置に配置されてよい。例えば、複数の周辺空間は、搬送空間の周囲全体に亘って配置されてもよい(上述の実施形態において、壁部材10W3,10W4に対向する周辺空間がさらに設けられてもよい)。或いは、複数の周辺空間は、搬送空間の一方側(上述の実施形態において、壁部材10W1又は壁部材10W2)のみに設けられてもよい。
・複数の周辺空間は、互いに異なる構成であってもよいし、互いに同じ構成であってもよい。
・開口にドアを設けなくてもよい。
・開口の配列方向は、水平方向に限定されず、例えば鉛直方向であってもよい。
・搬送ロボットの移動方向は、水平方向に限定されず、例えば鉛直方向であってもよい。
・複数の開口が鉛直方向に配列し且つ搬送ロボットが鉛直方向に移動可能である場合に、水平方向の循環気流を生じさせてもよい。
10 搬送空間
10P1〜10P10 柱部材
10W1〜10W4 壁部材
15 開口
20 搬送ロボット
20R 搬送ロボットの作業領域
30 循環流路
31 吸気口
32 排気口
40 共通空間
41 フィルタ
42 ファン
50 周辺空間
Claims (6)
- 搬送ロボットが配置される搬送空間であって、前記搬送ロボットによる搬送物の搬送先となる複数の周辺空間が周辺に配置され、複数の開口を介して前記複数の周辺空間のそれぞれと連通する搬送空間と、
前記搬送空間内の気体を循環させるための複数の循環流路であって、前記複数の開口を含む前記搬送ロボットの作業領域を避けるように、前記搬送空間を挟む位置に設けられた複数の循環流路と、
を備え、
前記複数の循環流路は、前記搬送空間を形成する柱部材の内部に設けられたことを特徴とする、ロボット搬送装置。 - 前記柱部材は、前記搬送空間を形成し且つ前記複数の開口が設けられた壁部材に接続されていることを特徴とする、請求項1に記載のロボット搬送装置。
- 所定の配列方向に沿って3以上の前記開口が配列しており、
前記複数の循環流路は、少なくとも、前記3以上の開口のうち前記配列方向に互いに隣接する2つの開口の間のそれぞれに設けられたことを特徴とする、請求項1又は2に記載のロボット搬送装置。 - 前記搬送ロボットは、前記複数の開口の配列方向に移動可能であり、
前記搬送空間と前記複数の循環流路とを循環する気体の通過領域に設けられた、気体中の粉塵を除去するフィルタをさらに備えたことを特徴とする、請求項1〜3のいずれか1項に記載のロボット搬送装置。 - 前記複数の循環流路は、前記配列方向と直交する直交方向に沿って、互いに平行に延在し、且つ、それぞれ、一端側の吸気口及び他端側の排気口を介して前記搬送空間と連通し、前記吸気口から吸引された前記搬送空間内の気体を前記排気口から前記搬送空間に戻すように構成されており、
前記複数の循環流路の前記排気口と前記搬送空間とを連通させる共通空間をさらに備え、
前記複数の循環流路の前記排気口から排出された気体が、前記直交方向における前記他端側から前記一端側に向かう方向に、前記共通空間を経由して前記搬送空間に戻されるように構成されたことを特徴とする、請求項4に記載のロボット搬送装置。 - 前記共通空間は、前記搬送空間に対して前記直交方向と直交する面全体に延在することを特徴とする、請求項5に記載のロボット搬送装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015220290A JP6555091B2 (ja) | 2015-11-10 | 2015-11-10 | ロボット搬送装置 |
KR1020187013147A KR102602973B1 (ko) | 2015-11-10 | 2016-10-28 | 로봇 반송 장치 |
US15/774,882 US10636680B2 (en) | 2015-11-10 | 2016-10-28 | Robot transport device |
CN201680065918.1A CN108431942B (zh) | 2015-11-10 | 2016-10-28 | 机器人输送装置 |
PCT/JP2016/082103 WO2017082086A1 (ja) | 2015-11-10 | 2016-10-28 | ロボット搬送装置 |
EP16864049.8A EP3376529B1 (en) | 2015-11-10 | 2016-10-28 | Robot transport device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015220290A JP6555091B2 (ja) | 2015-11-10 | 2015-11-10 | ロボット搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017092233A JP2017092233A (ja) | 2017-05-25 |
JP6555091B2 true JP6555091B2 (ja) | 2019-08-07 |
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Application Number | Title | Priority Date | Filing Date |
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JP2015220290A Active JP6555091B2 (ja) | 2015-11-10 | 2015-11-10 | ロボット搬送装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US10636680B2 (ja) |
EP (1) | EP3376529B1 (ja) |
JP (1) | JP6555091B2 (ja) |
KR (1) | KR102602973B1 (ja) |
CN (1) | CN108431942B (ja) |
WO (1) | WO2017082086A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7140960B2 (ja) * | 2018-03-15 | 2022-09-22 | シンフォニアテクノロジー株式会社 | Efem |
JP7037049B2 (ja) * | 2018-03-15 | 2022-03-16 | シンフォニアテクノロジー株式会社 | Efem |
US11373891B2 (en) * | 2018-10-26 | 2022-06-28 | Applied Materials, Inc. | Front-ducted equipment front end modules, side storage pods, and methods of operating the same |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
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EP0322205A3 (en) | 1987-12-23 | 1990-09-12 | Texas Instruments Incorporated | Automated photolithographic work cell |
JPH0462345A (ja) * | 1990-06-29 | 1992-02-27 | Hitachi Ltd | クリーンルーム内の吸気ダクト方式 |
JP3882340B2 (ja) * | 1998-06-01 | 2007-02-14 | 村田機械株式会社 | クリーンルーム用自動倉庫 |
US6287025B1 (en) * | 1998-08-14 | 2001-09-11 | Tokyo Electron Limited | Substrate processing apparatus |
JP3441681B2 (ja) | 1998-08-14 | 2003-09-02 | 東京エレクトロン株式会社 | 処理装置 |
JP3556134B2 (ja) * | 1999-10-01 | 2004-08-18 | 三進金属工業株式会社 | 空気清浄機能付棚 |
JP2004179519A (ja) * | 2002-11-28 | 2004-06-24 | Tokyo Ohka Kogyo Co Ltd | 基板処理装置 |
KR100486690B1 (ko) | 2002-11-29 | 2005-05-03 | 삼성전자주식회사 | 기판 이송 모듈의 오염을 제어할 수 있는 기판 처리 장치및 방법 |
KR100505061B1 (ko) * | 2003-02-12 | 2005-08-01 | 삼성전자주식회사 | 기판 이송 모듈 |
JP2005311260A (ja) * | 2004-04-26 | 2005-11-04 | Hitachi Plant Eng & Constr Co Ltd | 液晶基板の保管倉庫室 |
JP2007003069A (ja) | 2005-06-22 | 2007-01-11 | Hitachi Plant Technologies Ltd | ミニエンバイロメント装置及びミニエンバイロメント装置の循環流制御方法 |
JP2010077508A (ja) * | 2008-09-26 | 2010-04-08 | Tokyo Electron Ltd | 成膜装置及び基板処理装置 |
JP5181100B2 (ja) * | 2009-04-09 | 2013-04-10 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及び記憶媒体 |
JP4936567B2 (ja) * | 2009-09-18 | 2012-05-23 | 東京エレクトロン株式会社 | 熱処理装置 |
TWI635552B (zh) | 2013-12-13 | 2018-09-11 | 昕芙旎雅股份有限公司 | 設備前端模組(efem) |
JP6349750B2 (ja) | 2014-01-31 | 2018-07-04 | シンフォニアテクノロジー株式会社 | Efem |
JP2015115517A (ja) * | 2013-12-13 | 2015-06-22 | シンフォニアテクノロジー株式会社 | 基板搬送装置及びefem |
-
2015
- 2015-11-10 JP JP2015220290A patent/JP6555091B2/ja active Active
-
2016
- 2016-10-28 WO PCT/JP2016/082103 patent/WO2017082086A1/ja active Application Filing
- 2016-10-28 US US15/774,882 patent/US10636680B2/en active Active
- 2016-10-28 CN CN201680065918.1A patent/CN108431942B/zh active Active
- 2016-10-28 EP EP16864049.8A patent/EP3376529B1/en active Active
- 2016-10-28 KR KR1020187013147A patent/KR102602973B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
US20180323086A1 (en) | 2018-11-08 |
CN108431942A (zh) | 2018-08-21 |
KR102602973B1 (ko) | 2023-11-17 |
KR20180080233A (ko) | 2018-07-11 |
CN108431942B (zh) | 2023-03-24 |
JP2017092233A (ja) | 2017-05-25 |
EP3376529B1 (en) | 2020-07-29 |
WO2017082086A1 (ja) | 2017-05-18 |
EP3376529A4 (en) | 2019-07-03 |
EP3376529A1 (en) | 2018-09-19 |
US10636680B2 (en) | 2020-04-28 |
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