JP2021122054A - メモリダイ領域の有効利用 - Google Patents
メモリダイ領域の有効利用 Download PDFInfo
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- JP2021122054A JP2021122054A JP2021075896A JP2021075896A JP2021122054A JP 2021122054 A JP2021122054 A JP 2021122054A JP 2021075896 A JP2021075896 A JP 2021075896A JP 2021075896 A JP2021075896 A JP 2021075896A JP 2021122054 A JP2021122054 A JP 2021122054A
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- 230000015654 memory Effects 0.000 title claims abstract description 571
- 239000000758 substrate Substances 0.000 claims abstract description 78
- 238000000034 method Methods 0.000 abstract description 29
- 239000000463 material Substances 0.000 description 41
- 238000003860 storage Methods 0.000 description 20
- 150000004770 chalcogenides Chemical class 0.000 description 18
- 230000007246 mechanism Effects 0.000 description 14
- 230000003213 activating effect Effects 0.000 description 13
- 239000003990 capacitor Substances 0.000 description 12
- 229910052714 tellurium Inorganic materials 0.000 description 12
- 230000006870 function Effects 0.000 description 11
- 230000002093 peripheral effect Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 229910045601 alloy Inorganic materials 0.000 description 7
- 239000000956 alloy Substances 0.000 description 7
- 239000012782 phase change material Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 239000004020 conductor Substances 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 239000011669 selenium Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000004891 communication Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 229910052787 antimony Inorganic materials 0.000 description 4
- 238000003491 array Methods 0.000 description 4
- 229910052785 arsenic Inorganic materials 0.000 description 4
- 230000006399 behavior Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 229910052732 germanium Inorganic materials 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 229910052711 selenium Inorganic materials 0.000 description 4
- 229910052717 sulfur Inorganic materials 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 239000002178 crystalline material Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 229910018110 Se—Te Inorganic materials 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 239000006249 magnetic particle Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910005939 Ge—Sn Inorganic materials 0.000 description 1
- 229910000979 O alloy Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910001370 Se alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910020938 Sn-Ni Inorganic materials 0.000 description 1
- 229910020923 Sn-O Inorganic materials 0.000 description 1
- 229910002855 Sn-Pd Inorganic materials 0.000 description 1
- 229910018731 Sn—Au Inorganic materials 0.000 description 1
- 229910008937 Sn—Ni Inorganic materials 0.000 description 1
- 229910008772 Sn—Se Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 229910001215 Te alloy Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- CBJZJSBVCUZYMQ-UHFFFAOYSA-N antimony germanium Chemical compound [Ge].[Sb] CBJZJSBVCUZYMQ-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- -1 but not limited to Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000013626 chemical specie Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 235000019800 disodium phosphate Nutrition 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000006386 memory function Effects 0.000 description 1
- 230000005055 memory storage Effects 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0021—Auxiliary circuits
- G11C13/0023—Address circuits or decoders
- G11C13/0026—Bit-line or column circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0021—Auxiliary circuits
- G11C13/0023—Address circuits or decoders
- G11C13/0028—Word-line or row circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
- G11C13/0021—Auxiliary circuits
- G11C13/003—Cell access
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C5/00—Details of stores covered by group G11C11/00
- G11C5/02—Disposition of storage elements, e.g. in the form of a matrix array
- G11C5/025—Geometric lay-out considerations of storage- and peripheral-blocks in a semiconductor storage device
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C8/00—Arrangements for selecting an address in a digital store
- G11C8/10—Decoders
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B51/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory transistors
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- H—ELECTRICITY
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
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- H—ELECTRICITY
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/20—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having two electrodes, e.g. diodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/20—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having two electrodes, e.g. diodes
- H10B63/24—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having two electrodes, e.g. diodes of the Ovonic threshold switching type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
- H10B63/84—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays arranged in a direction perpendicular to the substrate, e.g. 3D cell arrays
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- H10N50/00—Galvanomagnetic devices
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- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
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- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
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- H—ELECTRICITY
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- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
- H10N70/8828—Tellurides, e.g. GeSbTe
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/70—Resistive array aspects
- G11C2213/71—Three dimensional array
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/70—Resistive array aspects
- G11C2213/72—Array wherein the access device being a diode
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/70—Resistive array aspects
- G11C2213/76—Array using an access device for each cell which being not a transistor and not a diode
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Abstract
Description
特許のための本出願は、2017年2月16日に出願の“Efficient Utilization of Memory Die Area”という名称であるLaurentによる米国特許出願番号15/434,395の優先権を主張する2018年2月7日に出願の“Efficient Utilization of Memory Die Area”という名称のPCT出願番号PCT/US2018/017204の優先権を主張し、該出願の各々は本願の譲受人に与えられ、該出願の各々はその全体が参照により本明細書に組み込まれる。
Claims (20)
- 第1の構成を有する第1の複数のデコーダを含むコア部分、
前記第1の構成とは異なる第2の構成を有する第2の複数のデコーダを含む境界部分、及び、
デコーダを除外した制御回路部分
を含み、
前記コア部分は、
前記コア部分と前記制御回路部分との間の第1の境界を画定する第1の境界線、及び、
前記第1の境界線に対向して位置付けられ、前記コア部分と前記境界部分との間の第2の境界を画定する第2の境界線
を含む、基板層と、
前記第1の境界線において終端し、アクセス線の第2のサブセットの第2の長さとは異なる第1の長さを画定するアクセス線の第1のサブセットと、
前記基板層の前記コア部分に渡って位置付けられたメモリセルの第1のサブセット、及び、前記基板層の前記境界部分に渡って位置付けられたメモリセルの第2のサブセットを含むメモリセルのアレイであって、メモリセルの前記第1のサブセットは前記第1の複数のデコーダと結合され、メモリセルの前記第2のサブセットは複数のアクセス線を介して前記第2の複数のデコーダと結合される、前記アレイと
を含む、装置。 - 前記コア部分は、前記コア部分と前記制御回路部分との間の第3の境界を画定する第3の境界線を更に含み、
前記装置は、前記第3の境界線に対向して位置付けられた第4の境界線であって、前記コア部分と前記制御回路部分との間の第4の境界を画定する前記第4の境界線を更に含む、
請求項1に記載の装置。 - 前記コア部分の前記第2の境界線により画定される前記第2の境界を越えて拡張するアクセス線のサブセットであって、メモリセルの前記第2のサブセットと結合される、アクセス線の前記サブセット
を更に含む、請求項1に記載の装置。 - 前記第2の複数のデコーダの内の少なくとも1つは、メモリセルの前記第2のサブセットのメモリセルにアクセスするように構成される、
請求項1に記載の装置。 - 前記第1の複数のデコーダの内の少なくとも1つは、メモリセルの前記第2のサブセットのメモリセルにアクセスするように構成される、
請求項1に記載の装置。 - 前記基板層の前記コア部分は、コンポーネントの共通の構成を各々含む複数の区域を含む、
請求項1に記載の装置。 - 前記境界部分は、前記境界部分と前記コア部分との間の前記第2の境界を画定するために前記コア部分の前記第2の境界線と協働する第1の境界の境界線と、前記第1の境界の境界線に対向して位置付けられ、前記境界部分と前記制御回路部分との間の第3の境界を画定する第2の境界の境界線とを含む、
請求項1に記載の装置。 - 前記第2の複数のデコーダの各行デコーダと前記第2の境界の境界線との間に位置付けられた複数の列デコーダ
を更に含む、請求項7に記載の装置。 - アクセス線の第3のサブセットであって、前記境界部分内に位置付けられ、アクセス線の前記第3のサブセットの各アクセス線は、前記制御回路部分において終端するアクセス線の前記第3のサブセット
を更に含む、請求項1に記載の装置。 - 第1のアクセス線と、前記第1のアクセス線に直角に拡張する第2のアクセス線とに結合される、メモリセルの前記アレイ内の活性化メモリセル
を更に含む、請求項1に記載の装置。 - 第1の構成を有する第1の複数のデコーダを含むコア部分、及び、
前記第1の構成とは異なる第2の構成を有する第2の複数のデコーダを含む境界部分
を含み、
前記コア部分は、
前記コア部分の第1の境界を画定する第1の境界線、及び、
前記第1の境界線に対向して位置付けられ、前記コア部分と前記境界部分との間の第2の境界を画定する第2の境界線
を含む、基板層と、
前記基板層の前記コア部分に渡って位置付けられたメモリセルの第1のサブセット、及び、前記基板層の前記境界部分に渡って位置付けられたメモリセルの第2のサブセットを含むメモリセルのアレイであって、メモリセルの前記第1のサブセットは前記第1の複数のデコーダと結合され、メモリセルの前記第2のサブセットは複数のアクセス線を介して前記第2の複数のデコーダと結合される、前記アレイと
を含み、
メモリセルの前記アレイは、前記コア部分及び前記境界部分に渡って位置付けられたメモリセルの第1のデッキと、メモリセルの前記第1のデッキに渡って位置付けられたメモリセルの第2のデッキとを含み、
メモリセルの前記第1のデッキにアクセス可能である前記第2の複数のデコーダの第1の部分は、メモリセルの前記第2のデッキにはアクセス不可能である、
装置。 - 前記第2の複数のデコーダの第2の部分は、メモリセルの前記第2のデッキにアクセス可能であって、メモリセルの前記第1のデッキにはアクセス不可能である、
請求項11に記載の装置。 - 第1の構成を有する第1の複数のデコーダを含むコア部分、及び、
前記第1の構成とは異なる第2の構成を有する第2の複数のデコーダを含む境界部分
を含み、
前記コア部分は、
前記コア部分の第1の境界を画定する第1の境界線、及び、
前記第1の境界線に対向して位置付けられ、前記コア部分と前記境界部分との間の第2の境界を画定する第2の境界線
を含む、基板層と、
前記基板層の前記コア部分に渡って位置付けられたメモリセルの第1のサブセット、及び、前記基板層の前記境界部分に渡って位置付けられたメモリセルの第2のサブセットを含むメモリセルのアレイであって、メモリセルの前記第1のサブセットは前記第1の複数のデコーダと結合され、メモリセルの前記第2のサブセットは複数のアクセス線を介して前記第2の複数のデコーダと結合される、前記アレイと
を含み、
前記複数のアクセス線は、前記コア部分に渡って位置付けられ、
前記コア部分は、繰り返しのパターンで配置される複数の地域であって、前記複数の地域の各地域が前記複数のアクセス線の対応するアクセス線と結合される、前記複数の地域を含む、
装置。 - 前記境界部分は、前記複数の地域のうちの少なくとも1つの地域を含む、請求項13に記載の装置。
- 少なくとも前記複数のアクセス線のサブセットは、前記境界部分に渡って位置付けられ、
前記複数の地域のうちの前記少なくとも1つの地域は、前記サブセットのアクセス線と結合される、
請求項14に記載の装置。 - 前記第2の複数のデコーダは、複数の列デコーダを含み、前記複数の列デコーダは、前記境界部分に重なるメモリセルの前記アレイと関連付けられる、
請求項13に記載の装置。 - 前記第1の複数のデコーダの内の少なくとも1つのデコーダは、前記境界部分に重なるメモリセルの前記アレイのメモリセルと結合される、
請求項13に記載の装置。 - 前記第2の複数のデコーダの内の少なくとも1つのデコーダは、前記境界部分に重なる前記アレイのメモリセルに結合される、
請求項13に記載の装置。 - メモリセルの前記アレイは、メモリセルの少なくとも2つのデッキであって、前記コア部分及び前記境界部分に渡って位置付けられたメモリセルの第1のデッキと、メモリセルの前記第1のデッキに渡って位置付けられたメモリセルの第2のデッキとを含む、
請求項13に記載の装置。 - 前記基板層は、行デコーダ及び列デコーダを除外する制御回路部分を更に含む、
請求項13に記載の装置。
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TWI663606B (zh) | 2019-06-21 |
KR20190108174A (ko) | 2019-09-23 |
US10896725B2 (en) | 2021-01-19 |
JP2020514939A (ja) | 2020-05-21 |
CN110291641A (zh) | 2019-09-27 |
US11170850B2 (en) | 2021-11-09 |
WO2018151987A1 (en) | 2018-08-23 |
US20200066339A1 (en) | 2020-02-27 |
US20180233197A1 (en) | 2018-08-16 |
CN110291641B (zh) | 2024-01-05 |
TW201839762A (zh) | 2018-11-01 |
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