JP2020510310A5 - - Google Patents

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Publication number
JP2020510310A5
JP2020510310A5 JP2019548638A JP2019548638A JP2020510310A5 JP 2020510310 A5 JP2020510310 A5 JP 2020510310A5 JP 2019548638 A JP2019548638 A JP 2019548638A JP 2019548638 A JP2019548638 A JP 2019548638A JP 2020510310 A5 JP2020510310 A5 JP 2020510310A5
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JP
Japan
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transport
robot
atv
transport robot
arm
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JP2019548638A
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Japanese (ja)
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JP2020510310A (ja
JP7275039B2 (ja
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Priority claimed from PCT/US2018/022397 external-priority patent/WO2018170104A1/en
Publication of JP2020510310A publication Critical patent/JP2020510310A/ja
Publication of JP2020510310A5 publication Critical patent/JP2020510310A5/ja
Priority to JP2023076062A priority Critical patent/JP7608512B2/ja
Application granted granted Critical
Publication of JP7275039B2 publication Critical patent/JP7275039B2/ja
Priority to JP2024221226A priority patent/JP2025038126A/ja
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JP2019548638A 2017-03-15 2018-03-14 リニア真空搬送モジュールを有する省スペースプラットフォームアーキテクチャ Active JP7275039B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2023076062A JP7608512B2 (ja) 2017-03-15 2023-05-02 リニア真空搬送モジュールを有する省スペースプラットフォームアーキテクチャ
JP2024221226A JP2025038126A (ja) 2017-03-15 2024-12-18 リニア真空搬送モジュールを有する省スペースプラットフォームアーキテクチャ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201762471478P 2017-03-15 2017-03-15
US62/471,478 2017-03-15
PCT/US2018/022397 WO2018170104A1 (en) 2017-03-15 2018-03-14 Reduced footprint platform architecture with linear vacuum transfer module

Related Child Applications (1)

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JP2023076062A Division JP7608512B2 (ja) 2017-03-15 2023-05-02 リニア真空搬送モジュールを有する省スペースプラットフォームアーキテクチャ

Publications (3)

Publication Number Publication Date
JP2020510310A JP2020510310A (ja) 2020-04-02
JP2020510310A5 true JP2020510310A5 (https=) 2023-01-27
JP7275039B2 JP7275039B2 (ja) 2023-05-17

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ID=63523643

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2019548638A Active JP7275039B2 (ja) 2017-03-15 2018-03-14 リニア真空搬送モジュールを有する省スペースプラットフォームアーキテクチャ
JP2023076062A Active JP7608512B2 (ja) 2017-03-15 2023-05-02 リニア真空搬送モジュールを有する省スペースプラットフォームアーキテクチャ
JP2024221226A Pending JP2025038126A (ja) 2017-03-15 2024-12-18 リニア真空搬送モジュールを有する省スペースプラットフォームアーキテクチャ

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2023076062A Active JP7608512B2 (ja) 2017-03-15 2023-05-02 リニア真空搬送モジュールを有する省スペースプラットフォームアーキテクチャ
JP2024221226A Pending JP2025038126A (ja) 2017-03-15 2024-12-18 リニア真空搬送モジュールを有する省スペースプラットフォームアーキテクチャ

Country Status (8)

Country Link
US (3) US11521869B2 (https=)
EP (2) EP3596752B1 (https=)
JP (3) JP7275039B2 (https=)
KR (3) KR20250035046A (https=)
CN (3) CN110447095B (https=)
SG (2) SG10202110040SA (https=)
TW (2) TWI765984B (https=)
WO (1) WO2018170104A1 (https=)

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