JP2015514019A5 - - Google Patents

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Publication number
JP2015514019A5
JP2015514019A5 JP2015505785A JP2015505785A JP2015514019A5 JP 2015514019 A5 JP2015514019 A5 JP 2015514019A5 JP 2015505785 A JP2015505785 A JP 2015505785A JP 2015505785 A JP2015505785 A JP 2015505785A JP 2015514019 A5 JP2015514019 A5 JP 2015514019A5
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JP
Japan
Prior art keywords
forearm
rotation
upper arm
substrate
chamber
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JP2015505785A
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English (en)
Japanese (ja)
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JP2015514019A (ja
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Priority claimed from PCT/US2013/034902 external-priority patent/WO2013154863A1/en
Publication of JP2015514019A publication Critical patent/JP2015514019A/ja
Publication of JP2015514019A5 publication Critical patent/JP2015514019A5/ja
Pending legal-status Critical Current

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JP2015505785A 2012-04-12 2013-04-02 独立して回転可能なウェストを有するロボットシステム、装置、および方法 Pending JP2015514019A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261623128P 2012-04-12 2012-04-12
US61/623,128 2012-04-12
PCT/US2013/034902 WO2013154863A1 (en) 2012-04-12 2013-04-02 Robot systems, apparatus, and methods having independently rotatable waists

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018186381A Division JP2019036738A (ja) 2012-04-12 2018-10-01 独立して回転可能なウェストを有するロボットシステム、装置、および方法

Publications (2)

Publication Number Publication Date
JP2015514019A JP2015514019A (ja) 2015-05-18
JP2015514019A5 true JP2015514019A5 (https=) 2016-06-09

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ID=49325246

Family Applications (2)

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JP2015505785A Pending JP2015514019A (ja) 2012-04-12 2013-04-02 独立して回転可能なウェストを有するロボットシステム、装置、および方法
JP2018186381A Pending JP2019036738A (ja) 2012-04-12 2018-10-01 独立して回転可能なウェストを有するロボットシステム、装置、および方法

Family Applications After (1)

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JP2018186381A Pending JP2019036738A (ja) 2012-04-12 2018-10-01 独立して回転可能なウェストを有するロボットシステム、装置、および方法

Country Status (6)

Country Link
US (1) US9117865B2 (https=)
JP (2) JP2015514019A (https=)
KR (1) KR20150003803A (https=)
CN (1) CN104380452B (https=)
TW (1) TWI593528B (https=)
WO (1) WO2013154863A1 (https=)

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